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公开(公告)号：US20210047968A1
公开(公告)日：2021-02-18
申请号：US16977367
申请日：2019-03-01
Applicant: JAPAN FINE CERAMICS CENTER , TOCALO CO.,LTD.
Inventor： Tsuneaki MATSUDAIRA , Satoshi KITAOKA , Naoki KAWASHIMA , Daisaku YOKOE , Makoto TANAKA , Yoichiro HABU , Mikako NAGAO , Kazuo NODA , Yoshiyasu ITO , Yuhei OHIDE , Kaito TAKAGI
Abstract: A thermal barrier coating includes: a metal bonding layer made of an alloy containing Al; a thermal barrier layer; and an intermediate layer provided between the metal bonding layer and the thermal barrier layer. The thermal barrier layer contains a compound represented by the following general formula (1), LnxTayHfzO(3x+5y+4z)/2 (1) (wherein Ln is an atom of one element selected from among rare earth elements, x is 0 to 1.0, y is 0.8 to 3.0, and z is 0 to 7.0). The intermediate layer contains at least one layer selected from among the following (A) to (C): (A) a layer containing hafnium oxide (HfO2) as a main component; (B) a layer containing, as a main component, a compound consisting of tantalum (Ta), hafnium (Hf), and oxygen (O); and (C) a layer containing, as a main component, a compound consisting of a rare earth element, tantalum (Ta), hafnium (Hf), and oxygen (O).
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公开(公告)号：US10900111B2
公开(公告)日：2021-01-26
申请号：US15746795
申请日：2016-06-27
Applicant: TOCALO CO., LTD.
Inventor： Hiroki Yokota , Tatsuya Fukushi , Tatsuo Suidzu
Abstract: A method for producing a surface-modified component includes: a process of forming a thermal sprayed coating on a substrate; a process of irradiating a surface of the thermal sprayed coating with a high energy beam so as to cause an entirety of the thermal sprayed coating and a part of the substrate in a thickness direction to melt and then solidify, and thereby forming a densified modified layer; a process of forming a thermal sprayed coating on the modified layer which has been formed in the latest; and a process of irradiating a surface of the thermal sprayed coating with a high energy beam so as to cause an entirety of the thermal sprayed coating and a part of the modified layer which has been formed in the latest in the thickness direction to melt and then solidify, and thereby forming a densified modified layer.
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公开(公告)号：US20190120288A1
公开(公告)日：2019-04-25
申请号：US16091857
申请日：2017-04-12
Applicant: NSK LTD. , TOCALO CO., LTD
Inventor： Manabu YAMADA , Naozumi NAKATA , Shinichi NISHIGUCHI , Junichi TAKEUCHI , Seiki MATSUURA , Yuji OKADA
Abstract: An insulated bearing includes a pair of bearing rings arranged concentrically to each other and rolling elements arranged to be rotatable between the pair of bearing rings, at least one of the bearing rings having an insulating layer formed thereon. The one of the bearing rings having the insulating layer formed thereon has an annular groove having an arc-shaped cross section formed on each of both end surfaces of the bearing ring. At least a surface from a non-raceway surface side circumferential surface to the annular groove of the bearing ring is covered by the insulating layer. The insulating layer is a ceramic thermal sprayed layer.
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公开(公告)号：US09799545B2
公开(公告)日：2017-10-24
申请号：US14397297
申请日：2013-03-22
Applicant: TOCALO CO., LTD.
Inventor： Ryo Yamasaki , Mitsuharu Inaba , Kensuke Taguchi
CPC classification number: H01L21/6833 , C23C4/01 , C23C4/11 , C23C4/12 , H01L21/67103 , H01L21/6831 , H02N13/00
Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.
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85.发明授权公开(公告)号：US09421570B2
公开(公告)日：2016-08-23
申请号：US14376647
申请日：2012-10-26
Applicant: TOCALO CO., LTD.
