公开(公告)号：US11997866B2

公开(公告)日：2024-05-28

申请号：US17136404

申请日：2020-12-29

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna Mohan ,  William E. Quinn ,  Ruiqing Ma ,  Emory Krall ,  Luke Walski

IPC: H10K50/842 ,  H10K50/11 ,  H10K50/81 ,  H10K50/82 ,  H10K50/822 ,  H10K50/844 ,  H10K59/121 ,  H10K59/122 ,  H10K59/124 ,  H10K71/00 ,  H10K77/10 ,  H10K102/00 ,  H10K50/813

CPC classification number: H10K50/8426 ,  H10K50/11 ,  H10K50/81 ,  H10K50/82 ,  H10K50/822 ,  H10K50/844 ,  H10K59/121 ,  H10K59/122 ,  H10K59/124 ,  H10K71/00 ,  H10K77/111 ,  H10K50/813 ,  H10K2102/311

Abstract: A novel thin film encapsulated OLED panel architecture and a method for making the panels with improved shelf life is disclosed. The OLED panel consists of a plurality of OLED pixels; each OLED pixel is individually hermetically sealed and isolated from its neighboring pixels. The organic stack of the OLED pixel is contained within its own hermetically sealed structure, achieved by making the structure on a barrier coated substrate and using a first barrier material as the grid and a second barrier for encapsulating the entire OLED pixel. The first barrier material provides the edge seal while the second barrier disposed over the pixel provides protection from top down moisture diffusion. By isolating and hermetically sealing individual pixels; any damage such as moisture and oxygen ingress due to defects or particles, delamination, cracking etc. can be effectively contained within the pixel thereby protecting other pixels in the panel.

公开(公告)号：US11751466B2

公开(公告)日：2023-09-05

申请号：US17224240

申请日：2021-04-07

Applicant: Universal Display Corporation

Inventor： Matthew King ,  Gregg Kottas ,  Gregory McGraw ,  William E. Quinn

IPC: B41J2/14 ,  H10K71/00 ,  H10K71/13 ,  H10K71/16 ,  B41J2/005

CPC classification number: H10K71/00 ,  B41J2/005 ,  B41J2/14 ,  B41J2/14145 ,  H10K71/135 ,  H10K71/16 ,  B41J2002/0055

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US11168391B2

公开(公告)日：2021-11-09

申请号：US15475408

申请日：2017-03-31

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H01L51/00

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US11121322B2

公开(公告)日：2021-09-14

申请号：US16689259

申请日：2019-11-20

Applicant: Universal Display Corporation

Inventor： Matthew King ,  William E. Quinn ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Elliot H. Hartford ,  Benjamin Swedlove ,  Gregg Kottas ,  Tomasz Trojacki ,  Julia J. Brown

IPC: C23C14/12 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00 ,  H01L51/50 ,  H01L51/52 ,  C23C14/22

Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.

公开(公告)号：US11108027B2

公开(公告)日：2021-08-31

申请号：US16245517

申请日：2019-01-11

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Jason Paynter ,  Gregory McGraw ,  Matthew King

IPC: H01L51/56 ,  H01L51/52 ,  H01L51/00

Abstract: Techniques and devices are provided for attaching a die to a metal manifold. A metal-containing ink is used to deposit a metal trace on the die and thereby to form a gasket, after which the die is compressed against the manifold to form a sealed connection between the two.

公开(公告)号：US11104988B2

公开(公告)日：2021-08-31

申请号：US16255040

申请日：2019-01-23

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw ,  Matthew King ,  Gregg Kottas

IPC: C23C14/22 ,  C23C14/12 ,  C23C14/24 ,  H01L51/50 ,  H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.

公开(公告)号：US11088325B2

公开(公告)日：2021-08-10

申请号：US16711476

申请日：2019-12-12

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Roman Korotkov

IPC: B41J2/14 ,  H01L51/00 ,  B05C5/02 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a micronozzle array including a linear array having a plurality of depositors connected in series, where a first depositor of the plurality of depositors may border a second depositor on a least one side boundary. The micronozzle array may include plurality of orifice arrays, where a width of each orifice in the plurality of orifice arrays is 20 μm or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel. The micronozzle array may include a plurality of exhaust distribution channels, where the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.

公开(公告)号：US11088324B2

公开(公告)日：2021-08-10

申请号：US16749154

申请日：2020-01-22

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L21/00 ,  H01L51/00 ,  C23C14/24 ,  C23C14/12 ,  C23C14/04 ,  C23C14/54 ,  B41J2/14 ,  B41M3/00 ,  H01L51/56 ,  H01L51/50

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

公开(公告)号：US10858729B2

公开(公告)日：2020-12-08

申请号：US14730768

申请日：2015-06-04

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King ,  Elliot H. Hartford, Jr. ,  Siddharth Harikrishna Mohan ,  Benjamin Swedlove ,  Gregg Kottas

IPC: C23C14/12 ,  C23C14/54 ,  C23C14/22 ,  B41J2/045 ,  C23C14/04 ,  H01L51/56 ,  H01L51/00 ,  B05D1/00

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

公开(公告)号：US20200161550A1

公开(公告)日：2020-05-21

申请号：US16749154

申请日：2020-01-22

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L51/00 ,  C23C14/54 ,  H01L51/56 ,  B41M3/00 ,  B41J2/14 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.