Remover solution composition for resist and method for removing resist
using the same
    82.
    发明授权
    Remover solution composition for resist and method for removing resist using the same 失效
    去除抗蚀剂的溶液组合物及使用其去除抗蚀剂的方法

    公开(公告)号:US5792274A

    公开(公告)日:1998-08-11

    申请号:US747898

    申请日:1996-11-13

    CPC分类号: G03F7/423 G03F7/425

    摘要: A remover solution composition for resist which comprises (a) a salt of hydrofluoric acid with a metal-free base, (b) a water-soluble organic solvent, and (c) water and optionally (d) an anticorrosive, and has a pH of 5 to 8. A method for removing resist which comprises the steps of (I) forming a resist layer on a substrate having a metal film, (II) light-exposing the resist layer through a mask pattern and subsequently developing the resist layer to form a resist pattern, and (III) dry-etching the substrate using the resist pattern as a mask and then removing the unnecessary resist and modified resist film with the remover solution composition.

    摘要翻译: 一种抗蚀剂去除剂溶液组合物,其包含(a)氢氟酸与无金属碱的盐,(b)水溶性有机溶剂和(c)水和任选的(d)防腐蚀剂,并具有pH (I)在具有金属膜的基板上形成抗蚀剂层的步骤,(II)通过掩模图案曝光抗蚀剂层,然后将抗蚀剂层显影到 形成抗蚀剂图案,(III)使用抗蚀剂图案作为掩模对基板进行干蚀刻,然后用去除剂溶液组合物除去不需要的抗蚀剂和改性的抗蚀剂膜。

    Liquid coating composition for use in forming photoresist coating films
and a photoresist material using said composition
    83.
    发明授权
    Liquid coating composition for use in forming photoresist coating films and a photoresist material using said composition 失效
    用于形成光致抗蚀剂涂膜的液体涂料组合物和使用所述组合物的光致抗蚀剂材料

    公开(公告)号:US5783362A

    公开(公告)日:1998-07-21

    申请号:US797988

    申请日:1997-02-12

    CPC分类号: G03F7/0048 G03F7/091

    摘要: A liquid coating composition for forming an anti-interference film over a photoresist film is prepared by combining a water-soluble, film-forming component with a specified fluorosurfactant or by combining said water-soluble, film-forming component with a fluorosurfactant and a specified anionic surfactant. A coating film is formed from said liquid coating composition over a photoresist film to produce a photoresist material of a dual structure. The photoresist material is particularly effective in lessening the multiple-interference effect of light, thereby enabling the formation of very fine resist patterns having high fidelity to mask patterns.

    摘要翻译: 通过将水溶性成膜组分与特定的含氟表面活性剂结合,或将所述水溶性成膜组分与含氟表面活性剂和指定的含氟表面活性剂组合来制备用于在光致抗蚀剂膜上形成抗干扰膜的液体涂料组合物 阴离子表面活性剂。 在光致抗蚀剂膜上由所述液体涂料组合物形成涂膜以产生具有双重结构的光致抗蚀剂材料。 光致抗蚀剂材料在减轻光的多重干涉效应方面特别有效,从而能够形成对掩模图案具有高保真度的非常精细的抗蚀剂图案。

    Stock developer solutions for photoresists and developer solutions
prepared by dilution thereof
    84.
    发明授权
    Stock developer solutions for photoresists and developer solutions prepared by dilution thereof 失效
    用于通过稀释制备的光致抗蚀剂和显影剂溶液的库存显影剂溶液

    公开(公告)号:US5753421A

    公开(公告)日:1998-05-19

    申请号:US412885

    申请日:1995-03-29

    IPC分类号: G03F7/32 G03F7/30

    CPC分类号: G03F7/32

    摘要: Stock developer solutions for photoresists contain an organic base free from metal ions and at least one compound having a specified weight average molecular weight that is selected from among polyethylene oxide compounds, polypropylene oxide compounds and ethylene oxide/propylene oxide adducts. The stock developer solutions may be diluted to requisite concentrations to prepare developer solutions for photoresists. By adding one or more of the specified compounds to the organic base free from metal ions, one can produce highly compatible stock developer solutions for photoresists that are concentrated, that have high stability in quality and that permit ease in handling and quality control. The stock developer solutions may be diluted to prepare developer solutions that are small in the tendency to foam and effective in defoaming, that assure uniform wetting and that are capable of forming resist patterns faithful to mask patterns.

