公开(公告)号：US06605392B2

公开(公告)日：2003-08-12

申请号：US09335494

申请日：1999-06-18

申请人： Takahiro Matsumoto ,  Keiko Chiba

发明人： Takahiro Matsumoto ,  Keiko Chiba

IPC分类号： G03F900

CPC分类号： G03F1/22 ,  G03F1/62 ,  G03F1/64 ,  G03F7/70983

摘要： An X-ray mask structure for use in X-ray lithography includes an X-ray transmission film to be disposed opposed to a workpiece in X-ray exposure, the X-ray transmission film having an X-ray absorptive material corresponding to a pattern to be printed on the workpiece, and a thin film covering at least a portion of the X-ray transmission film, the thin film having an anti-reflection function with respect to alignment light to be projected to the thin film for direct or indirect detection of relative positional deviation between the mask structure and the workpiece.

摘要翻译： 用于X射线光刻的X射线掩模结构包括在X射线曝光中与工件相对设置的X射线透射膜，X射线透射膜具有对应于图案的X射线吸收材料 被印刷在工件上，薄膜覆盖至少一部分X射线透射膜，薄膜具有相对于对准光的抗反射功能，以投射到薄膜上用于直接或间接检测 掩模结构和工件之间的相对位置偏差。

公开(公告)号：US06372308B1

公开(公告)日：2002-04-16

申请号：US09521956

申请日：2000-03-09

申请人： Yasue Yoshioka ,  Masahiro Johno ,  Tomoyuki Yui ,  Takahiro Matsumoto

发明人： Yasue Yoshioka ,  Masahiro Johno ,  Tomoyuki Yui ,  Takahiro Matsumoto

IPC分类号： C09K1912

CPC分类号： C09K19/0266 ,  C09K19/2021 ,  Y10T428/10

摘要： A liquid crystal composition includes (1) an anti-ferroelectric liquid crystal compound of formula (1) and (2) a ferrielectric liquid crystal compound or racemic compound thereof. The composition ratio of (1) to (2) is in the range extending from a value which extends from within 5 mol % of the boundary compositional ratio on the anti-ferroelectric phase side and to within 25 mol % of the boundary compositional ratio on the ferrielectric phase side. The boundary compositional ratio is obtained on the basis of a liquid crystal phase diagram prepared on the basis of conoscopic image observations obtained by changing the mixing ratio of (1) and (2). The liquid crystal composition has the following properties: (b) an optical response in a positive voltage region and a negative voltage region and free or substantially free of hysteresis; and (c) excellent alignment stability. The liquid crystal composition is substantially free from sticking, is excellent in alignment and alignment stability and exhibits a V-letter-shaped optical response so that it can be used in a highly reliable active matrix liquid crystal display device.

摘要翻译： 液晶组合物包括（1）式（1）的反铁电液晶化合物和（2）电介质液晶化合物或其外消旋化合物。 （1）〜（2）的组成比在从反铁电相侧的边界成分比例的5摩尔％以内的值延伸到边界成分比的25摩尔％以下的范围内 电介质相侧。 基于通过改变（1）和（2）的混合比获得的虹膜图像观察准备的液晶相图获得边界组成比。 液晶组合物具有以下性质：（b）在正电压区域和负电压区域中的光学响应，并且具有自由或基本上没有迟滞; 和（c）极好的取向稳定性。 液晶组合物基本上没有粘附，对准和取向稳定性优异，呈V字形的光学响应，因此可用于高可靠性的有源矩阵液晶显示装置。

公开(公告)号：US06151120A

公开(公告)日：2000-11-21

申请号：US198443

申请日：1998-11-24

申请人： Takahiro Matsumoto ,  Hideki Ina

发明人： Takahiro Matsumoto ,  Hideki Ina

IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  G01B11/00

CPC分类号： G03F9/7084 ,  G03F9/7049

摘要： In this exposure apparatus, a wafer formed with a first alignment mark and a mask formed with a second alignment mark at a position outside the exposure field angle are aligned. The exposure apparatus includes an alignment detection system for optically detecting any positional deviation between the first and second alignment marks, a calculator for calculating any positional deviation between a first pattern formed on the wafer and a second pattern formed on the mask on the basis of the detection result of the alignment detection system, the position of the first alignment mark in the wafer, and the position of the second alignment mark in the mask, and an actuator for driving a wafer stage on the basis of the calculation result of the calculator to make the first and second patterns overlap each other.

