Visual enhancement of interval changes using temporal subtraction, convolving, and non-rigid transformation field mapping
    1.
    发明授权
    Visual enhancement of interval changes using temporal subtraction, convolving, and non-rigid transformation field mapping 有权
    使用时间减法,卷积和非刚性变换场映射的间隔变化的视觉增强

    公开(公告)号:US08229189B2

    公开(公告)日:2012-07-24

    申请号:US12028255

    申请日:2008-02-08

    IPC分类号: G06K9/00 G06K9/64

    摘要: Method to bring out a temporal difference between corresponding structures in a reference image R and a floating image F by convolving the reference image R and the floating image F with a window function Hw to generate Rw and Fw, applying a non-rigid transformation resulting in a transformation field g(rR) mapping every location rR to a corresponding location rF in the floating image F and generating a subtraction image by performing subtraction Rw(r)−Fw(g(r)) wherein r represents a voxel (x, y, z) in reference image R.

    摘要翻译: 通过使用窗函数Hw卷积参考图像R和浮动图像F来产生参考图像R和浮动图像F中的相应结构之间的时间差异的方法,以产生Rw和Fw,应用非刚性变换,导致 将每个位置rR映射到浮动图像F中的对应位置rF的变换字段g(rR),并通过执行减法Rw(r)-Fw(g(r))生成减法图像,其中r表示体素(x,y ,z)。

    Electro-optical modulator structure
    2.
    发明授权
    Electro-optical modulator structure 有权
    电光调制器结构

    公开(公告)号:US08195011B2

    公开(公告)日:2012-06-05

    申请号:US12396550

    申请日:2009-03-03

    摘要: The present invention discloses an ultra-compact optical modulator comprising at least one resonator on a semiconductor chip. The EO modulator modulates incoming light having a certain wavelength range and comprises a waveguide layer accommodating at least one resonator having a periodic complex refraction index distribution structure defining a periodic defect band-edge and a cladding layer; and at least one electrode; the waveguide layer, the cladding layer and the electrode forming a capacitor structure; such that when an external voltage is applied to the capacitor structure the free carrier concentration in the waveguide layer is controlled, enabling a modulation of the resonator's refractive index; wherein the periodic defect band-edge is selected to be within the wavelength range, enabling a slow-light propagation of the incoming light within the waveguide layer.

    摘要翻译: 本发明公开了一种超小型光调制器,其包括在半导体芯片上的至少一个谐振器。 EO调制器调制具有一定波长范围的入射光,并且包括容纳至少一个谐振器的波导层,该谐振器具有限定周期性缺陷带边缘和包覆层的周期性复折射率分布结构; 和至少一个电极; 波导层,包层和形成电容器结构的电极; 使得当外部电压施加到电容器结构时,波导层中的自由载流子浓度被控制,使得能够调制谐振器的折射率; 其中周期性缺陷带边缘被选择在波长范围内,使得入射光在波导层内的慢光传播。

    Toothed wheel gearing (variants) and a planetary toothed mechanism based thereon (variants)
    4.
    发明授权
    Toothed wheel gearing (variants) and a planetary toothed mechanism based thereon (variants) 有权
    齿轮齿轮(变型)和基于其的行星齿轮机构(变体)

    公开(公告)号:US08157691B2

    公开(公告)日:2012-04-17

    申请号:US12644190

    申请日:2009-12-22

    IPC分类号: F16H1/32 F16H57/08

    摘要: The engagement of gearwheels with curvilinear teeth is intended to create small-sized mechanical gears of rotational motion with big gear ratio in one stage. The smaller gearwheel—pinion (16)—has one tooth, having in its face section the shape of circumference (3), eccentrically shifted with respect to the axis OO1 of the gearwheel (16). The curvilinear helical tooth of the gearwheel (16) (helical eccentric) is generated by sequential shifting of the circumference 3 along the axis OO1 and its continuous turning around the axis. The greater gearwheel (17) has helical teeth, generated by turning of the cycloidal curve (5), the teeth are conjugated with the helical surface of the pinion (16). The engagement has a continuous line of contact along the whole length of the tooth, where in each section a circular pin tooth and a cycloid are engaged, having minimum losses for friction. In order to eliminate axial loads, occurring in engagement of helical teeth, the gearwheels (16) and (17) are made herring-bone. The similar eccentrically cycloidal engagement can be implemented by assembled gearwheels. On the basis of the engagement one can design cylindrical gearboxes with parallel shafts, bevel gearboxes with intersecting shafts, and also planetary gears according to David and James schemes, possessing the increased load carrying capacity at smaller overall dimensions.

