Exposure apparatus and aberration correction method
    81.
    发明授权
    Exposure apparatus and aberration correction method 失效
    曝光装置和像差校正方法

    公开(公告)号:US07760326B2

    公开(公告)日:2010-07-20

    申请号:US11539316

    申请日:2006-10-06

    申请人: Yoshiyuki Okada

    发明人: Yoshiyuki Okada

    摘要: An exposure apparatus for exposing a wafer to light through a pattern of a mask. The apparatus includes a projection optical system configured to project the pattern onto the wafer, a first barometer configured to measure pressure of an atmosphere in the apparatus, a second barometer configured to measure the pressure at a speed higher than that at which the first barometer measures the pressure, a calibration unit configured to calibrate an output of the second barometer based on an output of the first barometer, and an aberration correction unit configured to correct aberration of the projection optical system based on the calibrated output.

    摘要翻译: 一种用于通过掩模图案使晶片曝光的曝光装置。 该装置包括:投影光学系统,其被配置为将图案投影到晶片上;第一气压计,被配置为测量装置中的气氛的压力;第二气压计,被配置为以比第一气压计测量的速度更高的速度测量压力 所述压力,校准单元,被配置为基于所述第一气压计的输出来校准所述第二气压计的输出;以及像差校正单元,被配置为基于所述校准输出来校正所述投影光学系统的像差。

    TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD
    82.
    发明申请
    TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD 有权
    温度调节装置,曝光系统和装置制造方法

    公开(公告)号:US20100004796A1

    公开(公告)日:2010-01-07

    申请号:US12498264

    申请日:2009-07-06

    IPC分类号: G05D23/00

    CPC分类号: G05D23/1919 H01L21/67248

    摘要: A temperature regulating apparatus which regulates temperature includes a heater, a temperature detector configured to detect temperature, a calculator configured to calculate a manipulated value based on an error between a target temperature and the temperature detected by the temperature detector, and a power controller configured to supply power, having one of a voltage and current controlled in accordance with the manipulated value, to the heater. The calculator includes a first calculator having at least a proportional element of the proportional element, an integral element, and a derivative element, and a second calculator configured to calculate a square root. The first calculator and the second calculator are coupled in series with each other.

    摘要翻译: 调节温度的温度调节装置包括:加热器,被配置为检测温度的温度检测器,配置为基于目标温度和由温度检测器检测到的温度之间的误差来计算操作值的计算器;以及功率控制器, 将具有根据操作值控制的电压和电流之一的电源供给到加热器。 计算器包括具有至少比例元素的比例元素的第一计算器,积分元素和微分元素,以及被配置为计算平方根的第二计算器。 第一计算器和第二计算器彼此串联耦合。

    Computer program and apparatus for display control
    83.
    发明申请
    Computer program and apparatus for display control 审中-公开
    用于显示控制的计算机程序和设备

    公开(公告)号:US20080224950A1

    公开(公告)日:2008-09-18

    申请号:US12076121

    申请日:2008-03-13

    IPC分类号: G09G5/00

    摘要: A computer program and apparatus for display control, which are capable of allowing a user to easily know the positional relationships among a plurality of display devices in the case where he/she uses the plurality of display devices to display content. An area information memory stores information on the display areas of display devices. An identification information memory stores a plurality of identification information. When information including the number of display devices to be used and content to be displayed is entered, a creating unit creates display data so as to match an entire usable display area. A dividing unit divides the display data into a plurality of partial display data according to the display areas of the display devices, and adds identification information to sides that are adjacent to other partial display data, out of the sides of the plurality of partial display data. An output unit outputs the obtained partial display data to the display devices.

