公开(公告)号：US06804005B2

公开(公告)日：2004-10-12

申请号：US10138903

申请日：2002-05-02

Applicant: Joerg Bischoff ,  Xinhui Niu

Inventor： Joerg Bischoff ,  Xinhui Niu

IPC: G01J400

CPC classification number: G03F7/70633

Abstract: Overlay measurements for a semiconductor wafer are obtained by forming a periodic grating on the wafer having a first set of ridges and a second set of ridges. The first and second sets of ridges are formed on the wafer using a first mask and a second mask, respectively. After forming the first and second sets of gratings, zero-order cross polarization measurements of a portion of the periodic grating are obtained. Any overlay error between the first and second masks used to form the first and second sets of gratings is determined based on the obtained zero-order cross polarization measurements.

Abstract translation: 通过在具有第一组脊和第二组脊的晶片上形成周期性光栅来获得半导体晶片的叠加测量。 使用第一掩模和第二掩模分别在晶片上形成第一和第二组脊。 在形成第一和第二组光栅之后，获得周期性光栅的一部分的零阶交叉极化测量。 基于获得的零级交叉极化测量确定用于形成第一和第二组光栅的第一和第二掩模之间的任何重叠误差。

公开(公告)号：US06798512B2

公开(公告)日：2004-09-28

申请号：US10042592

申请日：2002-01-09

Applicant: Martin Ebert ,  Li Chen

Inventor： Martin Ebert ,  Li Chen

IPC: G01J400

CPC classification number: G01N21/211 ,  G01J4/04

Abstract: An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by two linear axes of two perpendicularly oriented linear stages. As a result, an entire wafer is accessed for measurement with the linear stages having a travel range of only half the wafer diameter. The reduced linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of two perpendicularly directed probe beams permits measurement of periodic structures along a preferred direction while permitting the use of a reduced motion stage.

Abstract translation: 椭圆仪器提供了两个撞击的聚焦探针光束，其被引导以沿两个相互不同的，优选地基本垂直的方向反射出样品。 旋转台将晶片的部分旋转到由两个垂直取向的线性级的两个线性轴限定的行进区域中。 结果，整个晶片被访问用于测量，线性级的行程范围仅为晶片直径的一半。 减小的线性行程导致由晶片占据的小行程信封，因此在该设备的小占地面积内。 使用两个垂直定向的探针光束允许沿优选方向测量周期性结构，同时允许使用减小的运动级。

公开(公告)号：US06798511B1

公开(公告)日：2004-09-28

申请号：US09691006

申请日：2000-10-18

Applicant: Qiwen Zhan ,  James R. Leger

Inventor： Qiwen Zhan ,  James R. Leger

IPC: G01J400

CPC classification number: G01J4/00 ,  G01N21/211

Abstract: An ellipsometer apparatus and method for use in providing an image of at least a portion of a sample includes an objective lens having a focal plane at which a sample plane of a sample is positioned. Linearly polarized light normal to the sample plane incident on the objective lens is provided, and the incident linearly polarized light is focused onto the sample. At least a portion of the focused incident polarized light is reflected by the sample resulting in reflected light. Spatial filtering is used to modify at least a portion of the incident or the reflected light. An analyzer portion is operable to generate polarization information based on the reflected light.

Abstract translation: 用于提供样品的至少一部分的图像的椭圆偏振仪装置和方法包括具有样品的样品平面所在的焦平面的物镜。 提供垂直于入射在物镜上的采样平面的线偏振光，并将入射的线偏振光聚焦到样品上。 聚焦的入射偏振光的至少一部分被样品反射，产生反射光。 空间滤波用于修改入射或反射光的至少一部分。 分析器部分可操作以基于反射光产生偏振信息。

公开(公告)号：US06785638B2

公开(公告)日：2004-08-31

申请号：US09923578

申请日：2001-08-06

Applicant: Xinhui Niu ,  Nickhil Jakatdar

Inventor： Xinhui Niu ,  Nickhil Jakatdar

IPC: G01J400

CPC classification number: G01B11/24 ,  G01N21/211

Abstract: The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile.

