Multilayer reflector for high efficiency and high spatial resolution pixelated x-ray scintillators and fabrication method

    公开(公告)号:US11947055B2

    公开(公告)日:2024-04-02

    申请号:US17744841

    申请日:2022-05-16

    Applicant: Houxun Miao

    Inventor: Houxun Miao

    CPC classification number: G01T1/2002 G01T1/242

    Abstract: Disclosed herein is a pixelated x-ray scintillator with a multilayer reflector for x-ray detectors with simultaneous high spatial resolution and high quantum efficiency and fabrication method to produce the pixelated x-ray scintillator. The multilayer reflector provides high reflectivity for the emitted visible photons over a broad incident angle range, thus boosts the light output efficiency of the pixelated x-ray scintillator. The fabrication process to produce the pixelated scintillator with the multilayer reflector in this disclosure is compatible with standard semiconductor fabrication instrument and suitable for mass production.

    MULTILAYER REFLECTOR FOR HIGH EFFICIENCY AND HIGH SPATIAL RESOUTION PIXELATED X-RAY SCINTILLATORS AND FABRICATION METHOD

    公开(公告)号:US20230367023A1

    公开(公告)日:2023-11-16

    申请号:US17744841

    申请日:2022-05-16

    Applicant: Houxun Miao

    Inventor: Houxun Miao

    CPC classification number: G01T1/2002 G01T1/242

    Abstract: Disclosed herein is a pixelated x-ray scintillator with a multilayer reflector for x-ray detectors with simultaneous high spatial resolution and high quantum efficiency and fabrication method to produce the pixelated x-ray scintillator. The multilayer reflector provides high reflectivity for the emitted visible photons over a broad incident angle range, thus boosts the light output efficiency of the pixelated x-ray scintillator. The fabrication process to produce the pixelated scintillator with the multilayer reflector in this disclosure is compatible with standard semiconductor fabrication instrument and suitable for mass production.

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