Method and apparatus for measuring the thickness of a film using low
coherence reflectometry
    71.
    发明授权
    Method and apparatus for measuring the thickness of a film using low coherence reflectometry 失效
    使用低相干反射测量薄膜厚度的方法和装置

    公开(公告)号:US5642196A

    公开(公告)日:1997-06-24

    申请号:US520199

    申请日:1995-08-28

    CPC分类号: G01B11/06

    摘要: An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes a first coupler for generating a first probe light signal and a second probe light signal from a low coherence light source. The first probe light signal is directed toward the top surface of the film and the light leaving the top surface of the film is collected. Similarly, the second probe light signal is directed toward the bottom surface of the film and the light leaving the bottom surface of the film is also collected. Top and bottom partially reflecting reference surfaces are provided for generating reflections. The top reference surface reflects part of the light leaving the top surface back toward the top surface, and the bottom reference surface reflects light leaving the bottom surface of the film back toward the bottom surface of the film. The collected light is combined to form a collected light signal which is input to a receiver that determines the time delay between light reflected from the top surface of the film and the top reference surface and between the bottom surface of the film and the bottom reference surface. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the collected light signal.

    摘要翻译: 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括用于产生第一探针光信号的第一耦合器和来自低相干光源的第二探测光信号。 第一探针光信号指向膜的顶表面,并且收集离开膜的顶表面的光。 类似地,第二探针光信号指向膜的底表面,并且还收集离开膜的底表面的光。 提供顶部和底部部分反射的参考表面用于产生反射。 顶部参考表面反射离开顶部表面的光的一部分朝向顶部表面,并且底部参考表面将离开膜的底部表面的光反射回到膜的底部表面。 收集的光被组合以形成收集的光信号,其被输入到接收器,该接收器确定从膜的顶表面反射的光与顶部参考表面之间以及在膜的底表面和底部参考表面之间的时间延迟 。 在本发明的优选实施例中,接收机由光学自相关器或光谱分析仪构成,光谱分析仪包括用于提供从收集的光信号测量的频域频谱的傅里叶变换的电路。

    Optical low-coherence reflectometer using optical attenuation
    72.
    发明授权
    Optical low-coherence reflectometer using optical attenuation 失效
    光学低相干反射计使用光衰减

    公开(公告)号:US5365335A

    公开(公告)日:1994-11-15

    申请号:US210656

    申请日:1994-03-18

    申请人: Wayne V. Sorin

    发明人: Wayne V. Sorin

    IPC分类号: G01B9/02 G01M11/00 G02B6/26

    CPC分类号: G01M11/3172 G02B6/266

    摘要: A low-coherence reflectometer for use in measuring optical backscattering. The invention utilizes an optical attenuation in the reference arm of a Michelson interferometer to reduce the relative intensity noise. The invention obtains essentially the same performance as obtained with balanced detector schemes while maintaining the simplicity of the Michelson interferometer design and increased scan distance.

    摘要翻译: 用于测量光学后向散射的低相干反射计。 本发明利用了迈克尔逊干涉仪的参考臂中的光衰减来减小相对强度噪声。 本发明获得与平衡检测器方案获得的基本相同的性能,同时保持了迈克尔逊干涉仪设计的简单性和增加的扫描距离。

    Broadband tunable in-line filter for fiber optics
    73.
    发明授权
    Broadband tunable in-line filter for fiber optics 失效
    用于光纤的宽带可调式在线滤波器

    公开(公告)号:US5058977A

    公开(公告)日:1991-10-22

    申请号:US643395

    申请日:1991-01-18

    申请人: Wayne V. Sorin

    发明人: Wayne V. Sorin

    IPC分类号: G02B6/34

    CPC分类号: G02B6/29322 G02B6/29395

    摘要: A broadband tunable in-fiber filter includes a grating with divergent ridges which can be translated transversely of a side-polished optical fiber to vary the periodicity at an exposed evanescent field. The divergence is gradual so that at any given transverse position of the grating, the ridge interacting with the evanescent field are effectively parallel. The divergence is great enough so that a tuning-to-reflected bandwidth ratio of about 33:1 is demonstrated. The grating is fabricated in an amorphous silicon film on a fused quartz substrate. The film is coated with photoresist which is exposed to a holographic interference front. The substrate is tilted with respect to an interference front created by two spherically diverging beams to achieve the desired divergence. Subsequent processing, including etching are standard.

