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61.发明授权Device for directing radiation to a layer, apparatus with such device and method using such apparatus 失效用于将辐射引导到层的装置，具有这种装置的装置和使用这种装置的方法公开(公告)号：US07605979B2
公开(公告)日：2009-10-20
申请号：US11911559
申请日：2006-04-13
CPC分类号： G11B7/261 , G03F7/70383 , G03F7/70583
摘要： A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
摘要翻译： 描述了用于将辐射引导到层（1）的装置。 该装置包括用于将源自第一辐射源（S1）的第一辐射束（B1）聚焦到所述层上的第一光学元件（L1），用于聚焦源自第二辐射源 第二辐射源（S2）到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动，其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件（L2）具有孔（A2），其允许第一辐射束（B1）的光学上不受干扰地通过。 以这种方式实现L1和L2的紧凑且轻的配置以及改进的辐射束质量。 此外，公开了一种包括这种装置的装置和使用这种装置的方法。
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公开(公告)号：US20080252960A1
公开(公告)日：2008-10-16
申请号：US11569761
申请日：2005-05-27
申请人： Bernardus H.W. Hendriks , Helmar Van Santen , Michiel J.M. Van Der AA , Wil J.L. Ophey , Teus Tukker , Stein Kuiper
发明人： Bernardus H.W. Hendriks , Helmar Van Santen , Michiel J.M. Van Der AA , Wil J.L. Ophey , Teus Tukker , Stein Kuiper
CPC分类号： G02B3/14 , G02B26/005
摘要： An optical element comprises a fluid chamber and a device for providing a magnetic field over at least a portion of the fluid chamber The fluid chamber has side portions and end portions, and contains a first fluid and a second fluid. The fluids are non-miscible and the second fluid is capable of being influenced by a magnetic field. The end portions of the fluid chamber are connected together only by the side portions.
摘要翻译： 光学元件包括流体室和用于在流体室的至少一部分上提供磁场的装置。流体室具有侧部和端部，并且包含第一流体和第二流体。 流体是不可混溶的，并且第二流体能够受到磁场的影响。 流体室的端部仅通过侧部连接在一起。
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63.发明申请Objective System for an Optical Scanning Device for Ultraviolet and/or Deep-Ultraviolet Wavelengths 审中-公开用于紫外线和/或深紫外线波长的光学扫描装置的物镜系统公开(公告)号：US20080192334A1
公开(公告)日：2008-08-14
申请号：US11913713
申请日：2006-04-28
CPC分类号： C03C4/0085 , C03C3/06 , G02B13/143 , G11B7/1374 , G11B2007/13727
摘要： An objective system (1″) for an optical scanning device for ultraviolet and/or deep-ultraviolet wavelengths is provided. The objective system (1″) comprises at least one glass component (3″) with an aspherical surface. The at least one glass component (3″) is made of a glass material comprising a low softening temperature and a low absorption coefficient for ultraviolet and/or deep-ultraviolet wavelengths.
摘要翻译： 提供了用于紫外线和/或深紫外线波长的光学扫描装置的物镜系统（1“）。 物镜系统（1“）包括具有非球面的至少一个玻璃部件（3”）。 所述至少一个玻璃组分（3“）由玻璃材料制成，所述玻璃材料包含低的软化温度和对于紫外线和/或深紫外线波长的低吸收系数。
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公开(公告)号：US20080186459A1
公开(公告)日：2008-08-07
申请号：US11882292
申请日：2007-07-31
CPC分类号： G03F7/70341 , G03F7/7085
摘要： A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
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65.发明申请公开(公告)号：US20060261288A1
公开(公告)日：2006-11-23
申请号：US10538115
申请日：2003-11-14
申请人： Helmar Van Santen
发明人： Helmar Van Santen
IPC分类号： G21G5/00
CPC分类号： G11B7/1374 , G03F7/70341 , G11B7/122 , G11B7/261
摘要： For irradiating a layer (3) a radiation beam (7) is directed and focused to a spot (11) on the layer (3), relative movement of the layer (3) relative to the optical element (59) is caused so that, successively, different portions of the layer (3) are irradiated and an interspace (53) between a surface of the optical element (59) nearest to the layer (3) is maintained. Furthermore, at least a portion of the interspace (53) through which the radiation irradiates the spot (11) on the layer (3) is maintained filled with a liquid (91). By directing a gas flow (71-73) to a surface zone (74) of the layer (3), liquid (91) is reliably prevented from passing that surface zone (74), without causing damage to the layer (3). The liquid (91) is drawn away from the layer (3) in the vicinity of the surface zone (74).
摘要翻译： 为了照射层（3），辐射束（7）被引导并聚焦到层（3）上的斑点（11），引起层（3）相对于光学元件（59）的相对运动，使得 照射层（3）的不同部分，并且维持最靠近层（3）的光学元件（59）的表面之间的间隙（53）。 此外，辐射照射层（3）上的斑点（11）的间隙（53）的至少一部分保持充满液体（91）。 通过将气流（71-73）引导到层（3）的表面区域（74），可靠地防止液体（91）通过该表面区域（74），而不会损坏层（3）。 液体（91）在表面区域（74）附近从层（3）被拉出。
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66.发明授权公开(公告)号：US06396637B2
公开(公告)日：2002-05-28
申请号：US09846460
申请日：2001-05-01
申请人： Wouter Roest , Helmar Van Santen
发明人： Wouter Roest , Helmar Van Santen
IPC分类号： G02B2710
CPC分类号： G02B6/0038 , G02B6/0056 , G02F1/133536 , G02F1/133615 , G02F1/13362 , G02F2001/133545 , G02F2001/133616 , G02F2203/02
摘要： An image display device comprising a light modulation panel, a light conductor arranged opposite the light modulation panel and a light source connected to the light conductor. The light conductor comprises a serrated foil which reflects a light beam emitted by the light source and having a first direction of polarization, and transmits a light beam modulated by the light modulation panel and having a second direction of polarization.
