IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD, AND MICROSCOPE
    73.
    发明申请
    IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD, AND MICROSCOPE 审中-公开
    图像采集设备,图像采集方法和显微镜

    公开(公告)号:US20130083317A1

    公开(公告)日:2013-04-04

    申请号:US13610561

    申请日:2012-09-11

    IPC分类号: G01B11/26

    摘要: An image acquisition apparatus includes an image-forming optical system configured to form an image of an observation area in a plane of a subject, an image sensor including a light receiving surface configured to capture an image of the observation area formed by the image-forming optical system, and a rotation unit configured to rotate at least one of the subject and the image sensor within a plane perpendicular to an optical axis of the image-forming optical system. By driving of the rotation unit, the image acquisition apparatus changes a relative position of the observation area and the light receiving surface within the plane perpendicular to the optical axis of the image-forming optical system, to capture an image of an area in the observation area not captured at a time of image capturing before driving of the rotation unit.

    摘要翻译: 一种图像获取装置包括:图像形成光学系统,被配置为形成被摄体的平面中的观察区域的图像;图像传感器,包括受光面,被配置为捕获通过图像形成形成的观察区域的图像 光学系统和旋转单元,其被配置为在垂直于成像光学系统的光轴的平面内旋转被摄体和图像传感器中的至少一个。 通过驱动旋转单元,图像获取装置改变与垂直于成像光学系统的光轴的平面内的观察区域和光接收表面的相对位置,以捕获观察中的区域的图像 在旋转单元驱动之前,在拍摄图像时未捕获的区域。

    PVD cylindrical target
    75.
    发明授权
    PVD cylindrical target 有权
    PVD圆柱形靶

    公开(公告)号:US07955673B2

    公开(公告)日:2011-06-07

    申请号:US11755318

    申请日:2007-05-30

    IPC分类号: B32B1/08 B32B27/00

    摘要: The present invention provides a PVD cylindrical target comprising an evaporation material covering the outer circumferential surface of a cylindrical substrate, the PVD cylindrical target includes a meshing part having at least either of a protruding shape and a recessed shape formed with rounded angular parts at the interface between the substrate and the evaporation material. According to such a structure, peeling or cracking of the evaporation material by a residual stress caused at the interface between the substrate and the evaporation material by a thermal expansion difference between the both can be suppressed, and sufficient adhesiveness between the both can also be ensured.

    摘要翻译: 本发明提供一种PVD圆柱形靶,其包括覆盖圆筒形基板的外圆周表面的蒸发材料,该PVD圆柱形靶包括一个啮合部分,该啮合部分具有在界面处形成有圆角形部分的突出形状和凹形中的至少一个 在基板和蒸发材料之间。 根据这样的结构,可以抑制由于两者之间的热膨胀差在基板和蒸发材料之间的界面处产生的残余应力而使蒸发材料剥离或破裂,并且还可以确保两者之间的充分的粘附性 。

    Film deposition system and film deposition method using the same
    76.
    发明授权
    Film deposition system and film deposition method using the same 有权
    薄膜沉积系统和使用其的薄膜沉积方法

    公开(公告)号:US07150792B2

    公开(公告)日:2006-12-19

    申请号:US10681345

    申请日:2003-10-09

    IPC分类号: C23C16/00 C23C13/08 B05D3/06

    CPC分类号: C23C14/541

    摘要: The present invention provides a film deposition system capable of effectively cooling a work having a large volume, and a film deposition method using this system. The film deposition system has, within a vacuum chamber 1, an evaporation source 3 for forming a film on a work 2 and a cooling device 4 for cooling the work 2, characterized in that the work 2 has an internal space 15 communicating with the outside through an opening part 14, and the cooling device 4 is insertable to and drawable from the internal space 15 through the opening part 14 of the work 2 to cool the work 2 from the inside.

    摘要翻译: 本发明提供能够有效地冷却体积大的工件的成膜系统和使用该系统的成膜方法。 膜沉积系统在真空室1内具有用于在工件2上形成膜的蒸发源3和用于冷却工件2的冷却装置4,其特征在于,工件2具有与外部连通的内部空间15 通过开口部分14,并且冷却装置4可通过工件2的开口部分14插入并从内部空间15抽出,以从内部冷却工件2。

    Vacuum evaporator
    77.
    发明授权
    Vacuum evaporator 有权
    真空蒸发器

    公开(公告)号:US07131392B2

    公开(公告)日:2006-11-07

    申请号:US10879584

    申请日:2004-06-30

    IPC分类号: C23C14/32 C23C14/24 C23C14/56

    摘要: A vacuum evaporator according to the present invention comprises a vacuum chamber, a rod-like evaporation source provided to be liftable into and out of the vacuum chamber, and a work support means for supporting, relative to the evaporation source lowered into the vacuum chamber, works W arranged to surround the evaporation source. The vacuum chamber is formed of a fixed chamber part and a movable chamber part provided connectably to and disconnectably from the fixed chamber part and mounted with the work support means. Either one movable chamber part is horizontally moved and connected to the fixed chamber part in the state where the evaporation source is raised and retreated out of the vacuum chamber to perform vacuum evaporation treatment. According to such a structure, the maintenance of the vacuum evaporator can be performed without raising or lowering the lower plate or taking out the work support means from the vacuum chamber.

