公开(公告)号：US20050170666A1

公开(公告)日：2005-08-04

申请号：US10999937

申请日：2004-12-01

申请人： Katsuyuki Sekine ,  Yoshitaka Tsunashima ,  Seiji Inumiya ,  Akio Kaneko ,  Motoyuki Sato ,  Kazuhiro Eguchi

发明人： Katsuyuki Sekine ,  Yoshitaka Tsunashima ,  Seiji Inumiya ,  Akio Kaneko ,  Motoyuki Sato ,  Kazuhiro Eguchi

IPC分类号： H01L21/316 ,  H01L21/314 ,  H01L29/78 ,  H01L21/31 ,  H01L21/469 ,  H01L21/425 ,  H01L21/22

CPC分类号： H01L21/02321 ,  H01L21/02148 ,  H01L21/02159 ,  H01L21/022 ,  H01L21/28185 ,  H01L21/28194 ,  H01L21/3143 ,  H01L21/31645 ,  H01L29/518

摘要： A manufacturing method of a semiconductor device disclosed herein, comprises: forming a silicate film containing metal on a substrate; and introducing nitrogen and deuterium into the silicate film by using ND3 gas.

摘要翻译： 本文公开的半导体器件的制造方法包括：在基板上形成含有金属的硅酸盐膜; 并通过使用ND 3 N 3气体将氮和氘引入到硅酸盐膜中。

公开(公告)号：US06867451B2

公开(公告)日：2005-03-15

申请号：US09469190

申请日：1999-12-21

申请人： Katsuhiko Hieda ,  Kazuhiro Eguchi

发明人： Katsuhiko Hieda ,  Kazuhiro Eguchi

IPC分类号： H01L27/10 ,  H01L21/02 ,  H01L21/8242 ,  H01L27/108 ,  H01L29/76 ,  H01L29/94

CPC分类号： H01L28/55 ,  H01L27/10814 ,  H01L28/60

摘要： A semiconductor device comprises a lower electrode shaped as a convex formed on a semiconductor substrate having crystals, a grain boundary between adjacent crystals being perpendicular to a side of the lower electrode, a capacitor insulating film covering the lower electrode, and an upper electrode formed on the capacitor insulating film.

摘要翻译： 半导体器件包括形成在具有晶体的半导体衬底上形成的凸起的下电极，相邻晶体之间的晶界垂直于下电极的侧面，覆盖下电极的电容器绝缘膜和形成在 电容绝缘膜。

公开(公告)号：US06654008B2

公开(公告)日：2003-11-25

申请号：US09995102

申请日：2001-11-27

申请人： Masaki Ikeda ,  Kazuhiro Eguchi ,  Motoharu Kouda

发明人： Masaki Ikeda ,  Kazuhiro Eguchi ,  Motoharu Kouda

IPC分类号： G09G500

CPC分类号： G06F3/0433 ,  G06F3/03545 ,  G06F3/0428

摘要： An electronic whiteboard capable of being drawn by using marker pens of several colors and one penholder, and a penholder for use in such an electronic whiteboard are disclosed. In a penholder for mounting marker pens, an infrared light emitting unit emits infrared light containing color information of the marker pen, an ultrasonic wave emitting unit emits a the ultrasonic wave, and color information changeover means changes over color information depending on the color of marker pen. The electronic whiteboard main body receives the infrared light and ultrasonic wave emitted from the penholder, and issues information about a position of the penholder depending on the reception timing of the infrared light and ultrasonic wave.

公开(公告)号：US06495054B1

公开(公告)日：2002-12-17

申请号：US09429074

申请日：1999-10-29

申请人： Kazuhiro Eguchi ,  Katsuya Okumura ,  Masahiro Kiyotoshi ,  Katsuhiko Hieda ,  Soichi Yamazaki

发明人： Kazuhiro Eguchi ,  Katsuya Okumura ,  Masahiro Kiyotoshi ,  Katsuhiko Hieda ,  Soichi Yamazaki

IPC分类号： C03C1500

CPC分类号： C23C16/4405

摘要： Presented is an etching method capable of easily etching an oxide containing an alkaline-earth metal. One method is to etch the oxide by using an etching gas containing a halogen gas except for fluorine, an interhalogen compound consisting of only a halogen element except for fluorine, or a halogen hydride consisting of a halogen element except for fluorine and hydrogen. Particularly chlorides, bromides, and iodides of alkaline-earth metals have relatively high vapor pressures, so a thin film containing an alkaline-earth metal can be etched by using chlorine gas, bromine gas, or iodine gas. When a halogen gas containing fluorine is used, damages to SiO2 portions used in a film formation apparatus are prevented by coating these SiO2 portions with a fluoride of an alkaline-earth metal.

公开(公告)号：US06335241B1

公开(公告)日：2002-01-01

申请号：US09369174

申请日：1999-08-05

申请人： Katsuhiko Hieda ,  Soichi Yamazaki ,  Kazuhiro Eguchi ,  Kyoichi Suguro

发明人： Katsuhiko Hieda ,  Soichi Yamazaki ,  Kazuhiro Eguchi ,  Kyoichi Suguro

IPC分类号： H01L218242

CPC分类号： H01L27/10855 ,  H01L27/10888 ,  H01L27/10894 ,  H01L28/91

摘要： A semiconductor device with a charge holding capacitor comprises a lower electrode connected via a plug to one of the source and drain of an MIS transistor, a capacitor insulating film formed the lower electrode, an upper electrode formed on the capacitor insulating film. The lower electrode includes a first constituting portion that is embedded in a hole in which the plug has been embedded and so formed that it self-aligns with the plug and a second constituting portion which is formed on the first constituting portion and on regions outside the fist constituting portion and whose cross section is larger than that of the first constituting portion. The first constituting portion and the second constituting portion are formed integrally by a continues film.

