公开(公告)号：US20080153011A1

公开(公告)日：2008-06-26

申请号：US12043197

申请日：2008-03-06

申请人： Tomohiko Yamamoto

发明人： Tomohiko Yamamoto

IPC分类号： G03F1/00 ,  G03C5/00

CPC分类号： G03F7/70433 ,  G03F1/44 ,  G03F1/84 ,  G03F7/70641

摘要： A reticle of the present invention has a main pattern (11) and a monitor pattern (12) each having a different thickness of a light-shielding film (4), the light-shielding film (4) of the monitor pattern (12) being formed thicker than that of the main pattern (11). Therefore, in a CD-focus curve, a focus center at which a focus value is the optimal value is shifted from the extremal value, so that a positive/negative direction of the focus is specified by monitoring the amount of shift using this shifted focus center. This configuration provides easy and highly accurate measurements of a focus error amount and the positive/negative direction of the focus. Ultimately, the measured focus error information is fed back to a next lot and is fed forward to a next process to manufacture a semiconductor device stably.

摘要翻译： 本发明的掩模版具有各自具有不同厚度的遮光膜（4），监视器图案（12）的遮光膜（4））的主图案（11）和监视图案（12） 形成为比主图案（11）厚。 因此，在CD对焦曲线中，将焦点值为最佳值的对焦中心从极值偏移，从而通过使用该偏移焦点监视偏移量来指定焦点的正/负方向 中央。 该配置提供了聚焦误差量和焦点的正/负方向的简单且高精度的测量。 最终，将测量的聚焦误差信息反馈到下一批，并将其馈送到下一个工艺以稳定地制造半导体器件。

公开(公告)号：US20070146662A1

公开(公告)日：2007-06-28

申请号：US11387781

申请日：2006-03-24

申请人： Tomohiko Yamamoto

发明人： Tomohiko Yamamoto

IPC分类号： G03B27/68

CPC分类号： G03F7/70941 ,  G03F1/44 ,  G03F1/70 ,  G03F7/70483

摘要： An amount is flare is measured by a method including steps of applying a photosensitive material to a substrate; exposing a part of the photosensitive material using a mask including a transmitting section which has no pattern so that the part of the photosensitive material varies in thickness; and measuring an amount of flare based on a distribution of film amounts of the photosensitive material remaining in a first region corresponding to the transmitting section and on a second region other than the first region after the step of exposing.

摘要翻译： 通过包括将感光材料施加到基底的步骤的方法测量量， 使用包括不具有图案的透射部分的掩模曝光一部分感光材料，使得感光材料的一部分厚度变化; 以及基于曝光步骤之后的残留在与透射部分相对应的第一区域中的感光材料的膜量的分布和除了第一区域之外的第二区域，测量光斑的量。

公开(公告)号：US07113158B1

公开(公告)日：2006-09-26

申请号：US09668071

申请日：2000-09-22

申请人： Kouji Fujiwara ,  Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

发明人： Kouji Fujiwara ,  Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

IPC分类号： G09G3/36 ,  G09G3/34

CPC分类号： G09G3/342 ,  G02B26/04 ,  G02F1/133606 ,  G02F1/1347 ,  G02F2001/133601 ,  G09G2310/0237 ,  G09G2320/0261

摘要： An image display apparatus comprising an image display device, a shield member, and a drive mechanism. The drive mechanism drives the shield member in synchronization with display of the image.

摘要翻译： 一种图像显示装置，包括图像显示装置，屏蔽构件和驱动机构。 驱动机构与图像的显示同步地驱动屏蔽部件。

公开(公告)号：US07075521B2

公开(公告)日：2006-07-11

申请号：US10238896

申请日：2002-09-11

申请人： Tomohiko Yamamoto ,  Koji Fujiwara ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

发明人： Tomohiko Yamamoto ,  Koji Fujiwara ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

IPC分类号： G09G5/00

CPC分类号： G06F3/0412 ,  G09G3/3648

摘要： Input position is accurately detected. In an x-detection period of a non-display period, a source drive circuit simultaneously applies to all signal wiring lines a pulse of a peak value proportional to a distance from a gate drive circuit. A coordinate detection circuit obtains an x-coordinate on the basis of a voltage induced at a pen corresponding to the peak value (x-coordinate) of the applied pulse. In a y-detection period, a pulse generation circuit applies one pulse to a common line. The pen detects a potential variation in amplitude proportional to a distance (y-coordinate) from the source drive circuit, generated approximately simultaneously on all the signal wiring lines via a capacitance. The coordinate detection circuit obtains the y-coordinate similarly to the case of x-coordinate detection.

