公开(公告)号：US07119705B2

公开(公告)日：2006-10-10

申请号：US10978260

申请日：2004-10-30

Applicant: Gregory J. Manlove ,  Robert K Constable ,  Ashraf K. Kamel ,  Gregory A. Cobb ,  Duane D. Fortune ,  William W. Fultz ,  Dennis P. Griffin ,  Thomas L. Voreis

Inventor： Gregory J. Manlove ,  Robert K Constable ,  Ashraf K. Kamel ,  Gregory A. Cobb ,  Duane D. Fortune ,  William W. Fultz ,  Dennis P. Griffin ,  Thomas L. Voreis

IPC: G08B71/00

CPC classification number: G01L1/144 ,  B60N2/002

Abstract: The capacitance of a shielded capacitive load cell is determined so as to minimize the effect of stray or parasitic capacitance between the load cell and other objects including the shield. The load cell conductors are coupled across input and output terminals of an operational amplifier that is tied to a reference voltage. A constant current is applied to the load cell, and the resulting rate of change in voltage at the amplifier output is measured as a representation of the load cell capacitance. In a vehicle seat sensor application including an electromagnetic interference shield between the load cell and the seating surface, the amplifier output is coupled to the load cell electrode furthest from the shield, the amplifier maintains the other load cell electrode at a virtual reference voltage, and the shield is tied to the reference voltage.

Abstract translation: 确定屏蔽电容性测力传感器的电容，以便最小化负载传感器和包括屏蔽的其它物体之间的杂散或寄生电容的影响。 负载传感器导体耦合在与参考电压相连的运算放大器的输入和输出端上。 将恒定电流施加到测力传感器，并且测量放大器输出端的电压变化率作为测力传感器电容的表示。 在包括负载传感器和就座表面之间的电磁干扰屏蔽的车辆座椅传感器应用中，放大器输出端耦合到距离屏蔽件最远的负载传感器电极，放大器将另一个测力传感器电极维持在虚拟参考电压，并且 屏蔽被连接到参考电压。

公开(公告)号：US20060107768A1

公开(公告)日：2006-05-25

申请号：US10995779

申请日：2004-11-23

Applicant: Jack Johnson ,  Seyed Zarabadi ,  Ian Jay

Inventor： Jack Johnson ,  Seyed Zarabadi ,  Ian Jay

IPC: G01L1/22

CPC classification number: G01L1/142 ,  G01L1/144

Abstract: A strain gauge for sensing strain is provided and includes a support substrate, and first and second electrodes supported on the substrate. The first and second electrodes include first and second capacitive plates, respectively. The first capacitive plates are movable relative to the second capacitive plates responsive to strain. The strain gauge further has an input electrically coupled to one of the first and second electrodes for receiving an input signal, and an output electrically coupled to the other of the first and second electrodes for providing an output signal which varies as a function of the capacitive coupling and is indicative of sensed strain.

Abstract translation: 提供了用于感测应变的应变计，并且包括支撑衬底以及支撑在衬底上的第一和第二电极。 第一和第二电极分别包括第一和第二电容板。 响应于应变，第一电容板相对于第二电容板可移动。 应变仪还具有电耦合到第一和第二电极中的一个用于接收输入信号的输入端，以及电耦合到第一和第二电极中的另一个的输出端，用于提供作为电容器的函数而变化的输出信号 耦合并且表示感测到的应变。

公开(公告)号：US20060092032A1

公开(公告)日：2006-05-04

申请号：US10978260

申请日：2004-10-30

Applicant: Gregory Manlove ,  Robert Constable ,  Ashraf Kamel ,  Gregory Cobb ,  Duane Fortune ,  William Fultz ,  Dennis Griffin ,  Thomas Voreis

Inventor： Gregory Manlove ,  Robert Constable ,  Ashraf Kamel ,  Gregory Cobb ,  Duane Fortune ,  William Fultz ,  Dennis Griffin ,  Thomas Voreis

IPC: G08B21/00

CPC classification number: G01L1/144 ,  B60N2/002

Abstract: The capacitance of a shielded capacitive load cell is determined so as to minimize the effect of stray or parasitic capacitance between the load cell and other objects including the shield. The load cell conductors are coupled across input and output terminals of an operational amplifier that is tied to a reference voltage. A constant current is applied to the load cell, and the resulting rate of change in voltage at the amplifier output is measured as a representation of the load cell capacitance. In a vehicle seat sensor application including an electromagnetic interference shield between the load cell and the seating surface, the amplifier output is coupled to the load cell electrode furthest from the shield, the amplifier maintains the other load cell electrode at a virtual reference voltage, and the shield is tied to the reference voltage.