摘要翻译： 在该曝光装置中，对准具有第一对准标记的晶片和在曝光视场角外的位置处形成有第二对准标记的掩模。 曝光装置包括用于光学检测第一和第二对准标记之间的任何位置偏差的对准检测系统，用于计算形成在晶片上的第一图案与形成在掩模上的第二图案之间的任何位置偏差的计算器， 对准检测系统的检测结果，晶片中的第一对准标记的位置和掩模中的第二对准标记的位置，以及基于计算器的计算结果驱动晶片台的致动器 使第一和第二模式彼此重叠。

公开(公告)号：US5938973A

公开(公告)日：1999-08-17

申请号：US927795

申请日：1997-09-11

申请人： Yuki Motoyama ,  Tomoyuki Yui ,  Masahiro Johno ,  Takahiro Matsumoto

发明人： Yuki Motoyama ,  Tomoyuki Yui ,  Masahiro Johno ,  Takahiro Matsumoto

IPC分类号： G02F1/13 ,  C07C69/86 ,  C07C69/90 ,  C09K19/02 ,  C09K19/06 ,  C09K19/20 ,  C09K19/46 ,  C09K19/12 ,  C07C69/76

CPC分类号： C09K19/2021 ,  C07C69/90 ,  C09K19/02 ,  C09K19/06

摘要： A swallow-tailed compound of the following general formula (1), ##STR1## wherein m is an integer of 4 to 10, n is an integer of 2 to 6, p is 0 or 1 and each of X and Y is independently a hydrogen or fluorine atom; and a ferrielectric liquid crystal composition consisting essentially of the swallow-tailed compound of the general formula (1) and a ferrielectric liquid crystal compound of the following general formula (2), ##STR2## wherein R is a linear alkyl group having 6 to 12 carbon atoms, Z is a hydrogen or fluorine atom, r is an integer of 2 to 4 and s is an integer of 2 to 4. The ferrielectric liquid crystal composition has a ferrielectric phase in a broad temperature range and attains a fast response and a large tilt angle in a broad temperature range so that a ferrielectric liquid crystal display device having high display qualities can be provided.

摘要翻译： 下述通式（1）的燕尾化合物，其中m为4〜10的整数，n为2〜6的整数，p为0或1，X和Y各自独立地为氢或氟 原子; 和基本上由通式（1）的燕尾化合物和以下通式（2）的电介质液晶化合物组成的电介质液晶组合物，其中R是具有6至12个碳原子的直链烷基， Z为氢或氟原子，r为2〜4的整数，s为2〜4的整数。电介质液晶组合物具有宽温度范围内的电介质相，具有快速响应和大倾角 在宽的温度范围内，可以提供具有高显示质量的电介质液晶显示装置。

公开(公告)号：US5782960A

公开(公告)日：1998-07-21

申请号：US819411

申请日：1997-03-17

申请人： Makoto Ogawa ,  Toshiro Kobayashi ,  Minoru Sueda ,  Takahiro Matsumoto ,  Tetsuya Imai ,  Shigenori Shirogane ,  Hiroshi Shiota ,  Toshiuki Uchida ,  Shinsuke Ota

发明人： Makoto Ogawa ,  Toshiro Kobayashi ,  Minoru Sueda ,  Takahiro Matsumoto ,  Tetsuya Imai ,  Shigenori Shirogane ,  Hiroshi Shiota ,  Toshiuki Uchida ,  Shinsuke Ota

IPC分类号： B01D53/22 ,  B01D71/02 ,  C01B3/50

CPC分类号： B01D53/22 ,  B01D53/228 ,  B01D63/062 ,  B01D63/087 ,  B01D71/022 ,  C01B3/503 ,  B01D2323/12 ,  B01D2325/021

摘要： A hydrogen separation membrane has a hydrogen-permeable metal foil laminated to a porous metal support. The metal support comprising a laminate of metal-reinforcing plates each having a plurality of hydrogen-flow-through holes. The metal-reinforcing plates have rectangular or similarly shaped holes having longitudinal and lateral axes. The laminate is assembled so that the longitudinal axes of the holes of adjacent metal-reinforcing plates intersect substantially at right angles with each other.

摘要翻译： 氢分离膜具有层压到多孔金属载体上的氢可渗透金属箔。 金属支撑体包括各自具有多个氢流通孔的金属加强板的层压体。 金属加强板具有具有纵向和横向轴线的矩形或类似形状的孔。 层压体被组装成使得相邻金属加强板的孔的纵向轴线基本上彼此成直角相交。

公开(公告)号：US5728864A

公开(公告)日：1998-03-17

申请号：US631092

申请日：1996-04-12

申请人： Yuki Motoyama ,  Tomoyuki Yui ,  Masahiro Johno ,  Maki Ito ,  Takahiro Matsumoto ,  Hiroshi Mineta

发明人： Yuki Motoyama ,  Tomoyuki Yui ,  Masahiro Johno ,  Maki Ito ,  Takahiro Matsumoto ,  Hiroshi Mineta