    摘要翻译: 具有曲线齿的齿轮啮合旨在在一个阶段中产生具有大齿轮比的小型旋转运动机械齿轮。 较小的齿轮小齿轮(16)具有一个齿,其表面部分具有圆周(3)的形状,相对于齿轮16的轴线O01偏心移动。 齿轮16的曲线螺旋齿(螺旋偏心)通过圆周3沿着轴线O01的顺序移位及其围绕轴的连续转动而产生。 较大的齿轮(17)具有通过摆线曲线(5)的转动产生的螺旋齿,齿与小齿轮(16)的螺旋表面共轭。 该接合沿着整个齿的整个长度具有连续的接触线,在每个部分中,圆形销齿和摆线接合,具有最小的摩擦损失。 为了消除在螺旋齿接合中发生的轴向载荷,齿轮(16)和(17)被制成鲱鱼骨。 类似的偏心摆线接合可以通过组装的齿轮来实现。 在接合的基础上,可以设计具有平行轴的圆柱齿轮箱,具有相交轴的锥齿轮箱,以及根据David和James方案的行星齿轮,在较小的总体尺寸下具有增加的承载能力。

    Apparatus and method for inspecting micro-structured devices on a semiconductor substrate
    5.
    发明授权
    Apparatus and method for inspecting micro-structured devices on a semiconductor substrate 有权
    用于检查半导体衬底上的微结构器件的装置和方法

    公开(公告)号:US08154718B2

    公开(公告)日:2012-04-10

    申请号:US11568949

    申请日:2005-05-23

    IPC分类号: G01N21/00

    摘要: Previously used examination devices and methods mostly operate with reflected visible or UV light to analyze microstructured samples of a wafer (38), for example. The aim of the invention is to increase the possible uses of said devices, i.e. particularly in order to represent structural details, e.g. of wafers that are structured on both sides, which are not visible in VIS or UV because coatings or intermediate materials are not transparent. Said aim is achieved by using IR light as reflected light while creating transillumination (52) which significantly improves contrast in the IR image, among other things, thus allowing the sample to be simultaneously represented in reflected or transmitted IR light and in reflected visible light.

    摘要翻译: 以前使用的检查装置和方法大多以反射的可见光或UV光来操作,以分析例如晶片(38)的微结构样品。 本发明的目的是增加所述装置的可能用途,即特别是为了表示结构细节,例如, 的两面结构的晶片,其在VIS或UV中不可见,因为涂层或中间材料不透明。 所述目的通过使用IR光作为反射光来实现,同时产生透光(52),其显着地改善了IR图像中的对比度,从而允许样品在反射或透射的IR光和反射的可见光中同时被表示。

    Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources
    6.
    发明授权
    Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources 有权
    在EUV辐射源中连续生成液体锡作为发射体材料的布置

    公开(公告)号:US08154000B2

    公开(公告)日:2012-04-10

    申请号:US12773148

    申请日:2010-05-04

    IPC分类号: H05G2/00

    摘要: The invention is directed to an arrangement for generating EUV radiation based on a hot plasma using liquid emitter material. The object of the invention is to find a novel possibility for generating EUV radiation which allows a continuous supply of liquid, particularly metal, emitter material (2) under a defined high pressure without having to interrupt the continuous supply of emitter material (2) when consumed emitter material (2) must be replenished. According to the invention, this object is met in that the emitter material supply unit (4) has at least a first pressure vessel (44) and a second pressure vessel (44′) between the reservoir vessel (41) and the injection device (5) for generating a high emitter material pressure for the injection unit (5), the pressure vessels (44, 44′) are acted upon by a high-pressure gas system (73) with a gas pressure (74) in the megapascal range, and the emitter material supply unit (4) has means for switching the high-pressure gas system (73) from one pressure vessel (44, 44′) to the other pressure vessel (44, 44′) and for correspondingly alternately switching the injection unit (5) to the constant emitter material pressure of the respective pressure vessel (44, 44′) being pressurized, wherein at least one of the pressure vessels (44, 44′) can be refilled during the continuous operation of droplet generation and plasma generation.

