Load cell having a computation unit which computes displacement amount of the diffraction grating

    公开(公告)号:US10520376B2

    公开(公告)日:2019-12-31

    申请号:US15787429

    申请日:2017-10-18

    摘要: In one aspect, a load cell includes an elastic body, first optical unit, second optical unit, detector, and computation unit. The first optical unit has a light source, a first diffraction grating on which light from the light source is incident, and a light-receiving unit. The first optical unit is fixed to a first end portion of the elastic body and arranged within a hollow portion of the elastic body. The second optical unit has a second diffraction grating on which diffracted light from the first diffraction grating is incident to generate interference light. The second optical unit is fixed to a second end portion of the elastic body and arranged within the hollow portion. The detector detects the interference light. The computation unit computes a relative displacement amount of the second diffraction grating relative to the first diffraction grating on the basis of a signal obtained by the detector.

    Determining an equivalent mechanical load
    68.
    发明授权
    Determining an equivalent mechanical load 有权
    确定等效的机械负载

    公开(公告)号:US09310801B2

    公开(公告)日:2016-04-12

    申请号:US13263893

    申请日:2009-06-29

    申请人: Ib Frydendal

    发明人: Ib Frydendal

    CPC分类号: G05B23/0221

    摘要: A method for determining an equivalent mechanical load of a component includes a dynamic mechanical loading. A first measurement value of the mechanical load of the component is measured and compared to a first reference value. Further, at least one count value representing the number of load half-cycles of the component is updated based upon the result of comparing, wherein the load half-cycles correspond to a predetermined range of mechanical loads and occur within a time period prior to the measurement of the first measurement value. A first equivalent mechanical load of the component is determined based on the first updated count value. It is further described a program element and a computer-readable medium having stored a program for controlling the described equivalent mechanical load determining method.

    摘要翻译: 用于确定组件的等效机械负载的方法包括动态机械负载。 测量部件的机械载荷的第一测量值并将其与第一参考值进行比较。 此外,基于比较的结果,更新表示部件的负载半周期数的至少一个计数值,其中负载半周期对应于机械负载的预定范围,并且在 测量第一个测量值。 基于第一更新计数值确定部件的第一等效机械负载。 进一步描述了程序元件和计算机可读介质,其存储有用于控制所述等效机械负载确定方法的程序。

    Force feedback leveling of tip arrays for nanolithography
    70.
    发明授权
    Force feedback leveling of tip arrays for nanolithography 有权
    用于纳米光刻的尖端阵列的力反馈调平

    公开(公告)号:US08745761B2

    公开(公告)日:2014-06-03

    申请号:US12960439

    申请日:2010-12-03

    IPC分类号: G01L1/06 G01N13/16 B05D3/12

    CPC分类号: G03F7/0002

    摘要: A method of leveling a polymer pen array includes contacting a pen array with a surface and measuring a total force exerted on the surface by the pen array, the pen array being disposed at a first angle with respect to a first axis of the surface and a second angle with respect to a second axis of the surface; tilting one or both of the pen array and the surface to vary the first and second angles of the pen array with respect to the surface; measuring the total force exerted by the tilted pen array on the surface; and repeating the tilting and measuring steps until a global maximum of the total force exerted on the surface by the pen array is measured, thereby determining first and second angles which correspond to a leveled position of the pen array with respect to the surface.

    摘要翻译: 调整聚合物笔阵列的方法包括使笔阵列与表面接触并且通过笔阵列测量施加在表面上的总力,笔阵列相对于表面的第一轴线以第一角度设置, 相对于表面的第二轴线的第二角度; 倾斜笔阵列和表面中的一个或两个以改变笔阵列相对于表面的第一和第二角度; 测量由倾斜笔阵列施加在表面上的总力; 并且重复倾斜和​​测量步骤,直到测量由笔阵列施加在表面上的总力的全局最大值,从而确定对应于笔阵列相对于表面的调平位置的第一和第二角度。