ARRAY SUBSTRATE, METHOD FOR FABRICATING THE SAME, AND DISPLAY DEVICE
    82.
    发明申请
    ARRAY SUBSTRATE, METHOD FOR FABRICATING THE SAME, AND DISPLAY DEVICE 有权
    阵列基板,其制造方法和显示装置

    公开(公告)号:US20160315103A1

    公开(公告)日:2016-10-27

    申请号:US15098519

    申请日:2016-04-14

    CPC classification number: H01L29/78645 H01L27/124 H01L29/78633

    Abstract: An array substrate and a method for fabricating the same, and a display device are disclosed. The array substrate comprises light-transmissive regions for display and shading regions, a plurality of thin film transistors are provided in the shading region, the thin film transistor comprises: a base substrate; an active layer, a gate insulating layer, agate and a passivation layer sequentially provided on the base substrate; and a source and a drain provided on the passivation layer, the source and the drain comprise a conductive shading layer connected to the active layer and a copper layer provided on the conductive shading layer, the conductive shading layer is provided between the active layer and the copper layer, and at least a part of region of the shading region other than the source and the drain is provided with the conductive shading layer.

    Abstract translation: 阵列基板及其制造方法以及显示装置。 阵列基板包括用于显示和阴影区域的透光区域,在阴影区域中设置多个薄膜晶体管,薄膜晶体管包括:基底基板; 依次设置在基底基板上的有源层,栅极绝缘层,玛瑙和钝化层; 以及设置在钝化层上的源极和漏极,源极和漏极包括连接到有源层的导电性遮光层和设置在导电性遮光层上的铜层,导电性遮光层设置在有源层和 铜层,并且除了源极和漏极之外的阴影区域的至少一部分区域设置有导电性遮光层。

    METHOD FOR PATTERNING A GRAPHENE LAYER AND METHOD FOR MANUFACTURING A DISPLAY SUBSTRATE
    84.
    发明申请
    METHOD FOR PATTERNING A GRAPHENE LAYER AND METHOD FOR MANUFACTURING A DISPLAY SUBSTRATE 有权
    用于绘制石墨层的方法和用于制造显示基板的方法

    公开(公告)号:US20150357239A1

    公开(公告)日:2015-12-10

    申请号:US14513324

    申请日:2014-10-14

    Abstract: The invention provides a method for patterning a graphene layer and a method for manufacturing a display substrate. The method for patterning a graphene layer comprises: forming an isolation layer on a graphene layer; forming a photoresist layer on the isolation layer; patterning the photoresist layer; etching the isolation layer according to the patterned photoresist layer to form a patterned isolation layer; etching the graphene layer according to the patterned photoresist layer to form a patterned graphene layer; and removing the patterned isolation layer. In the method of the invention, the unfavorable condition of the prior art may be avoided that a graphene film sloughs off or a photoresist remains on a graphene film when a photoresist material is peeled off, and the product yield can be improved in the case that the production cost is controlled.

    Abstract translation: 本发明提供一种用于图案化石墨烯层的方法和用于制造显示基板的方法。 图案化石墨烯层的方法包括:在石墨烯层上形成隔离层; 在隔离层上形成光致抗蚀剂层; 图案化光致抗蚀剂层; 根据图案化的光致抗蚀剂层蚀刻隔离层以形成图案化隔离层; 根据图案化的光致抗蚀剂层蚀刻石墨烯层以形成图案化的石墨烯层; 并去除图案化隔离层。 在本发明的方法中,可以避免现有技术的不利条件,当光致抗蚀剂材料被剥离时,石墨烯薄膜脱落或光致抗蚀剂残留在石墨烯薄膜上,并且在以下情况下可提高产品产率: 生产成本受到控制。

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