Gas-line system for semiconductor-manufacturing apparatus
    81.
    发明授权
    Gas-line system for semiconductor-manufacturing apparatus 有权
    半导体制造装置的气体线路系统

    公开(公告)号:US06662817B2

    公开(公告)日:2003-12-16

    申请号:US09967727

    申请日:2001-09-28

    IPC分类号: G05D1113

    摘要: A gas-line system used for a semiconductor-manufacturing apparatus with at least two reactors, includes at least one gas source; a flow-divider means including an input port on the primary side, which receives a source gas from the gas source, and an output port on the secondary side, which outputs an inputted source gas by equally distributing it. The input port on the primary side is connected with the gas source and the output port on the secondary side is connected with the reactors; and one exhaust pump for exhausting gases within the reactors, which is connected with the reactors. It is desirable that the gas-line system is provided between the reactors and the exhaust pump, and an APC is included for controlling pressure for each reactor.

    摘要翻译: 用于具有至少两个反应器的半导体制造装置的气体管线系统包括至少一个气体源; 分流器装置,其包括在一侧上的输入端口,其接收来自气体源的源气体和次级侧的输出端口,其通过均匀分配输出输入的源气体。 初级侧的输入端口与气源连接,次级侧的输出端口与反应器连接; 以及一个用于排放反应器内的与反应器相连的气体的排气泵。 期望在反应器和排气泵之间设置气体管线系统,并且包括用于控制每个反应器的压力的APC。

    Universal safety device and process for protecting a pipeline
    82.
    发明授权
    Universal safety device and process for protecting a pipeline 有权
    通用安全装置和保护管道的过程

    公开(公告)号:US06328072B1

    公开(公告)日:2001-12-11

    申请号:US09592238

    申请日:2000-06-12

    IPC分类号: F15D102

    摘要: A safety device for protecting a fluid pipeline (1) from an excessive flow of the fluid running through it. The device includes a body (2) delimited by a tubular wall (20), having an upstream end (21) and a downstream end (22) and being selectively inserted into the pipeline (1). A valve (3), which is sensitive to a pressure loss, is supported by the body (2) and disposed between the upstream and downstream ends. A retaining means (4a, 4b) holds the body (2) in place inside the pipeline (1). An inflatable envelope (5) is provided outside the body for impermeably encasing a section of effective length of the tubular wall (20) into which at least one first opening (231) is cut.

    摘要翻译: 一种用于保护流体管道(1)免受流过其的流体的过量流动的安全装置。 该装置包括由管状壁(20)限定的主体(2),其具有上游端(21)和下游端(22),并被选择性地插入到管道(1)中。 对压力损失敏感的阀(3)由主体(2)支撑并设置在上游和下游端之间。 保持装置(4a,4b)将主体(2)保持在管道(1)内的适当位置。 一个可膨胀的外壳(5)设置在主体的外面,用于不可渗透地包围切割有至少一个第一开口(231)的有效长度的管状壁(20)的一部分。

    Differential valve
    83.
    发明授权
    Differential valve 失效
    差压阀

    公开(公告)号:US5165442A

    公开(公告)日:1992-11-24

    申请号:US659896

    申请日:1991-02-25

    IPC分类号: A62C5/02 G05D11/00

    摘要: A fire fighting foam proportioner for use in providing precise proportioning of foam to fire fighting liquid, e.g. water, is disclosed. It includes a tank for the storage of foam concentrate which is loaded using a hand pump. The storage tank is coupled to a fire fighting line through a differential pressure responsive valve in the fire fighting line and a proportioning valve used to select the foam concentration desired, for example 0.2 to 1 percent of the fire fighting liquid. The differential pressure responsive valve applies discharge pressure to the foam concentrate as a function of the fluid flow through the line and therefore provides precise flow concentration maintenance despite changes if flow and line pressure. The differential pressure responsive valve includes to coaxial valving members and low and high pressure ports which are coupled to control the discharged pressure to the tank. The proportioner valve include a rotor with a continuous variable groove for precise control.

    摘要翻译: 一种消防泡沫配料机,用于向消防液提供精确的泡沫比例,例如, 水,被公开。 它包括用于储存泡沫浓缩物的罐,其使用手动泵装载。 储罐通过消防线中的压差响应阀与消防线连接,并且用于选择所需泡沫浓度的比例阀,例如灭火液的0.2%至1%。 压差响应阀将排出压力作为流过管线的流体流量的函数对泡沫浓缩物施加,因此即使流量和管路压力发生变化,也能提供精确的流量集中维护。 差压响应阀包括连接到同轴阀构件和低压端口和高压端口,以连接到控制到罐的排出压力。 比例阀包括具有用于精确控制的连续可变槽的转子。

    Fire fighting foam mixing system
    84.
    发明授权
    Fire fighting foam mixing system 失效
    消防泡沫搅拌系统

    公开(公告)号:US5009244A

    公开(公告)日:1991-04-23

    申请号:US395321

    申请日:1989-08-17

    IPC分类号: A62C5/02 G05D11/00

    摘要: A fire fighting foam proportioner for use in providing precise proportioning of foam to fire fighting liquid, e.g. water, is disclosed. It includes a tank for the storage of foam concentrate which is loaded using a hand pump. The storage tank is coupled to a fire fighting line through a differential pressure responsive valve in the fire fighting line and a proportioning valve used to select the foam concentration desired, for example 0.2 to 1 percent of the fire fighting liquid. The differential pressure responsive valve applies discharge pressure to the foam concentrate as a function of the fluid flow through the line and therefore provides precise flow concentration maintenance despite changes if flow and line pressure. The differential pressure responsive valve includes to coaxial valving members and low and high pressure ports which are coupled to control the discharged pressure to the tank. The proportioner valve include a rotor with a continuous variable groove for precise control.

