Liquid crystal/polymer composite
    61.
    发明授权
    Liquid crystal/polymer composite 失效
    液晶/聚合物复合材料

    公开(公告)号:US08613985B2

    公开(公告)日:2013-12-24

    申请号:US13557703

    申请日:2012-07-25

    摘要: According to one embodiment, a liquid crystal/polymer complex includes a liquid crystal material, a polymer, and a chiral agent. The liquid crystal material exhibits blue phase and contains liquid crystal molecules that are spirally arranged to form liquid crystal molecular cylinders having a spiral arrangement. The polymer maintains the arrangement and has a dendrimer-type structure including a dendrimer unit and a polymerizable unit bonded to an end of the dendrimer unit. The dendrimer unit contains a central atom and at least two branched structures bonded to the central atom and has a generation of two or more. The polymerizable unit contains a polymerizable group which can bond to a polymerizable group.

    摘要翻译: 根据一个实施方案,液晶/聚合物复合物包括液晶材料,聚合物和手性试剂。 液晶材料呈现蓝相,并含有螺旋状排列形成具有螺旋配置的液晶分子柱的液晶分子。 聚合物维持该布置,并且具有包括树枝状大分子单元和结合到树枝状聚合单元的末端的可聚合单元的树枝状聚合物型结构。 树枝状大分子单元包含中心原子和至少两个结合到中心原子的分支结构并具有两个或多个的一代。 可聚合单元包含可以与可聚合基团结合的可聚合基团。

    Polysilanes, Polysiloxanes and silicone resist materials containing
these compounds
    62.
    发明授权
    Polysilanes, Polysiloxanes and silicone resist materials containing these compounds 失效
    聚硅烷,聚硅氧烷和含有这些化合物的硅氧烷抗蚀材料

    公开(公告)号:US4822716A

    公开(公告)日:1989-04-18

    申请号:US938874

    申请日:1986-12-08

    摘要: The polysilanes and polysiloxanes of the present invention are polymers that contain silicon in the principal chain, and contain in the side chains alkaline soluble groups such as phenol-based hydroxy group and carboxyl group.One silicone resist material of the present invention comprises the polysilane or the polysiloxane in the above.Another silicone resist material of the present invention contains the above polysilane or polysiloxane, and an appropriate photosensitive agent.Still another silicone resist material of the present invention does not contain the above photosensitive agent, and in its stead, it contains a group that possesses photosensitive to ultraviolet rays or the like, via a siloxane bonding in the principal chain. As a substance with such photosensitivity, one may mention, for example, o-nitrobenzylsilyl groups that presents alkaline solubility when it is irradiated by ultraviolet rays.Accordingly, the silicone resist materials of the present invention, especially the second and third silicone resist materials, are alkaline developable, and also possess a superior resistance to oxygen plasma. Therefore, they can be used as a top layer film in the two-layered resist system, making it possible to form very fine resist patterns, fast and with a minimum number of processing steps.

    摘要翻译: 本发明的聚硅烷和聚硅氧烷是在主链中含有硅并且在侧链中含有碱性可溶性基团如苯酚基羟基和羧基的聚合物。 本发明的一种硅氧烷抗蚀剂材料包含上述聚硅烷或聚硅氧烷。 本发明的另一种硅氧烷抗蚀剂材料含有上述聚硅烷或聚硅氧烷和适当的感光剂。 本发明的另一种硅氧烷抗蚀剂材料不含上述光敏剂,代替其中含有通过主链中的硅氧烷键具有紫外线等感光性的基团。 作为具有这种光敏性的物质,可以提及例如当用紫外线照射时呈现碱溶性的邻硝基苄基甲硅烷基。 因此,本发明的有机硅抗蚀剂材料,特别是第二和第三有机硅抗蚀剂材料是碱显影的,并且还具有优异的耐氧等离子体性。 因此,它们可以用作双层抗蚀剂系统中的顶层膜,使得可以形成非常精细的抗蚀剂图案,并且具有最少数量的加工步骤。

    LIQUID CRYSTAL/POLYMER COMPOSITE
    66.
    发明申请
    LIQUID CRYSTAL/POLYMER COMPOSITE 失效
    液晶/聚合物复合材料

    公开(公告)号:US20120307184A1

    公开(公告)日:2012-12-06

    申请号:US13557703

    申请日:2012-07-25

    摘要: According to one embodiment, a liquid crystal/polymer complex includes a liquid crystal material, a polymer, and a chiral agent. The liquid crystal material exhibits blue phase and contains liquid crystal molecules that are spirally arranged to form liquid crystal molecular cylinders having a spiral arrangement. The polymer maintains the arrangement and has a dendrimer-type structure including a dendrimer unit and a polymerizable unit bonded to an end of the dendrimer unit. The dendrimer unit contains a central atom and at least two branched structures bonded to the central atom and has a generation of two or more. The polymerizable unit contains a polymerizable group which can bond to a polymerizable group.

