Systems and methods for measuring one or more characteristics of patterned features on a specimen
    81.
    发明授权
    Systems and methods for measuring one or more characteristics of patterned features on a specimen 有权
    用于测量样品上图案特征的一个或多个特征的系统和方法

    公开(公告)号:US07463369B2

    公开(公告)日:2008-12-09

    申请号:US11277856

    申请日:2006-03-29

    IPC分类号: G01B11/14 G01N21/55

    摘要: Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.

    摘要翻译: 提供了用于测量样本上的图案特征的一个或多个特征的系统和方法。 一个系统包括光学子系统,被配置为从多个入射角,多个方位角和多个波长同时获取从样本上的图案化特征散射的光的测量。 该系统还包括配置成从测量中确定图案化特征的一个或多个特性的处理器。 一种方法包括以多个入射角,多个方位角和多个波长同时从样本上的图案化特征散射的光的测量。 该方法还包括从测量中确定图案化特征的一个或多个特性。

    Multiple angle of incidence spectroscopic scatterometer system

    公开(公告)号:US20060126079A1

    公开(公告)日:2006-06-15

    申请号:US11078572

    申请日:2005-03-11

    IPC分类号: G01B11/14

    摘要: Techniques for optimizing the sensitivity of spectroscopic measurement techniques with respect to certain profile variables by selecting desired measurement angles since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle. Optimizing the sensitivity of spectroscopic measurement techniques can also reduce or eliminates measurement correlation among variable to be measured.

    System for measuring polarimetric spectrum and other properties of a sample
    83.
    发明授权
    System for measuring polarimetric spectrum and other properties of a sample 有权
    用于测量样品的偏振光谱和其他性质的系统

    公开(公告)号:US06184984B2

    公开(公告)日:2001-02-06

    申请号:US09246922

    申请日:1999-02-09

    IPC分类号: G01N2121

    CPC分类号: G01J4/02 G01J3/447 G01N21/21

    摘要: A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.

    摘要翻译: 将宽带辐射的极化样品束聚焦到样品的表面上,并且通过不同入射平面的反射镜系统收集由样品改性的辐射。 聚焦到样品的样品束具有许多极化状态。 相对于偏振平面分析修改的辐射以提供偏振光谱。 然后可以从光谱导出厚度和折射信息。 优选地,样品光束的偏振仅由聚焦和样品改变,并且相对于固定的偏振平面进行分析。 在优选实施例中,使用两个不同的孔来重复样品束的聚焦和修改的辐射的收集,以检测样品中双折射轴的存在或不存在。 在另一个优选实施例中,上述技术可以与用于确定薄膜的厚度和折射率的椭偏仪组合。

    Enhancement of in-device interference
    84.
    发明授权
    Enhancement of in-device interference 有权
    增强设备间干扰

    公开(公告)号:US09532245B2

    公开(公告)日:2016-12-27

    申请号:US14400284

    申请日:2012-05-10

    IPC分类号: H04B7/00 H04W24/04 H04W88/06

    摘要: Disclosed are apparatuses, methods and computer program instructions which receive or detect an in-device coexistence interference condition change in a user equipment equipped with a plurality of transceivers, send an indication of the in-device coexistence interference condition change to an access point and receive a media access control element configured for muting/unmuting at least one of a plurality of transceivers from the access point. The condition of in-device coexistence interference relates to interference among transceivers such as a long term evolution advanced transceiver and a Bluetooth transceiver in the same user equipment. The media access control element can be configured to either promote a measurement gap pause or short discontinuous transmission during a condition of in-device coexistence interference.