    摘要翻译: 一种用于显示控制的计算机程序和装置,其能够允许用户在他/她使用多个显示装置的情况下显示内容的情况下容易地知道多个显示装置之间的位置关系。 区域信息存储器存储关于显示设备的显示区域的信息。 识别信息存储器存储多个识别信息。 当输入包括要使用的显示装置的数量和要显示的内容的信息时,创建单元创建显示数据,以使整个可用的显示区域相匹配。 分割单元根据显示装置的显示区域将显示数据分割为多个部分显示数据,并且将多个部分显示数据的侧面中的与其他部分显示数据相邻的侧面添加识别信息 。 输出单元将获得的部分显示数据输出到显示装置。

    File device and file access method
    84.
    发明授权
    File device and file access method 失效
    文件设备和文件访问方式

    公开(公告)号:US07363331B2

    公开(公告)日:2008-04-22

    申请号:US10033905

    申请日:2002-01-03

    IPC分类号: G06F17/00

    摘要: The present invention relates to a file device and file access method that divides a file into units of clusters or blocks and records, and has as its object to provide a file device and file access method such that even when there is a failure and the data is not recorded correctly to the end the data that has been recorded can be accessed. When recording a file to an external storage device divided among a plurality of blocks, the blocks that are to record the file are pre-allocated in the external storage device, management information that indicates the allocated blocks is created and the management information is recorded in the external storage device, after which the data that makes up the file is recorded in the external storage device.

    摘要翻译: 文件设备和文件访问方法技术领域本发明涉及一种文件设备和文件访问方法,该文件设备和文件访问方法将文件分成簇或块和记录单元,并且其目的是提供文件设备和文件访问方法,使得即使存在故障并且数据 没有正确记录到最后可以访问已记录的数据。 当将文件记录到在多个块之间划分的外部存储装置时,要将该文件记录的块预先分配在外部存储装置中,创建指示所分配的块的管理信息,并将管理信息记录在 外部存储设备之后,组成文件的数据被记录在外部存储设备中。

    Connecting structure for connecting together rotation operation shaft and operation knob of electric apparatus
    85.
    发明申请
    Connecting structure for connecting together rotation operation shaft and operation knob of electric apparatus 审中-公开
    连接旋转操作轴和电器操作旋钮的连接结构

    公开(公告)号:US20070020043A1

    公开(公告)日:2007-01-25

    申请号:US11484843

    申请日:2006-07-11

    申请人: Yoshiyuki Okada

    发明人: Yoshiyuki Okada

    IPC分类号: B25G3/20 F16B2/00

    CPC分类号: B25G3/20 Y10T403/7058

    摘要: A connecting structure includes: a cylindrical part formed in a rotation operation shaft; a shaft part formed in an operation knob; and division grooves respectively extending in the axial direction of the cylindrical part, wherein: the cylindrical part and a shaft part are tight fit connected together; in two or more portions of the cylindrical part at equal angle intervals in the peripheral direction thereof, there are formed the division grooves, thereby being able to enhance the flexural deformation property of the cylindrical part as well as to secure mutual concentricity between the cylindrical part and the shaft part formed of resin; and at least one of the division grooves is used as a key groove with which is fitted a key portion formed in the outer peripheral portion of the shaft part, thereby preventing the cylindrical and shaft parts from rotating with respect to each other.

    摘要翻译: 连接结构包括:形成在旋转操作轴中的圆筒部; 轴部,形成在操作旋钮中; 以及分隔槽,其分别在所述圆筒部的轴向延伸,其中:所述圆筒部和轴部紧密配合连接在一起; 在圆筒形部分的两个或多个部分中,在其圆周方向上具有相等的角度间隔,形成分隔槽,从而能够提高圆柱形部件的弯曲变形性能,并且确保圆柱形部件之间的相互同心度 和由树脂形成的轴部分; 并且至少一个分隔槽用作键槽,其配合有形成在轴部的外周部分中的键部,从而防止圆柱体和轴部相对于彼此旋转。

    Exposure apparatus and aberration correction method
    86.
    发明申请
    Exposure apparatus and aberration correction method 失效
    曝光装置和像差校正方法