IPC分类号： C07C69/94 ,  C09K19/02 ,  C09K19/20 ,  C07C69/76 ,  C09K19/12 ,  C09K19/22 ,  C09K19/30 ,  C09K19/34

CPC分类号： C09K19/02 ,  C07C69/94 ,  C09K19/2021

摘要： A liquid crystal compound of the formula (1) ##STR1## wherein R is a linear alkyl group having 6 to 12 carbon atoms, both X and Y are hydrogen atoms or one of X and Y is a fluorine atom and the other is a hydrogen atom, A is --CF.sub.3 or --C.sub.2 F.sub.5, m is an integer of 2 to 4, n is an integer of 2 to 4, and C* is an asymmetric carbon, having a ferrielectric phase in its phase sequence, or a ferrielectric liquid crystal composition containing the liquid crystal compound of the formula (1) having a ferrielectric phase, may be injected between substrates provided with nonlinear active elements, such as thin film transistors or diodes formed on each pixel, to form an active matrix liquid crystal display device.

摘要翻译： 式（1）的液晶化合物其中R为碳原子数为6〜12的直链烷基，X和Y均为氢原子，X和Y中的一个为氟原子，另一方为 是氢原子，A是-CF 3或-C 2 F 5，m是2〜4的整数，n是2〜4的整数，C *是其相序中具有电介质相的不对称碳，或 包含具有电介质相的式（1）的液晶化合物的电介质液晶组合物可以注入到设置有非线性有源元件的衬底之间，诸如形成在每个像素上的薄膜晶体管或二极管，以形成有源矩阵液晶 显示设备。

公开(公告)号：US5583472A

公开(公告)日：1996-12-10

申请号：US387366

申请日：1995-02-13

申请人： Kazuki Moritsu ,  Takahiro Matsumoto ,  Shuichi Nakagawa ,  Shuji Ando ,  Mitsuhiro Kishida ,  Hideto Yoshimura ,  Masashi Nagao ,  Takashi Inaguchi

发明人： Kazuki Moritsu ,  Takahiro Matsumoto ,  Shuichi Nakagawa ,  Shuji Ando ,  Mitsuhiro Kishida ,  Hideto Yoshimura ,  Masashi Nagao ,  Takashi Inaguchi

IPC分类号： H01F6/00 ,  F17C13/00 ,  F25B9/14 ,  F25D19/00 ,  H01F1/00 ,  F25B19/00

CPC分类号： F25D19/006 ,  F25B9/14 ,  H01F6/04 ,  F25B2500/11

摘要： An object of the present invention is to obtain a superconductive magnet, the size of which can be reduced by shortening the radial length of a magnetic device thereof and the refrigerating performance of which can be improved. A cylinder for fastening a refrigerator has an end facing an ambience of helium gas evaporating in a helium chamber and another end which is substantially horizontally fastened to a vacuum chamber. Further, the three-stage regenerative refrigerator is inserted and fastened to the cylinder for fastening the refrigerator. A heat insulator, such as a convection prevention tube, made of a hollow Teflon tube is wound around the outer surface of each stage of the cylinder of the three-stage regenerative refrigerator. The convection prevention tube is enclosed into a gap between the cylinder for fastening the refrigerator and the three-stage regenerative refrigerator without no undesirable gap so that heat convection of the helium gas is prevented.

摘要翻译： 本发明的目的是获得一种超导磁体，通过缩短其磁性装置的径向长度可以缩小其尺寸，并且可以提高其制冷性能。 用于紧固冰箱的气缸具有面向在氦室中蒸发的氦气的气氛的端部和基本上水平地紧固到真空室的另一端。 此外，将三级再生式冰箱插入并紧固到用于紧固冰箱的气缸。 在三级再生式冰箱的气缸的各级的外表面上缠绕由中空的特氟隆管制成的防热管等防热管。 对流防止管被封闭在用于紧固冰箱和三级再生式冰箱之间的气缸之间的间隙中，而没有不期望的间隙，从而防止了氦气的热对流。

公开(公告)号：US5500445A

公开(公告)日：1996-03-19

申请号：US197325

申请日：1994-02-16

申请人： Takahiro Matsumoto ,  Shogo Sameshima ,  Kenichi Yoshida

发明人： Takahiro Matsumoto ,  Shogo Sameshima ,  Kenichi Yoshida

IPC分类号： A61K9/00 ,  A61K31/665 ,  A61K31/34

CPC分类号： A61K31/665 ,  A61K9/0048 ,  Y10S514/912

摘要： This invention relates to an intraocular irrigating and enucleated eyeball preservative composition containing a phosphoric acid diester compound of the following formula or a pharmacologically acceptable salt thereof ##STR1## wherein R.sub.1 and R.sub.2 are the same or different and each represents a hydrogen atom or a methyl group.The composition of this invention is highly lenient to the ocular tissues, particularly in the sense that it protects the corneal (endothelial) cells which are most susceptible to physiological damage in ophthalmic surgery, with the result that various ophthalmic operations can be carried out with sufficient safety. Furthermore, since the composition of this invention may help retain the physiological functions of the enucleated eyeball without injuring its tissues, it can be used with advantage for the preservation of the cornea, retina, crystalline lens and so on.