Abstract translation: 本发明涉及一种利用图书馆生成过程中的动态学习有效地确定光栅轮廓的方法和系统。 本发明还涉及一种用于搜索和匹配试验光栅轮廓以确定与实际光栅轮廓相关联的形状，轮廓和频谱数据信息的方法和系统。

公开(公告)号：US06774996B2

公开(公告)日：2004-08-10

申请号：US10171570

申请日：2002-06-11

Applicant: John L. Johnson

Inventor： John L. Johnson

IPC: G01J400

CPC classification number: G01N21/23

Abstract: A method and an apparatus for measuring the density variations, static and dynamic, in substances that are at least partially transparent to electromagnetic waves is disclosed. A special birefringement crystal phase shifting assembly encodes the angle of incidence resulting from the refractive effects of the electromagnetic waves having passed through a density variation. The angle of incidence is encoded as a poralization phase shift. Specifically, the poralization phase shift is between the ordinary and the extraordinary rays. That poralization phase shift has a known and definable relationship to the gas density experienced by the electromagnetic wave during its path.

Abstract translation: 公开了一种用于测量对电磁波至少部分透明的物质中的静态和动态密度变化的方法和装置。 特殊的双折射晶体相移组件对通过密度变化的电磁波的折射效应产生的入射角进行编码。 入射角被编码为电化相移。 具体来说，通化相移在普通和非凡光线之间。 该通化相移与其在其路径中的电磁波所经历的气体密度具有已知和可定义的关系。

公开(公告)号：US06765672B1

公开(公告)日：2004-07-20

申请号：US09947147

申请日：2001-09-05

Applicant: David L. Veasey

Inventor： David L. Veasey

IPC: G01J400

CPC classification number: G02F1/0136 ,  G01J4/04 ,  G02B6/12004 ,  G02B6/126

Abstract: Methods and apparatus for optical Stokes polarimetry are provided. A polarimeter according to this invention includes a rotatable waveplate, including a variable birefringent material, and a polarizer optically downstream from the waveplate. The polarimeter can be integrated into a guided wave structure.

Abstract translation: 提供了光学斯托克斯偏振法的方法和装置。 根据本发明的偏振计包括可旋转波片，包括可变双折射材料，以及在波片上光学下游的偏振片。 旋光仪可以集成到导波结构中。

公开(公告)号：US06753961B1

公开(公告)日：2004-06-22

申请号：US09956356

申请日：2001-09-18

Applicant: Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke ,  Abdurrahman Sezginer

Inventor： Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke ,  Abdurrahman Sezginer

IPC: G01J400

CPC classification number: G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/274 ,  G01N2021/213

Abstract: A spectroscopic ellipsometer having a multiwavelength light source, spectrometer (or wavelength-scanning monochromator and photodetector), a polarizer and polarization analyzer, and one or more objectives in the illumination and collection light paths, further comprises a stationary polarization modulator that modulates the light polarization versus wavelength. Modulator can be an optically active crystal rotating the linear polarization plane by a different angle for each wavelength or a non-achromatic waveplate retarder that varies the relative phase delay of the polarization components periodically over wavelength. The measured spectrum can be used to characterize selected features or parameters of a sample, e.g. by comparison with one or more theoretical spectra.

Abstract translation: 具有多波长光源，光谱仪（或波长扫描单色仪和光电检测器），偏振器和偏振分析器以及照明和采集光路中的一个或多个目标的光谱椭偏仪还包括调制光偏振的固定偏振调制器 对波长。 调制器可以是旋转线性偏振平面对于每个波长旋转不同角度的光学活性晶体，或者是在波长周期性地改变偏振分量的相对相位延迟的非消色差波片延迟器。 测量的光谱可用于表征所选择的特征或样品的参数，例如。 通过与一个或多个理论光谱进行比较。

公开(公告)号：US06747739B2

公开(公告)日：2004-06-08

申请号：US09748004

申请日：2000-12-27

Applicant: Yasumasa Takao ,  Mutsuo Sando ,  Makio Naito ,  Keizo Uematsu

Inventor： Yasumasa Takao ,  Mutsuo Sando ,  Makio Naito ,  Keizo Uematsu

IPC: G01J400

CPC classification number: G01N21/23

Abstract: This invention relates to a method of measuring the internal structure (packing structure or dispersion condition of particulate material) of a composite filled with particles having an irregular matrix by observations based on its optical anisotropy, in which the internal structure (packing structure or dispersion condition of particulate material) of the composite obtained by mixing particulate material as raw material with a liquid material is made visible by utilizing the photoelasticity based on local rearrangement of liquid material molecules or difference of refractive indices of the particulate material and liquid material, and the structure thereof are observed, and an evaluation device using this principle of measurement.

