Method for via etching in organo-silica-glass
    2.
    发明授权
    Method for via etching in organo-silica-glass 有权
    有机硅玻璃中经过蚀刻的方法

    公开(公告)号:US06914004B2

    公开(公告)日:2005-07-05

    申请号:US10237371

    申请日:2002-09-09

    申请人: Keith J. Thompson

    发明人: Keith J. Thompson

    CPC分类号: H01L21/76802 H01L21/31116

    摘要: According to one embodiment of the invention, a method for via etching in a dielectric material includes providing a wafer (200) having a substrate (202), an etch stop layer (210) disposed outwardly from the substrate, an Organo-Silica-Glass layer (212) disposed outwardly from the etch stop layer (210), and a photoresist layer (216) disposed outwardly from the Organo-Silica-Glass layer (212), and positioning the wafer (200) within a process chamber (114). The method further includes introducing a first source gas mixture (110) into the process chamber (114) to etch a first portion of the Organo-Silica-Glass layer (212) utilizing the first source gas mixture (110), and introducing a second source gas mixture (110) into the process chamber (114) to etch, for a predetermined time period, a second portion of the Organo-Silica-Glass layer (212) down to the etch stop layer (210). The second source gas mixture (110) includes a fluorocarbon, a noble gas, carbon monoxide, and nitrogen.

    摘要翻译: 根据本发明的一个实施例,用于电介质材料中的通孔蚀刻的方法包括提供具有衬底(202)的晶片(200),从衬底向外设置的蚀刻停止层(210),有机硅玻璃 从蚀刻停止层(210)向外设置的层(212)和从有机硅 - 玻璃层(212)向外设置的光致抗蚀剂层(216),并将晶片(200)定位在处理室(114)内, 。 该方法还包括将第一源气体混合物(110)引入处理室(114)中,以利用第一源气体混合物(110)蚀刻有机硅 - 玻璃层(212)的第一部分,并引入第二源气体混合物 源气体混合物(110)进入处理室(114),以在预定时间段内将有机硅 - 玻璃层(212)的第二部分蚀刻到蚀刻停止层(210)。 第二源气体混合物(110)包括碳氟化合物,惰性气体,一氧化碳和氮气。

    APPARATUS AND SYSTEM FOR TRAPPING DEBRIS AND ARRESTING SPARKS
    5.
    发明申请
    APPARATUS AND SYSTEM FOR TRAPPING DEBRIS AND ARRESTING SPARKS 审中-公开
    用于追捕和毁灭火星的装置和系统

    公开(公告)号:US20110277454A1

    公开(公告)日:2011-11-17

    申请号:US12777730

    申请日:2010-05-11

    IPC分类号: F01N3/035 F01N3/021

    摘要: Described herein are various embodiments of an apparatus and system for trapping debris and arresting sparks that overcomes at least some shortcomings of the prior art approaches. According to one embodiment, an apparatus is disclosed for mitigating failure of an exhaust after-treatment component in an internal combustion engine system capable of generating an exhaust gas stream. The apparatus includes a housing that includes an exhaust inlet, exhaust outlet, and exhaust flow channel positioned between the exhaust inlet and outlet. Also, the apparatus includes a tubular-shaped mesh screen positioned substantially entirely within the exhaust flow channel. The mesh screen includes a closed end positioned proximate the exhaust inlet of the housing and an opposing open end positioned proximate the exhaust outlet of the housing. The mesh screen is configured to capture failed exhaust after-treatment component particles within the exhaust gas stream.

    摘要翻译: 这里描述了用于捕获碎片和阻止火花的装置和系统的各种实施例,其克服了现有技术方法的至少一些缺点。 根据一个实施例,公开了一种用于减轻能够产生废气流的内燃机系统中的废气后处理部件的故障的装置。 该装置包括壳体,其包括位于排气入口和出口之间的排气入口,排气出口和排气流动通道。 而且,该装置还包括基本上完全位于排气流动通道内的管状网眼筛网。 筛网包括邻近壳体的排气入口定位的封闭端和邻近壳体排气出口定位的相对开口端。 网筛被配置为捕获废气流内的失效的废气后处理组分颗粒。

    Drywall cart
    6.
    发明申请
    Drywall cart 有权
    干墙车

    公开(公告)号:US20080272566A1

    公开(公告)日:2008-11-06

    申请号:US11799975

    申请日:2007-05-03

    申请人: Keith J. Thompson

    发明人: Keith J. Thompson

    IPC分类号: B62B1/00

    摘要: A drywall bucket and tool carrying cart has a main body with an interior space and open top to receive and retain a drywall compound bucket and five legs extending downwardly and outwardly from the perimeter of the body of the cart. Lockable rollers extend from the bottoms of the legs. A shelf attaches to the legs below the body of the cart. A slotted rim for tools with at least one handle surrounds the upper perimeter of the cart.

    摘要翻译: 干墙桶和工具搬运车具有主体,其具有内部空间和敞开的顶部,用于接收和保持干墙复合桶和从车体的周边向下和向外延伸的五个腿。 可锁定的滚轮从腿部的底部延伸。 一个架子连接到车体的下方的腿部。 具有至少一个手柄的工具的开槽边缘围绕推车的上部周边。

    ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS
    8.
    发明申请
    ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS 审中-公开
    原子探针数据及相关系统和方法

    公开(公告)号:US20100288926A1

    公开(公告)日:2010-11-18

    申请号:US12294716

    申请日:2007-03-27

    IPC分类号: G01B21/30

    摘要: The present invention relates to atom probe data and associated systems and methods. Aspects of the invention are directed toward a computing system configured to predict a characteristic associated with an atom probe specimen that includes a data set receiving component configured to receive a three-dimensional data set associated with a portion of the specimen. The system further includes a predicting/calculating component configured to predict the characteristic associated with the specimen based on the data set. Other aspects of the invention are directed toward a method for evaluating a manufacturing process using atom probe data that includes receiving a three-dimensional data set associated with a portion of a microelectronic assembly produced by a manufacturing process. The method further includes determining a variation between the data set and a configuration expected to result from the manufacturing process.

    摘要翻译: 本发明涉及原子探针数据及相关系统和方法。 本发明的方面针对被配置为预测与原子探针样本相关联的特征的计算系统,所述特征包括被配置为接收与样本的一部分相关联的三维数据集的数据集接收部件。 该系统还包括预测/计算部件,其被配置为基于数据集预测与样本相关联的特性。 本发明的其它方面涉及使用原子探测器数据来评估制造过程的方法,该方法包括接收与由制造过程产生的微电子组件的一部分相关联的三维数据集。 该方法还包括确定数据集与期望从制造过程产生的配置之间的变化。