摘要翻译： 一种图像显示装置，包括光调制面板，与光调制面板相对布置的光导体和连接到光导体的光源。 光导体包括锯齿状箔，其反射由光源发射的光束并具有第一偏振方向，并透射由光调制面板调制并具有第二偏振方向的光束。
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公开(公告)号：US20100139862A1
公开(公告)日：2010-06-10
申请号：US12705018
申请日：2010-02-12
IPC分类号： H01L21/308 , B29C59/02
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A method for manufacturing a working template for use in imprint lithography is disclosed, which in an embodiment, involves contacting a first target region of an imprintable medium on a working template substrate with a master template to form a first imprint in the medium, the imprint defining a part of a working template pattern, separating the master template from the imprinted medium, contacting a second target region of the medium with the master template to form a second imprint in the medium, the second imprint defining a further part of the working template pattern, and separating the master template from the imprinted medium.
摘要翻译： 公开了一种用于制造用于压印光刻的工作模板的方法，其在一个实施例中包括将工作模板基板上的可压印介质的第一目标区域与主模板接触以在介质中形成第一印记，印记 定义工作模板模式的一部分，将主模板与压印介质分离，将介质的第二目标区域与主模板接触以在介质中形成第二压印，第二压印定义工作模板的另一部分 模式，并将主模板与压印介质分离。
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68.发明申请公开(公告)号：US20090205488A1
公开(公告)日：2009-08-20
申请号：US12306539
申请日：2007-06-27
申请人： Marco Betting , Bart Prast , Helmar Van Santen , Cornelius Johannes Schellekens , Paulus Henricus Joannes Verbeek , Peter Mervyn Wilkinson
发明人： Marco Betting , Bart Prast , Helmar Van Santen , Cornelius Johannes Schellekens , Paulus Henricus Joannes Verbeek , Peter Mervyn Wilkinson
摘要： A method and cyclonic separator are disclosed for degassing a fluid mixture comprising a carrier liquid and gaseous and/or vaporizable components, wherein: the fluid mixture is accelerated in a throat section (6, 21) of a vortex tube (1, 20) such that the static pressure of the fluid mixture is decreased and vaporizable components evaporate into a gaseous phase and the fluid mixture flows as a substantially homogeneously dispersed gas-liquid mixture through the throat section; the accelerated fluid mixture is induced to swirl within a tubular mid section of the vortex tube such that the fluid mixture is separated by centrifugal forces into a degassed liquid fraction and a gas enriched fraction; the degassed liquid fraction is induced to flow into a annular liquid outlet conduit (4, 21); and the gas enriched fraction is induced to flow into a central gas outlet conduit (3, 24). An advantage of inducing the fluid mixture to flow as a substantially homogeneously dispersed gas-liquid mixture through the throat section is that the velocity of sound in such a mixture is low, thereby increasing the Mach number and the pressure reduction in the throat section and enhancing evaporation of gas bubbles in the mixture.
摘要翻译： 公开了一种方法和气旋分离器，其用于对包含载体液体和气体和/或可蒸发组分的流体混合物进行脱气，其中：流体混合物在涡流管（1,20）的喉部（6,21）中被加速， 流体混合物的静压力降低，并且可蒸发组分蒸发成气相，并且流体混合物作为基本均匀分散的气液混合物流过喉部; 加速的流体混合物在涡流管的管状中间部分内引起涡流，使得流体混合物通过离心力分离成脱气的液体馏分和富含气体的馏分; 致动脱气的液体部分流入环形液体出口导管（4,21）中; 并且气体富集部分被诱导流入中心气体出口导管（3,44）。 引起流体混合物作为基本上均匀分散的气液混合物通过喉部分流动的优点是这种混合物中的声速低，从而增加了喉部的马赫数和压力降低，并增强了 混合物中气泡的蒸发。
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公开(公告)号：US07514699B2
公开(公告)日：2009-04-07
申请号：US10539313
申请日：2003-11-20
CPC分类号： G03F7/70341 , G11B7/122 , G11B7/1374 , G11B7/261
摘要： For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.
摘要翻译： 为了照射层，辐射束被引导并聚焦到层上的斑点，引起层相对于透镜的相对运动，使得相继地照射该层的不同部分和透镜表面之间的间隙 最靠近层保持。 此外，辐射照射到层上的斑点的间隙的至少一部分保持充满液体，液体经由供应导管供给。 至少一部分液体填充了辐射照射到该点的凹槽。
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公开(公告)号：US07490547B2
公开(公告)日：2009-02-17
申请号：US11025605
申请日：2004-12-30
CPC分类号： G03F7/0002 , B41C1/10 , B82Y10/00 , B82Y40/00
摘要： An imprinting method is provided that, according to an embodiment, involves contacting an imprintable medium on a substrate with a template to define an imprint area in the medium, removing at least some of any imprintable medium present outside the imprint area, and separating the template from the medium.
摘要翻译： 提供了一种压印方法，根据一个实施例，该方法包括使基板上的可压印介质与模板接触以在介质中限定压印区域，去除存在于压印区域之外的任何可压印介质的至少一些，以及分离模板 从媒介。
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