公开(公告)号：US07278812B2

公开(公告)日：2007-10-09

申请号：US11045787

申请日：2005-01-28

申请人： Takumi Mizokawa ,  Makoto Omori ,  Yuzo Takakado ,  Hitoshi Kawano

发明人： Takumi Mizokawa ,  Makoto Omori ,  Yuzo Takakado ,  Hitoshi Kawano

IPC分类号： B65G49/07

CPC分类号： H01L21/67173 ,  H01L21/67259 ,  H01L21/67727 ,  H01L21/67736

摘要： A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which one or more wares are processed. A hermetically closed chamber is provided that defines an isolated environment inside which a controlled atmosphere. At least one guide path is provided inside the hermetically closed chamber. At least one mobile element is movable inside the hermetically closed chamber along the at least one guide path to transport one or more wafers from one wafer processing apparatus to another. A plurality of position sensors that detect positions of the at least one mobile element are deployed along each of the at least one guide path in such a manner that they are deployed at intervals close together when near the wafer processing apparatuses and deployed at wider intervals elsewhere. In another aspect, the guide rails may be constructed of a plurality of connectable rail units. Because the guide rail can be disconnected and/or connected between rail units having position sensors, rearrangement and/or reattachment of the plurality of position sensors is not necessary when changing a configuration and/or extending the layout of the guide rail.

摘要翻译： 描述了一种晶片传送系统，用于传输在被处理一个或多个晶片的多个晶片处理设备中经历同时进行不同处理的一个或多个晶片。 提供了一个密封的腔室，其限定了一个隔离的环境，其中受控气氛。 至少一个引导路径设置在气密封闭的室内。 至少一个移动元件可以沿着至少一个引导路径在气密封闭的腔室内移动，以将一个或多个晶片从一个晶片处理设备传送到另一个。 检测至少一个移动元件的位置的多个位置传感器沿着至少一个引导路径中的每一个被展开，使得它们在靠近晶片处理设备并以更宽的间隔在其他地方展开 。 在另一方面，导轨可以由多个可连接的轨道单元构成。 由于导轨可以在具有位置传感器的轨道单元之间断开和/或连接，所以在改变构造和/或延伸导轨的布局时，不需要多个位置传感器的重排和/或重新附接。

公开(公告)号：US07226096B2

公开(公告)日：2007-06-05

申请号：US10838979

申请日：2004-05-05

申请人： Hidehiro Ito ,  Makoto Iwaki ,  Masakatsu Nitawaki ,  Hitoshi Kawano

发明人： Hidehiro Ito ,  Makoto Iwaki ,  Masakatsu Nitawaki ,  Hitoshi Kawano

IPC分类号： F16C3/00

CPC分类号： E05B85/14 ,  E05B1/0053 ,  E05B7/00 ,  Y10S292/23 ,  Y10S292/31 ,  Y10T292/57

摘要： A door handle device for vehicles includes a handle body positioned on an outer surface of a vehicle door and lifted to be pulled back when the vehicle door is opened. The handle body is provided with a finger rest which extends to at least three directions of four directions including up, down, right and left directions.

摘要翻译： 一种用于车辆的门把手装置包括一个位于车门外表面上的手柄体，并且当车门打开时被抬起以拉回。 手柄主体设有手指托，其延伸至包括上，下，左，右四个方向的四个方向的至少三个方向。

公开(公告)号：US20050231364A1

公开(公告)日：2005-10-20

申请号：US11069763

申请日：2005-03-01

申请人： Masakatsu Nitawaki ,  Hitoshi Kawano

发明人： Masakatsu Nitawaki ,  Hitoshi Kawano

IPC分类号： E05B17/10 ,  E05B65/20 ,  G08B21/00

CPC分类号： E05B85/16 ,  E05B17/10 ,  E05B81/77 ,  E05B85/01

摘要： A capacitive sensor unit of a door handle device is universally adaptable to door handles of various different designs. The vehicle door handle device, having an electrostatic capacitance detection circuit incorporated in a grip portion thereof, includes a sensor unit having a detection circuit insert molded in a plastic member, a hollow cavity formed in the grip portion to receive the sensor unit, and a retaining member made of plastic material for retaining the sensor unit in the cavity. By suitably changing the shape of the retaining member, the sensor unit can be adapted to door handles of different designs.

