公开(公告)号：US20040051046A1

公开(公告)日：2004-03-18

申请号：US10457044

申请日：2003-06-06

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： Daniel Ferenc

IPC: H01L027/00 ,  H01L025/00 ,  G01T001/24 ,  G01J001/00

CPC classification number: H01J31/49 ,  H01J9/244 ,  H01J29/894 ,  H04N5/225

Abstract: An imaging camera includes a housing that defines a proximal end and a distal end. A Fresnel lens is installed in the proximal end of the housing. Moreover, a reflection mode photocathode is installed in the distal end of the housing opposite the Fresnel lens. An electron sensor is disposed in the center of the Fresnel lens. A conductive layer is disposed on the interior of the housing. Further, the Fresnel lens establishes plural concentric optically passive surfaces that are parallel to a central axis defined by the imaging camera. A conductive layer is disposed on each optically passive surface, and an electron lens is established by the conductive layer on the interior of the housing and the conductive layers on the Fresnel lens.

Abstract translation: 成像照相机包括限定近端和远端的壳体。 菲涅尔透镜安装在壳体的近端。 此外，反射模式光电阴极安装在与菲涅尔透镜相对的壳体的远端。 电子传感器设置在菲涅尔透镜的中心。 导电层设置在壳体的内部。 此外，菲涅尔透镜设置多个同心光学被动表面，该表面平行于由成像照相机限定的中心轴线。 导电层设置在每个光学无源表面上，电子透镜由外壳内部的导电层和菲涅尔透镜上的导电层构成。

公开(公告)号：US20040027553A1

公开(公告)日：2004-02-12

申请号：US10637193

申请日：2003-08-08

Inventor： Wolfgang Henke ,  Gerhard Kunkel

IPC: G03B027/32 ,  G03F001/00 ,  G03B027/54 ,  G01B011/02 ,  G01J001/00

CPC classification number: G03F7/70133 ,  G03F1/44 ,  G03F7/70141

Abstract: A mask having at least one pair of mutually parallel slit structures, separated from one another by a distance in an opaque layer, is introduced into a mask mount. The mask side having the layer is turned to the illumination source. During mask exposure, a far field interference pattern is produced on the opposite rear side of the mask through the slit structures and projected into the substrate plane through a lens system of the exposure apparatus. The interference pattern is recorded as an image signal through exposure of a photosensitive layer of a wafer or by sensors on a movable substrate holder. Through determination of the contrast and subsequent Fourier transformation thereof as a function of distance between slits, the light distribution of the illumination can be derived. An advantageous mask has a multiplicity of slit structure pairs disposed with different angles with respect to a preferred direction and different distances in matrix form thereon.

Abstract translation: 具有至少一对相互平行的狭缝结构的掩模被引入到掩模底座中，所述狭缝结构在不透明层中彼此间隔一段距离。 具有该层的掩模侧转向照明源。 在掩模曝光期间，通过狭缝结构在掩模的相对的后侧产生远场干涉图案，并通过曝光装置的透镜系统投影到基板平面中。 通过将晶片的感光层或可移动的基板保持器上的传感器曝光来将干涉图案记录为图像信号。 通过确定作为狭缝之间的距离的函数的对比度和随后的傅里叶变换，可以导出照明的光分布。 有利的掩模具有多个狭缝结构对，其相对于优选方向具有不同的角度，并且在其上以矩阵形式设置不同的距离。

公开(公告)号：US20030231300A1

公开(公告)日：2003-12-18

申请号：US10353801

申请日：2003-01-28

Applicant: PRIMES GmbH

Inventor： Reinhard Kramer

IPC: G01J001/00

CPC classification number: G01J1/4257 ,  G01J1/0271 ,  G01J1/0414 ,  G01J2001/0257 ,  G01K17/003

Abstract: A laser power meter has a laser-radiation absorber body of metal formed with a rotationally symmetrical depression open at the radiation-receiving side of the body. At the bottom of the depression a copper reflector of a cone shape is received. The body can be connected to a lid housing the detection and display circuitry by a joint which can be locked and from which tubes can run to the body and lid to carry the electrical conductors.