    摘要翻译: 根据一个实施方案,液晶/聚合物复合物包括液晶材料,聚合物和手性试剂。 液晶材料呈现蓝相,并含有螺旋状排列形成具有螺旋配置的液晶分子柱的液晶分子。 聚合物维持该布置,并且具有包括树枝状大分子单元和结合到树枝状聚合单元的末端的可聚合单元的树枝状聚合物型结构。 树枝状大分子单元包含中心原子和至少两个结合到中心原子的分支结构并具有两个或多个的一代。 可聚合单元包含可以与可聚合基团结合的可聚合基团。

    Polysilanes, polysiloxanes and silicone resist materials containing
these compounds
    67.
    发明授权
    Polysilanes, polysiloxanes and silicone resist materials containing these compounds 失效
    含有这些化合物的聚硅烷,聚硅氧烷和硅氧烷抗蚀材料

    公开(公告)号:US5198520A

    公开(公告)日:1993-03-30

    申请号:US673185

    申请日:1991-03-21

    摘要: The polysilanes and polysiloxanes of the present invention are polymers that contain silicon in the principal chain, and contain in the side chains alkaline soluble groups such as phenol-based hydroxy group and carboxyl group.One silicone resist material of the present invention comprises the polysilane or the polysiloxane in the above.Another silicone resist material of the present invention contains the above polysilane or polysiloxane, and an appropriate photosensitive agent.Still another silicone resist material of the present invention does not contain the above photosensitive agent, and in its stead, it contains a group that possesses photosensitive to ultraviolet rays or the like, via a siloxane bonding in the principal chain. As a substance with such photosensitivity, one may mention, for example, o-nitrobenzylsilyl groups that presents alkaline solubility when it is irradiated by ultraviolet rays.Accordingly, the silicone resist materials of the present invention, especially the second and third silicone resist materials, are alkaline developable, and also possess a superior resistance to oxygen plasma. Therefore, they can be used as a top layer film in the two-layered resist system, making it possible to form very fine resist patterns, fast and with a minimum number of processing steps.

    摘要翻译: 本发明的聚硅烷和聚硅氧烷是在主链中含有硅并且在侧链中含有碱性可溶性基团如苯酚基羟基和羧基的聚合物。 本发明的一种硅氧烷抗蚀剂材料包含上述聚硅烷或聚硅氧烷。 本发明的另一种硅氧烷抗蚀剂材料含有上述聚硅烷或聚硅氧烷和适当的感光剂。 本发明的另一种硅氧烷抗蚀剂材料不含上述光敏剂,代替其中含有通过主链中的硅氧烷键具有紫外线等感光性的基团。 作为具有这种光敏性的物质,可以提及例如当用紫外线照射时呈现碱溶性的邻硝基苄基甲硅烷基。 因此,本发明的有机硅抗蚀剂材料,特别是第二和第三有机硅抗蚀剂材料是碱显影的,并且还具有优异的耐氧等离子体性。 因此,它们可以用作双层抗蚀剂系统中的顶层膜,使得可以形成非常精细的抗蚀剂图案,并且具有最少数量的加工步骤。

    A silicone resist materials containing a polysiloxane and a
photo-sensitive agent
    68.
    发明授权
    A silicone resist materials containing a polysiloxane and a photo-sensitive agent 失效
    含有聚硅氧烷和光敏剂的硅氧烷抗蚀剂材料

    公开(公告)号:US5017453A

    公开(公告)日:1991-05-21

    申请号:US304231

    申请日:1989-01-31

    摘要: The polysilanes and polysiloxanes of the present invention are polymers that contain silicon in the principal chain, and contain in the side chains alkaline soluble groups such as phenol-based hydroxy group and carboxyl group.One silicone resist material of the present invention comprises the polysilane or the polysiloxane in the above.Another silicone resist material of the present invention contains the above polysilane or polysiloxane, and an appropriate photosensitive agent.Still another silicone resist material of the present invention does not contain the above photosensitive agent, and in its stead, it contains a group that possesses photosensitive to ultraviolet rays or the like, via a siloxane bonding in the principal chain. As a substance with such photosensitivity, one may mention, for example, o-nitrogenzylsilyl groups that presents alkaline solubility when it is irradiated by ultraviolet rays.Accordingly, the silicone resist materials of the present invention, especially the second and third silicone resist materials, are alkaline developable, and also possess a superior resistance to oxygen plasma. Therefore, they can be used as a top layer film in the two-layered resist system, making it possible to form very fine resist patterns, fast and with a minimum number of processing steps.