摘要:
An invention being applied is a defect detecting apparatus that has: an illuminating optical system with a laser light source for irradiating a sample on whose surface a pattern is formed with light; a detecting optical system with a sensor for detecting light generated from the sample illuminated by the illuminating optical system; and a signal processing unit that extracts a defect from an image based on the light detected by the detecting optical system, in which an amplification rate of the sensor is dynamically changed during a time when the light is detected by the detecting optical system.
摘要:
The present invention prevents the corrosion of a printed circuit board which is connected to a lower side of a display panel in a liquid crystal display panel. In a display device which includes a display panel and a frame member which supports an outer peripheral portion of a display screen of a display panel, a water absorbing member is adhered to a surface of the frame member which faces the display panel in an opposed manner.
摘要:
The present invention provides an apparatus and a method for reviewing a defect with high throughput by detecting the defect to be reviewed with high sensitivity, comprising: an optical microscope; a correction means; and a scanning electron microscope which reviews the existing defect on the sample; wherein the optical microscope has: an optical height detection system which optically detects a vertical position of an upper surface of the sample placed on the stage; an illumination optical system which illuminates the defect with light; an image detection optical system which converges and detects reflected light or scattered light generated from the defect illuminated by the illumination optical system to obtain an image signal; and a focus adjusting means which adjusts a focus position of the optical microscope based on the vertical position of the upper surface of the sample, which is detected by the optical height detection system.
摘要:
A method for detecting defects on an object includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the object and white-color, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the object and passed through a filter which blocks diffraction light resulting from patterns formed on the object, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the object, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.
摘要:
The present invention prevents the corrosion of a printed circuit board which is connected to a lower side of a display panel in a liquid crystal display panel. In a display device which includes a display panel and a frame member which supports an outer peripheral portion of a display screen of a display panel, a water absorbing member is adhered to a surface of the frame member which faces the display panel in an opposed manner.
摘要:
The number of substrates held by a substrate holder is increased compared with conventional techniques while uniformity of a heat treatment is ensured. The substrate holder holds a plurality of substrates at predetermined vertical intervals. The substrate holder is carried into a heat treating furnace. A predetermined heat treatment is performed on the substrates. The substrate holder has two holder constituting bodies. Each of the holder constituting bodies has a plurality of columns and substrate holding sections. The columns are arranged on the circumference of the same imaginary circle. The substrate holding sections hold circumferential portions of the respective substrates. One of the holder constituting bodies holds the substrates under the condition that front surfaces of the substrates face upward, while the other of the holder constituting bodies holds the substrates under the condition that back surfaces of the substrates face upward. The substrate with the front surface facing upward and the substrate with the back surface facing upward are alternately arranged in a vertical direction. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other. A distance between one of a first pair of substrates that are vertically adjacent to each other and have the respective front surfaces facing each other and the other of the first pair of substrates is set to ensure uniformity of the treatment and larger than a distance between one of a second pair of substrates that are vertically adjacent to each other and have the respective back surfaces facing each other and the other of the second pair of substrates.
摘要:
A defect inspection apparatus includes an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, a first detection optical unit for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object, a second detection optical unit for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object, an image signal processing unit which processes a signal outputted from the first detection optical unit and a signal outputted from the second detection optical unit, and an output unit which outputs information processed by the image signal processing unit.
摘要:
The present invention prevents the corrosion of a printed circuit board which is connected to a lower side of a display panel in a liquid crystal display panel. In a display device which includes a display panel and a frame member which supports an outer peripheral portion of a display screen of a display panel, a water absorbing member is adhered to a surface of the frame member which faces the display panel in an opposed manner.
摘要:
A method for recording information on a rewritable recording medium includes recording first synchronizing signal information in a first synchronizing signal portion on the rewritable recording medium, recording second synchronizing signal information in a second synchronizing signal portion following the first synchronizing signal portion on the rewritable recording medium, recording data information in a data portion of the rewritable recording medium after the second synchronizing signal portion by forming marks in the data portion. The data information corresponds to both ends of each the marks. The marks and spaces between the marks are substantially randomly inverted each time the information is recorded and a length of the first synchronizing signal portion changes and a start position of the first synchronizing signal portion changes. A change of the start position of the first synchronizing signal portion is smaller than a change of the length of the first synchronizing signal portion.
摘要:
A method for recording information on a rewritable recording medium includes recording first synchronizing signal information in a first synchronizing signal portion on the rewritable recording medium, recording second synchronizing signal information in a second synchronizing signal portion following the first synchronizing signal portion on the rewritable recording medium, recording data information in a data portion of the rewritable recording medium after the second synchronizing signal portion by forming marks in the data portion. The data information corresponds to both ends of each the marks. The marks and spaces between the marks are substantially randomly inverted each time the information is recorded and a length of the first synchronizing signal portion changes and a start position of the first synchronizing signal portion changes. A change of the start position of the first synchronizing signal portion is smaller than a change of the length of the first synchronizing signal portion.