Abstract translation: 激光功率计具有金属的激光辐射吸收体，其形成有在身体的辐射接收侧开口的旋转对称的凹陷。 在凹陷的底部，接收锥形的铜反射器。 主体可以连接到盖子上，盖子可以通过可锁定的连接器将检测和显示电路连接起来，从而可以从哪个管道运行到主体和盖子上以携带电导体。

公开(公告)号：US20030189176A1

公开(公告)日：2003-10-09

申请号：US10276104

申请日：2002-11-12

Inventor： Boris Chichkov ,  Andr?eacute; Egbert

IPC: H01J037/141 ,  G21G005/00 ,  G01J001/00

CPC classification number: H05G2/003

Abstract: The invention relates to a method for generating EUV radiation. Laser pulses are directed onto photoelectric transducer means (10), which generate pulses of electrically charged particles (6) as a result of the action of the laser pulses. The electrically charged particles are accelerated in an electric field and directed onto a target (4), in such a way that the target generates a plasma, which emits EUV radiation, as a result of the action of the electrically charged particles.

Abstract translation: 本发明涉及一种用于产生EUV辐射的方法。 激光脉冲被引导到由激光脉冲的作用产生的产生带电粒子（6）的脉冲的光电转换器装置（10）上。 电荷粒子在电场中被加速并被引导到目标（4）上，使得由于带电粒子的作用，目标产生发射EUV辐射的等离子体。

公开(公告)号：US20030183786A1

公开(公告)日：2003-10-02

申请号：US10393594

申请日：2003-03-21

Inventor： Steve Seidel ,  Simon Tam ,  Valluri Rao ,  Stefan Rusu ,  Richard Livengood

IPC: G01J001/00

CPC classification number: H01L23/544 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: In one embodiment, the present invention includes a method. In the method, a fiducial transistor is provided in an integrated circuit. Also in the method, a power conductor is coupled to a first terminal of the transistor. Also in the method, a ground conductor is coupled to a second terminal of the transistor. Also in the method, a control conductor is coupled to a third terminal of the transistor. Also in the method, other circuitry is provided, the other circuitry is operatively decoupled from the fiducial transistor and the other circuitry is operable without the fiducial transistor.

Abstract translation: 在一个实施例中，本发明包括一种方法。 在该方法中，在集成电路中提供基准晶体管。 同样在该方法中，电源导体耦合到晶体管的第一端子。 同样在该方法中，接地导体耦合到晶体管的第二端子。 同样在该方法中，控制导体耦合到晶体管的第三端子。 同样在该方法中，提供了其它电路，另一电路与基准晶体管可操作地去耦，而另一电路可在不使用基准晶体管的情况下工作。

公开(公告)号：US20030183784A1

公开(公告)日：2003-10-02

申请号：US09756659

申请日：2001-01-10

Inventor： Albert W. Kongable

IPC: G01J001/00

CPC classification number: B23K26/04 ,  B23K26/043 ,  F41G3/326

Abstract: A system is provided for boresighting a laser to a passive sensor using a fluorescent conversion material. A passive sensor, such as a FLIR, is aligned with a boresight module using a test pattern on a fluorescent conversion material. Laser energy is then emitted onto the fluorescent conversion material at a first wavelength which is beyond the passive sensor's operating waveband. The fluorescent conversion material then radiates the laser energy at a second wavelength which is within the passive sensor's operating waveband. The location where the laser energy is radiated on the fluorescent conversion material is used as a reference in boresighting the laser to the passive sensor.

Abstract translation: 提供了一种用于使用荧光转换材料将激光瞄准无源传感器的系统。 诸如FLIR的无源传感器使用荧光转换材料上的测试图案与视轴模块对准。 然后以超过无源传感器工作波段的第一波长将激光能量发射到荧光转换材料上。 然后，荧光转换材料以无源传感器的工作波段内的第二波长辐射激光能量。 将激光能量照射在荧光转换材料上的位置用作将激光瞄准无源传感器的参考。

公开(公告)号：US20030174314A1

公开(公告)日：2003-09-18

申请号：US10360037

申请日：2003-02-07

Inventor： Nabeel Agha Riza

IPC: G01J001/00

CPC classification number: G01J1/04 ,  G01J1/0414 ,  G01J1/4257 ,  G02B26/02 ,  G02B26/0841

Abstract: An optical beam profiler using a spatial light modulator and photodetector. In an embodiment, the spatial light modulator is a two-dimensional (2-D) small tilt digital micromirror device. The profiler features fast speed, digital controls, low polarization sensitivity, and high measurement repeatability. The 2-D multi-pixel device-based profiler allows the use of several beam profile measurement concepts including moving knife edge, scanning slit, moving pinhole, variable aperture, and 2-D photodiode array. The proposed digital optical beam profiler can be implemented with any type of digitally operated 2-D spatial light modulator device such as using liquid crystals, magneto-optics, multiple quantum wells, electro-optic polymers, and photonic crystals.

