Method and apparatus for reviewing defect
    73.
    发明授权
    Method and apparatus for reviewing defect 有权
    检查缺陷的方法和装置

    公开(公告)号:US08045146B2

    公开(公告)日:2011-10-25

    申请号:US12141955

    申请日:2008-06-19

    IPC分类号: G01N21/00 G01J4/00

    摘要: The present invention provides an apparatus and a method for reviewing a defect with high throughput by detecting the defect to be reviewed with high sensitivity, comprising: an optical microscope; a correction means; and a scanning electron microscope which reviews the existing defect on the sample; wherein the optical microscope has: an optical height detection system which optically detects a vertical position of an upper surface of the sample placed on the stage; an illumination optical system which illuminates the defect with light; an image detection optical system which converges and detects reflected light or scattered light generated from the defect illuminated by the illumination optical system to obtain an image signal; and a focus adjusting means which adjusts a focus position of the optical microscope based on the vertical position of the upper surface of the sample, which is detected by the optical height detection system.

    摘要翻译: 本发明提供一种通过以高灵敏度检测待检查的缺陷来检查具有高通量的缺陷的装置和方法,包括:光学显微镜; 修正手段; 和扫描电子显微镜,用于回顾样品上现有的缺陷; 其中所述光学显微镜具有:光学高度检测系统,其光学地检测放置在所述台上的样品的上表面的垂直位置; 用光照亮缺陷的照明光学系统; 会聚和检测由照明光学系统照射的缺陷产生的反射光或散射光以获得图像信号的图像检测光学系统; 以及焦点调节装置,其基于由光学高度检测系统检测到的样本的上表面的垂直位置来调整光学显微镜的对焦位置。

    DISPLAY DEVICE WITH WATERPROOF SHEET
    75.
    发明申请
    DISPLAY DEVICE WITH WATERPROOF SHEET 有权
    带防水片的显示设备

    公开(公告)号:US20100149455A1

    公开(公告)日:2010-06-17

    申请号:US12708555

    申请日:2010-02-19

    IPC分类号: G02F1/1333

    摘要: The present invention prevents the corrosion of a printed circuit board which is connected to a lower side of a display panel in a liquid crystal display panel. In a display device which includes a display panel and a frame member which supports an outer peripheral portion of a display screen of a display panel, a water absorbing member is adhered to a surface of the frame member which faces the display panel in an opposed manner.

    摘要翻译: 本发明防止在液晶显示面板中连接到显示面板的下侧的印刷电路板的腐蚀。 在包括显示面板和支撑显示面板的显示屏的外周部的框架构件的显示装置中,吸水构件以相对的方式粘附在框架构件的面向显示面板的表面 。

    Heat treatment method and heat treatment apparatus
    76.
    发明申请
    Heat treatment method and heat treatment apparatus 有权
    热处理方法及热处理装置

    公开(公告)号:US20090081887A1

    公开(公告)日:2009-03-26

    申请号:US12232751

    申请日:2008-09-23

    IPC分类号: H01L21/26 C23C16/54

    摘要: The number of substrates held by a substrate holder is increased compared with conventional techniques while uniformity of a heat treatment is ensured. The substrate holder holds a plurality of substrates at predetermined vertical intervals. The substrate holder is carried into a heat treating furnace. A predetermined heat treatment is performed on the substrates. The substrate holder has two holder constituting bodies. Each of the holder constituting bodies has a plurality of columns and substrate holding sections. The columns are arranged on the circumference of the same imaginary circle. The substrate holding sections hold circumferential portions of the respective substrates. One of the holder constituting bodies holds the substrates under the condition that front surfaces of the substrates face upward, while the other of the holder constituting bodies holds the substrates under the condition that back surfaces of the substrates face upward. The substrate with the front surface facing upward and the substrate with the back surface facing upward are alternately arranged in a vertical direction. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other. A distance between one of a first pair of substrates that are vertically adjacent to each other and have the respective front surfaces facing each other and the other of the first pair of substrates is set to ensure uniformity of the treatment and larger than a distance between one of a second pair of substrates that are vertically adjacent to each other and have the respective back surfaces facing each other and the other of the second pair of substrates.