摘要翻译： 本发明涉及含有下式的磷酸二酯化合物或其药理学上可接受的盐的眼内注射和去核眼球防腐剂组合物，其中R 1和R 2相同或不同，各自表示氢原子或甲基 。 本发明的组合物对于眼组织是高度宽松的，特别是在保护在眼科手术中最容易受到生理损伤的角膜（内皮）细胞的意义上，结果是可以充分地进行各种眼科手术 安全。 此外，由于本发明的组合物可有助于保持去核眼球的生理功能而不损伤其组织，所以可以有利地用于保存角膜，视网膜，晶状体等。

公开(公告)号：US5465148A

公开(公告)日：1995-11-07

申请号：US139143

申请日：1993-10-21

申请人： Takahiro Matsumoto ,  Noriyuki Nose ,  Kenji Saito ,  Koichi Sentoku

发明人： Takahiro Matsumoto ,  Noriyuki Nose ,  Kenji Saito ,  Koichi Sentoku

IPC分类号： G01B9/02 ,  G01B11/24 ,  G03F7/20 ,  G03F9/00

CPC分类号： G03F7/70633 ,  G03F9/70

摘要： A first Savart plate and an object to be measured are arranged on the light path of a Zeeman light source. The object to be measured is constructed of a diffraction grating on a mask and a diffraction grating on a wafer. A second Savart plate, a deflection plate and a photoelectric detector are sequentially arranged in the light path for the diffracted beams from the measured object. The output of the photoelectric detector is connected to a phase-difference unit to detect the phase difference between two beat signals. Herein, the light is split into two beams by the Savart plate. After a diffraction is caused by the diffraction gratings, thereafter, the beams are re-synthesized by the Savart plates. The two beams travel on the same light path, thereby improving a measurement accuracy.

摘要翻译： 第一萨瓦特板和待测对象被布置在塞曼光源的光路上。 要测量的对象由掩模上的衍射光栅和晶片上的衍射光栅构成。 第二萨瓦特板，偏转板和光电检测器依次布置在来自测量对象的衍射光束的光路中。 光电检测器的输出连接到相位差单元，以检测两个差拍信号之间的相位差。 这里，萨瓦特板将光分成两束。 衍射由衍射光栅引起之后，光束由Savart板重新合成。 两个光束在相同的光路上行进，从而提高测量精度。

公开(公告)号：US5432603A

公开(公告)日：1995-07-11

申请号：US153038

申请日：1993-11-17

申请人： Koichi Sentoku ,  Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saito ,  Toshihiko Tsuji ,  Takahiro Matsumoto

发明人： Koichi Sentoku ,  Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saito ,  Toshihiko Tsuji ,  Takahiro Matsumoto

IPC分类号： G03F9/00 ,  G01B9/02

CPC分类号： G03F9/70

摘要： An optical element comprised of a plurality of polarizing beam splitters is provided on the optical path of a two-frequency linearly polarized laser beam source, and the optical element divides a light beam from the two-frequency linearly polarized laser beam source into two light beams, whereafter these two light beams are incident on diffraction gratings provided on a mask and a wafer, respectively. A pair of mirrors are provided vertically above the mask, and a pair of lenses, a pair of polarizing plates and a pair of photoelectric detectors are arranged in succession in the directions of reflection of the pair of mirrors. The outputs of the two photoelectric detectors become beat signals, and the phase difference between these beat signals is measured, whereby the alignment of the mask and wafer is effected. Since the optical element is comprised of a plurality of polarizing beam splitters, leak-in light included in each light beam is reduced.

摘要翻译： 在双频线性偏振激光束源的光路上设置由多个偏振分束器构成的光学元件，光学元件将来自双频线性偏振激光束源的光束分成两束光束 之后，这两个光束分别入射到设置在掩模和晶片上的衍射光栅上。 一对镜子垂直地设置在掩模上方，并且一对透镜，一对偏振片和一对光电检测器沿着该对反射镜的反射方向相继布置。 两个光电检测器的输出变为差拍信号，并且测量这些拍频信号之间的相位差，从而实现掩模和晶片的对准。 由于光学元件由多个偏振分束器组成，因此减少了包括在每个光束中的泄漏光。