Abstract translation: 一种使用空间光调制器和光电检测器的光束轮廓仪。 在一个实施例中，空间光调制器是二维（2-D）小倾斜数字微镜器件。 分析仪具有快速，数字控制，低极化灵敏度和高测量重复性。 基于2-D多像素设备的轮廓仪允许使用多个光束轮廓测量概念，包括移动刀刃，扫描狭缝，移动针孔，可变孔径和2-D光电二极管阵列。 所提出的数字光束轮廓仪可以用任何类型的数字操作的2-D空间光调制器装置来实现，例如使用液晶，磁光，多量子阱，电光聚合物和光子晶体。

公开(公告)号：US20030155530A1

公开(公告)日：2003-08-21

申请号：US10169845

申请日：2002-11-26

Inventor： Nabil Adnani ,  Gino Fallone

IPC: G01J001/00 ,  G01N021/00 ,  G01N023/00

CPC classification number: G21K5/04 ,  A61N5/10 ,  A61N2005/109 ,  H05H3/06

Abstract: A high energy electron accelerator (LINAC) can be employed for neutron-based therapy and imaging methods. Methods and systems are described for producing a thermal neutron image of a subject using a LINAC. Methods are also described for treating diseased tissues by neutron capture therapy or neutron capture enhanced photon therapy using a LINAC.

Abstract translation: 高能电子加速器（LINAC）可用于基于中子的治疗和成像方法。 描述了使用LINAC产生受试者的热中子图像的方法和系统。 还描述了通过中子捕获治疗或使用LINAC的中子俘获增强光子治疗来治疗患病组织的方法。

公开(公告)号：US20030086077A1

公开(公告)日：2003-05-08

申请号：US10194454

申请日：2002-07-12

Inventor： Masayuki Kayano ,  Nobuaki Takeda ,  Manabu Fujisawa ,  Kenji Hayashi ,  Shigeki Fukushima ,  Toyoki Shigematsu ,  Shigeto Suzuki

IPC: G01J001/00

CPC classification number: G01S15/872 ,  B60Q1/10 ,  B60Q2300/116 ,  B60Q2300/132

Abstract: An optical axis adjusting system for a vehicle head lamp detects the inclination of the front part of a vehicle with respect to a road surface and controls an optical axis adjusting system by an ECU according to the detected inclination to adjust the optical axis of the head lamp. Therefore, the optical axis adjusting system is capable of finding the accurate inclination of the entire vehicle and properly adjusting the optical axis.

Abstract translation: 用于车辆头灯的光轴调节系统检测车辆前方相对于路面的倾斜，并根据检测到的倾斜度由ECU控制光轴调节系统，以调节头灯的光轴 。 因此，光轴调整系统能够找到整个车辆的准确倾斜度并适当地调节光轴。

公开(公告)号：US20030043366A1

公开(公告)日：2003-03-06

申请号：US10228607

申请日：2002-08-27

Applicant: Ando Electric Co., Ltd.

Inventor： Hiroshi Ohta ,  Makoto Yoshida

IPC: G01J001/00

CPC classification number: G01J11/00

Abstract: An optical sampling waveform measuring apparatus can measure waveform of a high-speed signal light P8 sensitively, accurately, and in high time resolution, Raman shift light which is generated from a light pulse having a narrower pulse width than the signal light to be measured is used as a sampling light pulse.

Abstract translation: 光采样波形测量装置可以灵敏，准确地测量高速信号光P8的波形，并且在高时间分辨率下，从具有比待测信号光的脉冲宽度窄的光脉冲产生的拉曼偏移光是 用作采样光脉冲。