    摘要翻译: 宽带可调谐的纤维内滤波器包括具有发散脊的光栅,其可以横向于侧面抛光的光纤折射以改变暴露的消逝场处的周期性。 发散是渐进的,使得在光栅的任何给定的横向位置处,与渐逝场相互作用的脊是有效平行的。 发散度足够大,从而可以显示约33:1的调谐至反射带宽比。 光栅在熔融石英衬底上以非晶硅膜制造。 该膜被曝光到全息干涉前面的光致抗蚀剂涂覆。 基板相对于由两个球形发散光束产生的干涉前端倾斜以实现所需的发散。 后续处理,包括蚀刻是标准的。

    Method and apparatus for optical signal analysis using a gated
modulation source and an optical delay circuit to achieve a
self-homodyne receiver
    74.
    发明授权
    Method and apparatus for optical signal analysis using a gated modulation source and an optical delay circuit to achieve a self-homodyne receiver 失效
    用于使用门控调制源和光学延迟电路实现自身零差接收机的光信号分析的方法和装置

    公开(公告)号:US4859843A

    公开(公告)日:1989-08-22

    申请号:US146915

    申请日:1988-01-22

    IPC分类号: G01R23/17 G01J9/04

    CPC分类号: G01J9/04

    摘要: An actual optical field spectrum is mixed down to baseband and can be observed directly to measure the optical field spectrum of an optical signal based on a local oscillator approach. This local oscillator approach is achieved without adding an additional local oscillator. A single optical source, such as a laser, is controlled by a modulation source for selectively modulating the optical signal produced by the optical source. Accordingly, the optical signal produced by the optical source alternates between two states, namely, an unmodulated state and a modulated state which carries the optical field spectrum of interest. Preferably, the optical signal produced by the optical source is routed to an optical conduit in parallel with an optical delay line. Although the two states of the optical signal produced by the optical source occur sequentially in time, they are mixed together concurrently after being channeled through the parallel optical circuit comprising the optical conduit and the optical delay line. The unmodulated state of the optical signal produced by the optical source serves as a local oscillator signal. The parallel combination of the optical conduit and the optical delay line together with a photodetector functions as a self-homodyne receiver when fed the unmodulated and modulated states of the optical signal produced by the optical source. The self-homodyned mixing of the unmodulated and modulated states of the optical signal produced by the optical source serves to frequency-translate the optical power spectrum to within the bandwidth of an analyzer, such as a microwave spectrum analyzer.

    Fiber optic mode selector
    75.
    发明授权
    Fiber optic mode selector 失效
    光纤模式选择器

    公开(公告)号:US4828350A

    公开(公告)日:1989-05-09

    申请号:US820411

    申请日:1986-01-17

    摘要: An all fiber mode selector comprises a single-mode optical fiber and a double-mode optical fiber, each having a facing surface formed on one side of the cladding. The facing surfaces are juxtaposed in close facing relationship. The fibers are selected so that an optical signal propagating in the LP.sub.11 propagation mode of the double-mode optical fiber propagates at substantially the same phase velocity as an optical signal propagating in the LP.sub.01 propagation mode of the single-mode optical fiber. The evanescent fields of the two fibers interact to couple optical energy from the LP.sub.11 mode of the double-mode optical fiber to the LP.sub.01 mode of the single-mode optical fiber and vice versa.

