Semiconductor device having trench structures and method
    90.
    发明授权
    Semiconductor device having trench structures and method 有权
    具有沟槽结构和方法的半导体器件

    公开(公告)号:US07256119B2

    公开(公告)日:2007-08-14

    申请号:US11132949

    申请日:2005-05-20

    IPC分类号: H01L21/4763

    摘要: In one embodiment, a pair of sidewall passivated trench contacts is formed in a substrate to provide electrical contact to a sub-surface feature. A doped region is diffused between the pair of sidewall passivated trenches to provide low resistance contacts.

    摘要翻译: 在一个实施例中,在衬底中形成一对侧壁钝化沟槽触点以提供与子表面特征的电接触。 掺杂区域在一对侧壁钝化沟槽之间扩散,以提供低电阻触点。