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公开(公告)号：US20130112856A1
公开(公告)日：2013-05-09
申请号：US13660837
申请日：2012-10-25
Applicant: The Regents of the University of California
Inventor： Daniel Ferenc
IPC: H01L31/0232
Abstract: A scalable vacuum photosensor configured to simplify mass production with a housing having an evacuated first side at an ultrahigh vacuum and a second side which does not require high vacuum. The first side of the device is sealed to a base plate, having a central electron readout element, using an oxide-free sealing technique, with the deposited sealing areas serving as high voltage throughputs from the first to second sides. A conductive photocathode layer on the transparent first side converts photons to photoelectrons and concentrates the photoelectrons upon the readout. The first and second sides together form an electrostatic lens for accelerating and focusing photoelectrons upon the readout, preferably having a scintillator which generates secondary light measured by an optical detector in the second side of the housing.
Abstract translation: 一种可缩放的真空光电传感器，其被配置为通过具有在超高真空下的抽真空的第一侧的壳体和不需要高真空的第二侧来简化批量生产。 该装置的第一侧被密封到具有中央电子读出元件的基板，使用无氧化物密封技术，沉积的密封区域用作从第一至第二侧的高电压通过量。 透明第一面上的导电光电阴极层将光子转换为光电子，并将光电子集中在读出中。 第一和第二面一起形成用于在读出时加速和聚焦光电子的静电透镜，优选地具有产生由壳体的第二侧中的光学检测器测量的二次光的闪烁体。
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公开(公告)号：US20120068068A1
公开(公告)日：2012-03-22
申请号：US13277658
申请日：2011-10-20
Applicant: Raymond Hill , Shawn McVey , John Notte, IV
Inventor： Raymond Hill , Shawn McVey , John Notte, IV
CPC classification number: H01J43/06 , H01J37/244 , H01J2237/2444 , H01J2237/24455 , H01J2237/2448 , H01J2237/24495 , H01J2237/24564 , H01J2237/24571 , H01J2237/2802
Abstract: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.
Abstract translation: 公开了包括以下的装置，系统和方法：（a）第一材料层，其位于支撑结构的第一表面上并被配置为响应于撞击第一层的入射带电粒子产生二次电子，第一层 包括被配置为允许所述入射带电粒子的一部分通过所述孔的孔; 和（b）第二材料层，其位于所述支撑结构的第二表面上并且与所述第一层分离0.5cm或更大的距离，所述第二层被配置为响应于穿过所述第一层的带电粒子而产生二次电子 孔并撞击第二层，其中装置是带电粒子检测器。
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公开(公告)号：US07928657B2
公开(公告)日：2011-04-19
申请号：US11921934
申请日：2006-06-01
Applicant: Hiroyuki Kyushima , Hideki Shimoi , Hiroyuki Sugiyama , Hitoshi Kishita , Suenori Kimura , Yuji Masuda , Takayuki Ohmura
Inventor： Hiroyuki Kyushima , Hideki Shimoi , Hiroyuki Sugiyama , Hitoshi Kishita , Suenori Kimura , Yuji Masuda , Takayuki Ohmura
CPC classification number: H01J43/06
Abstract: The present invention relates to a photomultiplier having a fine configuration capable of realizing stable detection accuracy. The photomultiplier has a housing whose inside is maintained vacuum, and a photocathode, an electron-multiplier section, and an anode are disposed in the housing. In particular, one or more control electrodes disposed in an internal space of the housing which surrounds the electron-multiplier section and the anode are electrically connected via one or more connection parts extending from an electron emission terminal of the electron-multiplier section. In this configuration, due to a voltage, instead of the applying between an electron entrance terminal and the electron emission terminal of the electron-multiplier section, being applied between the electron entrance terminal and the control electrodes, an electric potential gradient which is increased gradually from the photocathode side toward the anode side is formed in the electron-multiplier section, and a sufficient electric potential difference is provided between the electron emission terminal of the electron-multiplier section and the anode, which makes it possible to obtain stable detection accuracy.
