公开(公告)号：US07363764B2

公开(公告)日：2008-04-29

申请号：US11123128

申请日：2005-05-06

申请人： Timothy Griffin ,  Daniel Holmberg ,  Dieter Winkler

发明人： Timothy Griffin ,  Daniel Holmberg ,  Dieter Winkler

IPC分类号： F02C3/20

CPC分类号： F02C3/30 ,  C01B3/386 ,  C01B3/48 ,  C01B13/0251 ,  C01B2203/0261 ,  C01B2203/0283 ,  C01B2203/0475 ,  C01B2203/0827 ,  C01B2203/0883 ,  C01B2203/84 ,  C01B2203/86 ,  F01K23/10 ,  F02C3/22 ,  F02C6/18 ,  Y02P20/129 ,  Y02P20/13 ,  Y02P30/30

摘要： A method of operating a gas turbine power plant and gas turbine power plant are disclosed wherein hydrogen for the combusting process is produced by feeding natural gas mixed with steam through a membrane/partial oxidation reactor and converting the natural gas at least to H2 and CO. Thereby oxygen is transferred from the compressed air through the membrane of the membrane/partial oxidation reactor and the oxygen is used for the partial oxidation process of the natural gas. The process is followed by converting the syngas in a CO shift reactor and a CO shift reactor to a CO2 removal equipment to mainly hydrogen.

摘要翻译： 公开了一种操作燃气轮机发电厂和燃气轮机发电厂的方法，其中用于燃烧过程的氢气是通过将混合有蒸汽的天然气进入膜/部分氧化反应器并将天然气转化为H 2， 2和CO。因此，氧气从压缩空气通过膜/部分氧化反应器的膜转移，氧气用于天然气的部分氧化过程。 该方法之后是将CO转化反应器和CO转化反应器中的合成气转化为CO 2脱除设备至主要为氢气。

公开(公告)号：US07345287B2

公开(公告)日：2008-03-18

申请号：US11240279

申请日：2005-09-30

申请人： Thomas Jasinski ,  Dieter Winkler ,  William A. Eckes

发明人： Thomas Jasinski ,  Dieter Winkler ,  William A. Eckes

IPC分类号： H01J1/50 ,  F28D15/00

CPC分类号： H01J37/141 ,  H01J2237/002

摘要： We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.

摘要翻译： 我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。 该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。 这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。 使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性 带电粒子束柱。

公开(公告)号：US07227155B2

公开(公告)日：2007-06-05

申请号：US11241789

申请日：2005-09-30

申请人： Benyamin Buller ,  William J. Devore ,  Juergen Frosien ,  Eugene Mirro, Jr. ,  Henry Pearce-Percy ,  Dieter Winkler

发明人： Benyamin Buller ,  William J. Devore ,  Juergen Frosien ,  Eugene Mirro, Jr. ,  Henry Pearce-Percy ,  Dieter Winkler

IPC分类号： H01J37/147

CPC分类号： H01J37/147 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/24 ,  H01J37/3174 ,  H01J2237/0432 ,  H01J2237/1504 ,  H01J2237/28

摘要： An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.

摘要翻译： 一种高精度高通量偏转电子束的装置和方法。 偏转电容器的至少一个电极通过同轴电缆连接到信号源。 终端电阻器还连接到同轴电缆和在同轴电缆和电极的接头处的电极。 终端电阻器具有与同轴电缆的阻抗匹配的电阻，并且电极具有与同轴电缆的阻抗的一半相匹配的阻抗。 本发明的偏转电容器由于涡电流而具有最小的精度损失。 与现有技术的系统相比，偏转电容器中的电极间距减小约2倍。

公开(公告)号：US20070085033A1

公开(公告)日：2007-04-19

申请号：US11243363

申请日：2005-10-03

申请人： Benyamin Buller ,  William DeVore ,  Juergen Frosien ,  Xinrong Jiang ,  Richard Lozes ,  Henry Pearce-Percy ,  Dieter Winkler ,  Steven Coyle ,  Helmut Banzhof

