X-ray mask structure, and X-ray exposure method and apparatus using the same
    1.
    发明授权
    X-ray mask structure, and X-ray exposure method and apparatus using the same 失效
    X射线掩模结构和X射线曝光方法及使用其的装置

    公开(公告)号:US06605392B2

    公开(公告)日:2003-08-12

    申请号:US09335494

    申请日:1999-06-18

    IPC分类号: G03F900

    摘要: An X-ray mask structure for use in X-ray lithography includes an X-ray transmission film to be disposed opposed to a workpiece in X-ray exposure, the X-ray transmission film having an X-ray absorptive material corresponding to a pattern to be printed on the workpiece, and a thin film covering at least a portion of the X-ray transmission film, the thin film having an anti-reflection function with respect to alignment light to be projected to the thin film for direct or indirect detection of relative positional deviation between the mask structure and the workpiece.

    摘要翻译: 用于X射线光刻的X射线掩模结构包括在X射线曝光中与工件相对设置的X射线透射膜,X射线透射膜具有对应于图案的X射线吸收材料 被印刷在工件上,薄膜覆盖至少一部分X射线透射膜,薄膜具有相对于对准光的抗反射功能,以投射到薄膜上用于直接或间接检测 掩模结构和工件之间的相对位置偏差。

    Light scattering type particle detector using scattered light of surface plasmon resonance photons
    2.
    发明授权
    Light scattering type particle detector using scattered light of surface plasmon resonance photons 有权
    光散射型粒子检测器采用散射光的表面等离子体共振光子

    公开(公告)号:US08717563B2

    公开(公告)日:2014-05-06

    申请号:US13313233

    申请日:2011-12-07

    IPC分类号: G01N21/00

    CPC分类号: G01N21/553

    摘要: A particle detector includes a light source, and a metal layer having an incident/reflective surface and a photoelectric surface opposing the incident/reflective surface. Incident light from the light source reaches the incident/reflective surface to excite near-field surface plasmon resonance photons at the photoelectric surface. A particle deposited on the photoelectric surface of the metal layer changes the near-field surface plasmon resonance photons to far-field scattered light. The particle detector further includes a scattered light detecting unit, provided above the photoelectric surface of the metal layer, for detecting the far-field scattered light.

    摘要翻译: 粒子检测器包括光源和具有入射/反射表面的金属层和与入射/反射表面相对的光电表面。 来自光源的入射光到达入射/反射表面以激发光电表面处的近场表面等离子体共振光子。 沉积在金属层的光电表面上的颗粒将近场表面等离子体共振光子改变为远场散射光。 粒子检测器还包括设置在金属层的光电表面上方的用于检测远场散射光的散射光检测单元。

    Exposure apparatus and device fabrication method
    3.
    发明授权
    Exposure apparatus and device fabrication method 失效
    曝光装置和装置制造方法

    公开(公告)号:US08625074B2

    公开(公告)日:2014-01-07

    申请号:US12577336

    申请日:2009-10-12

    IPC分类号: G03B27/52 G01B11/14 G03F9/00

    摘要: The present invention provides an exposure apparatus including a projection optical system configured to project a pattern of a reticle located on an object plane onto a substrate located on an image plane, a phase shift type mark mounted on a stage which holds the substrate, an image sensor which is set at one of a position of the object plane and a position optically conjugate to the object plane, and is configured to capture an image of the mark via the projection optical system, and a controller configured to control the stage based on an interval between edge images, formed by a pair of edge portions, in the image of the mark captured by the image sensor.