Abstract translation: 本发明涉及具有能够实现稳定的检测精度的精细结构的光电倍增管。 光电倍增管具有内部保持真空的壳体，并且光电阴极，电子倍增器部分和阳极设置在壳体中。 特别地，设置在外壳的内部空间中的一个或多个控制电极，其围绕电子倍增器部分和阳极通过从电子倍增器部分的电子发射端延伸的一个或多个连接部分电连接。 在该结构中，由于电压而不是在电子入射端子和电子倍增器部分的电子发射端子之间施加，而被施加在电子入射端子和控制电极之间，逐渐增加的电位梯度 在电子倍增部形成从光电阴极侧朝向阳极侧，在电子倍增部的电子发射端与阳极之间设置充分的电位差，能够得到稳定的检测精度。
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74.发明授权公开(公告)号：US07923929B2
公开(公告)日：2011-04-12
申请号：US12149712
申请日：2008-05-07
Applicant: Takayuki Ohmura , Suenori Kimura , Masuo Ito
Inventor： Takayuki Ohmura , Suenori Kimura , Masuo Ito
CPC classification number: H01J43/06
Abstract: The present invention relates to a photomultiplier having a structure that enables to perform high gain and satisfy higher required characteristics. In the photomultiplier, an electron-multiplying unit accommodated in a sealed container comprises a focusing electrode, an accelerating electrode, a dynode unit, and an anode. Particularly, at least the accelerating electrode and dynode unit are held unitedly in a state that at least a first-stage dynode and a second-stage included in the dynode unit are opposite directly to the accelerating electrode not through a conductive material. A conventional metal disk for supporting directly dynodes which are set to the same potential as that of the first-stage dynode is not placed between the accelerating electrode and dynode unit; thus, variations of the transit time of electrons may be drastically reduced while the electrons reach from the cathode to the second-stage dynode via the first-stage dynode.
Abstract translation: 本发明涉及具有能够实现高增益并满足更高要求特性的结构的光电倍增管。 在光电倍增器中，容纳在密封容器中的电子倍增单元包括聚焦电极，加速电极，倍增电极单元和阳极。 特别地，加速电极和倍增电极单元至少保持在至少第一级倍增电极和包括在倍增极单元中的第二级不是通过导电材料直接与加速电极相对的状态。 在加速电极和倍增电极单元之间没有设置用于直接设置与第一级倍增电极相同电位的倍增电极的金属盘; 因此，电子的通过时间的变化可以大大降低，同时电子经由第一级倍增极从阴极到达第二级倍增极。
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公开(公告)号：US20080211403A1
公开(公告)日：2008-09-04
申请号：US12149712
申请日：2008-05-07
Applicant: Takayuki Ohmura , Suenori Kimura , Masuo Ito
Inventor： Takayuki Ohmura , Suenori Kimura , Masuo Ito
IPC: H01J43/06
CPC classification number: H01J43/06
Abstract: The present invention relates to a photomultiplier having a structure that enables to perform high gain and satisfy higher required characteristics. In the photomultiplier, an electron-multiplying unit accommodated in a sealed container comprises a focusing electrode, an accelerating electrode, a dynode unit, and an anode. Particularly, at least the accelerating electrode and dynode unit are held unitedly in a state that at least a first-stage dynode and a second-stage included in the dynode unit are opposite directly to the accelerating electrode not through a conductive material. A conventional metal disk for supporting directly dynodes which are set to the same potential as that of the first-stage dynode is not placed between the accelerating electrode and dynode unit; thus, variations of the transit time of electrons may be drastically reduced while the electrons reach from the cathode to the second-stage dynode via the first-stage dynode.
