公开(公告)号：US20040136121A1

公开(公告)日：2004-07-15

申请号：US10341281

申请日：2003-01-13

申请人： Veeco Instruments Inc.

发明人： Ming Mao ,  Adrian J. Devasahayam ,  Jacques C.S. Kools ,  Chih-Ling Lee ,  Chih-Ching Hu ,  Patricia L. Cox

IPC分类号： G11B005/39

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3906 ,  G11B2005/3996 ,  Y10T29/49044

摘要： A thermally stable spin valve sensor having an increased GMR ratio by virtue of an AP pinned layer structure in which the first and second pinned layers are separated by an AP coupling layer having a nano-oxide layer formed as an oxidized surface portion of the AP coupling layer. The nano-oxide layer provides an increase in the specular scattering, and in turn, an increase in the GMR ratio.

摘要翻译： 一种热稳定的自旋阀传感器，其具有通过AP钉扎层结构增加的GMR比，其中第一和第二被钉扎层由具有形成为AP耦合器的氧化表面部分的纳米氧化物层的AP耦合层分开 层。 纳米氧化物层提供了镜面散射的增加，并且进而增加了GMR比。

公开(公告)号：US20040134264A1

公开(公告)日：2004-07-15

申请号：US10624246

申请日：2003-07-22

申请人： Veeco Instruments Inc.

发明人： James R. Massie

IPC分类号： G01B005/28

CPC分类号： G01Q70/02 ,  G01B5/28 ,  G01D5/26 ,  G01Q10/04 ,  Y10S977/87 ,  Y10S977/872

摘要： A metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The linkage supports a sample holder and transmits appropriate displacements generated by the actuator thereof The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the reference structure and is located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.

摘要翻译： 计量装置包括具有可在第一和第二正交方向上可控地移动的第一致动器级的致动器和与第一致动器台相邻的第二致动器级，以在与第一和第二正交方向正交的第三方向上可控地移动。 联接器联接到第二致动器台和固定到参考结构的第二端的多杆连杆组件。 联动装置支撑样品架并传递由其致动器产生的适当的位移。第二致动器级和联接器以第三正交方向移动连杆，使得连杆与第一和第二方向上的任何第二致动器台运动基本上隔离 。 目的是固定在参考结构上，并且位于光源和位置传感器之间。 位置传感器测量第一和第二方向上的第一致动器台运动。

公开(公告)号：US20040069944A1

公开(公告)日：2004-04-15

申请号：US10614425

申请日：2003-07-07

申请人： Veeco Instruments, Inc.

发明人： James R. Massie

IPC分类号： G12B021/20

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q70/02

摘要： A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or retract substantially simultaneously in response to a signal from a detector thus balancing the momentums of the first and second members and reducing the net momentum of the probe holder to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.

摘要翻译： 用于表征样品表面的装置中的平衡动量探头支架具有每个具有可伸缩的远端的第一和第二构件。 远端响应于来自检测器的信号而基本上同时地延伸或缩回，从而平衡第一和第二构件的动量并将探针保持器的净动量减小到基本为零。 平衡探头架的动量减少了设备中的寄生振荡，从而提高了性能。

公开(公告)号：US20030110844A1

公开(公告)日：2003-06-19

申请号：US10006085

申请日：2001-12-06

申请人： Veeco Instruments Inc.

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： H02N002/04 ,  G01B007/34

CPC分类号： G01Q10/065 ,  G01Q60/42 ,  Y10S977/837 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/872 ,  Y10S977/881

摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

摘要翻译： 强力扫描探针显微镜（FSPM）和对样品进行力测量的相关方法包括具有支撑样品以使样品沿三个正交方向移动的表面的压电扫描器。 FSPM还包括位移传感器，其测量样品在与表面正交的方向上的运动，并产生相应的位置信号，以便提供闭环位置反馈。 此外，相对于压电扫描器固定探针，而使用偏转检测装置来感测探针的偏转。 FSPM还包括基于位置信号产生扫描器驱动信号的控制器，并且适于根据在数据采集期间可以改变力曲线测量参数的用户定义的输入进行操作。

公开(公告)号：US20020125427A1

公开(公告)日：2002-09-12

申请号：US09904634

申请日：2001-07-13

申请人： Veeco Instruments Inc.

发明人： Ami Chand ,  Kevin J. Kjoller ,  Kenneth L. Babcock ,  Michael K. Harris

IPC分类号： G01N023/00

CPC分类号： G01Q70/16 ,  G01B5/28 ,  G01D5/26 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q80/00

摘要： A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.