    摘要翻译: 本发明提供一种曝光装置,包括:投影光学系统,被配置为将位于物体平面上的标线片的图案投影到位于图像平面上的基板上;相移型标记,安装在保持基板的台上;图像 传感器,其设置在物体平面的位置和与物体平面光学共轭的位置之一处,并且被配置为经由投影光学系统捕获标记的图像;以及控制器,被配置为基于 由图像传感器捕获的标记的图像中由一对边缘部分形成的边缘图像之间的间隔。

    Light source apparatus having a solid light source element and a phosphor
    4.
    发明授权
    Light source apparatus having a solid light source element and a phosphor 有权
    具有固体光源元件和荧光体的光源装置

    公开(公告)号:US08564186B2

    公开(公告)日:2013-10-22

    申请号:US13232034

    申请日:2011-09-14

    IPC分类号: F21V9/16

    摘要: Provided is a light source apparatus having a phosphor layer which is subjected to a light beam of a predefined wavelength emitted from a solid light source element as an excitation light beam and which generates fluorescent beam by being excited by the incident excitation light beam and emits the fluorescence beam to outside, and a metal layer which is joined to a predefined surface among outer surfaces of the phosphor layer except an incident surface of the excitation light beam and an outgoing surface of the fluorescence beam for converting excitons excited from a section of the phosphor layer close to the predefined surface into a light beam via surface plasmon polaritons. The light beam converted from the excitons via the surface plasmon polaritons is emitted out of the outgoing surface of the phosphor layer together with the fluorescence beam.

    摘要翻译: 提供一种具有荧光体层的光源装置,该荧光体层受到从固体光源元件发射的预定波长的光束作为激发光束,并且通过被入射的激发光束激发而产生荧光束, 荧光束到外部的金属层,以及除了激发光束的入射表面和荧光束的出射表面之外的荧光体层的外表面中接合到预定表面的金属层,用于转换从荧光体的一部分激发的激子 层通过表面等离子体激元极化而接近预定义的表面进入光束。 通过表面等离子体激元从激子转换的光束与荧光束一起从荧光体层的出射表面射出。

    Photocathode apparatus using photoelectric effect of surface plasmon resonance photons
    5.
    发明授权
    Photocathode apparatus using photoelectric effect of surface plasmon resonance photons 有权
    光电阴极设备采用光电效应的表面等离子体共振光子

    公开(公告)号:US08481937B2

    公开(公告)日:2013-07-09

    申请号:US12465734

    申请日:2009-05-14

    IPC分类号: H01L25/00

    CPC分类号: H01J40/06

    摘要: A photocathode apparatus is constructed by a transparent body adapted to receive incident light, and a metal cover layer formed on a surface of the transparent body. The incident light reaches an incident/reflective surface of the metal cover layer through the surface of the transparent body to excite surface plasmon resonance light in the incident/reflective surface of the metal cover layer, thus emitting photoelectrons from a photoelectric surface of the metal cover layer opposite to the incident/reflective surface thereof by the photoelectric effect of one of the surface plasmon resonance photons and its second harmonic generation wave.

    摘要翻译: 光电阴极装置由适于接收入射光的透明体和形成在透明体的表面上的金属覆盖层构成。 入射光通过透明体的表面到达金属覆盖层的入射/反射表面,以激发金属覆盖层的入射/反射表面中的表面等离子体共振光,从而从金属覆盖层的光电表面发射光电子 通过其中一个表面等离子体共振光子及其二次谐波产生波的光电效应与入射/反射表面相对的层。

    Benzoxazepine derivatives and use thereof
    6.
    发明授权
    Benzoxazepine derivatives and use thereof 有权
    苯并西泮衍生物及其用途

    公开(公告)号:US08247403B2

    公开(公告)日:2012-08-21

    申请号:US12449975

    申请日:2008-03-06

    摘要: Compounds represented by the general formula (I): wherein each symbol is as defined in the description [with the proviso that 9-chloro-7-(1,1-dimethylethyl)-2,3,4,5-tetrahydro-1,4-benz-oxazepine and N-[[(5S)-2-oxo-3-(2,3,4,5-tetrahydro-1,4-benz-oxazepin-7-yl)-5-oxazolidinyl]methyl]acetamide are excluded], salts of the same, and prodrugs thereof have selective activation effect on serotonin 5-HT2C receptor and are useful as preventive and therapeutic agents for lower urinary tract diseases, obesity, and/or pelvic organ prolapse.