公开(公告)号：US06958614B2

公开(公告)日：2005-10-25

申请号：US10446554

申请日：2003-05-28

Applicant: Hideo Morimoto

Inventor： Hideo Morimoto

IPC: G01L1/14 ,  G01L5/16 ,  G01L5/22 ,  G01L9/00 ,  G06F1/32 ,  G06F3/033 ,  G06F3/044 ,  H01H25/04 ,  G01R27/26 ,  G01D7/00

CPC classification number: G01L9/0072 ,  G01L1/142 ,  G01L1/144 ,  G01L5/165 ,  G01L5/223 ,  G06F1/3215 ,  G06F3/044 ,  H01H25/041 ,  H01H2025/048 ,  H01H2239/006 ,  H01H2300/022 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4902 ,  Y10T29/49103

Abstract: In a capacitance type sensor of the present invention, a capacitance element is constituted between a displacement electrode and a capacitance element electrode. A return-switch movable electrode is arranged above and spaced from the displacement electrode, to be placed in contact with the displaying electrode due to a displacement of a direction button. When the direction button is operated, the return-switch movable electrode is first displaced into contact with the displacement electrode. Then, the both make a displacement while keeping a contact state. When the displacement electrode is displaced to change the spacing to the capacitance element electrode, changed is the capacitance value of the capacitance element. Based on this change, a force is recognized. Herein, in the course of a transit from a state the displacement electrode and the return-switch electrode are not in contact to a state of their contact, the output signal varies necessarily beyond a threshold voltage.

Abstract translation: 在本发明的电容型传感器中，电容元件由位移电极和电容元件电极构成。 返回开关可动电极布置在位移​​电极的上方并与其间隔开，由于方向按钮的移位而与显示电极接触。 当方向按钮被操作时，首先将返回开关可移动电极移位成与置换电极接触。 然后，两者在保持接触状态的同时进行位移。 当置换电极移位以改变与电容元件电极的间隔时，改变电容元件的电容值。 基于这种变化，可以识别力。 这里，在从位移电极和返回开关电极不接触到状态的状态的过程中，输出信号必然超过阈值电压。

公开(公告)号：US20040255697A1

公开(公告)日：2004-12-23

申请号：US10889549

申请日：2004-07-12

Inventor： Kazuhiro Okada

IPC: G01D007/00

CPC classification number: G01P15/18 ,  B81B3/0021 ,  B81B2201/0235 ,  G01L1/144 ,  G01L5/165 ,  G01L5/167 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/0922 ,  G01P15/105 ,  G01P15/125 ,  G01P2015/084

Abstract: An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

Abstract translation: 在第一基板的上表面上形成电极层，进行部分除去基板的处理，以使基板具有挠性。 连接到第一基板的下表面，连接第二基板。 然后，通过切割第二基板，形成工作体和基座。 另一方面，在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板，使得两个电极以彼此之间的预定间隔彼此面对。 最后，第一，第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时，第一基板弯曲。 结果，两个电极之间的距离变化。 因此，通过两个电极之间的静电电容的变化来检测施加的加速度。

公开(公告)号：US06820493B1

公开(公告)日：2004-11-23

申请号：US09413494

申请日：1999-10-06

Applicant: Wayne Bonin

Inventor： Wayne Bonin

IPC: G01L1904

CPC classification number: G01B7/22 ,  G01L1/144 ,  G01L5/165

Abstract: A high precision force and displacement measuring device adapted to operate in at least two directions, including signal multiplexing scheme providing multiple signal channels to be transmitted through a single pickup electrode and sense amplifier, while maintaining high isolation between the channels, as well as identical electrical response characteristics of all channels. The device may be used in conjunction with a movable stage (such as on an optical microscope) to perform mechanical measurements on Micro Electro-Mechanical Systems (MEMS) devices.

Abstract translation: 一种适用于至少两个方向操作的高精度力和位移测量装置，包括提供多个信号通道的信号复用方案，以通过单个拾取电极和感测放大器传输，同时保持通道之间的高隔离度，以及相同的电气 所有通道的响应特性。 该装置可以与可移动台（诸如在光学显微镜上）结合使用以对微机电系统（MEMS）装置进行机械测量。

公开(公告)号：US06675656B1

公开(公告)日：2004-01-13

申请号：US09647958

申请日：2000-11-29

Applicant: Heinz Plöchinger

Inventor： Heinz Plöchinger

IPC: G01L912

CPC classification number: G01L1/142 ,  G01L1/144 ,  G01L9/0072

Abstract: A force or pressure sensor structure has a membrane and a counter-structure, both being provided with electrodes for determining capacitors. There are at least two capacitors connected in series or in parallel for determining a desired pressure/capacitance dependence or a desired force/capacitance dependence. The counter-structure preferably is fixed and has a multiplicity of electrode areas in the shape of segments of a circle in order to assemble electrode areas obtained by optimization in a series or parallel connection. The interconnection of the individual elementary capacitors are preferably realized by a multilayer construction. The same membrane and an identical evaluation circuit can be used for any pressure/capacitance or force/capacitance dependence desired, with only the multilayer construction requiring modification for a different dependence. The electrode structures can preferably be defined by a few specifications, such as e.g., length, width, spacing or angle, radius, respectively.

