公开(公告)号：US20020190335A1

公开(公告)日：2002-12-19

申请号：US09884844

申请日：2001-06-19

Applicant: AXSUN Technologies, Inc.

Inventor： Robert L. Payer

IPC: H01L023/495 ,  H01L023/52 ,  H01L023/02

CPC classification number: G02B6/4201 ,  G02B6/4248 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optoelectronic hermetic package comprises a frame defining a hermetic boundary and an electrical feedthrough assembly on the frame. This electrical feedthrough assembly provides electrical connections between signal wire bond areas within the hermetic boundary to electrical contact areas outside the hermetic boundary. Additionally, according to the invention, ground wire bond pad areas are also provided within the hermetic boundary, the ground wire bond pad areas being electrically connected to each other and/or the frame or other ground plane.

Abstract translation: 光电密封封装包括限定密封边界的框架和框架上的电馈通组件。 该电馈通组件提供密封边界内的信号线接合区域与密封边界外部的电接触区域之间的电连接。 此外，根据本发明，接地线接合焊盘区域也设置在密封边界内，地线接合焊盘区域彼此电连接和/或框架或其它接地平面。

公开(公告)号：US20020167713A1

公开(公告)日：2002-11-14

申请号：US09850720

申请日：2001-05-08

Applicant: AXSUN Technologies, Inc.

Inventor： Minh Van Le ,  Jo-Ey Wong

IPC: G02B026/00

CPC classification number: G02B26/02 ,  G02B26/001

Abstract: An electrostatically operated microelectromechanical system comprises a movable and a stationary structure, with a discharge system that is activated upon pull-in of the movable structure to discharge the voltage across an electrostatic cavity to thereby prevent stiction adhesion of the movable structure to the stationary structure. Specifically, a membrane release structure comprises a mirror optical element. The membrane is separated from a stationary support by an electrostatic cavity. The discharge switch comprises a membrane conductor pad on the membrane and a support conductor pad on the support that conducts a current upon activation of the discharge switch to discharge the electrostatic voltage. Preferably, these pads are metal.

Abstract translation: 静电操作的微机电系统包括可移动和静止结构，其中放电系统在可移动结构的拉入时被激活，以将静电空腔上的电压放电，从而防止可移动结构到固定结构的粘结。 具体地，膜释放结构包括镜面光学元件。 膜通过静电腔与固定支架分离。 放电开关包括膜上的膜导体焊盘和支撑体上的支撑导体焊盘，其在激活放电开关时传导电流以释放静电电压。 优选地，这些垫是金属的。

公开(公告)号：US20020135894A1

公开(公告)日：2002-09-26

申请号：US10064081

申请日：2002-06-10

Applicant: Axsun Technologies, Inc.

Inventor： Mona Masghati ,  Livia M. Racz ,  Robert L. Payer ,  Dale C. Flanders

IPC: G02B007/02

CPC classification number: G02B6/32 ,  G02B6/327 ,  G02B6/3636 ,  G02B6/3644 ,  G02B6/3656 ,  G02B6/3692 ,  G02B6/4225 ,  G02B6/4226 ,  G02B6/4237 ,  G02B6/4238 ,  G02B6/4244 ,  G02B6/4249 ,  G02B7/003 ,  G02B27/62

Abstract: An optical component is adapted for pick-and-place-style installation on an optical submount or bench and compatible with a chuck of a bonder that picks-up the optical component, places it on the optical bench, and then typically solder bonds the optical component to the bench. In the current implementation, this optical component comprises an optical element, such as an optical fiber, lens, or MOEMS device, that is attached to a plastically deformable mounting structure. The optical component has a bench-attach surface that is used to bond the optical component to an optical bench. Further, the optical component has a bonder chuck engagement surface to which a bonder chuck attaches to manipulate the optical component, such as install it, on the optical bench.

公开(公告)号：US20020048839A1

公开(公告)日：2002-04-25

申请号：US09954861

申请日：2001-09-18

Applicant: AXSUN Technologies, Inc.

Inventor： Michael F. Miller ,  Minh Van Le ,  Christopher C. Cook ,  Dale C. Flanders ,  Steven F. Nagle

IPC: H01L021/00

CPC classification number: B81B3/0083 ,  B81B2201/042 ,  B81B2201/047 ,  B81C1/0038 ,  B81C2201/0159 ,  B81C2201/053 ,  B81C2201/056 ,  G02B26/001

Abstract: A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress. Competing techniques such as shadow masking yield lower quality features and are difficult to align. Further, the minimum feature size that can be obtained with shadow masks is limited to null100 nullm, depending on the coating system geometry, and they require hard contact with the surface of the wafer, which can lead to damage and/or particulate contamination.

Abstract translation: 公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。 电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。 在一个实例中，使用掩模层作为保护层来蚀刻涂层。 在另一示例中，示出了剥离过程。 光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。 诸如阴影掩蔽的竞争技术产生较低的质量特征并且难以对准。 此外，根据涂层系统的几何形状，使用荫罩可获得的最小特征尺寸限制在〜100μm，并且它们需要与晶片的表面硬接触，这可能导致损坏和/或微粒污染。