    摘要翻译: 由通式(I)表示的化合物:其中每个符号如说明书中所定义[条件是9-氯-7-(1,1-二甲基乙基)-2,3,4,5-四氢-1,1- 4-苯并恶唑并吖嗪和N - [[(5S)-2-氧代-3-(2,3,4,5-四氢-1,4-苯并恶唑-7-基)-5-恶唑烷基]甲基] 乙酰胺被排除],其盐和前药对5-羟色胺5-HT 2C受体具有选择性活化作用,并且可用作下尿路疾病,肥胖症和/或盆腔器官脱垂的预防和治疗剂。

    MAINTENANCE AND MANAGEMENT SYSTEM FOR ENDOTRACHEAL TUBE IN INTUBATION
    7.
    发明申请
    MAINTENANCE AND MANAGEMENT SYSTEM FOR ENDOTRACHEAL TUBE IN INTUBATION 审中-公开
    内窥镜管理维护管理系统

    公开(公告)号:US20110265795A1

    公开(公告)日:2011-11-03

    申请号:US12891370

    申请日:2010-09-27

    IPC分类号: A61M16/04

    摘要: A maintenance and management system for tracheal tube in tracheal intubation makes it easier or steadier to identify endotracheal tube placement in the airway, check a tracheal stenosis due to sputum clogging, confirm a breakaway of the tube out of the airway, store and monitor measured data, diagnose automatically the complications, and obtain data for reproducing function of sound in a breath circuit. A ventilator tube is connected to the endotracheal tube and provided therein with a microphone to sense a breath sound transmitted via the endotracheal tube and a pressure sensing element to measure a circuit pressure in the ventilator circuit for the endotracheal tube. The data derived from the sensing elements is processed in a personal computer to be used to measure whether the breath sound and the circuit pressure are within a range of a prescribed value.

    摘要翻译: 气管插管气管导管的维护和管理系统使得更容易或更稳定地识别气管插管在气道中的位置,检查由于痰液堵塞引起的气管狭窄,确认管脱离气道,存储和监测测量数据 ,自动诊断并发症,并获得呼吸电路中声音再现功能的数据。 通气管连接到气管内管并且在其中设置有麦克风以感测通过气管内导管传递的呼吸音和压力感测元件,以测量用于气管插管的通气机回路中的回路压力。 从感测元件导出的数据在个人计算机中进行处理,以用于测量呼吸音和电路压力是否在规定值的范围内。

    DISPLACEMENT MEASUREMENT DEVICE, EXPOSURE APPARATUS, AND WORKING DEVICE
    8.
    发明申请
    DISPLACEMENT MEASUREMENT DEVICE, EXPOSURE APPARATUS, AND WORKING DEVICE 有权
    位移测量装置,曝光装置和工作装置

    公开(公告)号:US20110141451A1

    公开(公告)日:2011-06-16

    申请号:US12959301

    申请日:2010-12-02

    IPC分类号: G03B27/32 G01B9/02

    摘要: A device has a scale on which a grating pattern is formed, a light source to irradiate light on the scale, a wavelength plate to transform multiple diffracted lights from the light source into circular polarized light, respectively, an optical element to superposition and cause interference of the multiple diffracted lights, and a photodetector to receive the interfered light. Also, a generating unit to generate linearly polarized light by the light from the light source, so that the multiple diffracted lights input to the wavelength plate become linearly polarized light with a same mutual polarization direction.