    公开(公告)号:US20060017898A1

    公开(公告)日:2006-01-26

    申请号:US11201426

    申请日:2005-08-11

    申请人: Yoshiyuki Okada

    发明人: Yoshiyuki Okada

    IPC分类号: G03B27/42

    摘要: An exposure apparatus includes a barometer for detecting air pressure, a lens driving unit for driving a lens of a projection optical system, a light-source-wavelength changing unit for changing a wavelength of an exposure light source, and a stage driving unit for driving a wafer stage in an optical-axis direction. The apparatus can correct an aberration caused by a change in air pressure by utilizing the lens driving unit, the light-source-wavelength changing unit, and the stage driving unit. During a shot of an exposure of the exposure apparatus, the lens driving unit and/or the stage driving unit are employed to correct the aberration. In the non-exposure state (shot interval), the light-source-wavelength changing unit and/or the lens driving unit as well as the stage driving unit are employed to correct the aberration.

    摘要翻译: 曝光装置包括用于检测气压的气压计,用于驱动投影光学系统的透镜的透镜驱动单元,用于改变曝光光源的波长的光源波长改变单元和用于驱动的​​平台驱动单元 在光轴方向上的晶片台。 该装置可以通过利用透镜驱动单元,光源波长改变单元和平台驱动单元来校正由气压变化引起的像差。 在曝光装置的曝光的拍摄期间,使用透镜驱动单元和/或平台驱动单元来校正像差。 在非曝光状态(拍摄间隔)中,使用光源 - 波长变化单元和/或透镜驱动单元以及平台驱动单元来校正像差。

    Heat exchange method and heat exchange apparatus
    87.
    发明申请
    Heat exchange method and heat exchange apparatus 失效
    热交换方法和换热装置

    公开(公告)号:US20060005554A1

    公开(公告)日:2006-01-12

    申请号:US11177323

    申请日:2005-07-11

    申请人: Yoshiyuki Okada

    发明人: Yoshiyuki Okada

    IPC分类号: F25B39/04 F25D17/04

    摘要: A heat exchange method, which uses a heat exchange unit for exchanging heat between first and second media to adjust the temperature of the first media, includes a detection step of detecting the temperatures of the first and second media to enter the heat exchange unit, and an adjustment step of adjusting the flow rate of the second medium based on the temperatures of the first and second media detected in the detection step.

    摘要翻译: 一种热交换方法,其使用用于在第一和第二介质之间进行热交换以调节第一介质的温度的热交换单元,包括检测第一和第二介质进入热交换单元的温度的检测步骤,以及 基于在检测步骤中检测到的第一和第二介质的温度来调整第二介质的流量的调整步骤。

    Sending method of pay contents, radio terminal and carrier
    88.
    发明申请
    Sending method of pay contents, radio terminal and carrier 有权
    支付内容发​​送方式,无线终端和承运人

    公开(公告)号:US20050222858A1

    公开(公告)日:2005-10-06

    申请号:US10969038

    申请日:2004-10-21

    申请人: Yoshiyuki Okada

    发明人: Yoshiyuki Okada

    摘要: The present invention relates to a sending method of pay contents in a communication system which carry out communication through predetermined communication network (e.g., radiotelephone network or the like) using a predetermined first communication scheme (e.g., CDMA scheme or the like). The sending method includes radio terminals which carry out peer-to-peer communication using a predetermined second communication scheme (e.g., infrared communication, communication adhering to Bluetooth standards), and a carrier which carries out communication using the first communication scheme with each of the terminals. When pay contents possessed by a first radio terminal are transferred to a second radio terminal, first, permission of transfer of the pay contents to the second radio terminal is received from a carrier and then, the pay contents are transferred. After the pay contents are transferred to the second radio terminal, the carrier is informed of completion of transfer operation.

