公开(公告)号：US07573547B2

公开(公告)日：2009-08-11

申请号：US11108026

申请日：2005-04-15

Applicant: Lauren Palmateer ,  William J. Cummings ,  Brian Gally ,  Clarence Chui

Inventor： Lauren Palmateer ,  William J. Cummings ,  Brian Gally ,  Clarence Chui

IPC: G02F1/1335

CPC classification number: B81B7/0058 ,  B81B2201/045 ,  G02B26/001

Abstract: Physical forces sufficient to deform an electronic device and/or packaging for the electronic device can damage the device. Some mechanical components in a device, for example, in a microelectromechanical device and/or in an interferometric modulator are particularly susceptible to damage. Accordingly, provided herein is a packaging system and packaged electronic device that resists physical damage, a method for manufacturing the same, and a method for protecting an electronic device from physical damage. The packaging system for the electronic device includes one or more spacers that prevent or reduce damage to the electronic device arising from contact with the packaging. In some embodiments, the packaged electronic device comprising spacers is thinner than a comparable device manufactured without spacers.

Abstract translation: 足以使电子设备和/或电子设备的包装变形的物理力可能会损坏设备。 装置中的一些机械部件，例如在微机电装置和/或干涉式调制器中特别容易受损。 因此，本文提供了一种抵抗物理损坏的包装系统和封装的电子设备，其制造方法以及用于保护电子设备免受物理损坏的方法。 用于电子设备的包装系统包括一个或多个间隔件，其防止或减少由于与包装的接触而导致的对电子设备的损坏。 在一些实施例中，包括间隔物的封装电子器件比不用间隔物制造的类似器件更薄。

公开(公告)号：US20090181487A1

公开(公告)日：2009-07-16

申请号：US12315652

申请日：2008-12-05

Applicant: Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

Inventor： Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC: H01L21/02

CPC classification number: B81C1/00825 ,  B81B7/0029 ,  B81B2201/045 ,  B81B2203/033 ,  G02B26/0841 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T307/865

Abstract: A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

Abstract translation: 微型移动装置设置在单晶硅衬底上，可移动元件如活动杆和可移动梳状电极可平行移动到衬底表面，固定部分固定固定在单晶硅衬底上 绝缘层夹在中间。 在单晶硅衬底的不存在固定部分并且可移动部件位于凹部上方的表面区域中形成凹陷。 凹陷形成足够大的间隙，以防止异物引起可动部件的短路和故障。

公开(公告)号：US20090004765A1

公开(公告)日：2009-01-01

申请号：US12070931

申请日：2008-02-22

Applicant: Yoshichika Kato ,  Satoshi Yoshida ,  Keiichi Mori ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

Inventor： Yoshichika Kato ,  Satoshi Yoshida ,  Keiichi Mori ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC: H01L21/02

CPC classification number: G02B6/3584 ,  B81B3/0083 ,  B81B2201/045 ,  B81C1/00182 ,  G02B6/122 ,  G02B6/136 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3596 ,  G02B26/0841

Abstract: A micro-optic device including a complicate structure and a movable mirror is made to be manufactured in a reduced length of time. A silicon substrate and a single crystal silicon device layer with an intermediate layer of silicon dioxide interposed therebetween defines a substrate on which a layer of mask material is formed and is patterned to form a mask having the same pattern as the configuration of the intended optical device as viewed in plan view. A surface which is to be constricted as a mirror surface is chosen to be in a plane of the silicon crystal. Using the mask, the device layer is vertically etched by a reactive ion dry etching until the intermediate layer is exposed. Subsequently, using KOH solution, a wet etching which is anisotropic to the crystallographic orientation is performed with an etching rate which is on the order of 0.1 μm/min for a time interval on the order of ten minutes is performed to convert the sidewall surface of the mirror into a smooth crystallographic surface. Subsequently, the intermediate layer is selectively subject to a wet etching to remove the intermediate layer only in an area located below the movable part of the optical device.

