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公开(公告)号：US07518733B2
公开(公告)日：2009-04-14
申请号：US10536821
申请日：2003-11-21
IPC分类号： G01B11/02
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/02072 , G01B9/02089 , G01B9/0209
摘要： Light is directed along a sample path towards the sample surface and along a reference path towards a reference surface such that light reflected by the sample surface and light reflected by the reference surface interfere. Relative movement is effected between the sample surface and the reference surface along a measurement path and the light intensity resulting from interference between light reflected from the reference surface and regions of the sample surface is sensed at intervals along the measurement path to provide a number of sets of light intensity data values with each light intensity data value representing the sensed light intensity associated with a corresponding one of said regions. The sets of light intensity data are processed to determine a position along the measurement path at which a predetermined feature occurs in the light intensity data for each sensed region and to enhance image data representing the intensity data to facilitate the detection by a user of the interference fringes.
摘要翻译： 光沿取样路径朝向样品表面并沿着参考路径被引向参考表面，使得由样品表面反射的光和被参考表面反射的光干涉。 沿着测量路径在样品表面和参考表面之间进行相对运动，并且沿着测量路径以间隔感测从参考表面反射的光与样品表面的区域之间的干涉产生的光强度，以提供多个组 的光强数据值，其中每个光强数据值表示与所述区域中的相应一个相关联的感测光强度。 处理光强度数据集合以确定在每个感测区域的光强度数据中发生预定特征的测量路径的位置，并且增强表示强度数据的图像数据，以便于用户检测到干扰 边缘。
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公开(公告)号：US07877227B2
公开(公告)日：2011-01-25
申请号：US12162728
申请日：2007-02-09
IPC分类号： G01B11/24
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面（13）的表面特性数据的表面测量仪器（1）。 当传感器（16）沿着扫描路径（SP）以间隔感测光强度时，引起参考表面（11）和样品支架（15）之间的相对运动，以提供一系列强度值，表示由 在所述相对移动期间的样品表面（13）的区域，并且可以从其导出一系列强度值表面特征数据。 样品支撑件（15）在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件（15）可以倾斜以使得扫描路径（SP）垂直于样品表面区域，并且 翻译为补偿由于倾斜引起的翻译运动。
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3.发明授权Interferometer system for and a method of determining a surface characteristic by modifying surface height data using corresponding amplitude data 失效干涉仪系统和通过使用对应的振幅数据修改表面高度数据来确定表面特性的方法公开(公告)号：US07697726B2
公开(公告)日：2010-04-13
申请号：US11260072
申请日：2005-10-26
IPC分类号： G06K9/00
CPC分类号： G01B11/2441
摘要： An interferometer system (2) directs light along a sample path (SP) towards a sample surface (7) and along a reference path (RP) towards a reference surface (6). Light reflected by a sample surface region and by the reference surface interfere. Sensing elements (SE) sense interference fringes at intervals along a scan path to provide a set of intensity data. A coherence peak position determiner (201) determines from the intensity data set a position on the scan path that corresponds to the height of the surface region. An amplitude determiner (202) determines amplitude data representing the amplitude of the intensity data at the determined height position. A modified surface height calculator (207) calculates modified height data by modifying the height data by a correction factor determined using the corresponding amplitude data and a correction parameter provided by a correction parameter provider (260).
