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    Gas panel
    1.
    发明授权
    Gas panel 失效

    公开(公告)号：US06293310B1

    公开(公告)日：2001-09-25

    申请号：US08960464

    申请日：1997-10-29

    Applicant: Eric J. Redemann ,  Kim N. Vu

    Inventor： Eric J. Redemann ,  Kim N. Vu

    IPC: F16K1110

    CPC classification number: C23C16/44 ,  C23C16/455 ,  C23C16/45561 ,  F16K11/22 ,  F16K27/003 ,  H01J37/3244 ,  H01L21/67017 ,  Y10T137/5109 ,  Y10T137/87885

    Abstract: A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

    Method and apparatus for determining a rate of flow of gas by a rate of change of pressure
    2.
    发明授权
    Method and apparatus for determining a rate of flow of gas by a rate of change of pressure 失效
    用于通过压力变化率确定气体流量的方法和装置

    公开(公告)号：US5925829A

    公开(公告)日：1999-07-20

    申请号：US790218

    申请日：1997-02-03

    Applicant: Robert Laragione ,  Dan B. LeMay ,  Eric J. Redemann ,  Michael D. Upchurch

    Inventor： Robert Laragione ,  Dan B. LeMay ,  Eric J. Redemann ,  Michael D. Upchurch

    IPC: G01F1/34 ,  G01F25/00 ,  G01F1/00

    CPC classification number: G01F25/003 ,  G01F1/34 ,  G01F25/0053

    Abstract: Method and apparatus for determining a mass rate of flow of gas by a rate of change of pressure includes an inlet for communicating a flow of gas from a source of gas whose mass flow rate is to be measured. A volumetric container is connected to the gas inlet to receive the gas. The volumetric container precisely defines a standard volume in its interior. Positioned within the volumetric container is a heat conductive assembly for maintaining the interior of the system substantially isothermal during pressure changes of the gas as gas flows into or leaves the container. Attached to the container is a pressure measuring transducer which measures the gas pressure within the container. The rate of change of the gas pressure under isothermal conditions within the container is indicative of the rate of mass flow of the gas into or out of the volumetric container.

    Abstract translation: 用于通过压力变化率确定气体质量流率的方法和装置包括用于连通来自待测量质量流量的气体源的气体流的入口。 容积式容器连接到气体入口以接收气体。 体积容器在其内部精确地定义了标准体积。 位于容积容器内的是导热组件，用于在气体流入或离开容器时气体的压力变化期间将体系内部保持基本等温。 附着在容器上的是测量容器内的气体压力的压力测量传感器。 容器内等温条件下的气体压力变化率表示气体进出容积容器的质量流量。

    System for and method of providing a wide-range flow controller
    3.
    发明授权
    System for and method of providing a wide-range flow controller 有权
    提供广泛流量控制器的系统和方法

    公开(公告)号：US07874208B2

    公开(公告)日：2011-01-25

    申请号：US12249821

    申请日：2008-10-10

    Applicant: Eric J. Redemann ,  Chiun Wang ,  Thomas Owen Maginnis

    Inventor： Eric J. Redemann ,  Chiun Wang ,  Thomas Owen Maginnis

    IPC: G01F5/00 ,  G01F1/68

    CPC classification number: G01F1/6842 ,  G01F5/00 ,  G05D7/0635

    Abstract: An improved flow measuring device, such as a mass flow meter or mass flow controller, providing a high turn-down ratio as compared to prior art devices. In accordance with various embodiments of the invention, a flow sensor includes a sensor flow path that includes one or more restrictions configured to provide the sensor flow path with a non-linear relationship between a pressure drop across the sensor flow path and the flow of fluid through the flow sensor conduit. Such a flow sensor preferably achieves a high turn-down ratio by way of a variable bypass ratio that is directly proportional to the sensor tube mass flow rate so that the turn-down ratio of the mass flow controller will be ideally proportional to the square of the turndown achievable by the flow sensor conduit fluid sensing portion alone. In some embodiments, the restriction can be employed as a part of a fluid seal having an orifice and disposed between a flow sensor portion of a flow meter and a bypass portion of the flow meter.