发明人： Benyamin Buller ,  William DeVore ,  Juergen Frosien ,  Xinrong Jiang ,  Richard Lozes ,  Henry Pearce-Percy ,  Dieter Winkler ,  Steven Coyle ,  Helmut Banzhof

IPC分类号： G21G5/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31754

摘要： An electron beam column comprises a thermal field emission electron source to generate an electron beam, an electron beam blanker, a beam shaping module, and electron beam optics comprising a plurality of electron beam lenses. In one version, the optical parameters of the electron beam blanker, beam shaping module, and electron beam optics are set to achieve an acceptance semi-angle β of from about ¼ to about 3 mrads, where the acceptance semi-angle β is the half the angle subtended by the electron beam at the writing plane. The beam-shaping module can also operate as a single lens using upper and lower projection lenses. A multifunction module for an electron beam column is also described.

摘要翻译： 电子束柱包括产生电子束的热场发射电子源，电子束消除器，光束整形模块和包括多个电子束透镜的电子束光学器件。 在一个版本中，电子束消隐器，光束整形模块和电子束光学器件的光学参数被设置为实现约¼至约3mrads的接受半角β，其中接受半角β是半 在写平面处电子束对着的角度。 光束成形模块也可以使用上下投影透镜作为单个透镜进行操作。 还描述了用于电子束柱的多功能模块。

公开(公告)号：US20060237659A1

公开(公告)日：2006-10-26

申请号：US10564752

申请日：2004-05-17

申请人： Hans Feuerbaum ,  Jürgen Frosien ,  Uli Hoffmann ,  Dieter Winkler ,  Pavel Aamec

发明人： Hans Feuerbaum ,  Jürgen Frosien ,  Uli Hoffmann ,  Dieter Winkler ,  Pavel Aamec

IPC分类号： H01J1/50

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/047 ,  H01J2237/0635

摘要： The present invention provides a charged particle beam device. The device comprises an emitter array (22) for emitting a plurality of charged particle beams (8). The plurality of charged particle beams are imaged with a lens (12). An electrode unit (14) is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit (11) and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.

摘要翻译： 本发明提供一种带电粒子束装置。 该装置包括用于发射多个带电粒子束（8）的发射极阵列（22）。 多个带电粒子束用透镜（12）成像。 设置有用于加速多个带电粒子束的电极单元（14）。 第一控制单元（11）和第二控制单元控制发射极阵列的第一电位，电极单元的第二电位和试样的第三电位之间的电位差。 因此，第二电位能够相对于第一电位加速多个带电粒子束，并且第三电位能够使多个带电粒子束相对于第二电位减速。

公开(公告)号：US20060080968A1

公开(公告)日：2006-04-20

申请号：US11066926

申请日：2005-02-28

申请人： Timothy Griffin ,  Dieter Winkler

发明人： Timothy Griffin ,  Dieter Winkler

IPC分类号： F23R3/40

CPC分类号： F23C13/00 ,  F23C2900/13002 ,  F23C2900/9901 ,  F23R3/40

摘要： The present invention relates to a method and an apparatus (6) for carrying out the method, the method being used for combustion of a fuel-oxidator mixture in a combustion chamber (7) of a turbogroup, in particular of a power plant. A total oxidator flow (12) is divided into a main oxidator flow (14) and a secondary oxidator flow (15). The main oxidator flow (14) is lean mixed with a main fuel flow (21) in a premix burner (8), and the mixture (23) is fully oxidized in the combustion chamber (7). The secondary oxidator flow (15) is divided into a pilot oxidator flow (17) and a heat-exchanging oxidator flow (18). The pilot oxidator flow (17) is rich mixed with a pilot fuel flow (22), and the mixture (17, 22) is partially oxidized in a catalyst (24), with hydrogen being formed. Downstream of the catalyst (24), the partially oxidized pilot fuel-oxidator mixture (25) and the heat-exchanging oxidator flow (18) are together introduced into at least one zone (26) which is suitable for stabilizing the combustion of the main fuel-oxidator mixture (23).