    摘要翻译: 公开了在配备有多个收发器的用户设备中接收或检测设备内共存干扰条件变化的装置,方法和计算机程序指令,向接入点发送设备内共存干扰条件改变的指示并接收 媒体接入控制元件,被配置为从所述接入点对多个收发器中的至少一个收发器进行静音/取消静音。 设备间共存干扰的情况与收发器之间的干扰有关,如同一用户设备中的长期演进高级收发器和蓝牙收发器。 媒体访问控制元件可以被配置为在设备内共存干扰的条件期间促进测量间隙暂停或短暂的不连续传输。

    Device-to-device communication scenario
    85.
    发明授权
    Device-to-device communication scenario 有权
    设备到设备通信场景

    公开(公告)号:US09491766B2

    公开(公告)日:2016-11-08

    申请号:US13991706

    申请日:2010-12-08

    摘要: A method, apparatus, and computer program for supporting simultaneous multi-use of resources of a backhaul link between a relay base station and another base station of a cellular radio network. The relay base station is configured to forward transmission resources of the backhaul link to at least one communication device located in a cell of the relay base station. The communication device(s) is/are then configured to utilize the resources of the backhaul link for device-to-device connections.

    摘要翻译: 一种用于支持中继基站与蜂窝无线电网络的另一个基站之间的回程链路的资源的同时多次使用的方法,装置和计算机程序。 中继基站被配置为将回程链路的传输资源转发到位于中继基站的小区中的至少一个通信设备。 通信设备然后被配置为利用回程链路的资源进行设备到设备连接。

    LTE carrier aggregation configuration on TV white space bands
    86.
    发明授权
    LTE carrier aggregation configuration on TV white space bands 有权
    LTE载波聚合配置在电视空白频段

    公开(公告)号:US09351185B2

    公开(公告)日:2016-05-24

    申请号:US14111577

    申请日:2011-04-15

    摘要: An apparatus, method and computer program product comprise controlling cellular network based communication in a primary cell on a frequency band related to the cellular network and by using an uplink and downlink configuration specific to the primary cell; controlling communication in a secondary cell on a frequency band related to a television white space channel and by using an uplink and downlink configuration specific to the secondary cell; measuring radio interference on a temporarily set uplink related carrier on the secondary cell based on information on the temporarily set uplink related carrier received on a downlink related carrier on the primary cell; and reporting results of radio interference measurement via the primary cell.

    摘要翻译: 一种装置,方法和计算机程序产品包括在与蜂窝网络相关的频带上的主小区中控制基于蜂窝网络的通信,并且通过使用专用于所述主小区的上行链路和下行链路配置; 控制与电视白空间信道相关的频带上的二次小区中的通信,以及通过使用二次小区特有的上行链路和下行链路配置; 基于在所述主小区上的下行链路相关载波上接收的临时设置的上行链路相关载波的信息来测量所述辅助小区上的临时设置的上行链路相关载波上的无线电干扰; 并通过主要小区报告无线电干扰测量结果。

    Enhancement of In-Device Interference
    87.
    发明申请
    Enhancement of In-Device Interference 有权
    增强设备间干扰

    公开(公告)号:US20150105122A1

    公开(公告)日:2015-04-16

    申请号:US14400284

    申请日:2012-05-10

    IPC分类号: H04W24/04

    摘要: Disclosed are apparatuses, methods and computer program instructions which receive or detect an in-device coexistence interference condition change in a user equipment equipped with a plurality of transceivers, send an indication of the in-device coexistence interference condition change to an access point and receive a media access control element configured for muting/unmuting at least one of a plurality of transceivers from the access point. The condition of in-device coexistence interference relates to interference among transceivers such as a long term evolution advanced transceiver and a Bluetooth transceiver in the same user equipment. The media access control element can be configured to either promote a measurement gap pause or short discontinuous transmission during a condition of in-device coexistence interference.