    摘要翻译: 一种消防泡沫配料机,用于向消防液提供精确的泡沫比例,例如, 水,被公开。 它包括用于储存泡沫浓缩物的罐,其使用手动泵装载。 储罐通过消防线中的压差响应阀与消防线连接,并且用于选择所需泡沫浓度的比例阀,例如灭火液的0.2%至1%。 压差响应阀将排出压力作为流过管线的流体流量的函数对发泡浓缩物施加,因此即使流量和管路压力发生变化,也能提供精确的流量集中维护。 差压响应阀包括连接到同轴阀构件和低压端口和高压端口,以连接到控制到罐的排出压力。 比例阀包括具有用于精确控制的连续可变槽的转子。

    Pressure regulating hydraulic circuit and valve
    85.
    发明授权
    Pressure regulating hydraulic circuit and valve 失效
    压力调节液压回路及阀门

    公开(公告)号:US4337787A

    公开(公告)日:1982-07-06

    申请号:US197832

    申请日:1980-03-12

    IPC分类号: F16D48/02 F16D48/04 G05D11/13

    摘要: For work vehicles, for example, cold weather can be a problem. Disengaging the vehicle clutch (26) aids starting by reducing engine loads during starting. Where the clutch (26) is hydraulically actuated, it can be disengaged by keeping fluid pressures below required engagement pressure when supplying other elements common to the clutch hydraulic circuit. Apparatus is provided which during starting directs fluid to, for example, pump drive bearings (20) at less than clutch engagement pressure. An input signal to the apparatus from the vehicle operator after engine start-up then builds pressure to activate the clutch (26) while continuing to supply the pump drive bearings (20) for lubrication. Upon a preselected fluid flow to the apparatus, such as at engine shutdown, the apparatus automatically returns to the condition at which available pressure levels are less than required for clutch engagement. Thus, cold starting problems are substantially eliminated by automatically providing a clutch disengaged situation in the vehicle during engine start-up.

    摘要翻译: PCT No.PCT / US80 / 00270 Sec。 371日期1980年3月12日 102(e)1980年3月12日PCT PCT Fils 3月12日,PCT PCT。 公开号WO81 / 02641 1981年9月17日。对于工作车辆,例如,天气寒冷可能是一个问题。 拆卸车辆离合器(26)有助于起动时减少发动机负荷。 在离合器(26)被液压致动的情况下,当提供离合器液压回路共用的其它元件时,通过将流体压力保持在所需的接合压力以下,可将其分离。 提供了一种装置,其在启动期间以小于离合器接合压力将流体引导到例如泵驱动轴承(20)。 在发动机起动之后,来自车辆操作者的装置的输入信号随后建立压力以启动离合器(26),同时继续供应用于润滑的泵驱动轴承(20)。 当预先选定的流体流到设备时,例如在发动机关闭时,设备自动返回到可用压力水平低于离合器接合所需的压力水平的状态。 因此,通过在发动机启动期间自动提供车辆中的离合器分离情况,基本上消除了冷启动问题。

    Method and system for controlling the fluid level in a drain tank
    86.
    发明授权
    Method and system for controlling the fluid level in a drain tank 失效
    控制排水箱液位的方法和系统

    公开(公告)号:US4298019A

    公开(公告)日:1981-11-03

    申请号:US107799

    申请日:1979-12-27

    摘要: A method and system for allocating fluid flow draining from a fluid utilizing apparatus to first and second fluid sinks. The fluid flow is entirely routed to the first fluid sink for drain flow rates less than a predetermined flow rate and to the second fluid sink as well as the first fluid sink for drain flow rates at least as great as the predetermined flow rate. Fluid from the fluid utilizing device is received in a drain tank through an inlet port and is drained therefrom through an outlet port. The fluid flow rate through the outlet port is regulated by cooperatively modulating first and second valves arranged in parallel flow relation to allocate fluid flow to the first and second fluid sinks.

    摘要翻译: 一种用于将从流体利用设备排出的流体流分配到第一和第二流体槽的方法和系统。 流体流动完全路由到第一流体槽,用于低于预定流量的排出流量,以及至少与预定流量一样大的第二流体槽以及第一流体槽。 来自流体利用装置的流体通过入口端口容纳在排水槽中,并通过出口从其排出。 通过协同调节以平行流动关系布置的第一和第二阀来调节通过出口的流体流速,以分配流体流到第一和第二流体槽。