    摘要翻译: 全光纤模式选择器包括单模光纤和双模光纤,每个光纤具有形成在包层的一侧上的对置表面。 面对的表面以紧密的关系并置。 选择光纤使得以双模光纤的LP11传播模式传播的光信号以与在单模光纤的LP01传播模式中传播的光信号基本相同的相位速度传播。 两条光纤的消逝场相互作用,将双模光纤的LP11模式的光能耦合到单模光纤的LP01模式,反之亦然。

    Fiber optic dye amplifier
    76.
    发明授权
    Fiber optic dye amplifier 失效
    光纤染料放大器

    公开(公告)号:US4603940A

    公开(公告)日:1986-08-05

    申请号:US527946

    申请日:1983-08-30

    摘要: A fiber optic amplifier as disclosed, comprised of a fiber optic, monomode waveguide which has a core and cladding. Part of the cladding over a predetermined region is removed and replaced by an active medium capable of absorbing light energy at a first wavelength and emitting light energy at a second wavelength. The active medium is a lasing dye which has an index of refraction adjusted to be slightly less than the index of refraction of the fiber core. The amount of cladding which is removed is adjusted such that a predetermined amount of penetration of the evanescent field from a pump light signal coupled into an end of the fiber penetrates the active medium. A probe signal to be amplified causes stimulated emission from the excited dye molecules by penetration of its evanescent field into the dye in the region where the cladding is removed.In the preferred embodiment a recirculating pump is used to circulate dye through a cavity which is placed over the portion of the fiber where the cladding is removed. The dye molecules in contact with the surface caused by removal of the cladding are continually changed. A temperature control unit maintains the temperature of the dye such that its index of refraction remains tuned to an amount just less than the index of refraction of the core.

    摘要翻译: 公开的一种光纤放大器,包括具有芯和包层的光纤,单模波导。 除去预定区域上的部分包层,并用能够吸收第一波长的光能并以第二波长发射光能的活性介质代替。 活性介质是一种激光折射率,其折射率被调整为略小于纤维芯的折射率。 被去除的包层的量被调整为使得从耦合到纤维的端部的泵浦光信号中的消逝场的预定量的穿透穿透活性介质。 要被放大的探针信号通过在消除包层的区域中将其消逝场穿透到染料中,从而激发染料分子的受激发射。 在优选实施例中,循环泵用于使染料循环通过空腔,所述空腔放置在去除了包层的纤维部分上。 由去除包层引起的与表面接触的染料分子不断变化。 温度控制单元保持染料的温度,使得其折射率保持调谐到刚好小于芯的折射率的量。

    Integration of laser sources and detectors for a passive optical network

    公开(公告)号:US07944960B2

    公开(公告)日:2011-05-17

    申请号:US12564011

    申请日:2009-09-21

    IPC分类号: H01S5/00

    CPC分类号: H04B10/506

    摘要: Various methods and apparatuses are described in which an array of optical gain mediums capable of lasing are contained in a single integral unit. The array may contain four or more optical gain mediums capable of lasing. Each optical gain medium capable of lasing supplies a separate optical signal containing a band of wavelengths different than the other optical gain mediums capable of lasing in the array to a first multiplexer/demultiplexer. A connection for an output fiber exists to route an optical signal to and from a passive optical network.

    Integration of laser sources and detectors for a passive optical network
    78.
    发明授权
    Integration of laser sources and detectors for a passive optical network 有权
    无源光网络的激光源和检测器的集成

    公开(公告)号:US07916767B2

    公开(公告)日:2011-03-29

    申请号:US12564007

    申请日:2009-09-21

    IPC分类号: H01S5/00

    CPC分类号: H04B10/506

    摘要: Various methods and apparatuses are described in which an array of optical gain mediums capable of lasing are contained in a single integral unit. The array may contain four or more optical gain mediums capable of lasing. Each optical gain medium capable of lasing supplies a separate optical signal containing a band of wavelengths different than the other optical gain mediums capable of lasing in the array to a first multiplexer/demultiplexer. A connection for an output fiber exists to route an optical signal to and from a passive optical network.

