Curve approach control apparatus
    62.
    发明授权
    Curve approach control apparatus 有权
    曲线进近控制装置

    公开(公告)号:US06778896B1

    公开(公告)日:2004-08-17

    申请号:US09631939

    申请日:2000-08-03

    IPC分类号: G01C2100

    CPC分类号: B60K31/0066

    摘要: The present invention provides a curve approach control apparatus comprising an allowable lateral acceleration setting unit to set as an allowable lateral acceleration a lateral acceleration that a vehicle can tolerate when it negotiates a curve in front; an allowable approach speed setting unit to set as an allowable approach speed an approach speed at which the vehicle can negotiate the curve, based on at least the allowable lateral acceleration; a decision control unit to estimate and judge an approach of the vehicle to the curve based on at least the allowable approach speed and execute a predetermined control; and a road surface friction coefficient estimation unit to estimate a road surface friction coefficient. The allowable lateral acceleration setting unit corrects, according to the road surface friction coefficient, an allowable percentage of the lateral acceleration that occurs in the vehicle as it negotiates the curve and sets the allowable lateral acceleration.

    摘要翻译: 本发明提供了一种曲线进近控制装置,其包括允许的横向加速度设定单元,其将协商前面的曲线时车辆能够容忍的横向加速度设定为允许的横向加速度; 允许进入速度设定单元,至少基于允许的横向加速度来设定车辆可以协商曲线的接近速度作为允许的进近速度; 判定控制单元,至少基于所述允许接近速度来估计和判定所述车辆对所述曲线的接近,并执行预定的控制; 以及用于估计路面摩擦系数的路面摩擦系数估计单元。 允许的横向加速度设定单元根据路面摩擦系数来校正车辆中出现的横向加速度的允许百分比,并且设定允许的横向加速度。

    Position measuring apparatus and exposure apparatus
    63.
    发明授权
    Position measuring apparatus and exposure apparatus 失效
    位置测量装置和曝光装置

    公开(公告)号:US06744512B2

    公开(公告)日:2004-06-01

    申请号:US10231159

    申请日:2002-08-30

    申请人: Akira Takahashi

    发明人: Akira Takahashi

    IPC分类号: G01B1100

    CPC分类号: G03F9/7088 G03F9/7092

    摘要: An object of the invention is to provide a position measuring apparatus which can measure position information of a mark formed on an object with high accuracy, and an exposure apparatus which can perform exposure by performing alignment highly accurately, based on the highly accurate position information measured by the position measuring apparatus, and as a result, can realize fine processing. In order to achieve the object, the present invention is a position information measuring apparatus for measuring position information of an alignment mark, by converting an image Im1 of an alignment mark formed on an image pickup plane F1 of an image pickup device into image information, while scanning the image Im1 in a scanning direction SC1, and performing calculation processing with respect to the obtained image information, wherein the measuring direction D11 of the image Im1 of the alignment mark is set so as to be orthogonal to the scanning direction SC1.

    摘要翻译: 本发明的目的是提供一种可以高精度地测量形成在物体上的标记的位置信息的位置测量装置,以及基于所测量的高度准确的位置信息,可以高精度地执行对准而进行曝光的曝光装置 通过位置测量装置,结果可以实现精细处理。 为了实现该目的,本发明是一种位置信息测量装置,用于通过将形成在图像拾取装置的图像拾取平面F1上的对准标记的图像Im1转换成图像信息来测量对准标记的位置信息, 同时在扫描方向SC1上扫描图像Im1,并对所获得的图像信息执行计算处理,其中对准标记的图像Im1的测量方向D11被设置为与扫描方向SC1正交。

    Magneto-optical recording method using the relation of beam diameter and an aperture of converging lens
    66.
    发明授权
    Magneto-optical recording method using the relation of beam diameter and an aperture of converging lens 失效
    使用光束直径与会聚透镜孔径的磁光记录方法

    公开(公告)号:US06483785B1

    公开(公告)日:2002-11-19

    申请号:US09685829

    申请日:2000-10-10

    IPC分类号: G11B1100

    摘要: Featured is a recording and reproducing method for recording and reproducing information on and from a recording medium. The medium includes a base having a property that a light can be transmitted therethrough, a readout layer formed on the base, which has an in-plane magnetization at room temperature, whereas, a transition occurs from in-plane magnetization to perpendicular magnetization as temperature rises and a recording layer formed on said readout layer for recording thereon information magneto-optically. A groove for guiding a light beam is formed on a readout layer side of the base and a groove width is set substantially equal to a land width formed between grooves. The recording layer on the grooves and the recording layer on lands are used in recording and reproducing information. Further a light beam is incident on a converging lens of an optical head, the light beam having a larger diameter &ohgr; than an aperture &agr; of the converging lens for converging the light beam on a predetermined position of the magneto-optical recording medium.