    摘要翻译: 本发明涉及使用预定的第一通信方案(例如,CDMA方案等)通过预定通信网络(例如,无线电话网络等)进行通信的通信系统中的付费内容的发送方法。 发送方法包括使用预定的第二通信方式(例如,红外线通信,遵循蓝牙标准的通信)进行对等通信的无线终端,以及使用第一通信方式进行通信的载体, 终端。 当第一无线终端拥有的付费内容被转移到第二无线终端时,首先从载波接收到向第二无线终端传送付费内容的许可,然后传送付费内容。 在将付费内容传送到第二无线电终端之后,通知运营商完成转移操作。

    Stencil printing method and apparatus including printing drum with data storage section for storing printing and stencil making conditions
    89.
    发明授权
    Stencil printing method and apparatus including printing drum with data storage section for storing printing and stencil making conditions 有权
    模版印刷方法和装置,包括用于存储印刷和模版制作条件的数据存储部分的印刷鼓

    公开(公告)号:US06899024B2

    公开(公告)日:2005-05-31

    申请号:US10773280

    申请日:2004-02-09

    CPC分类号: B41L13/06

    摘要: A machine for stencil printing includes: a control panel for setting stencil making conditions and printing conditions; a stencil making section making a stencil sheet based on the stencil making conditions; a stencil winding section wrapping the perforated stencil sheet around a printing drum, the printing drum comprising a storage section; a printing section including a printing conditions adjustment section, the printing conditions adjustment section adjusting the printing section based on the printing conditions; and a control section storing the stencil making conditions of the stencil sheet and the printing conditions into the storage section at the time when the perforated stencil sheet is wrapped around the printing drum, the control section adjusting the printing condition adjustment section to print based on the stencil making conditions and the printing conditions in response to a direction of start of the printing processing.

    摘要翻译: 用于模版印刷的机器包括:用于设置模版制作条件和打印条件的控制面板; 基于模版制作条件制作蜡纸的模版制作部分; 所述印版滚筒包括存储部分,所述印版滚筒包括存放部分; 打印部,其包括打印条件调整部,所述打印条件调整部根据所述打印条件来调整所述打印部; 以及控制部,其在所述多孔板纸卷绕在所述印刷滚筒的同时,将所述蜡纸的所述模板制作条件和所述打印条件存储在所述存储部中,所述控制部将所述打印条件调整部调整为基于所述打印条件调整部进行打印 模版制作条件和响应于打印处理开始方向的打印条件。

    Image processing apparatus
    90.
    发明授权
    Image processing apparatus 失效
    图像处理装置

    公开(公告)号:US06385344B2

    公开(公告)日:2002-05-07

    申请号:US09075534

    申请日:1998-05-11

    IPC分类号: G06K936

    CPC分类号: H04N1/405

    摘要: An operator can select image processing for a half tone image area among a plurality of processing methods, and image processing appropriate for the image can be carried out thereby. An original image is read by an image sensor 1 and output through either simple binary conversion by binary conversion means 3 for character processing or half tone image processing by binary conversion means 2 for photograph processing. Judging means 6 judges whether image data are of a character image area or a half tone image area, and switches output between the binary conversion means 3 for character processing and the binary conversion means 2 for photograph processing. The binary conversion means 2 for photograph processing includes error diffusion processing means 10 and dither processing means 11. By setting of setting means 13 carried out by an operator, output from either the error diffusion processing means 10 or the dither processing means 11 is selected for a half tone image.

    摘要翻译: 操作员可以在多种处理方法中选择半色调图像区域的图像处理,从而可以执行适合于图像的图像处理。 原始图像由图像传感器1读取,并通过用于字符处理的二进制转换装置3的简单二进制转换或用于照片处理的二进制转换装置2的半色调图像处理来输出。 判断装置6判断图像数据是字符图像区域还是半色调图像区域,并且切换用于字符处理的二进制转换装置3和用于照片处理的二进制转换装置2之间的输出。 用于照片处理的二进制转换装置2包括误差扩散处理装置10和抖动处理装置11.通过设置由操作者进行的设定装置13,选择从误差扩散处理装置10或抖动处理装置11输出的 半色调图像。