Abstract translation: 制造包括复杂结构的微光学装置和可移动反射镜以缩短的时间来制造。 硅衬底和介于其间的二氧化硅中间层的单晶硅器件层限定了其上形成有掩模材料层的衬底并且被图案化以形成具有与所需光学器件的配置相同的图案的掩模 如平面图所示。 要被收缩成为镜面的表面被选择在硅晶体的平面内。 使用掩模，通过反应离子干蚀刻垂直蚀刻器件层，直到中间层露出。 随后，使用KOH溶液，对晶体取向进行各向异性的湿式蚀刻，以10分钟左右的时间间隔进行蚀刻速度为0.1μm/分钟左右的蚀刻速度， 镜子变成光滑的结晶表面。 随后，中间层选择性地进行湿式蚀刻，仅在位于光学器件的可移动部分下方的区域中除去中间层。

公开(公告)号：US07459331B2

公开(公告)日：2008-12-02

申请号：US11589075

申请日：2006-10-30

Applicant: Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Norinao Kouma ,  Hiromitsu Soneda ,  Fumio Yamagishi

Inventor： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Norinao Kouma ,  Hiromitsu Soneda ,  Fumio Yamagishi

IPC: H01L21/00

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00182 ,  B81C2203/0109 ,  Y10S359/904

Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

Abstract translation: 微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。 移动部件，框架和扭杆从材料基板形成为一体。 框架包括比移动部分更厚的部分。

公开(公告)号：US20080211044A1

公开(公告)日：2008-09-04

申请号：US12071513

申请日：2008-02-21

Applicant: Tamotsu Akashi ,  Tsuyoshi Yamamoto

Inventor： Tamotsu Akashi ,  Tsuyoshi Yamamoto

IPC: H01L29/84

CPC classification number: B81B3/0078 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0109 ,  G02B26/0833

Abstract: According to an aspect of an embodiment, a micro-electro-mechanical systems (MEMS) device comprises a substrate, a MEMS and a movable absorber.The MEMS has a movable part having a resonance frequency on the substrate. The movable absorber absorbs a vibration in accordance with the resonance frequency so as to vibrate itself.

Abstract translation: 根据实施例的一个方面，微电子机械系统（MEMS）装置包括衬底，MEMS和可移动吸收体。 MEMS具有在基板上具有共振频率的可移动部分。 可移动吸收体根据谐振频率吸收振动，以便自身振动。

公开(公告)号：US07355777B2

公开(公告)日：2008-04-08

申请号：US11430651

申请日：2006-05-09

Applicant: Patrick Ian Oden ,  William Craig McDonald

Inventor： Patrick Ian Oden ,  William Craig McDonald

IPC: G02F1/03 ,  G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/045 ,  B81B2203/0118

Abstract: System and method for storing energy using electromechanically active materials in micro electromechanical systems. A preferred embodiment comprises a movable element, an intermediate layer formed under the movable element, and electrical addressing circuitry formed under the intermediate layer. The intermediate layer contains a hinge and at least one flexible member associated with the movable element, with the flexible member comprising a layer made from an electromechanically active material. The electromechanically active material contracts or deforms when an electric field is applied, helping the movable element move from a first position to a second position. The use of the electromechanically active material enables the flexible member to apply a greater force on the movable element to help the movable element overcome stiction.

Abstract translation: 在微机电系统中使用机电活性材料储存能量的系统和方法。 优选实施例包括可移动元件，形成在可移动元件下方的中间层以及形成在中间层下面的电寻址电路。 中间层包含铰链和与可移动元件相关联的至少一个柔性构件，柔性构件包括由机电活性材料制成的层。 当施加电场时，机电活性材料收缩或变形，帮助可移动元件从第一位置移动到第二位置。 使用机电活性材料使得柔性构件能够在可移动元件上施加更大的力以帮助可移动元件克服粘性。