摘要翻译： 门把手装置的电容传感器单元通常适用于各种不同设计的门把手。 具有并入其夹持部分的静电电容检测电路的车门把手装置包括具有模制在塑料构件中的检测电路插件的传感器单元，形成在把手部分中以容纳传感器单元的中空腔，以及 用于将传感器单元保持在空腔中的由塑料材料制成的保持构件。 通过适当地改变保持构件的形状，传感器单元可适用于不同设计的门把手。

公开(公告)号：US06863485B2

公开(公告)日：2005-03-08

申请号：US09490507

申请日：2000-01-25

申请人： Takumi Mizokawa ,  Makoto Omori ,  Yuzo Takakado ,  Hitoshi Kawano

发明人： Takumi Mizokawa ,  Makoto Omori ,  Yuzo Takakado ,  Hitoshi Kawano

IPC分类号： H01L21/68 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67161 ,  H01L21/67173 ,  H01L21/67259 ,  H01L21/67709 ,  H01L21/67727 ,  H01L21/67736 ,  Y10S414/135

摘要： Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamber 14 is formed parallel to these wafer processing apparatus, and a guide rail 11 is provided inside the chamber 14. A mobile element 12 driven by means of a linear motor is provided on the guide rail 11, and a wafer transfer robot 13 capable of exchanging a wafer between the wafer processing apparatus is mounted on the mobile element 12. With this structure, the wafer transfer robot 13 exchange wafers between wafer processing apparatus to perform each process on the wafers until the wafers are conveyed to the wafer processing apparatus Z.

摘要翻译： 用于在晶片上进行处理A-Z的晶片处理装置A-Z排成一行。 腔室14与这些晶片处理装置平行地形成，导槽11设置在腔室14的内部。在导轨11上设置有由线性马达驱动的移动元件12，以及具有能够 在晶片处理装置之间更换晶片的装置安装在移动元件12上。利用这种结构，晶片传送机器人13在晶片处理装置之间交换晶片，以在晶片上执行每个处理，直到晶片被输送到晶片处理装置Z 。

公开(公告)号：US06427824B1

公开(公告)日：2002-08-06

申请号：US09446194

申请日：1999-12-17

申请人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

发明人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

IPC分类号： B65G3700

CPC分类号： B66C7/12 ,  B66C11/06 ,  B66C11/08 ,  Y10S414/14

摘要： An overhead conveyance device and an overhead conveyance vehicle that can convey a conveying object, while keeping it at a minimum distance from surrounding equipment when the overhead conveying vehicle turns around during conveyance of the conveying object. The overhead conveyance device (1) is so structured that even when a carriage part (6) of the overhead conveyance vehicle (5) enters a branching part (3) for allowing the carriage part to change in traveling direction and turns around, the conveying object (25) grasped by a hand (9) can be kept unchanged in direction.

摘要翻译： 一种架空输送装置和架空输送车辆，其能够在输送物体的输送期间在架空输送车辆转过时将输送物体输送到与周围设备的最小距离处。 架空输送装置（1）的结构使得即使当顶棚运输车辆（5）的托架部分（6）进入分支部分（3）以允许托架部分在行进方向上改变并转动时，输送 用手（9）抓住的物体（25）可以在方向上保持不变。

公开(公告)号：US06152669A

公开(公告)日：2000-11-28

申请号：US747113

申请日：1996-11-08

申请人： Teruya Morita ,  Masanao Murata ,  Hitoshi Kawano ,  Tsuyoshi Tanaka ,  Hiroyuki Oyobe ,  Toshiyuki Takaoka

发明人： Teruya Morita ,  Masanao Murata ,  Hitoshi Kawano ,  Tsuyoshi Tanaka ,  Hiroyuki Oyobe ,  Toshiyuki Takaoka