Abstract translation: 本发明涉及一种通过基于其光学各向异性观察来测量填充有具有不规则矩阵的颗粒的复合材料的内部结构（填料结构或颗粒材料的分散状态）的方法，其中内部结构（填料结构或分散条件 通过利用基于液体材料分子的局部重排或颗粒材料和液体材料的折射率差异的光弹性而将通过将颗粒材料作为原料与液体材料混合而获得的复合材料获得的复合材料可见， ，以及使用该测量原理的评价装置。

公开(公告)号：US06704106B2

公开(公告)日：2004-03-09

申请号：US10160808

申请日：2002-05-31

Applicant: Michael Anderson ,  Qienyuan Zhou ,  William Papworth

Inventor： Michael Anderson ,  Qienyuan Zhou ,  William Papworth

IPC: G01J400

CPC classification number: A61B3/1005 ,  A61B3/14 ,  G01J4/04

Abstract: A polarimeter system that averages multiple retardance measurement samples to cancel the effects of system birefringence in the diagnostic path. The retardance measurement errors arising from system birefringence have a symmetry that repeats over each complete cycle of optical signal rotation cycle. This symmetry is such that averaging the four retardance measurements collected over one complete rotation cycle cancels the effects of system birefringence, leaving a mean retardance measurement free of residual polarization bias. Apparatus is provided for determining the birefringence, thickness, and fiber orientation of the nerve fiber layer at the fundus of the eye by measuring the polarization bias induced in a return beam of polarized light that is reflected at the ocular fundus from an incident beam of a known polarization state. A corneal polarization compensator cancels the birefringent effects of the cornea and other portions of the eye anterior to the fundus.

Abstract translation: 平衡多个延迟测量样本以消除诊断路径中系统双折射的影响的偏振计系统。 由系统双折射引起的延迟测量误差具有在光信号旋转周期的每个完整周期上重复的对称性。 这种对称性使得在一个完整的旋转周期上收集的四个延迟测量的平均取消了系统双折射的影响，留下了没有残余偏振偏移的平均延迟测​​量。 提供了一种设备，用于通过测量在从眼睛的眼底反射的偏振光的反射光束中感应的偏振偏移，从眼睛的眼睛的入射光束来测定神经纤维层在眼底的双折射，厚度和纤维取向 已知的极化状态。 角膜偏振补偿器抵消了角膜和眼底前部眼部的双折射效应。

公开(公告)号：US06693711B1

公开(公告)日：2004-02-17

申请号：US09691346

申请日：2000-10-18

Applicant: James R. Leger ,  Qiwen Zhan

Inventor： James R. Leger ,  Qiwen Zhan

IPC: G01J400

CPC classification number: G01N21/211 ,  G01J4/00

Abstract: An ellipsometer and ellipsometry method uses radial symmetry. For example, circularly polarized light may be focused to a spot on a sample using an objective lens and reflected therefrom. A radially symmetric ellipsometric signal based on the reflected light and representative of at least one characteristic of the sample may be attained using a radially symmetric analyzer apparatus, e.g., a pure Polarization rotator such as two half wave plates and a radially symmetric analyzer such as a birefringent lens.

Abstract translation: 椭偏仪和椭圆偏振法使用径向对称。 例如，可以使用物镜将圆偏振光聚焦到样品上的斑点并从其反射。 基于反射光并且代表样品的至少一个特征的径向对称椭偏信号可以使用径向对称的分析仪装置来获得，例如，诸如两个半波片的纯偏振旋转器和诸如 双折射透镜