摘要翻译： 准确检测输入位置。 在非显示周期的x检测周期中，源驱动电路同时向所有信号布线施加与从栅极驱动电路的距离成比例的峰值的脉冲。 坐标检测电路基于与所施加的脉冲的峰值（x坐标）对应的笔感应的电压来获得x坐标。 在y检测周期中，脉冲发生电路将一个脉冲施加到公共线。 笔检测到与来自源驱动电路的距离（y坐标）成比例的振幅的电位变化，其通过电容在所有信号布线上大致同时地产生。 坐标检测电路与x坐标检测的情况类似地获得y坐标。

公开(公告)号：US07065862B1

公开(公告)日：2006-06-27

申请号：US09677031

申请日：2000-09-29

申请人： Tomohiko Yamamoto ,  Satoru Kudo ,  Hiroshi Sato ,  Yasuhisa Nagayama

发明人： Tomohiko Yamamoto ,  Satoru Kudo ,  Hiroshi Sato ,  Yasuhisa Nagayama

IPC分类号： B23P21/00 ,  B23P19/00 ,  B21D53/88

CPC分类号： B23P19/086 ,  B23P19/08 ,  F16D3/845 ,  F16J3/042 ,  Y10T29/49622 ,  Y10T29/4987 ,  Y10T29/49915 ,  Y10T29/49927 ,  Y10T29/53026 ,  Y10T29/53065 ,  Y10T29/53074 ,  Y10T29/53078 ,  Y10T29/53417 ,  Y10T29/53422 ,  Y10T29/53709

摘要： A fixing band-tightening apparatus comprises a holding section for gripping a shaft section at both ends in an axial direction, the holding section being provided rotatably in a circumferential direction in accordance with a driving action of a rotary driving source, a stopper section arranged in a lateral direction substantially horizontal with respect to the holding section, for positioning a projection of a fixing band in the lateral direction except for a vertical direction, and a band-tightening section for forcibly nipping the projection of the fixing band positioned by the stopper section to tighten the fixing band.

摘要翻译： 固定带收紧装置包括：保持部，用于在轴向两端夹持轴部，保持部根据旋转驱动源的驱动动作沿圆周方向可旋转地设置;止动部，布置在 相对于保持部分大致水平的横向方向，用于定位除了垂直方向之外的横向方向上的固定带的突出部，以及用于强制夹住由止动部分定位的固定带的突起的带束部分 收紧固定带。

公开(公告)号：US06977639B2

公开(公告)日：2005-12-20

申请号：US10270195

申请日：2002-10-15

申请人： Koji Fujiwara ,  Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

发明人： Koji Fujiwara ,  Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

IPC分类号： G02F1/133 ,  G09G3/20 ,  G09G3/30 ,  G09G3/36

CPC分类号： G09G3/3648 ,  G09G3/2011 ,  G09G3/3655 ,  G09G2310/065

摘要： A display device is arranged in such a manner that rows on the screen on which pixel electrodes are provided in a matrix manner are sequentially selected so as to be scanned by scanning signal lines formed on a substrate, and a data signal is supplied from gray scale signal lines, which are formed on a counter substrate facing the substrate, to the pixel electrodes on the selected row, so that the display is carried out. Also, an idle period, (i) which is longer than a scanning period for scanning the screen once and (ii) during which period all scanning signal lines are in the state of non-scanning, is provided, and the scanning period and the idle period constitute one vertical period. With this arrangement, it is possible to (1) provide a driving method of a display device by which method the reduction of power consumption is sufficiently realized without causing the degradation of the display qualities, and (2) provide a display device using the same.

摘要翻译： 顺序地选择显示装置，使得以矩阵方式设置像素电极的屏幕上的行，以便通过扫描形成在基板上的信号线进行扫描，并且从灰度级提供数据信号 形成在与衬底相对的对置衬底上的信号线到所选择的行上的像素电极，从而执行显示。 此外，提供了比扫描一次的扫描期间长的怠速期间，（ⅱ）在所述扫描信号线处于非扫描状态的期间，（ⅱ），扫描期间和 闲置期构成一个垂直期。 通过这种布置，可以（1）提供显示装置的驱动方法，通过该方法可以充分实现功耗的降低而不会导致显示质量的劣化，（2）提供使用该显示装置的显示装置 。

公开(公告)号：US20050277035A1

公开(公告)日：2005-12-15

申请号：US10973448

申请日：2004-10-27

申请人： Tomohiko Yamamoto

发明人： Tomohiko Yamamoto

IPC分类号： G03C5/00 ,  G03F1/00 ,  G03F7/20 ,  G06K9/00 ,  H01L21/027

CPC分类号： G03F7/70641

摘要： An exposure measurement apparatus is configured by including a size measurer measuring respective sizes of at least a pair of transferred patterns having mutually different optimal focus positions out of a plurality of transferred patterns formed by being transferred onto a transfer object, a difference value calculator obtaining a difference value between the size of one transferred pattern and the size of the other transferred pattern, a focus variation amount calculator calculating a focus variation amount of the transfer object using the difference value, and an exposure variation amount calculator calculating an exposure error amount of a wafer.