    摘要翻译: 与常规技术相比,由基板保持器保持的基板的数量增加,同时确保热处理的均匀性。 衬底保持器以预定的垂直间隔保持多个衬底。 衬底保持器被携带到热处理炉中。 对基板进行预定的热处理。 基板支架具有两个支架结构体。 保持器构成体中的每一个具有多个列和基板保持部。 列布置在同一虚构圆的圆周上。 基板保持部保持各基板的周向部。 保持器构成体中的一个在基板的前表面朝上的状态下保持基板,而另一个保持器构造体在基板的背面朝上的状态下保持基板。 前表面朝上的基板和背面朝上的基板在垂直方向交替排列。 保持构造体中的至少一个沿垂直方向移动,以改变保持器构成体相对于彼此的位置。 设置彼此垂直相邻并具有彼此相对的各个前表面和第一对基板中的另一个的第一对基板中的一个之间的距离,以确保处理的均匀性并且大于一个 第二对基板彼此垂直相邻并且具有彼此相对的相应后表面和第二对基板中的另一个。

    DISPLAY DEVICE
    78.
    发明申请
    DISPLAY DEVICE 有权
    显示设备

    公开(公告)号:US20070188675A1

    公开(公告)日:2007-08-16

    申请号:US11672600

    申请日:2007-02-08

    IPC分类号: G02F1/1333

    摘要: The present invention prevents the corrosion of a printed circuit board which is connected to a lower side of a display panel in a liquid crystal display panel. In a display device which includes a display panel and a frame member which supports an outer peripheral portion of a display screen of a display panel, a water absorbing member is adhered to a surface of the frame member which faces the display panel in an opposed manner.

    摘要翻译: 本发明防止在液晶显示面板中连接到显示面板的下侧的印刷电路板的腐蚀。 在包括显示面板和支撑显示面板的显示屏的外周部的框架构件的显示装置中,吸水构件以相对的方式粘附在框架构件的面向显示面板的表面 。

    Optical recording apparatus capable of changing the length of synchronization portions
    79.
    发明授权
    Optical recording apparatus capable of changing the length of synchronization portions 失效
    能够改变同步部分的长度的光学记录装置

    公开(公告)号:US07075884B2

    公开(公告)日:2006-07-11

    申请号:US11176320

    申请日:2005-07-08

    IPC分类号: G11B7/24

    摘要: A method for recording information on a rewritable recording medium includes recording first synchronizing signal information in a first synchronizing signal portion on the rewritable recording medium, recording second synchronizing signal information in a second synchronizing signal portion following the first synchronizing signal portion on the rewritable recording medium, recording data information in a data portion of the rewritable recording medium after the second synchronizing signal portion by forming marks in the data portion. The data information corresponds to both ends of each the marks. The marks and spaces between the marks are substantially randomly inverted each time the information is recorded and a length of the first synchronizing signal portion changes and a start position of the first synchronizing signal portion changes. A change of the start position of the first synchronizing signal portion is smaller than a change of the length of the first synchronizing signal portion.

    摘要翻译: 一种用于在可重写记录介质上记录信息的方法包括在可重写记录介质上的第一同步信号部分中记录第一同步信号信息,在可重写记录介质上的第一同步信号部分之后的第二同步信号部分中记录第二同步信号信息 通过在数据部分中形成标记,将数据信息记录在第二同步信号部分之后的可重写记录介质的数据部分中。 数据信息对应于每个标记的两端。 每当信息被记录并且第一同步信号部分的长度改变并且第一同步信号部分的开始位置改变时,标记之间的标记和间隔基本上随机反转。 第一同步信号部分的开始位置的改变小于第一同步信号部分的长度的变化。

    Information recording method and apparatus
    80.
    发明申请
    Information recording method and apparatus 失效
    信息记录方法和装置

    公开(公告)号:US20050243683A1

    公开(公告)日:2005-11-03

    申请号:US11176320

    申请日:2005-07-08

    摘要: A method for recording information on a rewritable recording medium includes recording first synchronizing signal information in a first synchronizing signal portion on the rewritable recording medium, recording second synchronizing signal information in a second synchronizing signal portion following the first synchronizing signal portion on the rewritable recording medium, recording data information in a data portion of the rewritable recording medium after the second synchronizing signal portion by forming marks in the data portion. The data information corresponds to both ends of each the marks. The marks and spaces between the marks are substantially randomly inverted each time the information is recorded and a length of the first synchronizing signal portion changes and a start position of the first synchronizing signal portion changes. A change of the start position of the first synchronizing signal portion is smaller than a change of the length of the first synchronizing signal portion.

    摘要翻译: 一种用于在可重写记录介质上记录信息的方法包括在可重写记录介质上的第一同步信号部分中记录第一同步信号信息,在可重写记录介质上的第一同步信号部分之后的第二同步信号部分中记录第二同步信号信息 通过在数据部分中形成标记,将数据信息记录在第二同步信号部分之后的可重写记录介质的数据部分中。 数据信息对应于每个标记的两端。 每当信息被记录并且第一同步信号部分的长度改变并且第一同步信号部分的开始位置改变时,标记之间的标记和间隔基本上随机反转。 第一同步信号部分的开始位置的改变小于第一同步信号部分的长度的变化。