摘要:
An exposure apparatus for exposing a wafer to light through a pattern of a mask. The apparatus includes a projection optical system configured to project the pattern onto the wafer, a first barometer configured to measure pressure of an atmosphere in the apparatus, a second barometer configured to measure the pressure at a speed higher than that at which the first barometer measures the pressure, a calibration unit configured to calibrate an output of the second barometer based on an output of the first barometer, and an aberration correction unit configured to correct aberration of the projection optical system based on the calibrated output.
摘要:
A temperature regulating apparatus which regulates temperature includes a heater, a temperature detector configured to detect temperature, a calculator configured to calculate a manipulated value based on an error between a target temperature and the temperature detected by the temperature detector, and a power controller configured to supply power, having one of a voltage and current controlled in accordance with the manipulated value, to the heater. The calculator includes a first calculator having at least a proportional element of the proportional element, an integral element, and a derivative element, and a second calculator configured to calculate a square root. The first calculator and the second calculator are coupled in series with each other.
摘要:
A computer program and apparatus for display control, which are capable of allowing a user to easily know the positional relationships among a plurality of display devices in the case where he/she uses the plurality of display devices to display content. An area information memory stores information on the display areas of display devices. An identification information memory stores a plurality of identification information. When information including the number of display devices to be used and content to be displayed is entered, a creating unit creates display data so as to match an entire usable display area. A dividing unit divides the display data into a plurality of partial display data according to the display areas of the display devices, and adds identification information to sides that are adjacent to other partial display data, out of the sides of the plurality of partial display data. An output unit outputs the obtained partial display data to the display devices.
摘要:
The present invention relates to a file device and file access method that divides a file into units of clusters or blocks and records, and has as its object to provide a file device and file access method such that even when there is a failure and the data is not recorded correctly to the end the data that has been recorded can be accessed. When recording a file to an external storage device divided among a plurality of blocks, the blocks that are to record the file are pre-allocated in the external storage device, management information that indicates the allocated blocks is created and the management information is recorded in the external storage device, after which the data that makes up the file is recorded in the external storage device.
摘要:
A connecting structure includes: a cylindrical part formed in a rotation operation shaft; a shaft part formed in an operation knob; and division grooves respectively extending in the axial direction of the cylindrical part, wherein: the cylindrical part and a shaft part are tight fit connected together; in two or more portions of the cylindrical part at equal angle intervals in the peripheral direction thereof, there are formed the division grooves, thereby being able to enhance the flexural deformation property of the cylindrical part as well as to secure mutual concentricity between the cylindrical part and the shaft part formed of resin; and at least one of the division grooves is used as a key groove with which is fitted a key portion formed in the outer peripheral portion of the shaft part, thereby preventing the cylindrical and shaft parts from rotating with respect to each other.
摘要:
An exposure apparatus includes a barometer for detecting air pressure, a lens driving unit for driving a lens of a projection optical system, a light-source-wavelength changing unit for changing a wavelength of an exposure light source, and a stage driving unit for driving a wafer stage in an optical-axis direction. The apparatus can correct an aberration caused by a change in air pressure by utilizing the lens driving unit, the light-source-wavelength changing unit, and the stage driving unit. During a shot of an exposure of the exposure apparatus, the lens driving unit and/or the stage driving unit are employed to correct the aberration. In the non-exposure state (shot interval), the light-source-wavelength changing unit and/or the lens driving unit as well as the stage driving unit are employed to correct the aberration.
摘要:
A heat exchange method, which uses a heat exchange unit for exchanging heat between first and second media to adjust the temperature of the first media, includes a detection step of detecting the temperatures of the first and second media to enter the heat exchange unit, and an adjustment step of adjusting the flow rate of the second medium based on the temperatures of the first and second media detected in the detection step.
摘要:
The present invention relates to a sending method of pay contents in a communication system which carry out communication through predetermined communication network (e.g., radiotelephone network or the like) using a predetermined first communication scheme (e.g., CDMA scheme or the like). The sending method includes radio terminals which carry out peer-to-peer communication using a predetermined second communication scheme (e.g., infrared communication, communication adhering to Bluetooth standards), and a carrier which carries out communication using the first communication scheme with each of the terminals. When pay contents possessed by a first radio terminal are transferred to a second radio terminal, first, permission of transfer of the pay contents to the second radio terminal is received from a carrier and then, the pay contents are transferred. After the pay contents are transferred to the second radio terminal, the carrier is informed of completion of transfer operation.
摘要:
A machine for stencil printing includes: a control panel for setting stencil making conditions and printing conditions; a stencil making section making a stencil sheet based on the stencil making conditions; a stencil winding section wrapping the perforated stencil sheet around a printing drum, the printing drum comprising a storage section; a printing section including a printing conditions adjustment section, the printing conditions adjustment section adjusting the printing section based on the printing conditions; and a control section storing the stencil making conditions of the stencil sheet and the printing conditions into the storage section at the time when the perforated stencil sheet is wrapped around the printing drum, the control section adjusting the printing condition adjustment section to print based on the stencil making conditions and the printing conditions in response to a direction of start of the printing processing.
摘要:
An operator can select image processing for a half tone image area among a plurality of processing methods, and image processing appropriate for the image can be carried out thereby. An original image is read by an image sensor 1 and output through either simple binary conversion by binary conversion means 3 for character processing or half tone image processing by binary conversion means 2 for photograph processing. Judging means 6 judges whether image data are of a character image area or a half tone image area, and switches output between the binary conversion means 3 for character processing and the binary conversion means 2 for photograph processing. The binary conversion means 2 for photograph processing includes error diffusion processing means 10 and dither processing means 11. By setting of setting means 13 carried out by an operator, output from either the error diffusion processing means 10 or the dither processing means 11 is selected for a half tone image.