摘要翻译： 干涉仪系统（2）沿着样本路径（SP）将光沿着参考路径（RP）朝向参考表面（6）引导到样本表面（7）并沿着参考路径（RP）。 由样品表面区域和参考面反射的光线干涉。 感测元件（SE）沿着扫描路径间隔地感测干涉条纹以提供一组强度数据。 相干峰位置确定器（201）根据强度数据设置与扫描路径上对应于表面区域的高度的位置。 振幅确定器（202）确定表示所确定的高度位置处的强度数据的振幅的振幅数据。 经修改的表面高度计算器（207）通过使用由对应的幅度数据确定的校正因子和由校正参数提供者（260）提供的校正参数来修改高度数据来计算修改的高度数据。
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公开(公告)号：US08489359B2
公开(公告)日：2013-07-16
申请号：US13008380
申请日：2011-01-18
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument for obtaining surface characteristic data of a sample surface is described. Relative movement between a reference surface and a sample support is caused to occur while a sensor senses light intensity at intervals along a scan path to provide a series of intensity values representing interference fringes produced by a region of a sample surface during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support can be both tilted to cause the scan path to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面的表面特性数据的表面测量仪器。 当传感器沿着扫描路径间隔地感测光强度时，引起参考表面和样品支架之间的相对运动，以提供一系列强度值，其表示在所述相对运动期间由样品表面的区域产生的干涉条纹， 可以推导出哪一系列的强度值表面特征数据。 样品支撑体可以在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件可以倾斜以使得扫描路径垂直于样品表面区域并且被平移以补偿由于 倾斜
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公开(公告)号：US20110166823A1
公开(公告)日：2011-07-07
申请号：US13008380
申请日：2011-01-18
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument for obtaining surface characteristic data of a sample surface is described. Relative movement between a reference surface and a sample support is caused to occur while a sensor senses light intensity at intervals along a scan path to provide a series of intensity values representing interference fringes produced by a region of a sample surface during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support can be both tilted to cause the scan path to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面的表面特性数据的表面测量仪器。 当传感器沿着扫描路径间隔地感测光强度时，引起参考表面和样品支架之间的相对运动，以提供一系列强度值，表示在所述相对运动期间由样品表面的区域产生的干涉条纹， 可以推导出哪一系列的强度值表面特征数据。 样品支撑体可以在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件可以倾斜以使扫描路径垂直于样品表面区域并且被平移以补偿由于 倾斜
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6.发明授权Surface profiling apparatus with reference calibrator and method of calibrating same 有权具有参考校准器的表面分析仪及其校准方法公开(公告)号：US07440116B2
公开(公告)日：2008-10-21
申请号：US10558006
申请日：2004-05-20
CPC分类号： G01B11/30
摘要： A broad band surface profiling apparatus including a reference calibrator for calibrating the apparatus to compensate for surface features of the reference surface. A user is instructed to conduct calibration measurement operations using a calibration sample having a calibration surface to obtain calibration surface topography data for the calibration sample. At each calibration measurement operation, an image representing the calibration surface topography data is displayed to the user and the user has the option to accept or reject the calibration surface topography data represented by the displayed image. The reference calibrator has a surface topography data processor and a mean surface calculator for calculating mean surface topography data using the processed calibration surface topography data accepted by the user to provide reference surface features data. A reference surface features remover is provided for adjusting surface topography data obtained for a sample surface in accordance with the reference surface features data.
摘要翻译： 一种宽带表面轮廓设备，包括用于校准装置以补偿参考表面的表面特征的参考校准器。 指示用户使用具有校准表面的校准样品进行校准测量操作，以获得校准样品的校准表面形貌数据。 在每个校准测量操作中，向用户显示表示校准表面形貌数据的图像，并且用户可以选择接受或拒绝由所显示的图像表示的校准表面形貌数据。 参考校准器具有表面形貌数据处理器和平均表面计算器，用于使用由用户接受的经处理的校准表面形貌数据来计算平均表面形貌数据，以提供参考表面特征数据。 提供了参考表面特征去除器，用于根据参考表面特征数据调整为样品表面获得的表面形貌数据。
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公开(公告)号：US07948634B2
公开(公告)日：2011-05-24
申请号：US12115955
申请日：2008-05-06
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02057 , G01B9/02069 , G01B9/02083 , G01B9/0209 , G01B11/026
摘要： Broadband light is directed along sample and reference paths such that light reflected by a sample surface and light reflected by a reference surface interfere. A mover effects relative movement between the sample and reference surfaces along a scan path. A detector senses a series of light intensity values representing interference fringes produced by a sample surface region during the movement. A data processor processes the intensity values as they are received to produce coherence peak position data and, after completion of a measurement operation, uses this coherence peak position data to obtain data indicative of the height of the surface region. The data processor includes a correlator for correlating intensity values with correlation function data to provide correlation data to enable identification of a position of a coherence peak. A surface topography determiner determines a height of a sample surface region from coherence peak position data.
