摘要:
A planetary gear structure includes a carrier, a plurality of pinion shafts each inserted into a bore in the carrier, and a stopper plate arranged between a pair of the pinion shafts to hold the pinion shafts without any revolutions on its own axis.
摘要:
Disclosed herein is an ultra clean spring steel which contains inclusions easily elongated and broken into fine particles by hot rolling and which is easily adaptive to cold rolling and yields springs excelling in fatigue characteristics. The spring steel is characterized in that the wire contains oxide inclusions with a sulfur concentration no more than 10 mass % such that no less than 70% (in terms of numbers) of such inclusions, which exist in the outer layer outside one quarter of the diameter of the wire and have a width no smaller than 3 μm, satisfies the formula (1) below, CaO+Al2O3+SiO2+MnO+MgO>80 (mass %) (1)
摘要翻译:本发明公开了一种超清洁弹簧钢,它含有容易伸长的夹杂物,并且通过热轧将其细分成细颗粒,并且易于适应于冷轧,并且产生具有优异的疲劳特性的弹簧。 弹簧钢的特征在于,所述线材含有硫浓度不超过10质量%的氧化物夹杂物,使得存在于外部四分之一以外的外层中的不少于70%(以数量计) 线的直径并且具有不小于3μm的宽度,满足以下公式(1),<?在线公式描述=“在线公式”end =“lead”>> CaO + (质量%)(1)<α在线公式描述=“内嵌式 公式“end =”tail“?>
摘要:
A thermal processing unit of the present invention includes: a holder that holds a plurality of substrates; a reaction container into which the holder is conveyed; a process-gas supplying mechanism that supplies a process gas into the reaction container; and a heating mechanism that heats the reaction container to conduct a film-forming process to the substrates when the process gas is supplied. Flow-rate-parameter table-data associating number-data of the substrates to be processed by one batch-process with target-data of flow-rate parameter of the process gas is stored in a flow-rate-parameter table-data storing part. A controlling unit obtains target-data of flow-rate parameter of the process gas, depending on an actual number of the substrates to be processed by one batch-process, based on the flow-rate-parameter table-data stored in the flow-rate-parameter table-data storing part, and controls the process-gas supplying mechanism according to the obtained target-data. The target-data of flow-rate parameter are determined in such a manner that a speed of the film-forming process is uniform among a plurality of batch-processes in which the numbers of substrates to be processed are different from each other.
摘要:
A jig for heat treatment of a workpiece capable of use over a long period of time by minimizing or eliminating deformation thereof caused by thermal distortion and which is capable of performing heat treatment of the workpiece by reducing the amount of heat energy absorbed by the jig in a heat-treatment furnace. The jig includes an outer peripheral frame formed by a plurality of members and a mounting portion arranged inside the outer peripheral frame and also formed by a plurality of members. The workpiece rests on the mounting portion during use. The members of the outer peripheral frame and mounting portion are movably connected to each other with an expansion space being provided between each adjacent member capable of absorbing thermal expansion of the member during thermal treatment.
摘要:
The invention is a method of determining a set temperature profile for a method of controlling respective substrate temperatures of a plurality of groups in accordance with respective corresponding set temperature profiles, in a method of heat processing a plurality of substrates that are classified into the plurality of groups. The invention includes a first heat processing step of controlling respective substrate temperatures of a plurality of groups in accordance with respective predetermined provisional set temperature profiles for first-batch substrates that are classified into the plurality of groups, and of introducing a process gas to conduct a heat process to form films on the substrates; a first film-thickness measuring step of measuring a thickness of the films formed on the substrates; and a first set-temperature-profile amending step of respectively amending the provisional set temperature profiles based on the measured thickness, in such a manner that a thickness of films formed during a heat process is substantially the same between the plurality of groups. In the first heat processing step, the provisional set temperature profiles are profiles whose set temperatures change as time passes.
摘要:
A planar dielectric integrated circuit is provided such that energy conversion loss between a planar dielectric line and electronic components is small and that impedance matching between them can be easily obtained. A planar dielectric line is provided by causing two slots to oppose each other with a dielectric plate interposed in between, a slot line and line-conversion conductor patterns are provided in the end portions of the planar dielectric line, and an FET is disposed in such a manner as to be extended over the slot line.
摘要:
Electrodes are formed on both top and bottom surfaces of a dielectric plate and grounded coplanar lines, as transmission lines, are formed on the top surface of the dielectric plate. A plurality of micro-strip lines, each composed of high-impedance lines and low-impedance lines alternately connected in series, is arranged at a pitch shorter than the wavelength of a wave traveling along the grounded coplanar lines. A spurious mode propagation blocking circuit thus constructed prevents a spurious mode wave, such as a parallel-plate mode, from traveling.
摘要:
This invention is a method of determining set temperature trajectories for a heat treatment system that conducts a first heat treatment process and a second heat treatment process to an object to be processed. The method comprises the steps of: conducting the first heat treatment process to a first test object to be processed, by using a temporary first set temperature trajectory; measuring a result of the first heat treatment process produced on the first test object to be processed; and determining a first set temperature trajectory for the first heat treatment process by correcting the temporary first set temperature trajectory on the basis of the measured result of the first heat treatment process. The method also comprises the steps of: conducting the second heat treatment process to a second test object to be processed to which the first heat treatment process has been conducted by using the determined first set temperature trajectory, by using a temporary second set temperature trajectory; measuring a result of the first heat treatment process and the second heat treatment process produced on the second test object to be processed; and determining a second set temperature trajectory for the second heat treatment process by correcting the temporary second set temperature trajectory on the basis of the measured result of the first heat treatment process and the second heat treatment process.
摘要:
The present invention provides a small-sized oscillator facilitating the adjustment of a resonance frequency, permitting mass productivity to be improved, sufficiently suppressing a fundamental wave, and permitting cost reduction, and provides radio equipment using the oscillator. In this oscillator, an oscillation circuit is formed by providing a line and a Gunn diode on a dielectric substrate. An NRD guide serving as an output transmission line is formed by disposing a dielectric strip between upper and lower conductor plates, and the above-mentioned line and the NRD guide are coupled. The cut-off frequency of this NRD guide is determined so that the fundamental wave component of an oscillation signal from the oscillation circuit is cut off, so that higher harmonic components are propagated.
摘要:
A planar dielectric integrated circuit is provided such that energy conversion loss between a planar dielectric line and electronic components is small and that impedance matching between them can be easily obtained. A planar dielectric line is provided by causing two slots to oppose each other with a dielectric plate interposed in between, a slot line and line-conversion conductor patterns are provided in the end portions of the planar dielectric line, and an FET is disposed in such a manner as to be extended over the slot line.