公开(公告)号：US20100204927A1

公开(公告)日：2010-08-12

申请号：US12296700

申请日：2007-04-12

Applicant: Brian P. Geiser ,  Thomas F. Kelly ,  Jason Schneir ,  Jay P. Roberts ,  David J. Larson ,  Scott A. Wiener

Inventor： Brian P. Geiser ,  Thomas F. Kelly ,  Jason Schneir ,  Jay P. Roberts ,  David J. Larson ,  Scott A. Wiener

IPC: G06F19/00 ,  G06T15/00 ,  G01N31/00

CPC classification number: H01J37/285 ,  H01J37/265 ,  H01J2237/153 ,  H01J2237/223 ,  H01J2237/226 ,  H01J2237/24571 ,  H01J2237/24592

Abstract: The present invention relates to atom probe data processes and associated systems. Aspects of the invention are directed toward a computing system configured to process atom probe data that includes a data set receiving component configured to receive a first three-dimensional data set. The first three-dimensional data set has a first data element structure and is based on data collected from performing an atom probe process on a portion of an atom probe specimen. The system further includes a data set constructing component configured to create a second three-dimensional data set having a second data element structure different than the first data element structure. In selected embodiments, the system can further include a Fourier Transform component configured to perform a Fourier Transform on a portion of the second three-dimensional data set.

Abstract translation: 本发明涉及原子探针数据处理和相关系统。 本发明的方面针对被配置为处理原子探测数据的计算系统，该原子探测数据包括被配置为接收第一三维数据集的数据集接收部件。 第一个三维数据集具有第一数据元素结构，并且基于在原子探针样本的一部分上执行原子探测过程收集的数据。 该系统还包括一个数据集构成部件，被配置为创建具有与第一数据元素结构不同的第二数据元素结构的第二三维数据集。 在所选择的实施例中，系统还可以包括被配置为在第二三维数据集的一部分上执行傅里叶变换的傅立叶变换分量。

公开(公告)号：US20100288926A1

公开(公告)日：2010-11-18

申请号：US12294716

申请日：2007-03-27

Applicant: Scott A. Wiener ,  Thomas F. Kelly ,  David J. Larson ,  Keith J. Thompson ,  Robert M. Ulfig ,  Brian P. Geiser ,  Thomas C. Kunicki ,  Raymond W. O'Neill ,  Jason Schneir

Inventor： Scott A. Wiener ,  Thomas F. Kelly ,  David J. Larson ,  Keith J. Thompson ,  Robert M. Ulfig ,  Brian P. Geiser ,  Thomas C. Kunicki ,  Raymond W. O'Neill ,  Jason Schneir

IPC: G01B21/30

CPC classification number: H01J37/285 ,  H01J37/265 ,  H01J2237/24571 ,  H01J2237/24592

Abstract: The present invention relates to atom probe data and associated systems and methods. Aspects of the invention are directed toward a computing system configured to predict a characteristic associated with an atom probe specimen that includes a data set receiving component configured to receive a three-dimensional data set associated with a portion of the specimen. The system further includes a predicting/calculating component configured to predict the characteristic associated with the specimen based on the data set. Other aspects of the invention are directed toward a method for evaluating a manufacturing process using atom probe data that includes receiving a three-dimensional data set associated with a portion of a microelectronic assembly produced by a manufacturing process. The method further includes determining a variation between the data set and a configuration expected to result from the manufacturing process.

Abstract translation: 本发明涉及原子探针数据及相关系统和方法。 本发明的方面针对被配置为预测与原子探针样本相关联的特征的计算系统，所述特征包括被配置为接收与样本的一部分相关联的三维数据集的数据集接收部件。 该系统还包括预测/计算部件，其被配置为基于数据集预测与样本相关联的特性。 本发明的其它方面涉及使用原子探测器数据来评估制造过程的方法，该方法包括接收与由制造过程产生的微电子组件的一部分相关联的三维数据集。 该方法还包括确定数据集与期望从制造过程产生的配置之间的变化。