摘要:
A chemical mechanical polishing pad of the present invention has the following two groups of grooves on the polishing surface: (i) a group of first grooves intersect a single virtual straight line extending from the center toward the periphery of the polishing surface and have a land ratio represented by the following equation of 6 to 30: Land ratio=(P−W)÷W (where P is the distance between adjacent intersections between the virtual straight line and the first grooves, and W is the width of the first grooves); and (ii) a group of second grooves extend from the center portion toward the peripheral portion of the polishing surface and consist of second grooves which are in contact with one another in the area of the center portion and second grooves which are not in contact with any other second grooves in the areas of the center portion. The chemical mechanical polishing pad of the present invention has a high polishing rate and excellent in-plane uniformity in the amount of polishing of the surface to be polished even when the amount of an aqueous dispersion for chemical mechanical polishing is made small.
摘要:
By a simple operation, data held in a portable information terminal can be transmitted to a desired apparatus and processed appropriately. A receiving apparatus 410 includes a wireless LAN communication unit 420 and an infrared receiving unit 82, and processing units 422 and 424 responsive to reception of data by the infrared receiving unit 82 from the same apparatus of the data received by wireless LAN communication unit 420, for performing a process determined by the data received by the infrared receiving unit 82 on the data received by the wireless LAN communication unit 420. Transmission of data as the object of processing and the process thereon can be designated by the data transmitting side, without requiring the side of receiving apparatus 410 to designate the method of processing.
摘要:
In throttle control, a throttle opening is set with sufficient control accuracy in accordance with the operating state of an engine despite variations in a throttle body and various kinds of sensors. A target effective opening area is calculated from a target amount of intake air, an atmospheric pressure, an intake pipe internal pressure and an intake air temperature by using a flow rate formula for a throttle type flow meter. A target throttle opening is calculated from a correlation map. An actual effective opening area is calculated from the amount of intake air, the atmospheric pressure, the intake pipe internal pressure, and the intake air temperature by using the above-mentioned flow rate formula, and a learning throttle opening is calculated from the correlation map. The target throttle opening is corrected by a throttle opening learning value calculated from a deviation between the target throttle opening and the learning throttle opening.
摘要:
Small-size, small-height fluid dynamic-pressure bearing device that causes a low shaft loss and is less prone to troubles such as shortage and leakage of lubricating liquid. A thrust dynamic-pressure bearing is formed at an inner position and a region having a slightly-widened gap is provided outside of the thrust dynamic-pressure bearing to retain the lubricating liquid therein. Further, an oil circulating path is communicated with the region having a slightly widened gap. The gap of this region is set to be greater than the gap at the thrust dynamic-pressure bearing portion by the value of the depth of dynamic-pressure generating grooves. The region having a widened gap may be provided with rows of grooves for stirring-up lubricating oil towards the center.
摘要:
A chemical mechanical polishing pad of the present invention has the following two groups of grooves on the polishing surface: (i) a group of first grooves intersect a single virtual straight light extending from the center toward the periphery of the polishing surface and have a land ratio represented by the following equation of 6 to 30: Land ratio=(P−W)÷W (P is the distance between adjacent intersections between the virtual straight line and the first grooves, and W is the width of the first grooves); and (ii) a group of second grooves extend from the center portion toward the peripheral portion of the polishing surface and consist of second grooves which are in contact with one another in the area of the center portion and second grooves which are not in contact with any other second grooves in the area of the center portion. The chemical mechanical polishing pad of the present invention has a high polishing rate and excellent in-plane uniformity in the amount of polishing of the surface to be polished even when the amount of an aqueous dispersion for chemical mechanical polishing is made small.
摘要翻译:本发明的化学机械抛光垫在研磨面上具有以下两组凹槽:(i)一组第一凹槽与从抛光表面的中心向周边延伸的单个虚拟直光相交, 比率由下式6〜30表示:<?in-line-formula description =“In-line formula”end =“lead”?> Land ratio =(PW)/ W <?in-line-formula description = (“P”是虚拟直线与第一槽之间的相邻交点之间的距离,W是第一槽的宽度)。 和(ii)一组第二凹槽从研磨表面的中心部分朝向周边部分延伸,并且包括在中心部分的区域中彼此接触的第二凹槽和不与第二凹槽接触的第二凹槽 在中心部分的区域中的任何其它第二凹槽。 本发明的化学机械抛光垫即使在化学机械研磨用水分散体的量少的情况下,抛光速度高,抛光面抛光量也具有优异的面内均匀性。
摘要:
The present invention relates to a method of manufacturing a chemical mechanical polishing pad which provides a chemical mechanical polishing pad which fully suppresses the occurrence of a scratch on the polished surface and has an excellent polishing rate. The method comprising either one of a group of steps (A) and a group of steps (B), the group of steps (A) including (A1) the step of preparing a composition for forming a chemical mechanical polishing pad; (A2) the step of molding the composition for forming a chemical mechanical polishing pad into a pad-like form; (A3) the step of mounting the pad-like form on the round table of a cutting machine having at least a milling unit equipped with a milling cutter, a drive unit capable of angle indexing and positioning and a round table journaled by the drive unit; (A4) the step of forming the second group of grooves with the milling cutter; and (A5) the step of forming the first group of grooves, and the group of steps (B) including (B1) the step of preparing a composition for forming a chemical mechanical polishing pad; (B2) the step of molding the composition for forming a chemical mechanical polishing pad into a pad-like form having the second group of grooves by using a metal mold having projections corresponding to the shapes of the second group of grooves; and (B3) the step of forming the first group of grooves.
摘要:
In an electronic apparatus having a touch panel, four fixing cushions are fixed at four corners of a rear surface of the touch panel. The fixing cushions are further fixed to a fixing frame to support the touch panel against to the fixing frame. Pair of vibrating elements are fixed to the rear surface of the touch panel along edges, which are parallel to each other, of the touch panel. The vibrating elements elastically bend the touch panel to cause flexural vibration to the touch panel. The fixing cushions have softness to allow the touch panel to vibrate and hardness to serve as fulcrums of the flexural vibration of the touch panel.
摘要:
The present invention has its main object in providing a bearing device of a motor superior in its resistance to impact and sliding performance. Therefore, according to the present invention, a shaft and a sleeve into which the shaft is inserted are formed from stainless steel, and a plating layer formed by means of an electroless nickel plating so as to have a phosphorous concentration of at least 6% and at most 12% and subjected to a precipitation hardening treatment in an atmosphere of at least 500° C. and at most 700° C. is provided on a surface of the shaft. Thereby, the sliding performance of the bearing device having a superior resistance to impact can be improved.
摘要:
Disclosed is a spindle motor comprising: a housing, a hub member which is rotatable with respect to the housing and to which a recording member is attached, and a bearing arranged between the housing and the hub member and having an outer member which is rotatably attached thereto through the intermediation of a plurality of spherical members, the hub member being fixed to the above-mentioned outer member by press fitting or shrinkage fitting, and the inner periphery of the hub member being equipped with an annular recess in correspondence with a ball lodging grooved formed on the outer member.
摘要:
A content distribution system that is supplied with power from a plurality of power sources having different environmental loads and that distributes content to a content playback apparatus connected via a communication circuit, the content distribution system distributing content with respect to a content distribution request from the content playback apparatus with a service quality that is determined so as to suppress the environmental load by the power supplied from the plurality of power sources to a predetermined environmental load.