摘要翻译： 曝光测量装置被配置为包括尺寸测量器，该尺寸测量器测量通过转印到转印对象上形成的多个转印图案中的至少一对具有相互不同的最佳焦点位置的转印图案的尺寸，差值计算器获得 一个转印图案的尺寸与另一个转印图案的尺寸之间的差值，使用差值计算转印对象的焦点变化量的聚焦变化量计算器，以及计算曝光误差量的曝光变化量计算器 晶圆。

公开(公告)号：US06724359B2

公开(公告)日：2004-04-20

申请号：US10027114

申请日：2001-12-20

申请人： Tomohiko Yamamoto ,  Keiichi Tanaka ,  Hideki Ichioka ,  Naoto Inoue ,  Koji Fujiwara

发明人： Tomohiko Yamamoto ,  Keiichi Tanaka ,  Hideki Ichioka ,  Naoto Inoue ,  Koji Fujiwara

IPC分类号： G09G336

CPC分类号： G09G3/3659 ,  G09G2300/0842

摘要： An electronic device includes on a substrate: a plurality of first capacitors each including a first electrode and a second electrode opposing the first electrode via a first dielectric layer; a plurality of second capacitors each including a third electrode electrically connected to the first electrode and a fourth electrode opposing the third electrode via a second dielectric layer; a first line whose electrical connection to the first electrode and the third electrode is turned ON/OFF by a first switching element; a second line electrically connected to the second electrode at least temporarily; a third line whose electrical connection to the fourth electrode is turned ON/OFF by a second switching element; and a fourth line whose electrical connection to the fourth electrode is turned ON/OFF by a third switching element.

摘要翻译： 电子设备包括在基板上：多个第一电容器，每个第一电容器包括经由第一介电层与第一电极相对的第一电极和第二电极; 多个第二电容器，每个包括电连接到第一电极的第三电极和经由第二电介质层与第三电极相对的第四电极; 与第一电极和第三电极的电连接由第一开关元件接通/断开的第一线; 至少暂时与第二电极电连接的第二线; 与第四电极的电连接由第二开关元件接通/断开的第三线; 以及与第四电极的电连接由第三开关元件接通/断开的第四线。

公开(公告)号：US06694592B2

公开(公告)日：2004-02-24

申请号：US10369637

申请日：2003-02-21

申请人： Tomohiko Yamamoto ,  Satoru Kudo ,  Hiroshi Sato ,  Yasuhisa Nagayama

发明人： Tomohiko Yamamoto ,  Satoru Kudo ,  Hiroshi Sato ,  Yasuhisa Nagayama

IPC分类号： B23P1102

CPC分类号： B23P19/086 ,  B23P19/08 ,  F16D3/845 ,  F16J3/042 ,  Y10T29/49622 ,  Y10T29/4987 ,  Y10T29/49915 ,  Y10T29/49927 ,  Y10T29/53026 ,  Y10T29/53065 ,  Y10T29/53074 ,  Y10T29/53078 ,  Y10T29/53417 ,  Y10T29/53422 ,  Y10T29/53709

摘要： A fixing band-tightening apparatus comprises a holding section for gripping a shaft section at both ends in an axial direction, the holding section being provided rotatably in a circumferential direction in accordance with a driving action of a rotary driving source, a stopper section arranged in a lateral direction substantially horizontal with respect to the holding section, for positioning a projection of a fixing band in the lateral direction except for a vertical direction, and a band-tightening section for forcibly nipping the projection of the fixing band positioned by the stopper section to tighten the fixing band.

摘要翻译： 固定带收紧装置包括：保持部，用于在轴向两端夹持轴部，保持部根据旋转驱动源的驱动动作沿圆周方向可旋转地设置;止动部，布置在 相对于保持部分大致水平的横向方向，用于定位除了垂直方向之外的横向方向上的固定带的突出部，以及用于强制夹住由止动部分定位的固定带的突起的带束部分 收紧固定带。

公开(公告)号：US06587161B1

公开(公告)日：2003-07-01

申请号：US09298161

申请日：1999-04-23

申请人： Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Kouji Fujiwara ,  Yasunobu Tagusa

发明人： Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Kouji Fujiwara ,  Yasunobu Tagusa

IPC分类号： G02F1136

CPC分类号： G02F1/136286 ,  G02F1/1345 ,  G02F2201/121

摘要： A pixel substrate has a plurality of scanning lines and a plurality of reference signal lines which are arranged parallel with each other. A counter substrate includes a plurality of signal lines. Moreover, the pixel substrate has a connecting line for connecting the plurality of the reference signal lines to each other. The connecting line is provided in each of two regions outside of two sides among the peripheral sides of a region where a plurality of pixel electrodes are formed, the two sides being perpendicular to the reference signal lines. In this structure, a reference signal is input from both ends of the reference signal line. It is therefore possible to provide a liquid crystal display device which reduces the occurrence of a short circuit between the lines on the substrate and decreases the signal delay due to the load capacitance.

摘要翻译： 像素基板具有彼此平行布置的多条扫描线和多条参考信号线。 对置基板包括多条信号线。 此外，像素基板具有用于将多个参考信号线彼此连接的连接线。 连接线设置在形成有多个像素电极的区域的外侧中的两侧之外的两个区域中的每一个中，两侧垂直于参考信号线。 在该结构中，从参考信号线的两端输入参考信号。 因此，可以提供一种能够减少基板上的线路之间的短路的发生并降低由于负载电容引起的信号延迟的液晶显示装置。