摘要:
Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.
摘要:
Techniques for optimizing the sensitivity of spectroscopic measurement techniques with respect to certain profile variables by selecting desired measurement angles since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle. Optimizing the sensitivity of spectroscopic measurement techniques can also reduce or eliminates measurement correlation among variable to be measured.
摘要:
A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.
摘要:
Disclosed are apparatuses, methods and computer program instructions which receive or detect an in-device coexistence interference condition change in a user equipment equipped with a plurality of transceivers, send an indication of the in-device coexistence interference condition change to an access point and receive a media access control element configured for muting/unmuting at least one of a plurality of transceivers from the access point. The condition of in-device coexistence interference relates to interference among transceivers such as a long term evolution advanced transceiver and a Bluetooth transceiver in the same user equipment. The media access control element can be configured to either promote a measurement gap pause or short discontinuous transmission during a condition of in-device coexistence interference.
摘要:
A method, apparatus, and computer program for supporting simultaneous multi-use of resources of a backhaul link between a relay base station and another base station of a cellular radio network. The relay base station is configured to forward transmission resources of the backhaul link to at least one communication device located in a cell of the relay base station. The communication device(s) is/are then configured to utilize the resources of the backhaul link for device-to-device connections.
摘要:
An apparatus, method and computer program product comprise controlling cellular network based communication in a primary cell on a frequency band related to the cellular network and by using an uplink and downlink configuration specific to the primary cell; controlling communication in a secondary cell on a frequency band related to a television white space channel and by using an uplink and downlink configuration specific to the secondary cell; measuring radio interference on a temporarily set uplink related carrier on the secondary cell based on information on the temporarily set uplink related carrier received on a downlink related carrier on the primary cell; and reporting results of radio interference measurement via the primary cell.
摘要:
Disclosed are apparatuses, methods and computer program instructions which receive or detect an in-device coexistence interference condition change in a user equipment equipped with a plurality of transceivers, send an indication of the in-device coexistence interference condition change to an access point and receive a media access control element configured for muting/unmuting at least one of a plurality of transceivers from the access point. The condition of in-device coexistence interference relates to interference among transceivers such as a long term evolution advanced transceiver and a Bluetooth transceiver in the same user equipment. The media access control element can be configured to either promote a measurement gap pause or short discontinuous transmission during a condition of in-device coexistence interference.
摘要:
Various methods for managing device-to-device interference are provided. One example method includes receiving an expected interference level for a resource block, where the expected interference level is represented by data indicative of interference associated with the resource block due to device-to-device communications using the resource block. The example method further includes selecting the resource block for a device-to-device communications session based at least in part on the expected interference level for the resource block. Similar and related example methods and example apparatuses are also provided.
摘要:
To find a D2D channel, by example a shared channel for offload traffic from an allocated D2D channel, a cellular network access node sends a configuration message with parameters (e.g., sensing time, frequency band, sensing mechanism, cyclic shift) for a D2D device to sense spectrum. From results of this spectrum sensing is decided whether to utilize a frequency band, sensed according to the parameters, for D2D communications. In an embodiment the network selects a subframe configuration to set the sensing time, in which different subframe configurations have different-length guard periods which is the sensing time. In embodiments a first sensing is within a guard period and represents coarse sensing results and if those are not sufficient the network configures a longer sensing time (e.g., spanning multiple subframes) for finer sensing results. The network or alternatively the D2D device decides whether to use the sensed frequency band for offload traffic.
摘要:
A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.