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公开(公告)号：US20170294615A1
公开(公告)日：2017-10-12
申请号：US15475408
申请日：2017-03-31
Applicant: Universal Display Corporation
Inventor： Edwin van den Tillaart , Sven Pekelder , Mark Meuwese , William E. Quinn , Gregory McGraw , Gregg Kottas
CPC classification number: C23C14/24 , C23C14/12 , H01L51/0005 , H01L51/0085
Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
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公开(公告)号：US11981987B2
公开(公告)日：2024-05-14
申请号：US17510529
申请日：2021-10-26
Applicant: Universal Display Corporation
Inventor： Edwin van den Tillaart , Sven Pekelder , Mark Meuwese , William E. Quinn , Gregory McGraw , Gregg Kottas
CPC classification number: C23C14/24 , C23C14/12 , C23C16/45517 , C23C16/45525 , C23C16/45563 , C23C16/45565 , C23C16/45574 , C23C16/45578 , C23C16/545 , H10K71/135 , H10K85/342
Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
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公开(公告)号：US20170291187A1
公开(公告)日：2017-10-12
申请号：US15483251
申请日：2017-04-10
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor： Peter van Putten , Sven Pekelder , Mark Meuwese , Maurits Willenbroek , Piet van Rens
CPC classification number: B05B15/70 , B41J25/001 , B41J25/3086
Abstract: A device for use in OVJP and similar arrangements includes a print head movable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.
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Patent Agency Ranking
公开(公告)号：US12043042B2
公开(公告)日：2024-07-23
申请号：US17242599
申请日：2021-04-28
Applicant: Universal Display Corporation
Inventor： Peter van Putten , Sven Pekelder , Mark Meuwese , Maurits Willenbroek , Piet van Rens
IPC: B41J25/308 , B41J11/00 , B41J25/00 , B41J25/316 , C23C14/04 , C23C14/12 , C23C14/22 , C23C14/54
CPC classification number: B41J25/308 , B41J11/008 , B41J25/001 , B41J25/3086 , B41J25/316 , C23C14/04 , C23C14/12 , C23C14/228 , C23C14/54
Abstract: A device for use in organic vapor jet printing (OVJP) and similar arrangements includes a print head moveable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.
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公开(公告)号：US20240279789A1
公开(公告)日：2024-08-22
申请号：US18610937
申请日：2024-03-20
Applicant: Universal Display Corporation
Inventor： Edwin van den Tillaart , Sven Pekelder , Mark Meuwese , William E. Quinn , Gregory McGraw , Gregg Kottas
CPC classification number: C23C14/24 , C23C14/12 , C23C16/45517 , C23C16/45525 , C23C16/45563 , C23C16/45565 , C23C16/45574 , C23C16/45578 , C23C16/545 , H10K71/135 , H10K85/342
Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
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公开(公告)号：US11168391B2
公开(公告)日：2021-11-09
申请号：US15475408
申请日：2017-03-31
Applicant: Universal Display Corporation
Inventor： Edwin van den Tillaart , Sven Pekelder , Mark Meuwese , William E. Quinn , Gregory McGraw , Gregg Kottas
IPC: C23C14/24 , C23C14/12 , C23C16/455 , C23C16/54 , H01L51/00
Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
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公开(公告)号：US20210245533A1
公开(公告)日：2021-08-12
申请号：US17242599
申请日：2021-04-28
Applicant: Universal Display Corporation
Inventor： Peter van Putten , Sven Pekelder , Mark Meuwese , Maurits Willenbroek , Piet van Rens
IPC: B41J25/308 , B41J25/00 , B41J25/316 , B41J11/00
Abstract: A device for use in organic vapor jet printing (OVJP) and similar arrangements includes a print head moveable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.
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公开(公告)号：US11014386B2
公开(公告)日：2021-05-25
申请号：US15483251
申请日：2017-04-10
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor： Peter van Putten , Sven Pekelder , Mark Meuwese , Maurits Willenbroek , Piet van Rens
IPC: B41J25/308 , B41J25/316 , B41J11/00 , B41J25/00
Abstract: A device for use in organic vapor jet printing (OVJP) and similar arrangements includes a print head movable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.
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