摘要翻译： 本发明涉及一种用于实施该方法的方法和装置（6），该方法用于在涡轮组（特别是发电厂）的燃烧室（7）中燃烧燃料 - 氧化剂混合物。 总的氧化剂流（12）被分成主氧化剂流（14）和次级氧化剂流（15）。 主氧化剂流（14）与预混燃烧器（8）中的主燃料流（21）稀混合，并且混合物（23）在燃烧室（7）中被完全氧化。 次级氧化剂流（15）被分为先导氧化剂流（17）和热交换氧化剂流（18）。 先导氧化剂流（17）与引燃燃料流（22）富混合，并且混合物（17,22）在催化剂（24）中部分氧化，形成氢气。 在催化剂（24）的下游，部分氧化的先导燃料 - 氧化剂混合物（25）和热交换氧化剂流（18）一起被引入至少一个适于稳定主燃烧器的燃烧的区域（26） 燃料 - 氧化剂混合物（23）。

公开(公告)号：US06943349B2

公开(公告)日：2005-09-13

申请号：US10258869

申请日：2001-04-27

申请人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

发明人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

IPC分类号： G01Q30/02 ,  H01J37/04 ,  H01J37/09 ,  H01J37/26 ,  G21K1/08 ,  G01N23/00 ,  H01J3/14 ,  H01J37/28

CPC分类号： H01J37/04 ,  H01J37/09 ,  H01J37/266

摘要： The present invention provides an improved column for a charged particle beam device. The column comprises an aperture plate having multiple apertures to produce multiple beams of charged particles and a deflector to influence the beams of charged particles so that each beam appears to come from a different source. Furthermore, an objective lens is used in order to focus the charged-particle beams onto the specimen. Due to the deflector, multiple images of the source are created on the surface of the specimen whereby all the images can be used for parallel data acquisition. Accordingly, the speed of data acquisition is increased. With regard to the focusing properties of the objective lens, the beams of charged particles can basically be treated as independent particle beams which do not negatively affect each other. Accordingly, each beam basically provides the same resolution as the beam of a conventional charged particle beam device.

摘要翻译： 本发明提供了一种用于带电粒子束装置的改进的柱。 柱包括具有多个孔的孔板，以产生多个带电粒子束和偏转器，以影响带电粒子束，使得每个束似乎来自不同的源。 此外，使用物镜以将带电粒子束聚焦到样本上。 由于偏转器，在样品的表面上产生了源的多个图像，从而所有图像可以用于并行数据采集。 因此，数据采集的速度增加。 关于物镜的聚焦特性，带电粒子束基本上可以被视为不会相互影响的独立的粒子束。 因此，每个光束基本上提供与常规带电粒子束装置的光束相同的分辨率。

公开(公告)号：US20050115244A1

公开(公告)日：2005-06-02

申请号：US10989029

申请日：2004-11-16

申请人： Timothy Griffin ,  Frank Reiss ,  Dieter Winkler

发明人： Timothy Griffin ,  Frank Reiss ,  Dieter Winkler

IPC分类号： F23D14/62 ,  F23D17/00 ,  F23R3/28 ,  F23R3/30

CPC分类号： F23D14/62 ,  F23C2900/07002 ,  F23C2900/9901 ,  F23D17/002 ,  F23R3/286

摘要： A premix burner includes a swirler (7) for a combustion air stream and a device for injection of fuel into the combustion air stream. The swirler (7) includes one or more inlet openings for combustion air of the combustion air stream entering the burner. The device for injection of fuel into the combustion air stream includes one or more first fuel lines (8) with first fuel injection openings (4). The opening diameter and/or the injection angle of the injection openings varies with respect to the axial and/or radial direction. Alternatively or in addition, some of the first fuel injection openings (4) may be arranged in one or more first groups of closely grouped fuel injection openings (4) so that each of the first groups forms one fuel jet with a large cross section. An improved mixing of the fuel with the combustion air is achieved with the burner in particular in cases in which the fuel is injected at the end of the burner facing the combustion chamber.