摘要翻译： 一种用于操纵样品表面的方法和装置，包括悬臂，安装在悬臂上的第一尖端和安装在悬臂上的第二尖端，第一和第二尖端构造成组合以形成成像探针并分离 以形成操纵探针。 第一和第二尖端被配置成形成第一位置，其特征在于，所述尖端组合以形成成像尖端，并且所述第一和第二末端被配置成形成第二位置，其特征在于，所述尖端分离以操纵颗粒在 一个样品。 当跨越尖端施加电压时，尖端可被配置成形成第一位置，并且优选地从基本垂直于其的悬臂向下延伸。

公开(公告)号：US4184188A

公开(公告)日：1980-01-15

申请号：US869523

申请日：1978-01-16

申请人： Donald D. Briglia

发明人： Donald D. Briglia

IPC分类号： G03F7/20 ,  H01J37/20 ,  H01L21/68 ,  H01L21/683 ,  H02N13/00

CPC分类号： G03F7/20 ,  H01J37/20 ,  H01L21/68 ,  H01L21/6833 ,  H02N13/00 ,  Y10S269/903 ,  Y10T279/23

摘要： An electrostatic clamping technique for use in clamping substrates in various semiconductor fabrication processes is disclosed. One example takes the form of a substrate support plate which has deposited on its working face two layers of thermally conductive, electrically insulative RTV silicone, between which layers is located an interdigital type printed circuit capacitor energized by a DC source in the kilovolt range. Secured to the back surface of the support plate is a water cooled jacket with the entire assembly adapted for location in the incident ion beam and having good thermal dissipation properties.An alternate embodiment utilized an alumina support plate on which the capacitor of aluminum composition is deposited by vacuum evaporation; the exposed capacitor surface is rendered insulative by oxidation.

摘要翻译： 公开了一种用于在各种半导体制造工艺中夹持衬底的静电夹紧技术。 一个实例采用衬底支撑板的形式，该衬底支撑板已经沉积在其工作面上两层导热的电绝缘RTV硅树脂，其间层位于通过千伏范围内由直流电源供电的叉指型印刷电路电容器。 固定到支撑板的后表面的是水冷套，其整个组件适于位于入射离子束中并且具有良好的散热特性。 替代实施例使用氧化铝支撑板，其上通过真空蒸发沉积铝组合物的电容器; 暴露的电容器表面通过氧化而变得绝缘。

公开(公告)号：US20240142310A1

公开(公告)日：2024-05-02

申请号：US18489460

申请日：2023-10-18

申请人： VEECO INSTRUMENTS INC.

发明人： Ji-Dih HU

IPC分类号： G01J5/0821

CPC分类号： G01J5/0821

摘要： A substrate processing system in accordance with one embodiment includes a processing chamber and an optical pyrometer assembly to measure an emitted thermal radiation originating substantially from a portion of target surfaces. The optical pyrometer includes a lightpipe that comprises a core and a hollow sheath surrounding the core. The core and the sheath are concentric with one another. The sheath is formed by a chemical vapor deposition process and includes local protrusions within a hollow interior thereof to maintain a position of the core within the sheath. In particular, the local protrusions are formed so as to center at least a distal end portion of the core within the sheath. A temperature of the target surface is determined from an intensity of a portion of the emitted thermal radiation near at least one wavelength.

公开(公告)号：US11756805B2

公开(公告)日：2023-09-12

申请号：US17117762

申请日：2020-12-10

申请人： Veeco Instruments Inc.

发明人： John Taddei ,  Kenji Nulman ,  Jonathan Fijal ,  Phillip Tyler ,  Ian Rafter

IPC分类号： H01L21/67 ,  B23K1/20 ,  B08B3/04 ,  B08B3/02 ,  H01L21/02 ,  B08B5/02

CPC分类号： H01L21/67051 ,  B08B3/024 ,  B08B3/04 ,  B23K1/206 ,  B08B5/02 ,  H01L21/02334 ,  H01L21/67057

摘要： A system for removing flux from openings formed in a substrate that has openings (e.g., sized 20 microns or less) formed therein includes a spay nozzle device that has a spray nozzle arm that is formed at an angle of about 45 degrees or less for discharging fluid towards the openings in the substrate for flux removal. The angle is between about 30 degrees and 45 degrees.

公开(公告)号：US11420223B2

公开(公告)日：2022-08-23

申请号：US16434831

申请日：2019-06-07

申请人： VEECO INSTRUMENTS INC.

发明人： Steven Honigman ,  Kenji Nulman

IPC分类号： B05B15/65 ,  B05B1/00 ,  B05B15/656 ,  B08B3/02

摘要： A device for spraying substrates comprises a longitudinal extending fluid dispensing head coupled to a supply of fluid and including a perpendicularly extending flange, a spacer having first and second ends, the first end of the spacer coupled to the extending flange of the dispensing head, a nozzle adapted to eject fluid coupled to the second end of the spacer, and a locking nut enclosing the spacer and securely the dispensing head, spacer and nozzle.

公开(公告)号：US20220076976A1

公开(公告)日：2022-03-10

申请号：US17310680

申请日：2020-02-19

申请人： Veeco Instruments Inc.

发明人： Michael W. Pacier ,  Michael J. Sershen ,  Adam F. Bertuch ,  Laurent Lecordier ,  Thousif Ahamad Khan Hosakote Buden ,  Ramesh Prasad Manchaladore Narahari Rao

IPC分类号： H01L21/677 ,  C23C16/52 ,  C23C16/455

摘要： Fully automated batch production thin film deposition systems configured to deliver uniformity combined with high throughput at a low cost-per-wafer. In some examples, systems of the present disclosure include automated safe wafer handling via low-impact batch transfer via transportable wafer racks loaded with a plurality of wafers. In some examples, systems include a modular pre-heat & cool-down architecture that enables a flexible thermal management solution tailored around particular specifications.