摘要:
A device for the measurement of a temperature in a relatively low range having the lower limit of below 100.degree. C. is proposed. The device is suitably used for measuring a temperature of a substrate 4 during a sputtering treatment in a vacuum environment. Infrared rays radiated from the substrate 4 in a vacuum chamber 1 are collected by an optical lens 13 mounted in a freely movable probe 10 via a mirror (15) provided in a hood 14 attached to a front end of the probe (10) for deflecting the incident rays to the lens 13. The collected rays are led outside the chamber 1 to a sensor through a fluoride fiber 8 optically connected to the lens 13. The fiber 8 is enveloped in an air-tight manner within a metal bellows 9. A pipe 20, 24 for feeding a coolant extends in a circulating manner through the interior of the bellows 9 between a coolant source 30 and the probe 10, to suppress the radiation of infrared rays from the probe 10, hood 14 and mirror 15, and to reduce disturbance to the detected substrate temperature value. A combination of an MCT sensor composed of Hg, Cd and Te and a chalcogen fiber composed of Ge, As, Se and Te is also proposed for the measurement of relatively low temperature ranges. A system for controlling a substrate temperature during the sputtering process while using the above device is also proposed.
摘要:
A seal unit is provided for a brake booster such as of a tandem type which includes a center plate within its shell. The brake booster includes annular means disposed within the shell for maintaining a hermetic seal between the center plate and a valve body. An axial portion of the center plate is formed with an axially extending cylindrical portion, the end of which is folded radially inward to define a U-shaped fold. The annular seal means is fitted inside the cylindrical portion, with its part disposed between the inner peripheral surface of the cylindrical portion and the outer peripheral surface of the fold. This effectively prevents the annular seal means from being withdrawn from the center plate.
摘要:
A disc reproducing apparatus is disclosed in which a disc is delivered from a disc inserting opening to a predetermined position within a player, a clamper arm that extends over a turntable for clamping the disc is operated to fix the disc on the turntable, and then the turntable is rotated to reproduce information recorded in the disc. A disc guide plate is pivotally mounted to the clamper arm such that the disc guide plate engages and disengages the clamper arm. A disc guiding recess into which a small-diameter disc can be fitted is provided to the disc guide plate. When the small-diameter disc is delivered, the small-diameter disc is fitted into the disc guiding recess to be aligned with a clamp position, and when a large-diameter disc is delivered, the large-diameter disc pushes the disc guide plate away to be aligned with the clamp position on the turntable.
摘要:
An electrically erasable programmable read only memory (EEPROM) latches externally applied write data in column latches, erases information of selected memory cells and then writes the latched write data into the selected memory cells. This EEPROM includes detectors for detecting a potential of the latch node of the corresponding latch, chargers each for charging the corresponding bit line in response to the output of the potential detector in a latched data write cycle, and separation transistors each for separating a bit line from the latch node of the corresponding column latch in response to the activation of the chargers.
摘要:
A novel perfluoropolyether containing 0.1 to 10% by weight of halogen atoms as bonded in the molecule is obtained by reacting tetrafluoroethylene with oxygen in a fluorinated solvent or a chlorofluorinated solvent under ultraviolet irradiation in the presence of a halogenated hydrocarbon chain transfer agent having a chain transfer coefficient with respect to methyl methacrylate of at least 5.times.10.sup.-5.
摘要:
A magnetic head assembly comprises a carriage on which a first magnetic head is mounted for performing read/write with respect to one face of a disk, a second magnetic head also mounted on the carriage opposite to the first magnetic head for performing read/write with respect to the other face of the disk, and a hold case coupled turnably via a leaf hinge spring to the carriage, wherein the first magnetic head is attached via a gimbal spring to the carriage, and the second magnetic head is secured to the hold case, and is characterized in that the carriage has a support portion abutting directly on the hold case inclusive of the leaf hinge spring to support the same, so that the hold case is supported turnably with the support portion serving as a supporting point, whereby the reference plane of the hold case is defined by the support portion, so that accuracy can be ensured for the reference plane of the second magnetic head with respect to the disk and an enhancement of the follow-up performance can contribute to an improvement of the read/write characteristic.
摘要:
A magnetic head assembly of a disk drive device has an upper magnetic head fastened to a case side and a lower magnetic head mounted on a gimbal plate of a carriage side. The upper case assembly includes a plurality of leaf hinge springs extending to the vicinity of the upper magnetic head, which is bonded to a supporting plate, and wire leads from the magnetic head are soldered to the leaf hinge spring ends as lead terminals. The other ends of the leaf hinge springs extend to the rear side of the case and serve both as a pivotable hinge mounting of the case to the carriage and as lead terminals to an external read/write controller. The upper case assembly is formed by molding in resin a flat plate which is precut with the leaf hinge spring and supporting plate portions formed in a predetermined shape, cutting the flat plate thus insert molded to separate the plate and a plurality of lead terminals independently, fastening the upper magnetic head to the plate, and connecting the lead wires from the fastened magnetic head to the predetermined divided lead terminals. Thus, the magnetic head assembly can be accurately manufactured inexpensively.
摘要:
A toner for developing latent electrostatic images is disclosed, which consists of toner particles, with each toner particle consisting of (i) a core particle comprising an electroconductive material and/or magnetic powder and a binder agent, having a specific volume resistivity ranging from 10.sup.2 ohm-cm to 10.sup.9 ohm-cm and (ii) a coating layer comprising a coloring agent such as carbon black, or magnetic powder and a binder agent, having a specific volume resistivity of 10.sup.9 ohm-cm or more.
摘要:
Method and apparatus for sensing liquid level of the invention includes a plurality of thermocouple elements that are formed by connecting two kind of thermocouple wires alternately in series into a plurality of thermometric contacts. The two kind of thermocouple wires have different thermoelectric powers SA and SB and have a variety of predetermined lengths. The invention can sense with high reliability a liquid level of a sensed liquid by changing electromotive forces from these thermocouple elements into binary signals by using fewer thermocouple elements than the conventional apparatus. The invention also includes thermocouple elements for parity check to self-diagnose the sensed result to inspect easily and securely errors in operation due to disconnections in the thermocouple elements or external noises.
摘要:
A water cooling apparatus for an electric circuit element is disclosed in which an internal waterway is connected with an external waterway by a connector with the whole body, the forward end or the inside part of the forward end thereof alone made of an alloy containing iron, nickel and/or chromium as main components. The water cooling apparatus may further comprise a net of an alloy containing iron, nickel and chromium as main components, the net being stretched in said waterway at the inside part of the forward end of the connector.