Semiconductor device having optimized shallow junction geometries and method for fabrication thereof
    72.
    发明授权
    Semiconductor device having optimized shallow junction geometries and method for fabrication thereof 有权
    具有优化的浅结几何形状的半导体器件及其制造方法

    公开(公告)号:US07033879B2

    公开(公告)日:2006-04-25

    申请号:US10835121

    申请日:2004-04-29

    IPC分类号: H01L21/8238 H01L21/336

    摘要: The present invention provides, in one embodiment, a method of fabricating a semiconductor device (100). The method comprises growing an oxide layer (120) on a gate structure (114) and a substrate (102) and implanting a dopant (124) into the substrate (102) and the oxide layer (120). Implantation is such that a portion of the dopant (124) remains in the oxide layer (120) to form an implanted oxide layer (126). The method further includes depositing a protective oxide layer (132) on the implanted oxide layer (126) and forming etch-resistant off-set spacers (134). The etch-resistant off-set spacers (134) are formed adjacent sidewalls of the gate structure (114) and on the protective oxide layer (132). The etch resistant off-set spacers having an inner perimeter (135) adjacent the sidewalls and an opposing outer perimeter (136). The method also comprises removing portions of the protective oxide layer (132) lying outside the outer perimeter (136) of the etch-resistant off-set spacers (134). Other embodiments of the present invention include a transistor device (200) and method of manufacturing an integrated circuit (300).

    摘要翻译: 本发明在一个实施例中提供一种制造半导体器件(100)的方法。 该方法包括在栅极结构(114)和衬底(102)上生长氧化物层(120)并将掺杂剂(124)注入到衬底(102)和氧化物层(120)中。 注入使得掺杂剂(124)的一部分保留在氧化物层(120)中以形成注入的氧化物层(126)。 该方法还包括在注入的氧化物层(126)上沉积保护性氧化物层(132)并且形成耐腐蚀的偏置间隔物(134)。 在栅极结构(114)的侧壁和保护氧化物层(132)上形成耐蚀刻偏置间隔物(134)。 耐腐蚀的偏置间隔件具有邻近侧壁的内周边(135)和相对的外周边(136)。 该方法还包括去除位于耐蚀刻偏移间隔物(134)的外周(136)外的保护氧化物层(132)的部分。 本发明的其他实施例包括晶体管器件(200)和制造集成电路(300)的方法。

    Elimination of void formation in aluminum based interconnect structures
    73.
    发明授权
    Elimination of void formation in aluminum based interconnect structures 失效
    消除铝基互连结构中的空隙形成

    公开(公告)号:US5946589A

    公开(公告)日:1999-08-31

    申请号:US947884

    申请日:1997-10-09

    申请人: Yat Meng Ng Xin Zhang

    发明人: Yat Meng Ng Xin Zhang

    CPC分类号: H01L21/02071 H01L21/31138

    摘要: A process for forming aluminum based interconnect structures, with a reduced risk of void formation, occurring during photoresist removal and clean up procedures, has been developed. The process features removing the photoresist layer, used as a mask for patterning of an aluminum based layer, using a two phase, in situ photoresist removal procedure, followed by a cold water rinse. An aluminum oxide layer, formed during the initial phase of the two phase, in situ photoresist removal procedure, protects the sides of the aluminum based interconnect structure, during post-clean procedures, reducing the risk of galvanic corrosion and void formation. In addition the temperature of a DI water, post-clean procedure, has also been decreased to between about 5 to 10.degree. C., reduced, also reducing the risk of galvanic corrosion, that can occur during the post clean procedures.

    摘要翻译: 已经开发了一种用于形成铝基互连结构的方法,其在光致抗蚀剂去除和清洁过程中发生空隙形成的风险降低。 该方法的特征在于,使用两相原位光致抗蚀剂去除步骤,然后进行冷水冲洗,除去用作铝基层图案的掩模的光致抗蚀剂层。 在两相初始阶段形成的原位光致抗蚀剂去除工艺中的氧化铝层在后清洁过程中保护铝基互连结构的侧面,降低电偶腐蚀和空隙形成的风险。 此外,去离子水的温度,后清洁程序也降低到约5至10℃之间,减少,也降低了电镀腐蚀的风险,这可能在后清洗过程中发生。

    Behavior and information model to yield more accurate probability of successful outcome
    77.
    发明授权
    Behavior and information model to yield more accurate probability of successful outcome 有权
    行为和信息模型产生更准确的成功结果概率

    公开(公告)号:US08996426B2

    公开(公告)日:2015-03-31

    申请号:US13039202

    申请日:2011-03-02

    IPC分类号: G06F15/18 G06N7/00

    CPC分类号: G06N7/005

    摘要: A report indicating a user-reported probability of a successful outcome is received. A behavior and information model is estimated based on the report. The behavior and information model includes a behavior model component having a bias parameter and a consistency parameter. The behavior and information model includes an information model component having a first user-believed probability of a successful outcome and a second user-believed probability of a successful outcome. The behavior and information model is used to yield a model-determined probability of a successful outcome that more accurately reflects a probability of a successful outcome than the user-reported probability of a successful outcome does.