    摘要翻译: 描述了各种方法和装置,其中能够激发的光学增益介质的阵列被包含在单个整体单元中。 阵列可以包含四个或更多个能够激光的光学增益介质。 能够进行激光的每个光学增益介质提供单独的光学信号,该光学信号包含波长不同于能够在该阵列中激光的其他光学增益介质的波长的波长带到第一多路复用器/解复用器。 存在用于输出光纤的连接以将光信号路由到无源光网络。

    Integration of laser sources and detectors for a passive optical network
    79.
    发明授权
    Integration of laser sources and detectors for a passive optical network 失效
    无源光网络的激光源和检测器的集成

    公开(公告)号:US07593444B2

    公开(公告)日:2009-09-22

    申请号:US11983720

    申请日:2007-11-09

    IPC分类号: H01S5/00 H01S3/14

    CPC分类号: H04B10/506

    摘要: Various methods and apparatuses are described in which an array of optical gain mediums capable of lasing are contained in a single integral unit. The array may contain four or more optical gain mediums capable of lasing. Each optical gain medium capable of lasing supplies a separate optical signal containing a band of wavelengths different than the other optical gain mediums capable of lasing in the array to a first multiplexer/demultiplexer. A connection for an output fiber exists to route an optical signal to and from a passive optical network.

    摘要翻译: 描述了各种方法和装置,其中能够激发的光学增益介质的阵列被包含在单个整体单元中。 阵列可以包含四个或更多个能够激光的光学增益介质。 能够进行激光的每个光学增益介质提供单独的光学信号,该光学信号包含波长不同于能够在该阵列中激光的其他光学增益介质的波长的波长带到第一多路复用器/解复用器。 存在用于输出光纤的连接以将光信号路由到无源光网络。

    Light source capable of lasing that is wavelength locked by an injected light signal
    80.
    发明授权
    Light source capable of lasing that is wavelength locked by an injected light signal 有权
    能够通过注入的光信号波长锁定的能够激发的光源

    公开(公告)号:US07515626B2

    公开(公告)日:2009-04-07

    申请号:US10558820

    申请日:2003-05-29

    IPC分类号: H01S3/092

    摘要: Various methods, systems, and apparatuses are described in which a light source (101) capable of lasing is wavelength locked by an injected light signal. The light source (101) capable of lasing, such as a Fabry-Perot laser diode, may have antireflective coating on one or more facets of the light source (101) capable of lasing. The light source (101) capable of lasing receives a spectral slice of a light signal from a broadband light source (113) to wavelength lock the output wavelength of the light source (101) capable of lasing within the bandwidth of the injected light signal. A current pump (141) may bias the light source (101) capable of lasing to operate as a reflective regenerate semiconductor optical amplifier so that the injected light is reflected back out a front facet after being amplified and wavelength locked. The current pump (141) may also bias the light source (101) capable of lasing such that the externally injected narrow-band light signal into the light source (101) capable of lasing suppresses the lasing modes outside of the bandwidth of injected incoherent light.

    摘要翻译: 描述了可以通过注入的光信号波长锁定能够激光的光源(101)的各种方法,系统和装置。 能够激光的光源(101),例如法布里 - 珀罗激光二极管,可以在能够发射的光源(101)的一个或多个面上具有抗反射涂层。 能够进行激光的光源(101)从宽带光源(113)接收光信号的光谱片,以在注入的光信号的带宽内波长锁定能够发光的光源(101)的输出波长。 电流泵(141)可以偏置能够发光的光源(101)作为反射再生半导体光放大器工作,使得注入的光在被放大和波长锁定之后被反射回前面。 电流泵(141)也可以偏置能够发射的光源(101),从而外部注入的窄带光信号进入能够激发的光源(101)中抑制注入非相干光带宽以外的激光模式 。