Abstract translation: 本发明涉及具有能够实现高增益并满足更高要求特性的结构的光电倍增管。 在光电倍增器中，容纳在密封容器中的电子倍增单元包括聚焦电极，加速电极，倍增电极单元和阳极。 特别地，加速电极和倍增电极单元至少保持在至少第一级倍增电极和包括在倍增极单元中的第二级不是通过导电材料直接与加速电极相对的状态。 在加速电极和倍增电极单元之间没有设置用于直接设置与第一级倍增电极相同电位的倍增电极的金属盘; 因此，电子的通过时间的变化可以大大降低，同时电子经由第一级倍增极从阴极到达第二级倍增极。
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Patent Agency Ranking
公开(公告)号：US07317283B2
公开(公告)日：2008-01-08
申请号：US11294534
申请日：2005-12-06
Applicant: Toshikazu Fujita
Inventor： Toshikazu Fujita
IPC: H01J43/18
CPC classification number: H01J43/06
Abstract: The present invention relates to a photomultiplier having a structure for performing a high gain and achieving a higher productivity in a state keeping or improving an excellent high-speed response. In the photomultiplier, an electron-multiplying unit accommodated in a sealed container has a structure that enables an integrated assembly of a focusing electrode, an accelerating electrode, a dynode unit, and an anode. Specifically, the focusing electrode has one or more notched portions to be grasped by a part of each of the insulating support members for grasping directly the dynode unit and so on when the focusing electrode itself is rotated around the tube axis of the sealed container. With this construction, the focusing electrode is fixed to the pair of insulating support members in a state that the focusing electrode is aligned with high accuracy by using the pair of insulating support member as a reference member.
Abstract translation: 本发明涉及具有用于实现高增益并且在保持状态或提高优异的高速响应方面实现更高生产率的结构的光电倍增管。 在光电倍增器中，容纳在密封容器中的电子倍增单元具有能够集中组装聚焦电极，加速电极，倍增极单元和阳极的结构。 具体地，聚焦电极具有一个或多个凹口部分，以便当聚焦电极本身围绕密封容器的管轴旋转时，通过每个绝缘支撑构件的一部分直接握持倍增极单元等来抓握。 利用这种结构，通过使用一对绝缘支撑构件作为基准构件，聚焦电极以高精度对准的状态固定在一对绝缘支撑构件上。
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公开(公告)号：US20060220554A1
公开(公告)日：2006-10-05
申请号：US11294535
申请日：2005-12-06
Applicant: Takayuki Ohmura , Suenori Kimura , Masuo Ito
Inventor： Takayuki Ohmura , Suenori Kimura , Masuo Ito
IPC: H01J43/04
CPC classification number: H01J43/06
Abstract: The present invention relates to a photomultiplier having a structure that enables to perform high gain and satisfy higher required characteristics. In the photomultiplier, an electron-multiplying unit accommodated in a sealed container comprises a focusing electrode, an accelerating electrode, a dynode unit, and an anode. Particularly, at least the accelerating electrode and dynode unit are held unitedly in a state that at least a first-stage dynode and a second-stage included in the dynode unit are opposite directly to the accelerating electrode not through a conductive material. A conventional metal disk for supporting directly dynodes which are set to the same potential as that of the first-stage dynode is not placed between the accelerating electrode and dynode unit; thus, variations of the transit time of electrons may be drastically reduced while the electrons reach from the cathode to the second-stage dynode via the first-stage dynode.
