Method for manufacturing semiconductor device
    71.
    发明申请
    Method for manufacturing semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US20050255709A1

    公开(公告)日:2005-11-17

    申请号:US11125602

    申请日:2005-05-09

    Applicant: Jae-Suk Lee

    Inventor: Jae-Suk Lee

    CPC classification number: H01L21/76825 H01L21/76801

    Abstract: High quality dielectric layers may be achieved without introducing excessive impurities when a semiconductor device is manufactured by a method that includes forming a lower wire layer on a structure above a semiconductor substrate, forming a silicon rich oxide layer having a refractive index of 0.45-1.55 on the lower wire layer and the structure, implanting carbon and oxygen (e.g., CO2) into the silicon rich oxide (SRO) layer, and forming an organosilicate glass layer by heat-treating the implanted SRO layer.

    Abstract translation: 当半导体器件通过包括在半导体衬底上的结构上形成下导线层的方法制造半导体器件时,可以实现高质量的电介质层,形成折射率为0.45-1.55的富硅氧化物层在 下层导线层和结构,将碳和氧(例如CO 2)注入富硅氧化物(SRO)层中,并通过热处理植入的SRO层形成有机硅酸盐玻璃层。

    Siloxane monomer containing trifluorovinylether group and sol-gel hybrid polymer prepared by using the same
    72.
    发明申请
    Siloxane monomer containing trifluorovinylether group and sol-gel hybrid polymer prepared by using the same 失效
    含有三氟乙烯基醚的硅氧烷单体和使用它们制备的溶胶 - 凝胶杂化聚合物

    公开(公告)号:US20050107561A1

    公开(公告)日:2005-05-19

    申请号:US10881557

    申请日:2004-06-30

    CPC classification number: C08G77/24 C07F7/1804

    Abstract: The present invention relates to a siloxane monomer containing a trifluorovinylether group and a sol-gel hybrid polymer prepared using the monomer, more particularly to siloxane monomer with novel structure prepared by reacting alkoxychlorosilane with a Grignard reagent containing a trifluorovinylether (—OC2F3) group, a method of preparing the same and a sol-gel hybrid polymer containing a perfluorocyclobutane (PFCB) group prepared from sol-gel reaction using said siloxane monomer containing a trifluorovinylether group.

    Abstract translation: 本发明涉及含有三氟乙烯醚基团的硅氧烷单体和使用该单体制备的溶胶 - 凝胶杂化聚合物,更具体地说,涉及通过使烷氧基氯硅烷与含有三氟乙烯醚(-OC 2)的格利雅试剂 3,根据权利要求1所述的方法,其制备方法和含有由溶胶 - 凝胶反应制备的全氟环丁烷(PFCB)基团的溶胶 - 凝胶杂化聚合物,所述硅氧烷单体含有三氟乙烯基醚基团 。

    Method for formation of copper diffusion barrier film using aluminum
    73.
    发明授权
    Method for formation of copper diffusion barrier film using aluminum 有权
    使用铝形成铜扩散阻挡膜的方法

    公开(公告)号:US06790767B2

    公开(公告)日:2004-09-14

    申请号:US10306491

    申请日:2002-11-27

    Applicant: Jae Suk Lee

    Inventor: Jae Suk Lee

    Abstract: A method for formation of a copper diffusion barrier film using aluminum is disclosed. In the method, thin aluminum (Al) film is deposited on a dielectric, and a surface of the deposited aluminum film is plasma treated with NH3, thereby transforming the surface of the plasma treated aluminum film into a nitride film basically composed of aluminum nitride (AlxNy), and an aluminum film is deposited on the surface of the transformed aluminum nitride film, and copper is deposited on the surface of the deposited aluminum film. Therefore, because the diffusion of copper is suppressed, the problem that leakages between metal lines increase as pitches between the metals decrease due to high integration of parts of semiconductor can be settled.

    Abstract translation: 公开了一种使用铝形成铜扩散阻挡膜的方法。 在该方法中,在电介质上沉积薄铝(Al)膜,并且用NH 3等离子体处理沉积的铝膜的表面,从而将等离子体处理的铝膜的表面转化为基本上由氮化铝构成的氮化物膜 Al x N y),并且在转化的氮化铝膜的表面上沉积铝膜,并且在沉积的铝膜的表面上沉积铜。 因此,由于铜的扩散被抑制,所以能够解决金属线之间的泄漏由于半导体部件的高度集成而使金属之间的间距减小的问题。

    Planarization method for semiconductor device
    74.
    发明授权
    Planarization method for semiconductor device 失效
    半导体器件的平面化方法

    公开(公告)号:US06348415B1

    公开(公告)日:2002-02-19

    申请号:US09472556

    申请日:1999-12-27

    CPC classification number: H01L21/31053 H01L21/3143

    Abstract: This invention discloses a planarization method for semiconductor device. The planarization method includes the steps of: providing a semiconductor substrate in which metal patterns are formed with various pattern densities; depositing a porous oxide layer over the semiconductor substrate so as to cover the metal patterns; plasma-treating surface of the porous oxide layer; and polishing the plasma-treated porous oxide layer by chemical mechanical polishing.