    Abstract translation: 一种改进的流量测量装置，例如质量流量计或质量流量控制器，与现有技术的装置相比，提供了高的调节比。 根据本发明的各种实施例，流量传感器包括传感器流动路径，该传感器流动路径包括一个或多个限制件，其构造成为传感器流动路径提供传感器流动路径上的压降与流体流之间的非线性关系 通过流量传感器导管。 这种流量传感器优选地通过与传感器管质量流量成正比的可变旁路比实现高的调节比，使得质量流量控制器的调节比理想地与 由流量传感器导管流体检测部分单独实现的调节。 在一些实施例中，限制可以用作具有孔口并设置在流量计的流量传感器部分和流量计的旁路部分之间的流体密封件的一部分。

    SYSTEM FOR AND METHOD OF PROVIDING A WIDE-RANGE FLOW CONTROLLER
    4.
    发明申请
    SYSTEM FOR AND METHOD OF PROVIDING A WIDE-RANGE FLOW CONTROLLER 有权
    提供宽范围流量控制器的系统和方法

    公开(公告)号：US20090095068A1

    公开(公告)日：2009-04-16

    申请号：US12249821

    申请日：2008-10-10

    Applicant: Eric J. Redemann ,  Chiun Wang ,  Thomas Owen Maginnis

    Inventor： Eric J. Redemann ,  Chiun Wang ,  Thomas Owen Maginnis

    IPC: G01F5/00 ,  G01F1/42

    CPC classification number: G01F1/6842 ,  G01F5/00 ,  G05D7/0635

    Abstract: An improved flow measuring device, such as a mass flow meter or mass flow controller, providing a high turn-down ratio as compared to prior art devices. In accordance with various embodiments of the invention, a flow sensor includes a sensor flow path that includes one or more restrictions configured to provide the sensor flow path with a non-linear relationship between a pressure drop across the sensor flow path and the flow of fluid through the flow sensor conduit. Such a flow sensor preferably achieves a high turn-down ratio by way of a variable bypass ratio that is directly proportional to the sensor tube mass flow rate so that the turn-down ratio of the mass flow controller will be ideally proportional to the square of the turndown achievable by the flow sensor conduit fluid sensing portion alone. In some embodiments, the restriction can be employed as a part of a fluid seal having an orifice and disposed between a flow sensor portion of a flow meter and a bypass portion of the flow meter.

    Abstract translation: 一种改进的流量测量装置，例如质量流量计或质量流量控制器，与现有技术的装置相比，提供了高的调节比。 根据本发明的各种实施例，流量传感器包括传感器流动路径，该传感器流动路径包括一个或多个限制件，其构造成为传感器流动路径提供传感器流动路径上的压降与流体流之间的非线性关系 通过流量传感器导管。 这种流量传感器优选地通过与传感器管质量流量成正比的可变旁路比实现高的调节比，使得质量流量控制器的调节比理想地与 由流量传感器导管流体检测部分单独实现的调节。 在一些实施例中，限制可以用作具有孔口并设置在流量计的流量传感器部分和流量计的旁路部分之间的流体密封件的一部分。

    Mass flow meter or controller with inclination sensor
    5.
    发明授权
    Mass flow meter or controller with inclination sensor 有权
    质量流量计或带倾斜传感器的控制器

    公开(公告)号：US07409871B2

    公开(公告)日：2008-08-12

    申请号：US11377911

    申请日：2006-03-16

    Applicant: Chiun Wang ,  Eric J Redemann

    Inventor： Chiun Wang ,  Eric J Redemann

    IPC: G01F1/86 ,  G01F15/02 ,  G01F25/00 ,  G01F7/00 ,  G01F19/00 ,  G01F23/00 ,  G01F1/12 ,  G01F1/50 ,  G01P21/00 ,  G01N11/00 ,  G01L27/00

    CPC classification number: G05D7/0635 ,  G01F1/6847 ,  G01F5/00 ,  G01F15/00

    Abstract: A thermal mass flow meter associated with an inclination sensor that detects an angle of inclination of at least one portion of a thermal mass flow sensor relative to at least one reference axis. Based upon the detected angle of inclination, the output signal of the mass flow meter that is indicative of the mass flow rate of fluid through the sensor may be compensated to account for any inaccuracies relating to the orientation in which the mass flow meter is installed. Inaccuracies for which compensation may be provided include thermal siphoning effects and fluid buoyancy effects. By compensating for such inaccuracies, the mass flow meter may be used in any orientation, and/or may be used in non-inertial (e.g., accelerating) environments. The flow meter may be used as a stand alone device, or incorporated in a thermal mass flow controller.

