公开(公告)号：US07595087B2

公开(公告)日：2009-09-29

申请号：US10510758

申请日：2003-10-14

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Masafumi Kitano ,  Yukio Minami ,  Koji Kawada

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Masafumi Kitano ,  Yukio Minami ,  Koji Kawada

IPC分类号： G21C9/00

CPC分类号： B01J12/007 ,  B01J21/04 ,  B01J23/42 ,  B01J37/0225 ,  B01J37/0226 ,  B01J37/08 ,  C01B5/00

摘要： A barrier film which has uniform thickness and excellent adhesiveness to the base material and superbly functions to protect a platinum film can be formed on the inner wall surface of a moisture-generating reactor at ease and at a low cost. The moisture-generating reactor in which hydrogen and oxygen are reacted to generate moisture without high temperature combustion is made of an alloy containing aluminum. A principally aluminum oxide (Al2O3)-composed barrier film is formed by applying an aluminum selective oxidation treatment on the inner wall surface of the moisture-generating reactor, and thereafter a platinum film is stacked on and stuck to the barrier film so that a platinum coating catalyst layer is formed.

摘要翻译： 能够容易地且成本低廉地在发湿反应堆的内壁面上形成具有均匀厚度和对基材的粘合性优异的保护铂膜的保护膜的阻挡膜。 其中氢和氧反应产生水分而不进行高温燃烧的发湿反应器由含铝的合金制成。 通过在产生水分的反应器的内壁表面上进行铝选择性氧化处理，形成主要为氧化铝（Al 2 O 3）的阻挡膜，然后将铂膜层叠并粘贴在阻挡膜上，使铂 形成涂层催化剂层。

公开(公告)号：US07553459B2

公开(公告)日：2009-06-30

申请号：US11460087

申请日：2006-07-26

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

IPC分类号： B01J10/00 ,  B01J8/00 ,  C01B5/00

CPC分类号： B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

公开(公告)号：US20080257415A1

公开(公告)日：2008-10-23

申请号：US10597343

申请日：2005-01-13

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

IPC分类号： F17D1/16 ,  F16K17/00 ,  B01F15/02

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US07219533B2

公开(公告)日：2007-05-22

申请号：US11015097

申请日：2004-12-16

申请人： Tadahiro Ohmi ,  Masaaki Nagase ,  Ryousuke Dohi ,  Kouji Nishino ,  Osamu Nakamura ,  Tomio Uno ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Masaaki Nagase ,  Ryousuke Dohi ,  Kouji Nishino ,  Osamu Nakamura ,  Tomio Uno ,  Nobukazu Ikeda

IPC分类号： G01M3/02

CPC分类号： G01B13/10 ,  Y10T29/49432

摘要： A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the critical state of the fluid and controlling the inlet-side pressure to a predetermined inlet-side pressure; a plate holding section comprised of a plate supporting device which rotatably holds the plate, and a test probe supporting device which supports a test probe so that the test probe is moved vertically and horizontally; and a control section comprised of a calculation and judgment part, which calculates the hole diameter during the supply of the fluid based upon the measured value of the flow rate from the flow rate measurement section, and an external output part, which outputs the calculated value to the outside.

摘要翻译： 一种小孔直径测量装置，包括：流量测量部分，包括自动压力控制装置，该自动压力控制装置将流体供应到板中的小孔的入口侧，同时保持小孔的出口和入口侧压力 流体的临界状态并将入口侧压力控制到预定的入口侧压力; 由可转动地保持该板的板支撑装置构成的板保持部和支撑测试探针的测试探针支撑装置，使得测试探针垂直和水平地移动; 以及控制部，包括计算判断部，其基于来自流量测量部的流量的测定值，计算流体供给时的孔径，以及输出计算值的外部输出部 到外面

公开(公告)号：US20060076060A1

公开(公告)日：2006-04-13

申请号：US11182762

申请日：2005-07-18

申请人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Kenetu Mizusawa ,  Eiji Takahashi ,  Tomio Uno ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase

发明人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Kenetu Mizusawa ,  Eiji Takahashi ,  Tomio Uno ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase

IPC分类号： F16K49/00

CPC分类号： H01L21/67023 ,  G05D7/0635 ,  Y10T137/6416 ,  Y10T137/6606 ,  Y10T137/7761

摘要： Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.