    摘要翻译: 收到表明用户报告的成功结果概率的报告。 行为和信息模型是根据报告估算的。 行为和信息模型包括具有偏差参数和一致性参数的行为模型组件。 行为和信息模型包括具有第一用户相信的成功结果的概率和第二用户相信的成功结果的概率的信息模型组件。 行为和信息模型用于产生成功结果的模型确定概率,其更准确地反映成功结果的概率,而不是用户报告的成功结果的概率。

    Double-stranded RNA-based nanoparticles for insect gene silencing
    78.
    发明授权
    Double-stranded RNA-based nanoparticles for insect gene silencing 有权
    用于昆虫基因沉默的双链RNA基纳米颗粒

    公开(公告)号:US08841272B2

    公开(公告)日:2014-09-23

    申请号:US13485181

    申请日:2012-05-31

    摘要: Nanoparticles for insect RNAi via oral delivery are provided, along with methods of silencing a target gene in a target insect using RNAi are provided. The nanoparticles comprise a polymer matrix and insect dsRNA. The dsRNA comprises at least one sequence having a region of complementarity substantially complementary to at least a portion of an mRNA transcript of the target gene. Insect baits comprising the nanoparticles are also provided. Methods of screening target gene functions are also provided using the methods disclosed herein.

    摘要翻译: 提供了通过口服递送的用于昆虫RNAi的纳米颗粒,以及使用RNAi沉默目标昆虫中的靶基因的方法。 纳米颗粒包含聚合物基质和昆虫dsRNA。 dsRNA包含至少一个具有与靶基因的mRNA转录物的至少一部分互补的互补区的序列。 还提供了包含纳米颗粒的昆虫诱饵。 还使用本文公开的方法提供筛选靶基因功能的方法。

    Tuning parameter of Kalman filter in a wheel inspection
    79.
    发明授权
    Tuning parameter of Kalman filter in a wheel inspection 有权
    车轮检测中卡尔曼滤波器的调谐参数

    公开(公告)号:US08818738B2

    公开(公告)日:2014-08-26

    申请号:US13590788

    申请日:2012-08-21

    IPC分类号: G01B3/44

    CPC分类号: G01M17/013

    摘要: An apparatus for tuning a parameter of a Kalman filter in a wheel inspection for a vehicle is disclosed. The apparatus includes an association module that associates wheel inspection data of the vehicle with locations of corresponding wheels in the vehicle; an evaluation module that evaluates a wheel stable score of the vehicle based on the wheel inspection data and the association, where the wheel stable score indicates reliability of the wheel inspection; and a parameter tuning module that tunes a measurement error covariance of the Kalman filter according to the evaluated wheel stable score.

    摘要翻译: 公开了一种用于调整车辆车轮检查中的卡尔曼滤波器的参数的装置。 该装置包括关联模块,其将车辆的车轮检查数据与车辆中相应车轮的位置相关联; 评估模块,其基于车轮检查数据和关联来评估车辆的车轮稳定分数,其中车轮稳定分数表示车轮检查的可靠性; 以及参数调谐模块,根据评估轮稳定分数调整卡尔曼滤波器的测量误差协方差。

    PROVIDING SUBSCIBER IDENTITY MODULE FUNCTION
    80.
    发明申请
    PROVIDING SUBSCIBER IDENTITY MODULE FUNCTION 有权
    提供附件识别模块功能

    公开(公告)号:US20140213321A1

    公开(公告)日:2014-07-31

    申请号:US14240665

    申请日:2011-09-01

    IPC分类号: H04B1/38

    摘要: A host processing apparatus (100) and a user removable memory (40) are disclosed. The host processing apparatus (100) and the user removable memory (40) are, in use, connected to one another by respective connectors. The user removable memory (40) is provided in the form of a secure digital (SD) memory card with an expanded subscriber identity module (SIM) function. The host processing apparatus (100) is configured to convert SIM- related request signals to file access signals which identify a location or locations on the user removable memory (40) and one or more file access functions. The file access signals are transferred to the user removable memory (40) via the connectors. The user removable memory (40) comprises a flash memory (59), a SIM (42) programmed with data associated with a communications system, and interface means (52) for receiving the file access signals from the host processing apparatus (100), and configured to identify from the location(s) therein whether a memory or SIM function is to be applied. If the latter, the received file access function(s) are converted to SIM function(s) which are applied to the SIM (42) for transferring results back to the host processing apparatus (100).

    摘要翻译: 公开了主机处理设备(100)和用户可移动存储器(40)。 主机处理设备(100)和用户可移动存储器(40)在使用中通过相应的连接器相互连接。 用户可移动存储器(40)以具有扩展的用户识别模块(SIM)功能的安全数字(SD)存储卡的形式提供。 主机处理装置(100)被配置为将SIM相关的请求信号转换成识别用户可移动存储器(40)上的位置或位置的文件访问信号以及一个或多个文件访问功能。 文件访问信号通过连接器传送到用户可移动存储器(40)。 用户可移动存储器(40)包括闪存(59),用通信系统相关联的数据编程的SIM(42)和用于从主机处理设备(100)接收文件访问信号的接口装置(52) 并且被配置为从其中的位置识别是否应用存储器或SIM功能。 如果后者,所接收的文件访问功能被转换为应用于SIM(42)以将结果传回主机处理设备(100)的SIM功能。