    摘要翻译: 器件具有形成光栅图案的刻度,用于照射刻度的光的光源,波长板以将来自光源的多个衍射光分别转换成圆偏振光,光学元件叠加并引起干涉 的多个衍射光,以及光电检测器,用于接收被干扰的光。 另外,通过来自光源的光生成线偏振光的发生单元,使得输入到波长板的多个衍射光变成具有相同的相互偏振方向的线偏振光。

    Amide compound
    9.
    发明授权
    Amide compound 失效
    酰胺化合物

    公开(公告)号:US07851473B2

    公开(公告)日:2010-12-14

    申请号:US11667821

    申请日:2005-11-17

    摘要: There is provided a FAAH inhibitor and a prophylactic or therapeutic agent for cerebrovascular disorders or sleep disorders comprising it. The prophylactic or therapeutic agent comprises a compound of the formula (I0): wherein Z is oxygen or sulfur; R1 is aryl which may be substituted, or a heterocyclic group which may be substituted; R1a is a hydrogen atom, a hydrocarbon group which may be substituted, hydroxyl, etc.; R2 is piperidin-1,4-diyl which may be substituted, or piperazin-1,4-diyl which may be substituted; R3 is a group formed by eliminating two hydrogen atoms from a 5-membered aromatic heterocyclic group having 1 to 3 heteroatoms selected from nitrogen, oxygen and sulfur, which may be further substituted, —CO—, etc.; and R4 is a hydrocarbon group which may be substituted, or a heterocyclic group which may be substituted; or a salt thereof.

    摘要翻译: 提供了FAAH抑制剂和包含其的脑血管障碍或睡眠障碍的预防或治疗剂。 预防或治疗剂包括式(I0)化合物:其中Z是氧或硫; R1可以被取代的芳基,或可被取代的杂环基; R1a为氢原子,可被取代的烃基,羟基等; R2是可被取代的哌啶-1,4-二基,或可被取代的哌嗪-1,4-二基; R3是通过从具有1至3个选自氮,氧和硫的杂原子的5元芳族杂环基中除去两个氢原子而形成的基团,其可进一步被-CO-等取代; R 4为可被取代的烃基,或可被取代的杂环基; 或其盐。

    CONDENSED PYRIDINE DERIVATIVE AND USE THEREOF
    10.
    发明申请
    CONDENSED PYRIDINE DERIVATIVE AND USE THEREOF 审中-公开
    浓缩吡啶衍生物及其用途

    公开(公告)号:US20100266504A1

    公开(公告)日:2010-10-21

    申请号:US12742781

    申请日:2008-11-14

    IPC分类号: A61K49/00

    摘要: Provided are a condensed pyridine derivative having a serotonin 5-HT2C receptor activation action, a prophylactic or therapeutic agent for a lower urinary tract symptom, obesity and/or organ prolapse and the like containing the condensed pyridine derivative, a screening method for a substance that increases leak point pressure upon a rise in the intravesical pressure or a prophylactic or therapeutic drug for stress urinary incontinence, a prophylactic or therapeutic drug for cystoceles or enteroceles, containing a substance that activates serotonin 5-HT2C receptor, and a method of screening for a therapeutic drug for cystoceles or enteroceles, including increasing an intravesical pressure after bilateral transection of the hypogastric nerve and pudendal nerve of an animal, and measuring a closure response in the urethra, the rectum or the vagina observed at that time. A serotonin 5-HT2c receptor activator containing a compound represented by the formula: wherein each symbol is as defined in the specification, or a salt thereof.

    摘要翻译: 提供具有5-羟色胺5-HT 2C受体活化作用的缩合吡啶衍生物,含有缩合吡啶衍生物的下尿路症状,肥胖症和/或器官脱垂等的预防或治疗剂, 增加膀胱内压的上升时的泄漏点压力或压力性尿失禁的预防或治疗药物,包含激活5-羟色胺5-HT 2C受体的物质的用于膀胱或肠的预防或治疗药物的筛选方法 用于膀胱或肠道的治疗药物,包括在双侧横断动物的下腹神经和阴部神经之后增加膀胱内压力,并测量当时观察到的尿道,直肠或阴道中的闭合反应。 含有下式表示的化合物的5-羟色胺5-HT 2C受体活化剂:其中每个符号如说明书中所定义,或其盐。