    摘要翻译: 特色是用于在记录介质上记录和再现信息的记录和再现方法。 该介质包括具有光可以透射的性质的基底,形成在基底上的读出层,其在室温下具有面内磁化强度,而从平面内磁化转变为垂直磁化转变为温度 并且在所述读出层上形成用于在其上记录光学信息的记录层。 在基板的读出层侧形成用于引导光束的槽,并且将槽宽度设定为与槽之间形成的焊盘宽度大致相等。 凹槽上的记录层和焊盘上的记录层用于记录和再现信息。 此外,光束入射到光学头的会聚透镜上,所述光束具有比会聚透镜的孔径α更大的直径Ω,用于将光束会聚在磁光记录介质的预定位置。

    Magneto-optical recording medium and process for producing the same
    67.
    发明授权
    Magneto-optical recording medium and process for producing the same 失效
    磁光记录介质及其制造方法

    公开(公告)号:US06456586B1

    公开(公告)日:2002-09-24

    申请号:US09392248

    申请日:1999-09-09

    IPC分类号: G11B1110

    摘要: A magneto-optical recording medium comprising a reproducing magnetic layer having a magnetic layer which is in an in-plane magnetization state at room temperature but shifts to a perpendicular magnetization state as temperature rises, a dielectric layer and a recording magnetic layer having a magnetic layer which exhibits a perpendicular magnetization, sequentially from a photo-receptive side, the recording medium being further comprising a metal layer between the reproducing magnetic layer and the dielectric layer.

    摘要翻译: 一种磁光记录介质,包括具有磁性层的再现磁性层,所述磁性层在室温下处于平面内的磁化状态,但随着温度升高而转变为垂直磁化状态,介电层和具有磁性层的记录磁性层 其从光接收侧顺序地显示垂直磁化,所述记录介质还包括在再现磁性层和介电层之间的金属层。

    System for exhaust gas purification
    68.
    发明授权
    System for exhaust gas purification 失效
    废气净化系统

    公开(公告)号:US06350416B2

    公开(公告)日:2002-02-26

    申请号:US09093789

    申请日:1998-06-09

    IPC分类号: B01D5334

    摘要: A system for exhaust gas purification disposed in the exhaust pipe of an internal combustion engine, includes an adsorbent formed by loading, on a monolithic carrier, (1) a zeolite containing at least one kind of ion of an element having an electronegativity of 1.40 or more and (2) a catalyst material formed by loading at least one kind of noble metal selected from Pt, Pd and Rh on a heat-resistant inorganic oxide, and at least one loaded carrier formed by loading, on a monolithic carrier, a catalyst component having a purifiability for the harmful substances present in the exhaust gas emitted from the engine and/or an adsorbent component having an adsorptivity for the hydrocarbons also present in the exhaust gas, the loaded carrier being provided upstream of the adsorbent in the flow direction of the exhaust gas and having a total volume of 0.6 l or more. In this system for exhaust gas purification, the thermal deterioration of the adsorbent is reduced because there is used an adsorbent of higher HC desorption start temperature and because the thermal load applied to the adsorbent is decreased by the use of a particular means.

    摘要翻译: 一种设置在内燃机的排气管中的废气净化系统,包括通过在整体式载体上装载(1)含有至少一种具有1.40的电负性的元素的离子的沸石形成的吸附剂,或 更多和(2)通过将选自Pt,Pd和Rh中的至少一种贵金属负载在耐热无机氧化物上形成的催化剂材料,以及通过在整体式载体上负载催化剂形成的至少一种负载载体 具有对从发动机排出的排气中存在的有害物质具有可净化性的成分和/或对废气中也存在的具有对烃的吸附性的吸附剂成分,负载载体在吸附剂的流动方向上游侧设置 废气,总体积为0.6l以上。 在这种废气净化系统中,由于使用HC解吸开始温度较高的吸附剂,因为通过使用特定的方法降低了对吸附剂的热负荷,所以吸附剂的热劣化降低。

    Projection exposure apparatus and exposure method
    70.
    发明授权
    Projection exposure apparatus and exposure method 失效
    投影曝光装置和曝光方法

    公开(公告)号:US06335537B1

    公开(公告)日:2002-01-01

    申请号:US09598317

    申请日:2000-06-21

    申请人: Akira Takahashi

    发明人: Akira Takahashi

    IPC分类号: G01B1100

    摘要: In the projection exposure apparatus of the present invention, alignment controller selects, from baseline memory, the appropriate baseline amount in correspondence with the insertion, into optical axes and in positional detection optical system, of illumination light limiting member and phase plate. In this way, by using a baseline amount corresponding to a modification of the optical conditions, a desired position on substrate is accurately disposed beneath the projection optical system. Furthermore, even when there are changes in the electrical circuit characteristics of the positional detection optical system as a result of changes in the amplification ratio of the amplifier, the alignment controller conducts processing which is identical to that described above. By means of this, even when the characteristics of the positional detection optical system are changed, the baseline amount corresponding to the changes in characteristics is corrected, and reliable alignment is possible.

    摘要翻译: 在本发明的投影曝光装置中,对准控制器从基线存储器中选择对应于照明光限制构件和相位板的光轴和位置检测光学系统中的适当基线量。 以这种方式,通过使用对应于光学条件的修改的基线量,在投影光学系统下方精确地设置在基板上的期望位置。 此外,即使由于放大器的放大率的变化而导致位置检测光学系统的电路特性发生变化,所以对准控制器进行与上述相同的处理。 由此,即使在位置检测光学系统的特性发生变化的情况下,对与特性变化对应的基线量进行校正,也可以进行可靠的对准。