    摘要翻译: 本发明涉及一种用于使用液体发射器材料基于热等离子体生成EUV辐射的装置。 本发明的目的是找到产生EUV辐射的新型可能性,其允许在限定的高压下连续供应液体,特别是金属发射体材料(2),而不必中断发射体材料(2)的连续供应,当 消耗的发射体材料(2)必须补充。 根据本发明,满足的目的在于,发射体材料供应单元(4)在储存器容器(41)和注射装置(4)之间至少具有第一压力容器(44)和第二压力容器(44') 5)用于产生用于注入单元(5)的高发射极材料压力,压力容器(44,44')被高压气体系统(73)作用,其中气压(74)在兆帕范围内 ,并且发射体材料供给单元(4)具有用于将高压气体系统(73)从一个压力容器(44,44')切换到另一个压力容器(44,44')的装置,并且相应地交替地切换 注射单元(5)到相应的压力容器(44,44')的恒定的发射器材料压力被加压,其中至少一个压力容器(44,44')可以在液滴生成的连续操作期间重新填充, 等离子体生成

    Electronic circuitry and method for determination of amplitudes of received signals
    8.
    发明授权
    Electronic circuitry and method for determination of amplitudes of received signals 失效
    用于确定接收信号振幅的电子电路和方法

    公开(公告)号:US08107558B2

    公开(公告)日:2012-01-31

    申请号:US12350308

    申请日:2009-01-08

    申请人: Moshe Fireaizen

    发明人: Moshe Fireaizen

    IPC分类号: H04L27/00

    CPC分类号: G01R19/2506 G06F1/0307

    摘要: A method and a calculating circuit for generating an output signal representing an actual amplitude of a received digitized signal having a magnitude of the actual amplitude equal or greater than a value of a saturation level of a dynamic range of a receiver. For the determination of the actual amplitude, firstly, a predetermined time interval is selected. Then, a total number of samples of the received digitized signal within the predetermined time interval is calculated. Further, a number of samples of the received digitized signal within the predetermined time interval with the amplitude equal to the saturation level is calculated. Thereafter, a ratio between the number of the samples with the amplitude value equal to the saturation level and the total number of the samples is calculated. For calculation of the magnitude of the actual amplitude a predetermined relationship between the magnitude of the amplitude and the ratio is applied and the output signal representing the actual amplitude is provided.

    摘要翻译: 一种方法和计算电路,用于产生表示具有等于或大于接收机的动态范围的饱和电平值的实际幅度的幅度的接收数字化信号的实际振幅的输出信号。 为了确定实际振幅,首先选择预定的时间间隔。 然后,计算预定时间间隔内接收到的数字化信号的样本总数。 此外,计算在等于饱和水平的幅度的预定时间间隔内接收的数字化信号的多个样本。 此后,计算具有等于饱和水平的振幅值的样本数与样本总数之间的比率。 为了计算实际振幅的大小,施加幅度幅度和比率之间的预定关系,并且提供表示实际振幅的输出信号。

    Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers
    9.
    发明授权
    Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers 有权
    用于评估晶片边缘区域中的缺陷并在晶片检查系统中使用该装置的装置和方法

    公开(公告)号:US08089622B2

    公开(公告)日:2012-01-03

    申请号:US12039047

    申请日:2008-02-28

    IPC分类号: G01N21/00 G06K9/62

    CPC分类号: G01N21/9503

    摘要: A device for evaluating defects in the edge area of a wafer (6) is disclosed. The evaluation may also be performed automatically. In particular, the device includes three cameras (25, 26, 27), each provided with an objective (30), wherein a first camera (25) is arranged such that the first camera (25) is opposite to an edge area on the upper surface (6a) of the wafer (6), wherein a second camera (26) is arranged such that the second camera (26) is opposite to a front surface (6b) of the wafer (6), and wherein a third camera (27) is arranged such that the third camera (27) is opposite to an edge area on the lower surface (6c) of the wafer (6).

    摘要翻译: 公开了一种用于评估晶片(6)的边缘区域中的缺陷的装置。 评价也可以自动进行。 特别地,该装置包括三个相机(25,26,27),每个相机设置有物镜(30),其中第一相机(25)布置成使得第一相机(25)与第一相机 晶片(6)的上表面(6a),其中第二相机(26)布置成使得第二相机(26)与晶片(6)的前表面(6b)相对,并且其中第三相机 (27)被布置成使得第三相机(27)与晶片(6)的下表面(6c)上的边缘区域相对。