Abstract translation: 本发明涉及具有能够实现高增益并满足更高要求特性的结构的光电倍增管。 在光电倍增器中，容纳在密封容器中的电子倍增单元包括聚焦电极，加速电极，倍增电极单元和阳极。 特别地，加速电极和倍增电极单元至少保持在至少第一级倍增电极和包括在倍增极单元中的第二级不是通过导电材料直接与加速电极相对的状态。 在加速电极和倍增电极单元之间没有设置用于直接设置与第一级倍增电极相同电位的倍增电极的金属盘; 因此，电子的通过时间的变化可以大大降低，同时电子经由第一级倍增极从阴极到达第二级倍增极。
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公开(公告)号：US07102284B2
公开(公告)日：2006-09-05
申请号：US10468817
申请日：2002-02-22
Applicant: Hisaki Kato , Hideto Kawai
Inventor： Hisaki Kato , Hideto Kawai
CPC classification number: H01J43/28 , H01J43/045 , H01J43/06 , H01J43/18 , H01J43/22
Abstract: In a photomultiplier, focusing pieces of a focusing electrode are formed with sufficient height that the photocathode in the adjacent channels cannot be viewed from the first and second stage dynodes of each channel in order to prevent light reflected from the first and second stage dynodes from returning to the adjacent channels. This construction prevents the photocathode from emitting undesired electrons, thereby suppressing crosstalk. Further, by arranging condensing lenses on the outer surface of a light-receiving faceplate in correspondence with each channel, light is reliably condensed in each channel. Further, an oxide film formed over the surface of the focusing pieces prevents the reflection of light off the focusing pieces.
Abstract translation: 在光电倍增器中，聚焦电极的聚焦片形成有足够的高度，使得相邻通道中的光电阴极不能从每个通道的第一和第二级倍增电极观察，以防止从第一和第二级倍增电极反射的光返回 到相邻信道。 这种结构防止光电阴极发射不需要的电子，从而抑制串扰。 此外，通过在每个通道对应于在受光面板的外表面上布置聚光透镜，在每个通道中可靠地冷凝光。 此外，形成在聚焦片表面上的氧化膜防止光从聚焦片反射。
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公开(公告)号：US07009187B2
公开(公告)日：2006-03-07
申请号：US10606930
申请日：2003-06-26
Applicant: Robert L. Gerlach , Mark W. Utlaut , Trevor Dingle , Marek Uncovsky
Inventor： Robert L. Gerlach , Mark W. Utlaut , Trevor Dingle , Marek Uncovsky
IPC: G01K1/08
CPC classification number: H01J37/244 , H01J37/3005 , H01J43/06 , H01J49/025
Abstract: A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications. The ion-to-electron converter is preferably in the shape of a cylinder or includes multiple parallel plates
Abstract translation: 可从离子检测器切换到电子检测器的粒子检测器包括离子 - 电子转换器和闪烁体检测器。 在组件上具有一组电压，转换器对电子轨迹的影响最小，因此闪烁体检测器有效地检测电子。 通过对组件进行不同的电压设置，检测器可以以正离子模式运行，以便大多数FIB应用能够以足够的效率收集正离子。 离子 - 电子转换器优选为圆柱形或包括多个平行板
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公开(公告)号：US20040100193A1
公开(公告)日：2004-05-27
申请号：US10468817
申请日：2003-12-29
Inventor： Hisaki Kato , Hideto Kawai
IPC: H01J043/04
CPC classification number: H01J43/28 , H01J43/045 , H01J43/06 , H01J43/18 , H01J43/22
Abstract: In a photomultiplier, focusing pieces of a focusing electrode are formed with sufficient height that the photocathode in the adjacent channels cannot be viewed from the first and second stage dynodes of each channel in order to prevent light reflected from the first and second stage dynodes from returning to the adjacent channels. This construction prevents the photocathode from emitting undesired electrons, thereby suppressing crosstalk. Further, by arranging condensing lenses on the outer surface of a light-receiving faceplate in correspondence with each channel, light is reliably condensed in each channel. Further, an oxide film formed. over the surface of the focusing pieces prevents the reflection of light off the focusing pieces.
Abstract translation: 在光电倍增器中，聚焦电极的聚焦片形成有足够的高度，使得相邻通道中的光电阴极不能从每个通道的第一和第二级倍增电极观察，以防止从第一和第二级倍增电极反射的光返回 到相邻信道。 这种结构防止光电阴极发射不需要的电子，从而抑制串扰。 此外，通过在每个通道对应于在受光面板的外表面上布置聚光透镜，在每个通道中可靠地冷凝光。 此外，形成氧化物膜。 在聚焦片的表面之上防止光从聚焦片的反射。
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