摘要翻译： 公开了一种使用压力式流量控制装置控制聚集流体的流量的方法，其中通过孔口的气体的流量Q被计算为K = KP 1（其中K是常数），气体为 在孔口上游侧的气体压力P 1与孔口下游侧的气体压力P 2之间的比率P 2 / P 1保持在不高于孔口的临界压力比的值的状态下 通过将压力型流量控制装置加热到高于40℃的温度，或者通过将稀释气体施加到聚集流体以使其低于分压，分离的缔合来分离气体，使得聚合 允许流体以单分子状态通过孔口。

公开(公告)号：US07008598B2

公开(公告)日：2006-03-07

申请号：US10884917

申请日：2004-07-07

申请人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

发明人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

IPC分类号： B01J8/02

CPC分类号： B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.

摘要翻译： 一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性， 减少内部空间以进一步减小反应器壳体的尺寸。 反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧 设置有气体供给口1a和在排气侧设置有湿气取出口2a的反应器结构部件2; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8，其中通过气体供给口供给到反应器的内部空间中的氢和氧与铂涂层8b相接触， 激活反应性，从而使氢和氧在非燃烧状态下反应成水。

公开(公告)号：US20050241697A1

公开(公告)日：2005-11-03

申请号：US11152638

申请日：2005-06-15

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Masaaki Nagase ,  Kyousuke Dohi ,  Ryutaro Nishimura

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Masaaki Nagase ,  Kyousuke Dohi ,  Ryutaro Nishimura

IPC分类号： F16K47/02 ,  F16L55/04 ,  G05D7/06

CPC分类号： F16K47/02 ,  F16K47/023 ,  F16L55/043 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/86461

摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.

摘要翻译： 流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。 无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器 执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，以控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

公开(公告)号：US20050157834A1

公开(公告)日：2005-07-21

申请号：US10510758

申请日：2003-10-14

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Masafumi Kitano ,  Yukio Minami ,  Koji Kawada

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Masafumi Kitano ,  Yukio Minami ,  Koji Kawada

IPC分类号： B01J21/04 ,  B01J23/42 ,  B01J32/00 ,  B01J37/02 ,  B01J37/08 ,  B01J37/10 ,  C01B5/00 ,  G21C9/00

CPC分类号： B01J12/007 ,  B01J21/04 ,  B01J23/42 ,  B01J37/0225 ,  B01J37/0226 ,  B01J37/08 ,  C01B5/00

摘要： A barrier film which has uniform thickness and excellent adhesiveness to the base material and superbly functions to protect a platinum film can be formed on the inner wall surface of a moisture-generating reactor at ease and at a low cost. The moisture-generating reactor in which hydrogen and oxygen are reacted to generate moisture without high temperature combustion is made of an alloy containing aluminum. A principally aluminum oxide (Al2O3)-composed barrier film is formed by applying an aluminum selective oxidation treatment on the inner wall surface of the moisture-generating reactor, and thereafter a platinum film is stacked on and stuck to the barrier film so that a platinum coating catalyst layer is formed.

