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公开(公告)号:US5644158A
公开(公告)日:1997-07-01
申请号:US492690
申请日:1995-06-20
申请人: Eiji Fujii , Atsuo Inoue , Koji Arita , Toru Nasu , Akihiro Matsuda
发明人: Eiji Fujii , Atsuo Inoue , Koji Arita , Toru Nasu , Akihiro Matsuda
IPC分类号: H01L27/04 , H01L21/02 , H01L21/3105 , H01L21/324 , H01L21/768 , H01L21/822 , H01L27/10 , H01L21/3205
CPC分类号: H01L28/40 , H01L21/3105 , H01L21/76828
摘要: A semiconductor device comprising: (a) a semiconductor substrate on whose surface an integrated circuit is formed, (b) a first insulating layer formed on the semiconductor device and having first contact holes which lead to the integrated circuit, (c) a capacitance element formed on the first insulating layer, (d) a second insulating layer formed on the first insulating layer to cover the capacitance element, and having second contact holes which lead to an upper and a lower electrodes of the capacitance element respectively, and (e) interconnections which are connected to the integrated circuit and the capacitance element respectively through the first and second contact holes. The hydrogen density of this semiconductor device is 10.sup.11 atoms/cm.sup.2 or less.
摘要翻译: 一种半导体器件,包括:(a)在其表面上形成集成电路的半导体衬底,(b)形成在半导体器件上并具有通向集成电路的第一接触孔的第一绝缘层,(c)电容元件 形成在所述第一绝缘层上,(d)形成在所述第一绝缘层上以覆盖所述电容元件的第二绝缘层,以及具有分别通向所述电容元件的上下电极的第二接触孔,以及(e) 互连通过第一和第二接触孔分别连接到集成电路和电容元件。 该半导体器件的氢密度为1011原子/ cm 2以下。
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82.
公开(公告)号:US5624864A
公开(公告)日:1997-04-29
申请号:US284984
申请日:1994-08-04
申请人: Koji Arita , Eiji Fujii , Yasuhiro Shimada , Yasuhiro Uemoto , Toru Nasu , Akihiro Matsuda , Yoshihisa Nagano , Atsuo Inoue , Taketoshi Matsuura , Tatsuo Otsuki
发明人: Koji Arita , Eiji Fujii , Yasuhiro Shimada , Yasuhiro Uemoto , Toru Nasu , Akihiro Matsuda , Yoshihisa Nagano , Atsuo Inoue , Taketoshi Matsuura , Tatsuo Otsuki
IPC分类号: H01L21/02 , H01L21/8242 , H01L21/8246 , H01L27/115
CPC分类号: H01L27/11502 , H01L27/10852 , H01L27/11585 , H01L27/1159 , H01L28/40 , H01L28/55 , H01L28/60 , H01L28/75 , Y10S438/958
摘要: A semiconductor device forming a capacitor through an interlayer insulating layer on a semiconductor substrate on which an integrated circuit is formed. This semiconductor device has an interlayer insulating layer with moisture content of 0.5 g/cm.sup.3 or less, which covers the capacitor in one aspect, and has a passivation layer with hydrogen content of 10.sup.21 atoms/cm.sup.3 or less, which covers the interconnections of the capacitor in other aspect. By thus constituting, deterioration of the capacitor dielectric can be prevented which brings about the electrical reliability of the ferroelectric layer or high dielectric layer.
摘要翻译: 一种通过半导体衬底上的层间绝缘层形成电容器的半导体器件,其上形成集成电路。 该半导体装置具有含水量为0.5g / cm 3以下的层间绝缘层,其在一个方面覆盖电容器,并且具有氢含量为1021原子/ cm3以下的钝化层,其覆盖电容器的互连 在其他方面。 通过这样构成,可以防止导致铁电层或高介电层的电可靠性的电容器电介质的劣化。
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公开(公告)号:US5000802A
公开(公告)日:1991-03-19
申请号:US565330
申请日:1990-08-09
申请人: Yoshiyuki Ikeda , Atsuo Inoue , Yoshio Tanabe
发明人: Yoshiyuki Ikeda , Atsuo Inoue , Yoshio Tanabe
IPC分类号: C06B47/14
CPC分类号: C06B47/145
摘要: This invention relates to a water-in-oil type emulsion explosive comprising an aqueous oxidizer solution, an oily material, an emulsifier and hollow microspheres, in which the whole or a part of the oily material is replaced with a polymer which is oil-soluble and has a ladder structure in the molecule.
摘要翻译: 本发明涉及一种油包水型乳液炸药,其包含氧化剂水溶液,油性物质,乳化剂和中空微球,其中全部或一部分油性物质被油溶性聚合物代替 并且在分子中具有梯形结构。
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公开(公告)号:US4730465A
公开(公告)日:1988-03-15
申请号:US938999
申请日:1986-12-08
申请人: Atsuo Inoue
发明人: Atsuo Inoue
CPC分类号: F25B43/006
摘要: An accumulator for an automotive refrigeration system is disclosed. The accumulator includes a housing having a cover, an inlet port for introducing refrigerant, an outlet port, and a U-shaped tube having one end connected to the outlet port and an other end opening to the upper portion of the housing of the accumulator at a predetermined level. A conduit is vertically disposed in the housing of the accumulator and has lower end opening into the housing at a level lower than the other end of the U-shaped tube. The upper end of the conduit communicates with the outlet port through a fluid passage. A sight glass is disposed on the fluid passage to view the refrigerant. On charging the system, when refrigerant is in view, the proper volume of refrigerant is enclosed in the refrigeration system.
摘要翻译: 公开了一种用于汽车制冷系统的蓄能器。 蓄能器包括具有盖的壳体,用于引入制冷剂的入口端口,出口端口和U形管,其一端连接到出口端口,另一端开口连接到蓄电池的壳体上部 一个预定的水平。 导管垂直设置在蓄电池的壳体中,并且具有比U形管的另一端低的水平的下端开口进入壳体。 导管的上端通过流体通道与出口连通。 在流体通道上设置观察窗以观察制冷剂。 在对系统充电时,在制冷剂观察时,在制冷系统中封闭适当体积的制冷剂。
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