公开(公告)号：US20170294615A1

公开(公告)日：2017-10-12

申请号：US15475408

申请日：2017-03-31

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: H01L51/50 ,  H01L51/56 ,  B05B1/00 ,  H01L51/00

CPC classification number: C23C14/24 ,  C23C14/12 ,  H01L51/0005 ,  H01L51/0085

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US11981987B2

公开(公告)日：2024-05-14

申请号：US17510529

申请日：2021-10-26

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H10K71/13 ,  H10K85/30

CPC classification number: C23C14/24 ,  C23C14/12 ,  C23C16/45517 ,  C23C16/45525 ,  C23C16/45563 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45578 ,  C23C16/545 ,  H10K71/135 ,  H10K85/342

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US20240279789A1

公开(公告)日：2024-08-22

申请号：US18610937

申请日：2024-03-20

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H10K71/13 ,  H10K85/30

CPC classification number: C23C14/24 ,  C23C14/12 ,  C23C16/45517 ,  C23C16/45525 ,  C23C16/45563 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45578 ,  C23C16/545 ,  H10K71/135 ,  H10K85/342

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US11168391B2

公开(公告)日：2021-11-09

申请号：US15475408

申请日：2017-03-31

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H01L51/00

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.