    Abstract translation: 本发明公开了一种半导体器件的平面化方法。 平面化方法包括以下步骤:提供其中以各种图案密度形成金属图案的半导体衬底; 在所述半导体衬底上沉积多孔氧化物层以覆盖所述金属图案; 多孔氧化物层的等离子体处理表面; 并通过化学机械抛光抛光等离子体处理的多孔氧化物层。

    Blue-light-emitting iridium complex, iridium complex monomer, phosphorus polymer, and organic electroluminescence device using same
    77.
    发明授权
    Blue-light-emitting iridium complex, iridium complex monomer, phosphorus polymer, and organic electroluminescence device using same 有权
    蓝光发射铱络合物,铱络合物单体,磷聚合物和使用其的有机电致发光器件

    公开(公告)号:US09150601B2

    公开(公告)日:2015-10-06

    申请号:US13389697

    申请日:2010-08-10

    Abstract: Provided are a blue-light-emitting iridium complex, an iridium complex monomer, a phosphorescent polymer, and an organic electroluminescent device using same. The blue-light-emitting iridium complex contains a ligand having a low electron density structure, such as triazole or tetrazole. The iridium complex monomer containing a ligand having a polymerizable vinyl group produces a blue phosphorescent polymer through the polymerization with carbazole derivatives. The organic electroluminescent device comprises a first electrode, a second electrode, and a light-emitting layer interposed between the first electrode and the second electrode, wherein the light-emitting layer contains the above-described iridium complex or polymer containing the iridium complex.

    Abstract translation: 提供蓝色发光铱络合物,铱络合物单体,磷光聚合物和使用其的有机电致发光器件。 蓝色发光铱络合物包含具有低电子密度结构的配体,例如三唑或四唑。 含有可聚合乙烯基的配体的铱络合物单体通过与咔唑衍生物的聚合产生蓝色磷光聚合物。 有机电致发光器件包括第一电极,第二电极和介于第一电极和第二电极之间的发光层,其中发光层含有上述铱络合物或含有铱络合物的聚合物。

    SULFONATED POLY(ARYLENE ETHER) COPOLYMER HAVING A CROSS-LINKABLE STRUCTURE, AND POLYELECTROLYTE MEMBRANE COMPRISING SAME
    79.
    发明申请
    SULFONATED POLY(ARYLENE ETHER) COPOLYMER HAVING A CROSS-LINKABLE STRUCTURE, AND POLYELECTROLYTE MEMBRANE COMPRISING SAME 审中-公开
    具有交联结构的磺化聚(亚乙基醚)共聚物和包含其的聚电解质膜

    公开(公告)号:US20130102740A1

    公开(公告)日:2013-04-25

    申请号:US13807455

    申请日:2011-07-13

    Abstract: Provided are a sulfonated poly(arylene ether) copolymer including a crosslinking structure and a polyelectrolyte membrane including the same. Particularly, a sulfonated poly(arylene ether) copolymer including a crosslinking structure in a polymer chain or at the terminal portion of the polymer chain, and a polyelectrolyte membrane including the same are provided. The polyelectrolyte membrane using the sulfonated poly(arylene ether) copolymer including the crosslinking structure, may have the same or better degree of a thermal stability, a mechanical stability, a chemical stability, a membrane forming capability, etc. than a commonly used polyelectrolyte membrane. In addition, the proton conductivity and the cell performance of the polyelectrolyte membrane may be remarkably improved than those of the commonly used polymer electrolyte. Further, the properties of the electrolyte membrane may be rarely changed, and a high measuring stability may be obtainable. The polyelectrolyte membrane may be used in a fuel cell or a secondary battery.

    Abstract translation: 提供包含交联结构的磺化聚(亚芳基醚)共聚物和包含其的聚电解质膜。 特别地,提供了在聚合物链或聚合物链的末端部分包含交联结构的磺化聚(亚芳基醚)共聚物和包含该聚合物的聚电解质膜。 使用包含交联结构的磺化聚(亚芳基醚)共聚物的聚电解质膜可以具有与常用的聚电解质膜相同或更好的热稳定性,机械稳定性,化学稳定性,成膜能力等。 。 此外,与常用聚合物电解质相比,聚电解质膜的质子传导性和电池性能可显着提高。 此外,电解质膜的性质可能很少改变,并且可以获得高的测量稳定性。 聚电解质膜可以用于燃料电池或二次电池。

    Anionic polymerization method for styrene derivative containing pyridine as functional group
    80.
    发明授权
    Anionic polymerization method for styrene derivative containing pyridine as functional group 失效
    含吡啶作为官能团的苯乙烯衍生物的阴离子聚合方法

    公开(公告)号:US08110641B2

    公开(公告)日:2012-02-07

    申请号:US12335693

    申请日:2008-12-16

    Abstract: An anionic polymerization method for styrene derivative containing pyridine as functional group is provided. The method includes forming a complex of (vinylphenyl)-pyridine and lithium chloride and performing anionic polymerization. Accordingly, a polymer of styrene derivative containing pyridine can be obtained. The polymer has excellent optical properties, and its molecular weight and molecular weight distribution can be controlled.

    Abstract translation: 提供了含吡啶作为官能团的苯乙烯衍生物的阴离子聚合方法。 该方法包括形成(乙烯基苯基) - 吡啶和氯化锂的络合物并进行阴离子聚合。 因此,可以得到含有吡啶的苯乙烯衍生物的聚合物。 聚合物具有优异的光学性能,并且可以控制其分子量和分子量分布。

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