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公开(公告)号：US20180246533A1
公开(公告)日：2018-08-30
申请号：US15907138
申请日：2018-02-27
CPC分类号： G05D7/0623 , G01F1/6842 , G01F1/6884 , G01F1/696 , G01F15/005 , G05D7/0166 , G05D7/0647 , G05D7/0676
摘要： A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.
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公开(公告)号：US20170219393A1
公开(公告)日：2017-08-03
申请号：US15424719
申请日：2017-02-03
摘要： A system and method including a weighing scale configured to measure a starting weight at a start time of a vaporizer chamber with a vaporizable liquid, the weighing scale configured to measure an ending weight at an end time and a controller configured to determine a vapor flow rate out of the vaporizer chamber based on a difference between the start time and the end time.
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公开(公告)号：US20180246531A1
公开(公告)日：2018-08-30
申请号：US15907254
申请日：2018-02-27
CPC分类号： G05D7/0623 , G01F1/6842 , G01F1/6884 , G01F1/696 , G01F15/005 , G05D7/0166 , G05D7/0647 , G05D7/0676
摘要： A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.
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公开(公告)号：US10584989B2
公开(公告)日：2020-03-10
申请号：US15424719
申请日：2017-02-03
摘要： A system and method including a weighing scale configured to measure a starting weight at a start time of a vaporizer chamber with a vaporizable liquid, the weighing scale configured to measure an ending weight at an end time and a controller configured to determine a vapor flow rate out of the vaporizer chamber based on a difference between the start time and the end time.
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公开(公告)号：US10054959B2
公开(公告)日：2018-08-21
申请号：US15260834
申请日：2016-09-09
申请人： Bhushan Somani
发明人： Bhushan Somani
CPC分类号： G05D7/0635 , G01F1/34 , G01F1/68 , G01F15/003 , G01F15/005 , G01F15/06 , Y10T137/7759
摘要： A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.
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公开(公告)号：US09454158B2
公开(公告)日：2016-09-27
申请号：US14210113
申请日：2014-03-13
申请人： Bhushan Somani
发明人： Bhushan Somani
CPC分类号： G05D7/0635 , G01F1/34 , G01F1/68 , G01F15/003 , G01F15/005 , G01F15/06 , Y10T137/7759
摘要： A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.
摘要翻译： 一种包括包括一个或多个传感器的流量控制器系统的装置，包括一个或多个传感器的流量测量传感器。 流量测量传感器被配置为基于由流量控制器系统和流量测量系统实时测量的流量之间的差异来生成信号。
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公开(公告)号：US20140299204A1
公开(公告)日：2014-10-09
申请号：US14210113
申请日：2014-03-13
申请人： Bhushan Somani
发明人： Bhushan Somani
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G01F1/34 , G01F1/68 , G01F15/003 , G01F15/005 , G01F15/06 , Y10T137/7759
摘要： A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.
摘要翻译： 一种包括包括一个或多个传感器的流量控制器系统的装置，包括一个或多个传感器的流量测量传感器。 流量测量传感器被配置为基于由流量控制器系统和流量测量系统实时测量的流量之间的差异来生成信号。
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公开(公告)号：US20200042021A1
公开(公告)日：2020-02-06
申请号：US16597781
申请日：2019-10-09
申请人： Bhushan Somani
发明人： Bhushan Somani
摘要： A mass flow control apparatus and methods for calibrating and tuning the mass flow apparatus are provided. The mass flow apparatus can be calibrated by receiving a calibration input signal that provides one or more properties of a gas that is flowing through a main fluid flow path and performing one or more measurements, using one or more sensors, on the gas. The calibration includes determining a calibration parameter based on the results of the one or more measurements and the calibration input signal and adjusting a proportional valve, based on the calibration parameter, to adjust a flow rate, of the gas through the apparatus, to match a setpoint flow rate.
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公开(公告)号：US20170023951A1
公开(公告)日：2017-01-26
申请号：US15260834
申请日：2016-09-09
申请人： Bhushan Somani
发明人： Bhushan Somani
CPC分类号： G05D7/0635 , G01F1/34 , G01F1/68 , G01F15/003 , G01F15/005 , G01F15/06 , Y10T137/7759
摘要： A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.
摘要翻译： 一种包括包括一个或多个传感器的流量控制器系统的装置，包括一个或多个传感器的流量测量传感器。 流量测量传感器被配置为基于由流量控制器系统和流量测量系统实时测量的流量之间的差异来生成信号。
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