摘要翻译： 具有电荷保持电容器的半导体器件包括通过插头连接到MIS晶体管的源极和漏极之一的下电极，形成下电极的电容器绝缘膜，形成在电容器绝缘膜上的上电极。 下部电极包括第一构成部，该第一构成部嵌入在插入孔内并形成为与插头自对准的孔和形成在第一构成部上的第二构成部和第二构成部 第一构成部分的横截面大于第一构成部分的截面。 第一构成部分和第二构成部分由连续膜一体地形成。

公开(公告)号：US06297122B1

公开(公告)日：2001-10-02

申请号：US09408837

申请日：1999-09-30

申请人： Kazuhiro Eguchi ,  Tomonori Aoyama

发明人： Kazuhiro Eguchi ,  Tomonori Aoyama

IPC分类号： H01L2120

CPC分类号： H01L28/75 ,  C23C16/40 ,  H01L28/55 ,  H01L28/60

摘要： An SrRuO3 film as the lower electrode and upper electrode of a capacitor is formed by CVD using a gas mixture of Sr(THD)2 and Ru(THD)3 as source gases. A BaxSr1-xRuO3 film is used as a capacitor insulating film.

摘要翻译： 使用Sr（THD）2和Ru（THD）3的气体混合物作为源气体通过CVD形成作为电极的下部电极和上部电极的SrRuO 3膜。 使用BaxSr1-xRuO3膜作为电容绝缘膜。

公开(公告)号：US6009240A

公开(公告)日：1999-12-28

申请号：US978279

申请日：1997-11-25

申请人： Kazuhiro Eguchi ,  Osamu Nakamura

发明人： Kazuhiro Eguchi ,  Osamu Nakamura

IPC分类号： B43L1/00 ,  H04N1/00 ,  H04N1/32 ,  G06K15/00

CPC分类号： H04N1/00241 ,  H04N1/1255 ,  H04N1/32502 ,  H04N1/32529 ,  H04N1/00204 ,  H04N1/00236 ,  H04N2201/007 ,  H04N2201/0081 ,  H04N2201/0082

摘要： An electronic white-board apparatus having a writable screen, a reader for reading information on a screen and outputting the information as image data, a printer for printing and recording the image data output from the reader onto a recording medium, and an external interface which is connectable to external equipment and can output the image data from the reader. Data obtained by reading information on the screen can be output to external information equipment such as personal computers for editing purposes. Information written on a screen (1) is read by a CCD (9), and stored in an image memory (13) through an A/D converter (10), magnification and reduction circuit (11), and binarizer (12). A CPU (14) determines whether a laser printer (18) or personal computer (20) is connected to a parallel interface connector (17). If one of them is connected, data stored in the image memory (13) is output to the laser printer (18) or personal computer (20). If none of them is connected, the data in the image memory (13) is output to a thermal printer (16).

摘要翻译： 一种具有可写屏幕的电子白板装置，用于读取屏幕上的信息并将该信息作为图像数据输出的读取器，用于将从读取器输出的图像数据记录到记录介质上的打印机以及外部接口， 可连接到外部设备，并可以从读卡器输出图像数据。 通过读取屏幕上的信息获得的数据可以输出到诸如个人计算机的外部信息设备用于编辑目的。 写入屏幕（1）的信息由CCD（9）读取，并通过A / D转换器（10），放大和缩小电路（11）和二值化器（12）存储在图像存储器（13）中。 CPU（14）确定激光打印机（18）或个人计算机（20）是否连接到并行接口连接器（17）。 如果其中一个被连接，则存储在图像存储器（13）中的数据被输出到激光打印机（18）或个人计算机（20）。 如果没有连接，图像存储器（13）中的数据被输出到热敏打印机（16）。

公开(公告)号：US5914745A

公开(公告)日：1999-06-22

申请号：US989154

申请日：1997-12-11

申请人： Kazuhiro Eguchi

发明人： Kazuhiro Eguchi

IPC分类号： B43L1/04 ,  G03B27/00 ,  H04N1/00

CPC分类号： G03B27/00

摘要： In an electronic white board apparatus, when at power on a screen is not in a screen home position, the screen is moved in a first direction. When the screen reaches the home position during a predetermined movement thereof, the screen is stopped. If the screen does not reach the home position even after it has been moved more than the predetermined movement, the screen is moved in the opposite to the first direction until the screen reaches the home position.

摘要翻译： 在电子白板装置中，当屏幕上的电源不在屏幕初始位置时，屏幕沿第一方向移动。 当屏幕在其预定移动期间到达原始位置时，屏幕停止。 如果即使移动超过预定的移动，屏幕也不到达原始位置，则屏幕以与第一方向相反的方向移动，直到屏幕到达原始位置。