摘要翻译： 能够容易地且成本低廉地在发湿反应堆的内壁面上形成具有均匀厚度和对基材的粘合性优异的保护铂膜的保护膜的阻挡膜。 其中氢和氧反应产生水分而不进行高温燃烧的发湿反应器由含铝的合金制成。 主要由氧化铝（Al 2 O 3 O 3）组成的阻挡膜是通过在产生水分的反应器的内壁表面上进行铝选择性氧化处理而形成的， 然后将铂膜层叠并粘贴到阻挡膜上，从而形成铂涂层催化剂层。

公开(公告)号：US20050126030A1

公开(公告)日：2005-06-16

申请号：US10498800

申请日：2003-09-11

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Takumi Fujita ,  Yukio Minami ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Takumi Fujita ,  Yukio Minami ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada

IPC分类号： H01L21/304 ,  F26B17/24 ,  F26B17/30 ,  H01L20060101 ,  H01L21/00 ,  H01L21/02 ,  H01L21/30 ,  H01L21/302

CPC分类号： H01L21/67034 ,  H01L21/02052

摘要： It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments. According to the present invention, a rotation type silicon wafer cleaning device has a silicon wafer support/rotation driving mechanism inside the case body for cleaning the silicon wafer at the post chemical cleaning with pure water, drying and hydrogen termination treatments on the outer surface of a silicon wafer is performed by means of installing a silicon wafer drying device comprising a gas supply panel attached to a case body to supply a mixed gas of the hydrogen gas and inactive gas containing a hydrogen gas of more than 0.05%, a mixed gas supply pipe coupled to a gas mixer of the afore-mentioned gas supply panel at one end, a mixed gas heating device to heat the mixed gas in the afore-mentioned gas supply pipe, and a hydrogen radical formation apparatus equipped with a platinum coating film to form hydrogen radical at the gas contacting part where to a high temperature gas heated with the afore-mentioned mixed gas heating device touches, thus to gush out the mixed gas containing hydrogen radical formed with the afore-mentioned radical formation apparatus onto the rotating silicon wafer after cleaning is completed.

摘要翻译： 本发明的目的是提供一种旋转型硅晶片清洁装置，以在化学和纯净水清洗处理完成之后通过在硅晶片上提供更好的氢终止来进一步提高硅晶片的稳定性。 根据本发明，旋转型硅晶片清洗装置在壳体内部具有硅晶片支撑/旋转驱动机构，用于在后期化学清洗时用纯水清洗硅晶片，在外表面上进行干燥和氢终止处理 通过安装硅晶片干燥装置来执行硅晶片，所述硅晶片干燥装置包括附接到壳体的气体供应板，以供应氢气和含有大于0.05％的氢气的惰性气体的混合气体，混合气体供应 一端连接上述气体供给面板的气体混合器的管道，将上述气体供给管内的混合气体加热的混合气体加热装置以及配备有铂镀膜的氢自由基形成装置， 在与上述混合气体加热装置加热的高温气体接触的气体接触部分处形成氢自由基，从而喷出混合气体 在完成清洁之后，将上述自由基形成装置形成的氢基团固定在旋转的硅晶片上。

公开(公告)号：US06116092A

公开(公告)日：2000-09-12

申请号：US919110

申请日：1997-08-28

申请人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Koji Nishino ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Koji Nishino ,  Nobukazu Ikeda

IPC分类号： G01L9/04 ,  G01L9/00 ,  G01L19/00 ,  G01L19/06 ,  G01L7/08

CPC分类号： G01L19/0084 ,  G01L19/0645 ,  G01L19/143

摘要： A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic action at a gas-contact face, thereby improving production quality in a semiconductor manufacturing process and providing high accuracy pressure detection. The passive-state film is formed on the gas-contact face of the diaphragm when the diaphragm is mounted on a diaphragm base. The diaphragm base is then fixedly secured to a sensor base in which a sensor chip is housed and a pressure transmitting medium is sealed in a gap between the sensor base and the diaphragm base.

摘要翻译： 在使用传感器芯片的压力检测器的膜片的气体接触面上形成优质的被动状态膜，以防止气体接触面的腐蚀或水分含量的排出或催化作用，从而改善生产 质量在半导体制造过程和提供高精度的压力检测。 当隔膜安装在隔膜基座上时，被动态膜形成在隔膜的气体接触面上。 然后将隔膜基座牢固地固定到传感器基座上，在传感器基座中容纳传感器芯片，并且压力传递介质被密封在传感器基座和隔膜基座之间的间隙中。