IPC分类号： B65D85/86 ,  H01L21/673 ,  H01L21/677 ,  B65G49/07

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/139 ,  Y10S414/14

摘要： A mechanical interface apparatus which is capable of loading semiconductor wafers stored in a sealed container into a processing apparatus without adversely affecting the surfaces of the semiconductor wafers due to exposure to external air or dust. When a sealed container 100 is placed on top of a processing apparatus 200, latch mechanisms 201 are activated to engage with a flange 103, so as to affix the container body 101. Then, valves 3 and 5 are opened to perform a gas purge, after which a drive mechanism provided inside a lock operating mechanism 220 is operated in order to withdraw lock arms 111 from concave portions 103a, thereby unlocking the bottom lid 110. Then, wafer cassettes 106 inside the container are lowered to a predetermined position by means of an in-apparatus elevator mechanism 202, and the wafer cassettes are loaded into the processing apparatus 200 by a cassette loading mechanism.

摘要翻译： 一种机械接口装置，其能够将存储在密封容器中的半导体晶片装载到处理设备中，而不会由于暴露于外部空气或灰尘而不利地影响半导体晶片的表面。 当将密封容器100放置在处理装置200的顶部时，闩锁机构201被启动以与凸缘103接合，以便固定容器主体101.然后，打开阀3和5以进行气体吹扫， 之后，设置在锁定操作机构220内部的驱动机构，以将锁定臂111从凹部103a中撤出，从而解锁底盖110.然后，容器内部的晶片盒106通过 装置内电梯机构202，并且晶片盒通过盒装载机构装载到处理装置200中。

公开(公告)号：US6092678A

公开(公告)日：2000-07-25

申请号：US323833

申请日：1999-06-02

申请人： Hitoshi Kawano ,  Masanao Murata ,  Susumu Nakagawa ,  Motonori Inagaki ,  Toshiyuki Takaoka

发明人： Hitoshi Kawano ,  Masanao Murata ,  Susumu Nakagawa ,  Motonori Inagaki ,  Toshiyuki Takaoka

IPC分类号： B25J13/08 ,  B65G17/20 ,  B66C13/18 ,  B66C13/48

CPC分类号： H01L21/67733 ,  H01L21/67736 ,  H01L21/681

摘要： In an overhead hoist transfer having a moving carriage with a hand portion, which holds a load, elevatably suspended therefrom; and a means for teaching an appointed stop position on a placement base, on which said load is placed, to said moving carriage, LEDs 7a and 7b are installed at the hand portion 6, and a position detecting portion 12 consisting of a lens 12a and PSD 12b is installed at the placement base 53 side, in order to automatically and accurately enable a teaching of position correcting data in a short time without use of any manpower. Further, a teaching portion is installed, which detects a deviation between the present stop position and the above appointed stop position on the basis of the relative position of the hand portion 6 with respect to the placement base, which is obtained by the position detecting portion 12, and carries out a teaching to the moving carriage by, for example, radio, whereby it is not necessary for an operator to carry out a teaching by actually moving the hand portion, wherein it is possible to accurately carry out a teaching of position correcting data in a short time.

摘要翻译： 在具有具有手部的移动的支架的顶架式起重机转移中，其保持负载，可升降地悬挂在其上; 以及用于在所述移动托架上放置所述载荷的放置基座上指定指定的停止位置的装置，LED 7a和7b安装在手部6处，以及位置检测部分12，由透镜12a和 PSD 12b安装在放置基座53侧，以便在短时间内自动且准确地实现位置校正数据的教导而不使用任何人力。 此外，安装示教部，其基于由手部6相对于配置基座的相对位置来检测当前停止位置与上述指定停止位置之间的偏差，该位置由位置检测部 如图12所示，通过例如无线电向移动托架进行教导，由此操作者不需要通过实际移动手部来执行教导，其中可以准确地执行位置的教导 在短时间内纠正数据。

公开(公告)号：US6019563A

公开(公告)日：2000-02-01

申请号：US59361

申请日：1998-04-14

申请人： Masanao Murata ,  Tatsuo Tsubaki ,  Hitoshi Kawano

发明人： Masanao Murata ,  Tatsuo Tsubaki ,  Hitoshi Kawano

IPC分类号： B23Q7/14 ,  B25J5/00 ,  B25J5/02 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677 ,  B25J19/00