    Abstract translation: 与倾斜传感器相关联的热质量流量计，其检测热质量流量传感器相对于至少一个参考轴线的至少一部分的倾斜角度。 基于检测到的倾斜角度，可以补偿指示通过传感器的流体的质量流量的质量流量计的输出信号，以解决与安装质量流量计的方向有关的任何不精确性。 可以提供补偿的不准确性包括热虹吸效应和流体浮力效应。 通过补偿这种不准确性，质量流量计可以以任何方向使用，和/或可以用于非惯性（例如加速）环境中。 流量计可以用作独立装置，或者并入热质量流量控制器中。

    Gas panel
    6.
    发明授权
    Gas panel 有权

    公开(公告)号：US06435215B1

    公开(公告)日：2002-08-20

    申请号：US09939487

    申请日：2001-08-23

    Applicant: Eric J. Redemann ,  Kim N. Vu

    Inventor： Eric J. Redemann ,  Kim N. Vu

    IPC: F16K2700

    CPC classification number: H01L21/67017 ,  C23C16/44 ,  C23C16/455 ,  C23C16/45561 ,  H01J37/3244 ,  Y10T137/4259 ,  Y10T137/5109 ,  Y10T137/5283 ,  Y10T137/87885 ,  Y10T137/87917

    Abstract: A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

    Manifold system of removable components for distribution of fluids
    7.
    发明授权
    Manifold system of removable components for distribution of fluids 有权
    用于流体分配的可拆卸部件的歧管系统

    公开(公告)号：US06394138B1

    公开(公告)日：2002-05-28

    申请号：US09229722

    申请日：1999-01-13

    Applicant: Kim N. Vu ,  Eric J. Redemann ,  David P. Sherriff

    Inventor： Kim N. Vu ,  Eric J. Redemann ,  David P. Sherriff

    IPC: F16K2700

    CPC classification number: C23C16/44 ,  C23C16/45561 ,  F16K11/22 ,  F16K27/003 ,  H01J37/3244 ,  H01L21/67017 ,  Y10T137/87249 ,  Y10T137/87885

    Abstract: A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a common surface. An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.

    Abstract translation: 用于实现流体分配的歧管系统包括可以连接在一起以形成气棒的多个单独的歧管块。 每个歧管块将具有流体通道，其中入口和出口进入共同的表面。 活动部件可以安装到一个歧管块，同时延伸穿过相邻歧管块的端口。 可以提供对准系统以确保入口和出口端口位于包含公共表面的平面中以便于密封。

    Manifold system for gas and fluid delivery
    10.
    发明授权
    Manifold system for gas and fluid delivery 有权
    用于气体和流体输送的歧管系统

    公开(公告)号：US08950433B2

    公开(公告)日：2015-02-10

    申请号：US13462511

    申请日：2012-05-02

    Applicant: William L. Manofsky, Jr. ,  Eric J. Redemann ,  Donald H. Julian

    Inventor： William L. Manofsky, Jr. ,  Eric J. Redemann ,  Donald H. Julian

    IPC: F16K27/00 ,  G05D7/00

    CPC classification number: G05D7/00 ,  F17D1/00 ,  Y10T137/87249 ,  Y10T137/87885

    Abstract: A fluid delivery system includes a manifold plate having an upper surface, four vertical sides, and a lower surface opposite the upper surface, where the manifold plate includes a gas inlet, a gas outlet, and a plurality of component receiving stations, one or more component receiving stations located on the upper surface and two or more component receiving stations located on the lower surface. The manifold plate also includes a plurality of internal fluid passageways interconnecting the gas inlet, the plurality of component receiving stations, and the gas outlet. The system also includes a plurality of active fluid components, one active fluid component coupled to a corresponding one component receiving station on the manifold plate. The fluid delivery system can be configured having a single channel or a dual channel.

    Abstract translation: 流体输送系统包括具有上表面，四个垂直侧面和与上表面相对的下表面的歧管板，歧管板包括气体入口，气体出口和多个部件接收站，一个或多个 位于上表面的部件接收站和位于下表面上的两个或多个部件接收站。 歧管板还包括互连气体入口，多个部件接收站和气体出口的多个内部流体通道。 该系统还包括多个主动流体部件，一个活动流体部件联接到歧管板上相应的一个部件接收站。 流体输送系统可以被配置为具有单通道或双通道。

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