Method of fabricating vertical structure compound semiconductor devices
    61.
    发明授权
    Method of fabricating vertical structure compound semiconductor devices 失效
    制造垂直结构化合物半导体器件的方法

    公开(公告)号:US07384807B2

    公开(公告)日:2008-06-10

    申请号:US10861743

    申请日:2004-06-03

    Inventor: Myung Cheol Yoo

    Abstract: A method of fabricating a vertical structure opto-electronic device includes fabricating a plurality of vertical structure opto-electronic devices on a crystal substrate, and then removing the substrate using a laser lift-off process. The method then fabricates a metal support structure in place of the substrate. In one aspect, the step of fabricating a metal support structure in place of the substrate includes the step of plating the metal support structure using at least one of electroplating and electro-less plating. In one aspect, the vertical structure is a GaN-based vertical structure, the crystal substrate includes sapphire and the metal support structure includes copper. Advantages of the invention include fabricating vertical structure LEDs suitable for mass production with high reliability and high yield.

    Abstract translation: 制造垂直结构光电器件的方法包括在晶体衬底上制造多个垂直结构光电器件,然后使用激光剥离工艺去除衬底。 然后,该方法制造金属支撑结构来代替基底。 一方面,代替基板制造金属支撑结构的步骤包括使用电镀和无电镀中的至少一种电镀金属支撑结构的步骤。 在一个方面,垂直结构是GaN基垂直结构,晶体衬底包括蓝宝石,金属支撑结构包括铜。 本发明的优点包括制造适合大量生产的垂直结构LED,具有高可靠性和高产量。

    Method of making diode having reflective layer
    63.
    发明授权
    Method of making diode having reflective layer 有权
    制造具有反射层的二极管的方法

    公开(公告)号:US06949395B2

    公开(公告)日:2005-09-27

    申请号:US09982980

    申请日:2001-10-22

    Inventor: Myung Cheol Yoo

    Abstract: A method of forming a light emitting diode includes forming a transparent substrate and a GaN buffer layer on the transparent substrate. An n-GaN layer is formed on the buffer layer. An active layer is formed on the n-GaN layer. A p-GaN layer is formed on the active layer. A p-electrode is formed on the p-GaN layer and an n-electrode is formed on the n-GaN layer. A reflective layer is formed on a second side of the transparent substrate. A scribe line is formed on the substrate for separating the diodes on the substrate. Also, a cladding layer of AlGaN is between the p-GaN layer and the active layer.

    Abstract translation: 形成发光二极管的方法包括在透明基板上形成透明基板和GaN缓冲层。 在缓冲层上形成n-GaN层。 在n-GaN层上形成有源层。 在活性层上形成p-GaN层。 在p-GaN层上形成p电极,在n-GaN层上形成n电极。 在透明基板的第二面上形成反射层。 在基板上形成划线,以分离基板上的二极管。 此外,AlGaN的包覆层在p-GaN层和有源层之间。

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