CPC分类号： H01L21/67724 ,  B23Q7/1436 ,  B23Q7/1442 ,  B25J5/007 ,  B25J5/02 ,  H01L21/67259 ,  H01L21/67736 ,  G05B2219/37286 ,  G05B2219/40203 ,  G05B2219/50393 ,  Y10S414/14

摘要： An automated guided vehicle includes a transporting portion having an upper surface and a driving device, the transporting portion being movable by the driving device; a transferring device provided on the upper surface of the transporting portion, the transferring device being capable of transferring a workpiece to or from an apparatus; and a mounting portion formed on the upper surface of the transporting portion, the mounting portion having at least two opening portions which allow an operation for transferring the workpiece. In the automated guided vehicle, photosensors are respectively arranged on the opening portions to detect an object which intrudes into a predetermined area or projects from the predetermined area, and a control device monitors a state of the photosensors and controls the transferring device or the driving device in accordance with the state of the photosensors.

摘要翻译： 一种自动引导车包括具有上表面和驱动装置的传送部分，该传送部分可由驱动装置移动; 传送装置，其设置在所述传送部的上表面上，所述传送装置能够将工件传送到设备或从设备传送; 以及形成在所述输送部的上表面上的安装部，所述安装部具有至少两个开口部，所述至少两个开口部允许用于传送所述工件的操作。 在自动导引车辆中，光敏传感器分别布置在开口部分上以检测入侵到预定区域中的物体或从预定区域突出的物体，并且控制装置监视光传感器的状态并控制传送装置或驱动装置 按照照相机的状态。

公开(公告)号：US4544826A

公开(公告)日：1985-10-01

申请号：US606996

申请日：1984-05-03

申请人： Sadao Nakanishi ,  Yoshihiro Nakajima ,  Hitoshi Kawano ,  Akihiko Ihochi ,  Takaaki Ogasawara ,  Tokuji Maruyama

发明人： Sadao Nakanishi ,  Yoshihiro Nakajima ,  Hitoshi Kawano ,  Akihiko Ihochi ,  Takaaki Ogasawara ,  Tokuji Maruyama

IPC分类号： B23K9/073 ,  B23K9/06 ,  B23K9/09 ,  B23K9/10

CPC分类号： B23K9/06 ,  B23K9/10

摘要： A method and a device for controlling a welding power supply, employing a control device essentially including a first switch means consisting of at least one switch in element to be turned on and off to control the output current of the power supply, second switch means adapted to be inserted in a welding current attenuating path when the first switch means is in off state, and an impedance means consisting of at least one impedance element connected parallel with the second switch means.

摘要翻译： 一种用于控制焊接电源的方法和装置，采用基本上包括由至少一个开关元件组成的第一开关装置的控制装置，以便导通和关断以控制电源的输出电流，第二开关装置适配 当所述第一开关装置处于断开状态时被插入到焊接电流衰减路径中，以及由与所述第二开关装置并联连接的至少一个阻抗元件组成的阻抗装置。

公开(公告)号：US4249063A

公开(公告)日：1981-02-03

申请号：US2002

申请日：1979-01-09

申请人： Hitoshi Kawano ,  Kiyoshi Ikemura ,  Mitsuhiro Hayashi

发明人： Hitoshi Kawano ,  Kiyoshi Ikemura ,  Mitsuhiro Hayashi

IPC分类号： B23K9/073 ,  B23K9/09

CPC分类号： B23K9/092

摘要： A circuit for a high frequency arc welding apparatus which can control the welding current by keeping the peak value, that is the amplitude of the pulse component, of the welding current waveform constant and improve operating efficiency and reliability. The circuit includes a D.C. electrical source for welding and a condenser for regenerating. The welding current is controlled by controlling the voltage of the condenser. A low frequency switch periodically discharges the condenser to limit the voltage of the condenser and to transfer the stored energy of the condenser to the electrical source.

摘要翻译： 一种高频电弧焊接装置的电路，其可以通过保持焊接电流波形的峰值（即脉冲成分的振幅）恒定来提高操作效率和可靠性来控制焊接电流。 该电路包括用于焊接的直流电源和用于再生的冷凝器。 通过控制冷凝器的电压来控制焊接电流。 低频开关周期性地对冷凝器进行放电以限制冷凝器的电压并将冷凝器的储存能量传送到电源。