摘要翻译： 预混燃烧器包括用于燃烧空气流的旋流器（7）和用于将燃料喷射到燃烧空气流中的装置。 旋流器（7）包括用于燃烧空气流进入燃烧器的燃烧空气的一个或多个入口。 用于将燃料喷射到燃烧空气流中的装置包括具有第一燃料喷射开口（4）的一个或多个第一燃料管线（8）。 喷射开口的开口直径和/或喷射角度相对于轴向和/或径向方向变化。 或者或另外，一些第一燃料喷射开口（4）可以布置在一组或多个紧密分组的燃料喷射开口（4）中，使得每个第一组形成具有大截面的一个燃料喷射。 燃烧器与燃烧空气的改进的混合是通过燃烧器实现的，特别是在燃烧器面向燃烧室的燃烧器端部喷射燃料的情况下。

公开(公告)号：US06834622B2

公开(公告)日：2004-12-28

申请号：US10662376

申请日：2003-09-16

申请人： Timothy Griffin ,  Andreas Schlegel ,  Dieter Winkler

发明人： Timothy Griffin ,  Andreas Schlegel ,  Dieter Winkler

IPC分类号： F22D100

CPC分类号： C01B5/00 ,  B01B1/005 ,  F22B1/003

摘要： Method for generating steam, in particular ultrapure steam, and steam generator The invention relates to a method and a steam generator for generating steam, in particular ultrapure steam, by reacting a stoichiometric mixture comprising a fuel, in particular hydrogen, and an oxidizing agent, in particular oxygen, and injecting water into the hot reaction gases, which is distinguished by a high purity of the steam generated. The object of providing a method for generating an ultrahigh purity steam is achieved, according to the invention, by two-stage combustion, in that the reaction mixture which is generated in a first combustion and evaporation stage is subjected to catalytic afterburning. A steam generator is distinguished by the fact that a catalytic afterburning chamber (3) with a through-flow body (16) is arranged downstream of the combustion and evaporation chamber (2).

摘要翻译： 用于产生蒸汽的方法，特别是超纯蒸汽和蒸汽发生器本发明涉及一种用于产生蒸汽，特别是超纯蒸汽的方法和蒸汽发生器，其通过使包含燃料，特别是氢的化学计量混合物和氧化剂在 特别是氧，并将水注入热的反应气体中，其特征在于产生的蒸汽的高纯度。根据本发明，通过两阶段燃烧实现提供产生超高纯度蒸汽的方法的目的， 因为在第一燃烧和蒸发阶段产生的反应混合物经过催化后燃.A蒸汽发生器的特征在于具有通流体（16）的催化后燃烧室（3）布置在 燃烧和蒸发室（2）。

公开(公告)号：US06740889B1

公开(公告)日：2004-05-25

申请号：US09162103

申请日：1998-09-28

申请人： Dieter Winkler ,  Hans-Peter Feuerbaum ,  Joseph Bach

发明人： Dieter Winkler ,  Hans-Peter Feuerbaum ,  Joseph Bach

IPC分类号： G01K510

CPC分类号： H01J37/18 ,  H01J37/28

摘要： A charged particle beam microscope is described, which is equipped with a minicolumn. Various embodiments are disclosed, suitable for various uses. According to one embodiment the minicolumn is situated inside a mini-environment and can be introduced into and withdrawn from the main vacuum chamber. According to other embodiments, the minicolumn is situated inside the main vacuum chamber. According to further embodiments, a turntable stage is used and the minicolumn is attached to an arm movable in the radial direction of the turntable.

摘要翻译： 描述带电粒子束显微镜，其装备有小柱。 公开了适用于各种用途的各种实施例。 根据一个实施例，小柱位于迷你环境内并且可以被引入和从主真空室排出。 根据其他实施例，小柱位于主真空室内。 根据另外的实施例，使用转盘台，并将小柱连接到可在转盘的径向方向上移动的臂上。