摘要:
It is intended to provide a vacuum pump so that without upsizing the vacuum pump, noise and vibration are reduced, heat dissipation property is secured, and the casing is downsized. Therefore, at least one turning part is provided in an exhausting path formed in a casing body. The casing body is formed of a material whose thermal conductivity is higher than that of a rotor and vanes, and a cylinder part where the vanes slide is press fitted in the casing body.
摘要:
A coating equipment for composite membrane without diffusion pump and its thickness gauge for both thick and thin coatings comprises a coating equipment for composite membrane without diffusion pump and a thickness gauge for both thick and thin coatings. A vacuum pump system of the coating equipment for composite membrane without diffusion pump is a roots-type pump system. Compared to conventional diffusion pumps, roots-type pump have advantages of low energy consumption, stable performance, good vacuum-pumping effect, short starting time, etc.
摘要:
Provided is a coupling structure for vacuum exhaust devices each including a pump chamber and a casing that demarcates the pump chamber. The coupling structure includes a first end surface formed on a first side of the casing, and a second end surface formed on the second side of the casing, the second side being the opposite side of the first side. The casing of a first vacuum exhaust device and the casing of a second vacuum exhaust device among a plurality of vacuum exhaust devices are arranged to be directly superposed on each other such that the first end surface provided to the first vacuum exhaust device and the second end surface provided to the second vacuum exhaust device come into contact with each other. By fastening the first end surface and the second end surface, the first vacuum exhaust device and the second vacuum exhaust device are connected to each other such that gas can flow between the casing of the first vacuum exhaust device and the casing of the second vacuum exhaust device.
摘要:
It is intended to provide a vacuum pump so that without upsizing the vacuum pump, noise and vibration are reduced, heat dissipation property is secured, and the casing is downsized. Therefore, at least one turning part is provided in an exhausting path formed in a casing body. The casing body is formed of a material whose thermal conductivity is higher than that of a rotor and vanes, and a cylinder part where the vanes slide is press fitted in the casing body.
摘要:
The invention relates to an electric motor-driven motor-vehicle vacuum pump (1), having a drive shaft (3) which has, in particular, two bearings and extends with a shaft stub (5; 35; 45) in a rotor (8) which is connected fixedly to the shaft stub so as to rotate with it. In the rotor, the shaft stub has a centring region (26, 36; 46) which serves to centre the rotor, without guiding the rotor in the axial direction.
摘要:
The disclosure generally relates to pump assembly that includes a rotary vane vacuum pump. The pump assembly is controlled using a controller and may be moved through manipulation of a robotic arm segment of the pump assembly and a reel and cable segment of the pump assembly. The vacuum pump includes a motor and rotor each offset from the center axis of the body of the vacuum pump. Vanes that are longer than the diameter of the rotor slide within cavities of the rotor and, as the rotor turns, create a vacuum in the vacuum generating chamber of the pump. A bypass groove on the rotor limits thermal expansion and a biasing spring maintains a critical distance between the rotor and an air intake plate to maintain proper vacuum in the vacuum generating chamber.
摘要:
A pair of Northey rotors for a vacuum pump, in which each rotor comprises two opposing, substantially parallel faces, and a peripheral surface located between the opposing faces. In order to reduce damage caused by pumping a gas stream containing liquid or solid particulates, a plurality of grooves is located on the peripheral surface for accommodating the particulates.
摘要:
A multi-stage vacuum pump of the dry pump type is disclosed. The multi-stage vacuum pump includes a plurality of pumping stages each respectively having an inlet and an outlet, the pumping stages being mounted in series between a suction port and a discharge port of the vacuum pump, characterized in that the vacuum pump also includes at least one valve configured to dump pressure from a pumping stage, said valve being arranged in the upper part of the vacuum pump, on the same side as the inlet of the pumping stage.
摘要:
A vacuum pump (10) has a pump casing (54) including pump chambers (50a-50f) held in fluid communication with each other and arrayed in a longitudinal direction thereof, an inlet port (52a) and an outlet port (52b), a rotational shaft (58) rotatably supported at opposite ends thereof and extending in the longitudinal direction of the pump casing (54), and rotors (60a-60f) housed in the pump chambers (50a-50f) and coupled to the rotational shaft (58). The pump casing (54) includes a first thermally conductive member (72) extending parallel to the rotational shafts (58) substantially the full length of the pump casing (54) in the longitudinal direction thereof, and a second thermally conductive member (74) positioned near an end of the first thermally conductive member (72) at the outlet port (52b) and extending in a transverse direction of the pump casing (54).
摘要:
A method of pumping a gas stream containing a condensable species and a light gas and an apparatus therefore, the method comprising the steps of conveying the gas stream to a multistage vacuum pump comprising an inlet stage and an exhaust stage downstream from the inlet stage, and adding to the gas stream upstream of or at the inlet stage a purge gas heavier than said light gas to both inhibit migration of the light gas from the exhaust stage towards the inlet stage and to inhibit condensation of the condensable species within the pump.