    摘要翻译: 用于光致抗蚀剂的储备显影剂溶液含有不含金属离子的有机碱和至少一种具有指定重均分子量的化合物,其选自聚环氧乙烷化合物,聚环氧丙烷化合物和环氧乙烷/环氧丙烷加合物。 原料显影剂溶液可以稀释至必需的浓度以制备用于光致抗蚀剂的显影剂溶液。 通过将一种或多种指定的化合物加入到不含金属离子的有机基质中,可以生产高浓度的光致抗蚀剂的高度相容的原料显影剂溶液,其具有高的质量稳定性并且易于处理和质量控制。 可以将原料显影剂溶液稀释以制备发泡趋势小并且有效消泡的显影剂溶液,其确保均匀的润湿并且能够形成忠实于掩模图案的抗蚀剂图案。

    Monoclonal antibody recognizing FK506-binding protein, method for
assaying FK506-binding protein level, and kit therefor
    85.
    发明授权
    Monoclonal antibody recognizing FK506-binding protein, method for assaying FK506-binding protein level, and kit therefor 失效
    识别FK506结合蛋白的单克隆抗体,用于测定FK506结合蛋白水平的方法及其试剂盒

    公开(公告)号:US5576183A

    公开(公告)日:1996-11-19

    申请号:US379563

    申请日:1995-02-10

    CPC分类号: C07K16/28

    摘要: The present invention relates to a monoclonal antibody (anti-FKBP antibody) which recognizes an antigenic determinant in an FK506-binding protein and does not inhibit the binding between an FK506-binding protein and FK506, a method for assaying an FKBP level in plasma, comprising reacting an immobilized anti-FKBP antibody, an enzyme-labelled FK506 and FKBP in a specimen, and assaying the degree of color development of an enzyme substrate, and a kit for the assay. According to the present invention, the FKBP level in plasma which affects the immunosuppressive action of FK506 can be assayed more precisely with ease, which in turn enables setting the optimal dose of FK506 in close accordance with the condition of individual patients.

    摘要翻译: PCT No.PCT / JP93 / 01136 Sec。 371日期1995年2月10日 102(e)日期1995年2月10日PCT提交1993年8月11日PCT公布。 第WO94 / 04700号公报 1994年3月3日本发明涉及识别FK506结合蛋白中的抗原决定簇并且不抑制FK506结合蛋白与FK506之间的结合的单克隆抗体(抗FKBP抗体),用于测定 包括使样品中固定的抗FKBP抗体,酶标记的FK506和FKBP,以及测定酶底物的显色程度和用于测定的试剂盒,使血浆中的FKBP水平升高。 根据本发明,可以更加准确地测定影响FK506的免疫抑制作用的血浆中的FKBP水平,从而能够根据个体患者的情况设定FK506的最佳剂量。

    Laser robot and method of controlling same, and light beam deflector and
control signal generator therefor
    86.
    发明授权
    Laser robot and method of controlling same, and light beam deflector and control signal generator therefor 失效
    激光机器人及其控制方法,以及光束偏转器及其控制信号发生器

    公开(公告)号:US5302802A

    公开(公告)日:1994-04-12

    申请号:US807828

    申请日:1992-02-05

    IPC分类号: B23K26/08 B23K26/10

    CPC分类号: B23K26/0884

    摘要: The present invention belongs to the field of techniques related to a laser robot and a method of controlling the same, particularly for performing weaving of a laser beam easily with high accuracy without the provision of a vibrating condenser lens at the leading edge of an arm.To solve the problems, in the laser robot (RB) of the present invention, a first inclined mirror (41a) is mounted on a motor (42a) inclined at a predetermined angle from a plane perpendicular to the direction of the rotation axis of a rotor shaft. Similarly, a second inclined mirror (41b) is mounted on a motor (42b) inclined at a predetermined angle. The laser beam (LB) emitted from a laser oscillator (8) is reflected in series by the first and second inclined mirrors (41a, 41b) and is subsequently propagated in the laser robot (RB) to be directed toward workpieces from the tip of a torch (7). By controlling the numbers of rotations, rotation directions and rotation phases of the first and second inclined mirrors (41a, 41b), weaving modes of the laser beam (LB) are selected.