摘要翻译： 宽带光沿着采样和参考路径被引导，使得被样品表面反射的光和被参考表面反射的光干涉。 移动器沿着扫描路径影响样品和参考表面之间的相对运动。 检测器感测在运动期间由表面区域产生的干涉条纹的一系列光强度值。 数据处理器处理它们被接收的强度值以产生相干峰位置数据，并且在完成测量操作之后，使用该相干峰位置数据来获得表示表面区域的高度的数据。 数据处理器包括用于将强度值与相关函数数据相关联以提供相关数据以使得能够识别相干峰的位置的相关器。 表面形貌确定器从相干峰位置数据确定样品表面区域的高度。
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公开(公告)号：US20090012743A1
公开(公告)日：2009-01-08
申请号：US12162728
申请日：2007-02-09
IPC分类号： G01B11/24
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面（13）的表面特性数据的表面测量仪器（1）。 当传感器（16）沿着扫描路径（SP）以间隔感测光强度时，引起参考表面（11）和样品支架（15）之间的相对运动，以提供一系列强度值，表示由 在所述相对移动期间的样品表面（13）的区域，并且可以从其导出一系列强度值表面特征数据。 样品支撑件（15）在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件（15）可以倾斜以使得扫描路径（SP）垂直于样品表面区域，并且 翻译为补偿由于倾斜引起的翻译运动。
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公开(公告)号：US20080215271A1
公开(公告)日：2008-09-04
申请号：US12115955
申请日：2008-05-06
CPC分类号： G01B11/2441 , G01B9/02057 , G01B9/02069 , G01B9/02083 , G01B9/0209 , G01B11/026
摘要： Light from a broadband source (4) is directed along a sample path (SP) towards a region of a sample surface (7) and along a reference path (RP) towards a reference surface (6) such that light reflected by the region of the sample surface and light reflected by the reference surface interfere. A mover (11) effects relative movement along a scan path between the sample surface (7) and the reference surface (6). A detector (10) senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface. A data processor has a concurrent processing section (34a;340) for carrying out processing on intensity values as the intensity values are received by the receiving means during a measurement operation to produce data indicating the position of a coherence peak, and a post-processing section (34b;350) for, after completion of a measurement operation, using the data produced by the concurrent section to obtain data indicative of a height of the surface region. One of the processing sections has a correlator (44;440) for correlating intensity values with correlation function data representing a correlation function to provide correlation data to enable a position of a coherence peak to be identified. The post-processing section has a surface topography determiner (35;350) for determining a height of a sample surface region from coherence peak position data.
摘要翻译： 来自宽带源（4）的光沿着样本路径（SP）朝向样本表面（7）的区域并且沿着参考路径（RP）朝向参考表面（6）引导，使得由 样品表面和参考面反射的光线会干扰。 移动器（11）沿着样品表面（7）和参考表面（6）之间的扫描路径实现相对运动。 检测器（10）间隔地感测光强度以提供一系列表示由样品表面的区域产生的干涉条纹的强度值。 数据处理器具有并行处理部分（341a; 340），用于在测量操作期间由接收装置接收强度值以产生指示相干峰位置的数据的强度值进行处理， 处理部分（34b; 350），用于在完成测量操作之后，使用并发部分产生的数据来获得表示表面区域的高度的数据。 处理部分之一具有相关器（44; 440），用于将强度值与表示相关函数的相关函数数据相关联，以提供相关数据以使相关峰的位置能够被识别。 后处理部分具有用于根据相干峰位置数据确定样品表面区域的高度的表面形貌确定器（35; 350）。
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公开(公告)号：US07385707B2
公开(公告)日：2008-06-10
申请号：US10507837
申请日：2003-03-13
CPC分类号： G01B11/2441 , G01B9/02057 , G01B9/02069 , G01B9/02083 , G01B9/0209
摘要： A surface profiling apparatus and method. Broadband light is directed along sample and reference paths such that light reflected by a region of a sample surface and light reflected by a reference surface interfere. A mover effects relative movement between the sample and reference surfaces along a scan path. A detector senses a series of light intensity values representing interference fringes produced by the region of the sample surface during the movement. A data processor processes the intensity values as they are received during a measurement operation to produce data indicating the position of a coherence peak, and, after completion of a measurement operation, uses this coherence peak position data to obtain data indicative of the height of the surface region. The data processor includes a correlator for correlating intensity values with a correlation function to provide correlation data to enable the position of a coherence peak to be identified.
摘要翻译： 表面成型装置及方法。 宽带光沿着采样和参考路径被引导，使得由样品表面的区域反射的光和被参考表面反射的光被干扰。 移动器沿着扫描路径影响样品和参考表面之间的相对运动。 检测器感测一系列光强度值，其表示在运动期间由样品表面的区域产生的干涉条纹。 数据处理器处理在测量操作期间接收到的强度值以产生指示相干峰位置的数据，并且在完成测量操作之后，使用该相干峰位置数据来获得指示相关峰的高度的数据 表面区域。 数据处理器包括用于将强度值与相关函数相关联的相关器，以提供相关数据，以使得能够识别相干峰的位置。
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