摘要:
A multi-layer mirror includes a multi-layer stack. The multi-layer stack includes a plurality of alternating layers with a multi-layer stack top layer and a spectral filter top layer arranged on the multi-layer stack. The spectral filter top layer includes a first spectral purity enhancement layer that includes a first material m1 and has a first layer thickness d1, an intermediate layer that includes a second material m2 and has a second layer thickness d2. The intermediate layer is arranged on the multi-layer stack top layer. The first material is selected from SiN, Si3N4, SiO2, ZnS, Te, diamond, CsI, Se, SiC, amorphous carbon, MgF2, CaF2, TiO2, Ge, PbF2, ZrO2, BaTiO3, LiF or NaF. The second material includes a material different from the first material, and d1+d2 has a thickness between 1.5 and 40 nm.
摘要:
A method and an apparatus for generating a polarized light beam to be projected onto an object plane are provided. A converging or diverging light beam (18) is generated. The converging or diverging light beam is projected through a member (22, 52) comprising an uniaxial birefringent material, the uniaxial birefringent material having a symmetry axis essentially parallel to the optical axis (12) of the light beam, and the member being placed at a distance from the object plane. Thereby, it is possible to create, for example a radially polarized beam that can be used for various optical purposes, e.g. for optical data reading/writing or for microscopy.
摘要:
The invention relates to an adaptation medium (100) for use in a device (45) for imaging an interior of a turbid medium (90), the device (45) for imaging an interior of a turbid medium (90) comprising: a. a receiving volume (60) for accommodating the turbid medium (90); b. an irradiation light source (50) for irradiating the turbid medium (90); c. a photodetector unit (55) for detecting light emanating from the receiving volume (60) as a result of irradiating the turbid medium (90). The invention also relates to a device (45) for imaging an interior of a turbid medium (90) and to a medical image acquisition device, the device (45) for imaging an interior of a turbid medium (90) and the medical image acquisition device comprising: a. a receiving volume (60) for accommodating a turbid medium (90); b. an irradiation light source (50) for irradiating the turbid medium (90); c. a photodetector unit (55) for detecting light emanating from the receiving volume (60) as a result of irradiating the turbid medium (90). It is an object of the invention to reduce the effect on a measurement of light from a light source other than the irradiation light source (50). According to the invention this object is achieved in that the adaptation medium (100) comprises filtering means, such as a dye, for filtering out light from a light source other than the irradiation light source (50).
摘要:
The invention relates to a system, a medical image acquisition system, and a method for imaging an interior of a turbid medium (25). The invention also relates to a marker (60) for use in the method for imaging an interior of a turbid medium (25). The system, the medical image acquisition system, and the method may be used for obtaining an image of an interior of a turbid medium (25) by: accommodation of a turbid medium (25) inside a receiving volume (20); irradiation of the receiving volume (20) with light from a light source; detection of light emanating from the receiving volume (20) as a result of irradiating the receiving volume (20) with light from the light source through the use of a photodetector unit. The detected light is then used to reconstruct an image of an interior of the turbid medium (25). According to the invention, the system, the medical acquisition system, and the method are adapted such that during a measurement the receiving volume (20) comprises at least one marker (60) comprising a predetermined concentration of a chosen fluorescent agent. The light source is arranged for generating excitation light that causes fluorescent emission in the marker (60) and the photodetector is arranged to detect light emanating from the receiving volume (20) as a result of irradiating the receiving volume (20) with excitation light. The use of a marker (60) according to the invention enables obtaining information relating to the geometry of the turbid medium (25). If the turbid medium (25) comprises an unknown concentration of a second fluorescent agent, and the light source and the photodetector unit are arranged for causing fluorescence in the second fluorescent agent and detecting the resulting fluorescence light, respectively, the use of a marker (60) according to the invention enables calibration of the signal resulting from this fluorescence light.
摘要:
A system for imaging of prostate cancer in a prostate in vivo is provided. The system utilizes Diffuse Optical Tomography (DOT) for creating a 3D image for the detection of suspicious prostate tissue. The DOT image may be used to guide the biopsy, thereby reducing the number of false negatives. A method, computer-readable medium and use are also provided.
摘要:
The invention relates to a method of acquiring image data from a turbid medium (102) using a diffuse optical tomography device, comprising: —irradiating the turbid medium (102) at a plurality of first spatial positions (106), —collecting light emanating from the turbid medium (102) at a plurality of 5 second spatial positions (136), —splitting the light collected from each second spatial position (136) into at least two optical channels (140), —measuring the intensity of the split light in each optical channel of the at least two optical channels (140) using photo detectors (142),10 —reconstructing (152) an image of the turbid medium (102) from the measured intensities.
摘要:
A multi-layer mirror includes on top of the multi-layer mirror a spectral purity enhancement layer, for example for application in an EUV lithographic apparatus. This spectral purity enhancement layer includes a first spectral purity enhancement layer, but between the multi-layer mirror and first spectral purity enhancement layer there may optionally be an intermediate layer or a second spectral purity enhancement layer and intermediate layer. Hence, multi-layer mirrors with the following configurations are possible: multi-layer mirror/first spectral purity enhancement layer; multi-layer mirror/intermediate layer/first spectral purity enhancement layer; and multi-layer mirror/second spectral purity enhancement layer/intermediate layer/first spectral purity enhancement layer. The spectral purity of normal incidence radiation may be enhanced, such that DUV radiation is diminished relatively stronger than EUV radiation.
摘要:
The invention relates to a method and system for reading data on a data layer (105) of an information carrier (101) comprising one or more servo marks (108, 109) positioned relative to said data layer (105), the system comprising: probe array generation means (104, 102) for generating a probe array comprising an array of light spots (103) intended to be applied to said information carrier (101) so as to generate output beams representative of said one or more servo marks (108, 109) and said data, wherein the distance between the focal point of one or more light spots of a portion of said probe array and a respective portion of said information carrier corresponding to at least one servo mark is different to the distance between the focal points of the light spots of the rest of the probe array and the rest of said information carrier; an image sensor (106) for receiving said output beams and generating a corresponding image; means (116) for deriving a contrast value in respect of at least of a portion of said image corresponding to said at least one servo mark (108, 109) and generating a control signal (125) derived from said contrast value, said control signal (125) being for application to actuation means (AC6) for adjusting the distance between said information carrier (101) and said array of light spots (103).
摘要:
The invention relates to a device for generating a periodical array of light spots from an input light beam, said device comprising—a periodical array of apertures (202) forming a plurality of interlaced sub-arrays of apertures,—phase shifter elements (PSi) placed in front of said apertures for imposing a phase shift to said input light beam so that each light spot is constructed as the superposition of a plurality of light spots generated by said plurality of interlaced sub-arrays of apertures. Use: Light spot generation.
摘要:
In a lithographic apparatus, a localized area of the substrate surface under a projection system is immersed in liquid. The height of a liquid supply system above the surface of the substrate can be varied using actuators. A control system uses feedforward or feedback control with input of the surface height of the substrate to maintain the liquid supply system at a predetermined height above the surface of the substrate.