公开(公告)号：US20180231579A1

公开(公告)日：2018-08-16

申请号：US15432133

申请日：2017-02-14

申请人： NXP USA, INC.

发明人： Aaron A. Geisberger ,  Fengyuan Li

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0808 ,  G01P2015/0814 ,  G01P2015/0831 ,  G01P2015/0871

摘要： A microelectromechanical systems (MEMS) device, such as a single axis accelerometer, includes a movable mass suspended from a substrate. The movable mass has a first portion and a second portion. A first spring system interconnects the first portion of the movable mass with the second portion of the movable mass. A second spring system interconnects the first portion with an anchor system. The first spring system enables movement of the second portion of the movable mass in response to a shock event force imposed on the movable mass in a first direction that is orthogonal to a sense direction, wherein the first spring system inhibits movement of the first portion of the movable mass in the first direction in response to the shock event force. However, the first and second movable masses move together in response to an acceleration force in the sense direction.

公开(公告)号：US20190144264A1

公开(公告)日：2019-05-16

申请号：US15811471

申请日：2017-11-13

申请人： InvenSense, Inc.

发明人： Ilya Gurin ,  Joseph Seeger ,  Matthew Thompson

IPC分类号： B81B3/00 ,  B81C99/00

CPC分类号： B81B3/0013 ,  B81B3/0008 ,  B81B3/0027 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2203/04 ,  B81B2203/055 ,  B81C99/003 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P21/00 ,  G01P2015/0808

摘要： A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

公开(公告)号：US20140150552A1

公开(公告)日：2014-06-05

申请号：US13690932

申请日：2012-11-30

申请人： Ando Feyh ,  Po-Jui Chen

发明人： Ando Feyh ,  Po-Jui Chen

IPC分类号： G01C19/5712 ,  G01C25/00

CPC分类号： G01C19/5712 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/053 ,  G01C19/5755 ,  G01C19/5769 ,  G01C25/00 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0808 ,  G01P2015/0814 ,  G01P2015/0848 ,  G01P2015/0882 ,  Y10T29/42

摘要： A sensing assembly device includes a substrate, a chamber above the substrate, a first piezoelectric gyroscope sensor positioned within the chamber, and a first accelerometer positioned within the chamber.

摘要翻译： 感测组装装置包括衬底，位于衬底上方的腔室，位于室内的第一压电陀螺仪传感器和位于腔室内的第一加速计。

公开(公告)号：US20180031601A1

公开(公告)日：2018-02-01

申请号：US15275188

申请日：2016-09-23

申请人： Lumedyne Technologies Incorporated

发明人： Ozan Anac ,  Xiaojun Huang

IPC分类号： G01P15/097 ,  G01P15/125

CPC分类号： G01P15/097 ,  B81B2201/0235 ,  B81B2203/051 ,  G01C19/5726 ,  G01C19/5776 ,  G01P15/125 ,  G01P15/14 ,  G01P2015/0808 ,  G01P2015/0814

摘要： Systems and methods are described herein for detecting and measuring inertial parameters, such as acceleration. In particular, the systems and methods relate to vibratory inertial sensors implementing time-domain sensing techniques. Within a composite mass sensor system, a sense mass may oscillate at a frequency different from its actuation frequency, allowing flexibility when integrating the sensor into drive systems without sacrificing sensitivity.

公开(公告)号：US09638524B2

公开(公告)日：2017-05-02

申请号：US13690932

申请日：2012-11-30

申请人： Ando Feyh ,  Po-Jui Chen

发明人： Ando Feyh ,  Po-Jui Chen

IPC分类号： G01C19/5712 ,  B81B7/02 ,  G01P15/12 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/125 ,  G01C25/00 ,  G01P15/08 ,  G01P15/18

CPC分类号： G01C19/5712 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/053 ,  G01C19/5755 ,  G01C19/5769 ,  G01C25/00 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0808 ,  G01P2015/0814 ,  G01P2015/0848 ,  G01P2015/0882 ,  Y10T29/42

摘要： A sensing assembly device includes a substrate, a chamber above the substrate, a first piezoelectric gyroscope sensor positioned within the chamber, and a first accelerometer positioned within the chamber.

公开(公告)号：US20130055813A1

公开(公告)日：2013-03-07

申请号：US13697234

申请日：2010-05-12

申请人： Robert Newton Bicknell ,  Brian D. Homeijer

发明人： Robert Newton Bicknell ,  Brian D. Homeijer

IPC分类号： G01P15/125

CPC分类号： H01G5/18 ,  G01P15/125 ,  G01P2015/0808 ,  G01P2015/0814 ,  H01G5/011

摘要： An accelerometer can include a support structure having situated thereupon a stator electrode array including multiple stator electrodes (e.g., A, B, and C); and a proof mass positioned parallel to the stator electrode array and capable of displacement parallel thereto. A translator electrode array facing the stator electrode array can comprise multiple translator electrodes (e.g., a and b) can be situated on the proof mass. Further included is a drive circuitry to apply drive voltages to six capacitances formed by the stator and translator electrodes. The total force exerted on the proof mass by the drive voltages is held constant at about zero.

摘要翻译： 加速度计可以包括一个支撑结构，该支撑结构位于包括多个定子电极（例如A，B和C）的定子电极阵列之上; 以及与定子电极阵列平行定位且能够平行移动的检测质量块。 面向定子电极阵列的平移电极阵列可以包括多个平移电极（例如，a和b）可以位于证明物质上。 还包括驱动电路，用于将驱动电压施加到由定子和转换器电极形成的六个电容。 通过驱动电压施加在检验质量上的总力保持恒定在大约零。