Inventor： Yoshio Harada , Kenichiro Togoe
CPC classification number: B05D1/02 , B05B7/205 , B05D2350/33 , C23C4/02 , C23C4/04 , Y10T428/12056 , Y10T428/24372 , Y10T428/24413
Abstract: [Problem] To provide a fluoride spray coating covered member adhered with a fluoride spray coating having excellent properties on quality by suppressing a thermal decomposition reaction and an oxide reaction, and to propose a method for forming a cover by firmly adhering the coating.[Solution] A method for forming a fluoride spray coating in an implantation structure onto a substrate surface by spraying particles of a fluoride spraying material onto a substrate surface or a pretreated substrate surface, if necessary through an undercoat layer or spray particle dotted parts of carbide cermet, at a flying velocity of particles of not less than 500 m/sec with an inert gas as a working gas for coating formation at an inert gas temperature of 600° C.-1300° C. as well as a fluoride spray coating covered member.
Abstract translation: [问题]通过抑制热分解反应和氧化反应来提供通过抑制热分解反应和氧化物反应而具有优异质量性质的氟化物喷涂的氟喷涂层覆盖部件，并提出通过牢固地粘合涂层来形成盖的方法。 [解决方案]通过将氟化物喷涂材料的颗粒喷涂到基材表面或预处理的基材表面上，如果需要，通过底涂层或喷涂颗粒的碳化物的点部分将喷涂结构中的氟化物喷涂形成形成在基材表面上的方法 金属陶瓷以不小于500m / sec的颗粒的飞行速度，在惰性气体温度为600℃-1300℃下以惰性气体作为用于涂层形成的工作气体，以及覆盖氟化物喷涂层 会员。
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Patent Agency Ranking
86.发明授权公开(公告)号：US09238863B2
公开(公告)日：2016-01-19
申请号：US14373505
申请日：2013-01-16
Applicant: TOCALO CO., LTD.
Inventor： Yoshio Harada , Takema Teratani , Shinya Miki , Kenichiro Togoe
CPC classification number: C23C14/48 , C23C4/04 , C23C4/18 , Y10T428/24802
Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.
Abstract translation: 本发明提供一种具有优异的抗卤素腐蚀性和耐等离子体侵蚀性的氟喷涂层覆盖部件，并显示字母，数字，图形，图案，公司名称，序列号等识别符号。 在本发明中，将选自含氟气体，氧气和惰性气体的一种或多种注入气体离子注入到形成在基材表面上的白色氟化物喷涂层上，由此白色表面的至少一部分 氟化物喷涂改为黑色，形成黑色离子注入层。
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公开(公告)号：US20150116889A1
公开(公告)日：2015-04-30
申请号：US14397297
申请日：2013-03-22
Applicant: TOCALO CO., LTD.
Inventor： Ryo Yamasaki , Mitsuharu Inaba , Kensuke Taguchi
IPC: H01L21/683 , C23C4/12
CPC classification number: H01L21/6833 , C23C4/01 , C23C4/11 , C23C4/12 , H01L21/67103 , H01L21/6831 , H02N13/00
Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.
Abstract translation: 公开了一种静电卡盘和制造方法，其中不存在使用粘合剂的缺点，自由度高。 静电卡盘包括构成主卡盘主体的基板部分，形成在基板部分表面上的喷涂层的第一绝缘层，通过将导电浆料涂敷到第一绝缘层的表面而形成的电导体的加热器部分 层，形成在第一绝缘层的表面上以覆盖加热器部分的喷涂层的第二绝缘层，通过热喷涂形成于第二绝缘层的表面上的电极部分和喷涂层的介电层 形成到第二层的表面，以便覆盖电极部分，并且在不使用粘合剂的情况下降低体积电阻率。
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公开(公告)号：US08896210B2
公开(公告)日：2014-11-25
申请号：US13705712
申请日：2012-12-05
Applicant: Tokyo Electron Limited , Tocalo Co., Ltd.
Inventor： Masaru Nishino , Masatsugu Makabe , Nobuyuki Nagayama , Tatsuya Handa , Ryotaro Midorikawa , Keigo Kobayashi , Tetsuya Niya
CPC classification number: H05H1/46 , H01J37/32477 , H01J37/32495
Abstract: A plasma processing apparatus includes a processing chamber; a lower electrode serving as a mounting table for mounting thereon a target object; and an upper electrode or an antenna electrode provided to be opposite to the lower electrode. The apparatus further includes a gas supply source for introducing a gas including a halogen-containing gas and an oxygen gas into the processing chamber and a high frequency power supply for applying a high frequency power for generating plasma to at least one of the upper electrode, the antenna electrode, or the lower electrode. Among inner surfaces of the processing chamber which are exposed to the plasma, at least a part of or all of the surfaces between a mounting position of the target object and the upper electrode, or the antenna electrode; or at least a part of or all of the surfaces of the upper electrode or the antenna electrode are coated with a fluorinated compound.