Abstract translation: 力或压力传感器结构具有膜和对向结构，两者都设置有用于确定电容器的电极。 串联或并联连接有至少两个电容器用于确定所需的压力/电容依赖性或期望的力/电容依赖性。 相对结构优选地是固定的并且具有圆形形状的多个电极区域，以便组装通过串联或并联连接优化获得的电极区域。 各个基本电容器的互连优选通过多层结构实现。 可以使用相同的膜和相同的评估电路用于所需的任何压力/电容或力/电容依赖性，只需要对不同依赖性进行修改的多层结构。 电极结构可以优选地由几个规格限定，例如分别为长度，宽度，间距或角度半径。

公开(公告)号：US06628124B1

公开(公告)日：2003-09-30

申请号：US09674387

申请日：2001-05-17

Applicant: Yutaka Yamagata ,  Tsunehiko Ozaki ,  Victor Morozov ,  Kozo Inoue

Inventor： Yutaka Yamagata ,  Tsunehiko Ozaki ,  Victor Morozov ,  Kozo Inoue

IPC: G01R2704

CPC classification number: G01L1/144 ,  G01D5/2417 ,  G01L1/142

Abstract: A sensor unit is formed by a single integral body obtained by coupling a resiliently deforming portion with a base portion without interposing a soft material therebetween, and a force applied to a probe secured to a front end of the resiliently deforming portion is measured as a change in capacitance of a capacitor constituted by electrodes secured to opposing surfaces of the resiliently deforming portion and base portion. These electrodes are connected to a resonance circuit of a high frequency oscillation circuit, and in order to measure a change in a resonance frequency which is varied in accordance with the applied force, an output signal from the high frequency oscillation circuit is counted by a digital frequency counter for a predetermined time period. It is possible to provide the electrocapacitive type force measuring apparatus which can measure a very small force with an extremely high precision without being affected by temperature variation, humidity variation and secular variation.

Abstract translation: 传感器单元由通过将弹性变形部与基部连接而不在其间插入软质而获得的单个整体形成，并且测量施加到固定到弹性变形部的前端的探针的力作为变化 由固定在弹性变形部分和基部的相对表面上的电极构成的电容器的电容。 这些电极连接到高频振荡电路的谐振电路，为了测量根据施加的力而变化的谐振频率的变化，来自高频振荡电路的输出信号由数字 频率计数器预定的时间段。 可以提供能够以非常高的精度测量非常小的力而不受温度变化，湿度变化和长期变化的影响的电容式力测量装置。

公开(公告)号：US06532824B1

公开(公告)日：2003-03-18

申请号：US09786944

申请日：2001-03-08

Applicant: Toru Ueno ,  Kazuya Mori ,  Tetsuo Yoshida

Inventor： Toru Ueno ,  Kazuya Mori ,  Tetsuo Yoshida

IPC: G01B716

CPC classification number: G01P15/125 ,  G01B7/22 ,  G01L1/142 ,  G01L1/144 ,  G01L1/148 ,  G01L3/106 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: A capacitive strain sensor comprises a substrate (119) and a pair of interdigital electrode capacitors (209, 209A) formed on the substrate. A dielectric thick film (129) having a uniform thickness and made of a material the dielectric constant of which varies with strain is provided on an elastic body having a flat or curved surface on the substrate (119). A block (318) for preventing strain from being produced is secured to one end of the substrate (119); a weight (329) is secured to the other end. The capacitors (209, 209A) are formed by interdigitally arranging a pair of electrodes being parallel linear electrodes of linear conductors on the substrate.

Abstract translation: 电容式应变传感器包括基板（119）和形成在基板上的一对叉指电极电容器（209,209A）。 具有均匀厚度并由其介电常数随应变变化的材料制成的电介质厚膜（129）设置在基板（119）上具有平坦或弯曲表面的弹性体上。 用于防止产生应变的块（318）被固定到基板（119）的一端; 重物（329）固定在另一端。 电容器（209,209A）通过在基板上以直线方式布置成线状导体的平行线状电极的一对电极而形成。

公开(公告)号：US20030024328A1

公开(公告)日：2003-02-06

申请号：US10247771

申请日：2002-09-19

Inventor： Kazuhiro Okada

IPC: G01L001/14

CPC classification number: G01P15/18 ,  B81B3/0021 ,  B81B2201/0235 ,  G01L1/144 ,  G01L5/165 ,  G01L5/167 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/0922 ,  G01P15/105 ,  G01P15/125 ,  G01P2015/084

Abstract: An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the, working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

Abstract translation: 在第一基板的上表面上形成电极层，进行部分除去基板的处理，以使基板具有挠性。 连接到第一基板的下表面，连接第二基板。 然后，通过切割第二基板，形成工作体和基座。 另一方面，在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板，使得两个电极以彼此之间的预定间隔彼此面对。 最后，第一，第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时，第一基板弯曲。 结果，两个电极之间的距离变化。 因此，通过两个电极之间的静电电容的变化来检测施加的加速度。