公开(公告)号：US07304556B2

公开(公告)日：2007-12-04

申请号：US10527731

申请日：2004-06-25

Applicant: Masaya Tamura ,  Shinji Kobayashi

Inventor： Masaya Tamura ,  Shinji Kobayashi

IPC: H01H51/22

CPC classification number: G02B6/358 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/045 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0833 ,  H02N1/008

Abstract: A buckling actuator has a connecting section of a supporting beam that is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of two switch positions. A substrate, stationary members, rotatable supporters, and supporting beams support a movable member in a shiftable manner in a y-axis direction, such that the movable member can be shifted between first and second switch positions. Moreover, the rotatable supporters are each provided with arm portions which extend in a radial fashion and support the corresponding supporting beam in a rotatable manner. When the movable member is being shifted, each supporting beam can be rotated without having to bend a corresponding end by a significant amount. Thus, a large barrier ΔE of potential energy of the movable member is set between the first and second switch positions. The movable member can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes. Furthermore, each arm portion prevents the movable member from being displaced in an x-axis direction.

Abstract translation: 弯曲致动器具有支撑梁的连接部分，该连接部分设置有用于允许可动构件稳定地保持在两个开关位置之一的可旋转支撑件。 基板，固定构件，旋转支撑件和支撑梁在y轴方向上以可移动的方式支撑可移动构件，使得可移动构件能够在第一和第二开关位置之间移动。 此外，旋转的支撑件各自设置有以径向方式延伸并以可旋转方式支撑相应的支撑梁的臂部分。 当可移动部件移动时，可以使每个支撑梁旋转，而不必使相应的端部弯曲大量。 因此，在第一和第二开关位置之间设置可动构件的势能的大阻挡DeltaE。 因此，即使不向电极供电，也可以将可动构件稳定地维持在开关位置的各个位置。 此外，每个臂部防止可动构件在x轴方向上移位。

公开(公告)号：US07288424B2

公开(公告)日：2007-10-30

申请号：US10720498

申请日：2003-11-24

Applicant: James A. Hunter ,  Charles B. Roxlo ,  Alexander Payne

Inventor： James A. Hunter ,  Charles B. Roxlo ,  Alexander Payne

IPC: H01L21/00

CPC classification number: G02B26/0808 ,  B81B2201/045 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/016 ,  B81C2203/0735 ,  B81C2203/0778 ,  H01L27/0611

Abstract: An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmit the processed control signals to the MEMS structure. Methods of fabricating integrated devices are also disclosed.

Abstract translation: 集成器件包括一个或多个器件驱动器和与该一个或多个器件驱动器单片耦合的微机电系统（MEMS）结构。 一个或多个设备驱动器被配置为处理接收的控制信号并将经处理的控制信号传送到MEMS结构。 还公开了制造集成器件的方法。

公开(公告)号：US07249856B2

公开(公告)日：2007-07-31

申请号：US10868603

申请日：2004-06-14

Applicant: Michael J. Sinclair

Inventor： Michael J. Sinclair

IPC: G03B21/28 ,  G03B21/00 ,  G02F1/00 ,  G02B26/00

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

公开(公告)号：US20060228066A1

公开(公告)日：2006-10-12

申请号：US10559310

申请日：2003-06-06

Applicant: Jan Ravnkilde ,  Henning Henningsen

Inventor： Jan Ravnkilde ,  Henning Henningsen

IPC: G02B6/12

CPC classification number: B81C3/008 ,  B81B2201/045 ,  B81C2203/0109 ,  G02B26/02

Abstract: The invention relates to an optical microelectromechanical structure (MEMS) comprising—an (at least one) optically transmissive layer (UTL)—an (at least one) intermediate layer structure (IL)—a (at least one) device layer (DL) said intermediate layer structure (IL) defining one or more optical paths (OP) between said substantially optically transmissive layer (UTL) and said device layer (DL), said intermediate structure layer (IL) defining the distance (d) between said optically transmissive layer (UTL) and said device layer (DL).