    摘要翻译: 公开了在配备有多个收发器的用户设备中接收或检测设备内共存干扰条件变化的装置,方法和计算机程序指令,向接入点发送设备内共存干扰条件改变的指示并接收 媒体接入控制元件,被配置为从所述接入点对多个收发器中的至少一个收发器进行静音/取消静音。 设备间共存干扰的情况与收发器之间的干扰有关,如同一用户设备中的长期演进高级收发器和蓝牙收发器。 媒体访问控制元件可以被配置为在设备内共存干扰的条件期间促进测量间隙暂停或短暂的不连续传输。

    Method and apparatus for managing device-to-device interference
    88.
    发明授权
    Method and apparatus for managing device-to-device interference 有权
    用于管理设备到设备干扰的方法和设备

    公开(公告)号:US08824326B2

    公开(公告)日:2014-09-02

    申请号:US13318347

    申请日:2009-04-30

    IPC分类号: H04L12/26

    CPC分类号: H04W72/082 H04W84/18

    摘要: Various methods for managing device-to-device interference are provided. One example method includes receiving an expected interference level for a resource block, where the expected interference level is represented by data indicative of interference associated with the resource block due to device-to-device communications using the resource block. The example method further includes selecting the resource block for a device-to-device communications session based at least in part on the expected interference level for the resource block. Similar and related example methods and example apparatuses are also provided.

    摘要翻译: 提供了用于管理设备到设备干扰的各种方法。 一个示例性方法包括接收资源块的预期干扰电平,其中由于使用资源块的设备到设备通信,预期干扰电平由指示与资源块相关联的干扰的数据表示。 该示例方法还包括至少部分地基于资源块的预期干扰级别来选择用于设备到设备通信会话的资源块。 还提供了类似的和相关的示例性方法和示例设备。

    NETWORK ASSISTED SENSING ON A SHARED BAND FOR LOCAL COMMUNICATIONS
    89.
    发明申请
    NETWORK ASSISTED SENSING ON A SHARED BAND FOR LOCAL COMMUNICATIONS 有权
    网络辅助传感器,用于本地通信的共享带

    公开(公告)号:US20130223398A1

    公开(公告)日:2013-08-29

    申请号:US13883950

    申请日:2010-11-25

    IPC分类号: H04W72/08

    摘要: To find a D2D channel, by example a shared channel for offload traffic from an allocated D2D channel, a cellular network access node sends a configuration message with parameters (e.g., sensing time, frequency band, sensing mechanism, cyclic shift) for a D2D device to sense spectrum. From results of this spectrum sensing is decided whether to utilize a frequency band, sensed according to the parameters, for D2D communications. In an embodiment the network selects a subframe configuration to set the sensing time, in which different subframe configurations have different-length guard periods which is the sensing time. In embodiments a first sensing is within a guard period and represents coarse sensing results and if those are not sufficient the network configures a longer sensing time (e.g., spanning multiple subframes) for finer sensing results. The network or alternatively the D2D device decides whether to use the sensed frequency band for offload traffic.

    摘要翻译: 为了找到D2D信道,例如用于从分配的D2D信道的卸载业务的共享信道,蜂窝网络接入节点向D2D设备发送具有参数(例如,感测时间,频带,感测机制,循环移位)的配置消息 感光谱。 根据该频谱感测的结果,决定是否利用根据参数感测的D2D通信的频带。 在一个实施例中,网络选择子帧配置来设置感测时间,其中不同的子帧配置具有作为感测时间的不同长度的保护周期。 在实施例中,第一感测在保护周期内并且表示粗略感测结果,并且如果这些感测结果不够,则网络配置更长的感测时间(例如,跨越多个子帧)以获得更精细的感测结果。 网络或备选地,D2D设备决定是否使用所感测的频带来进行卸载业务。

    Reconfigurable spectroscopic ellipsometer
    90.
    发明授权
    Reconfigurable spectroscopic ellipsometer 有权
    可重构光谱椭偏仪

    公开(公告)号:US08446584B2

    公开(公告)日:2013-05-21

    申请号:US13106940

    申请日:2011-05-13

    IPC分类号: G01J4/00

    摘要: A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.

    摘要翻译: 具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节(1 )第一旋转元件的第一角频率和(2)第二旋转元件的第二角频率。