Abstract translation: 等离子体处理装置包括处理室; 用作安装台的下电极，用于安装目标物体; 以及设置成与下电极相对的上电极或天线电极。 该装置还包括用于将包含含卤素气体和氧气的气体引入处理室的气体供给源和用于将高频电力施加到上部电极中的至少一个的高频电源， 天线电极或下电极。 在暴露于等离子体的处理室的内表面中，目标物体的安装位置与上部电极或天线电极之间的至少一部分或全部表面; 或上部电极或天线电极的至少一部分或全部表面涂覆有氟化合物。
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公开(公告)号：US08864869B2
公开(公告)日：2014-10-21
申请号：US12734680
申请日：2008-11-28
Applicant: Yasushi Kurisu , Tatsuo Suidzu
Inventor： Yasushi Kurisu , Tatsuo Suidzu
CPC classification number: C23C4/06 , C21D9/563 , C22C19/05 , C22C19/07 , C22C29/02 , C23C4/18 , F27B9/2407 , F27B9/2469
Abstract: The hearth roll for a continuous annealing furnace is able to suppress the occurrence of buildup on the hearth roll surface and able to be stably used for a long period under the high temperature environment. The hearth roll has a cermet coating comprised 50 to 90 vol % of ceramic and the balance of a heat resistant alloy on its surface, the ceramic containing Cr3C2: over 50 to 90 vol %, Al2O3: 1 to 40 vol %, Y2O3: 0 to 3 vol %, and ZrB2: 0 to 40 vol % and having a balance of unavoidable impurities and pores, the heat resistant alloy containing Cr: 5 to 20 mass %, Al: 5 to 20 mass %, and one or both of Y and Si: 0.1 to 6 mass % and has a balance of one or both of Co and Ni and unavoidable impurities.
Abstract translation: 用于连续退火炉的炉床辊能够抑制炉床辊表面积聚的发生，并且能够在高温环境下长时间稳定地使用。 炉底辊具有包含50至90体积％的陶瓷和其表面上的耐热合金的余量的金属陶瓷涂层，包含Cr 3 C 2的陶瓷：超过50至90体积％，Al 2 O 3：1至40体积％，Y 2 O 3：0 至3体积％，ZrB 2：0〜40体积％，余量为不可避免的杂质和气孔，含有Cr：5〜20质量％，Al：5〜20质量％的耐热合金，Y： 和Si：0.1〜6质量％，并且余量为Co和Ni之一或两者以及不可避免的杂质。
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公开(公告)号：US20110203468A1
公开(公告)日：2011-08-25
申请号：US13127740
申请日：2009-11-05
Applicant: Yoshio Harada , Takema Teratani
Inventor： Yoshio Harada , Takema Teratani
Abstract: In order to propose a dry process technique of producing a printing roll having safe and beauty concave portions for printing image area without discharging environmental contaminating substance and a new technique for improving quality of printed matters, this invention is to provide a printing roll with DLC film layer in which laser beam-engraved grooves as concave portions for printing image area are formed on a carbide cermet spray coating formed on a surface of a roll substrate, and a method wherein a carbide cermet spray coating is formed on a surface of a roll substrate roughened by a blast treatment, the surface of the carbide cermet spray coating is ground or ground-polished, then a DLC film is formed on the ground or ground-polished surface and thereafter laser beam-engraved grooves are formed on the surface of the DLC film as a concave portion for printing image area.
Abstract translation: 为了提出一种制造具有安全美观的印刷辊的干燥工艺技术，用于印刷图像区域而不排放环境污染物质，以及用于提高印刷品质量的新技术，本发明提供一种具有DLC膜的印刷辊 在形成于辊基板的表面上的碳化物金属陶瓷喷涂层上形成有作为印刷图像区域的凹部的激光雕刻槽的层，以及在辊基板的表面上形成碳化物金属陶瓷喷涂 通过喷砂处理粗糙化，将硬质合金金属陶瓷喷涂的表面研磨或研磨抛光，然后在地面或研磨抛光表面上形成DLC膜，此后在DLC的表面上形成激光束刻槽 胶片作为打印图像区域的凹部。
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