    摘要翻译: 根据本发明的真空蒸发器包括真空室,设置成能够进出真空室的棒状蒸发源,以及用于相对于下降到真空室中的蒸发源支撑的工件支撑装置, 工作W布置成围绕蒸发源。 真空室由固定室部分和与固定室部分可连接并可断开地设置并安装在工件支承装置上的活动室部分构成。 在蒸发源升高并退出真空室的状态下,任一个活动室部分水平移动并连接到固定室部分,以进行真空蒸发处理。 根据这样的结构,可以在不升降下板的情况下进行真空蒸发器的维护,或从真空室取出工作支承机构。

    Method for manufacturing wired circuit board
    79.
    发明授权
    Method for manufacturing wired circuit board 失效
    布线电路板制造方法

    公开(公告)号:US06889426B2

    公开(公告)日:2005-05-10

    申请号:US10198121

    申请日:2002-07-19

    摘要: A method for manufacturing wired circuit board that enables a wired circuit board of high quality to be manufactured without changing in dimension of the wired circuit board substantially. In this method, the wired circuit board is wound in layers in the winding process in such a manner that after an uncured thermosetting resin layer is formed on the wired circuit board in the resin layer forming process, a right-side spacer and a left-side spacer are disposed on the already wound wired circuit board at both widthwise ends thereof and also an upper spacer is disposed on the right-side spacer and the left-side spacer so as to cover a widthwise area of the wired circuit board, so that the right-side spacer, the left-side spacer and the upper spacer are positioned between the layers of the wired circuit board when wound. Thereafter, the wired circuit board wound in the rolled state is heated as it is, to cure the uncured thermosetting resin layer in the curing process.

    摘要翻译: 一种用于制造布线电路板的方法,其能够在不改变布线电路板的尺寸的基础上制造高质量的布线电路板。 在这种方法中,布线电路板在卷绕过程中以这样一种方式缠绕,即在树脂层形成工艺中在布线电路板上形成未固化的热固性树脂层之后,将右侧间隔物和左侧间隔物 侧间隔件在其两个宽度方向的两端均布置在已经缠绕的布线电路板上,并且上侧间隔件设置在右侧隔离物和左侧间隔件上以覆盖布线电路板的宽度方向区域,使得 当缠绕时,右侧间隔件,左侧间隔件和上间隔件位于布线电路板的层之间。 此后,卷绕成轧制状态的布线电路板原样加热,在固化工序中固化未固化的热固性树脂层。

    Vacuum evaporator
    80.
    发明申请
    Vacuum evaporator 有权
    真空蒸发器

    公开(公告)号:US20050005860A1

    公开(公告)日:2005-01-13

    申请号:US10879584

    申请日:2004-06-30

    摘要: A vacuum evaporator according to the present invention comprises a vacuum chamber, a rod-like evaporation source provided to be liftable into and out of the vacuum chamber, and a work support means for supporting, relative to the evaporation source lowered into the vacuum chamber, works W arranged to surround the evaporation source. The vacuum chamber is formed of a fixed chamber part and a movable chamber part provided connectably to and disconnectably from the fixed chamber part and mounted with the work support means. Either one movable chamber part is horizontally moved and connected to the fixed chamber part in the state where the evaporation source is raised and retreated out of the vacuum chamber to perform vacuum evaporation treatment. According to such a structure, the maintenance of the vacuum evaporator can be performed without raising or lowering the lower plate or taking out the work support means from the vacuum chamber.

    摘要翻译: 根据本发明的真空蒸发器包括真空室,设置成能够进出真空室的棒状蒸发源,以及用于相对于下降到真空室中的蒸发源支撑的工件支撑装置, 工作W布置成围绕蒸发源。 真空室由固定室部分和与固定室部分可连接并可断开地设置并安装在工件支承装置上的活动室部分构成。 在蒸发源升高并退出真空室的状态下,任一个活动室部分水平移动并连接到固定室部分,以进行真空蒸发处理。 根据这样的结构,可以在不升降下板的情况下进行真空蒸发器的维护,或从真空室取出工作支承机构。