    摘要翻译: PCT No.PCT / JP91 / 00700 Sec。 371日期:1992年2月5日 102(e)日期1992年2月5日PCT提交1991年5月20日PCT公布。 公开号WO91 / 17857 日本1991年11月28日。本发明属于与激光机器人相关的技术领域及其控制方法,特别是用于以高精度执行激光束的编织,而不需要提供振动聚光透镜 手臂的前缘。 为了解决这些问题,在本发明的激光机器人(RB)中,第一倾斜镜41a安装在从垂直于旋转轴的方向的平面倾斜预定角度的电动机42a上, 转子轴。 类似地,第二倾斜镜(41b)安装在以预定角度倾斜的马达(42b)上。 从激光振荡器(8)发射的激光束(LB)由第一和第二倾斜镜(41a,41b)串联反射,随后在激光机器人(RB)中传播,以从 火炬(7)。 通过控制第一和第二倾斜镜(41a,41b)的旋转数,旋转方向和旋转相位,选择激光束(LB)的织造模式。

    Transparent touch switch
    87.
    发明授权
    Transparent touch switch 失效
    透明触摸开关

    公开(公告)号:US5243162A

    公开(公告)日:1993-09-07

    申请号:US754860

    申请日:1991-09-04

    摘要: An optically transparent touch switch is described. The switch is of the type which comprises a pair of glass sheets, transparent electrodes formed on one side of each glass sheet in such a way that the transparent electrodes are facing each other, and a spacer provided between the paired glass sheets to establish a given gap therebetween. The spacer is made of a dispersion which comprises an adhesive resin, spherical fine particles of a transparent resin, and hard fine particles of glass fibers having substantially the same diameter as a size of the spherical fine particles.

    摘要翻译: 描述了一种光学透明的触摸开关。 该开关是这样的一种类型:一对玻璃板,透明电极,以透明电极彼此相对的方式形成在每个玻璃板的一侧上;以及间隔件,设置在成对的玻璃板之间,以建立给定的 间隙。 间隔物由包含粘合树脂,透明树脂的球形细颗粒和基本上具有与球形细颗粒的尺寸基本相同的直径的玻璃纤维的硬细颗粒的分散体制成。

    3,7-Disubstituted-2 or 3-cephem-4-carboxylic acid compounds
    89.
    发明授权
    3,7-Disubstituted-2 or 3-cephem-4-carboxylic acid compounds 失效
    3,7-二取代-2或3-头孢烯-4-羧酸化合物

    公开(公告)号:US4327093A

    公开(公告)日:1982-04-27

    申请号:US85684

    申请日:1979-10-17

    CPC分类号: C07D501/14

    摘要: 3,7-Disubstituted-2 or 3-cephem-4-carboxylic acid compounds of the formula: ##STR1## wherein R.sup.1 is acylamino or ar(lower)alkylamino; R.sup.2 is carboxy or carboxy protected by a pharmaceutically acceptable group; --N--R.sup.3, R.sup.4 is di(lower)alkylamino(lower)alkylamino, an unsaturated or saturated 3 to 8 membered heteromonocyclic (lower)alkylamino group containing 1 to 4 nitrogen atoms, an unsaturated or saturated 3 to 8 membered heteromonocyclic (lower)alkylamino group containing 1 to 4 nitrogen atoms substituted by lower alkyl or hydroxy(lower) alkyl, an unsaturated or saturated 5 to 6 membered heteromonocyclic group containing 2 to 4 nitrogen atoms, an unsaturated or saturated 5 to 6 membered heteromonocyclic group containing 2 to 4 nitrogen atoms substituted by lower alkyl or hydroxy(lower)alkyl or hydroxypiperidino, and X is --S-- or ##STR2## and pharmaceutically acceptable salts thereof. The present compounds are useful for the treatment of infectious diseases in animals and human beings.

    摘要翻译: 3,7-二取代的2-或3-头孢烯-4-羧酸化合物,其结构式如下:其中R 1是酰氨基或芳(低级)烷基氨基; R2是被药学上可接受的基团保护的羧基或羧基; -N-R3,R4是二(低级)烷基氨基(低级)烷基氨基,含有1-4个氮原子的不饱和或饱和的3至8元杂单环(低级)烷基氨基,不饱和或饱和的3至8元杂单环(低级) 由低级烷基或羟基(低级)烷基取代的含有1至4个氮原子的烷基氨基,含2-4个氮原子的不饱和或饱和5至6元杂单环基团,含有2至4个不饱和或饱和的5至6元杂单环基团 被低级烷基或羟基(低级)烷基或羟基哌啶子基取代的氮原子,X是-S-或其药学上可接受的盐。 本发明化合物可用于治疗动物和人类的感染性疾病。