公开(公告)号：US07837528B2

公开(公告)日：2010-11-23

申请号：US10718640

申请日：2003-11-24

申请人： Koji Shigemura ,  Chang Ho Kang

发明人： Koji Shigemura ,  Chang Ho Kang

IPC分类号： H01J9/00 ,  H01J63/04 ,  H01J1/62 ,  C23C16/00 ,  B05C11/11

CPC分类号： H01L51/56 ,  C23C14/042 ,  C23C14/12 ,  G03F1/20 ,  H01L27/3223 ,  H01L27/3281 ,  H01L51/0011

摘要： An evaporation mask, a method of manufacturing an organic electroluminescent device using the evaporation mask, and an organic electroluminescent device manufactured by the method are provided. The evaporation mask is formed of a thin film and is drawn taut by application of tension. The evaporation mask includes at least one mask unit, the mask unit including a plurality of main apertures, and a plurality of first dummy apertures formed adjacent to outermost ones of the main apertures in a direction in which tension is applied to the evaporation mask.

摘要翻译： 提供了蒸发掩模，使用该蒸发掩模的有机电致发光器件的制造方法和通过该方法制造的有机电致发光器件。 蒸发掩模由薄膜形成，并通过张力拉伸拉紧。 所述蒸发掩模包括至少一个掩模单元，所述掩模单元包括多个主孔，以及在施加到所述蒸发掩模上的张力的方向上与所述主孔中的最外侧主孔相邻形成的多个第一虚拟孔。

公开(公告)号：US06955726B2

公开(公告)日：2005-10-18

申请号：US10452382

申请日：2003-06-03

申请人： Chang Ho Kang ,  Tae Seung Kim

发明人： Chang Ho Kang ,  Tae Seung Kim

IPC分类号： H05B33/10 ,  C23C14/04 ,  H01L51/50 ,  C23C16/00 ,  B44C1/22 ,  C23C14/00 ,  C25B11/00 ,  H01L21/425

CPC分类号： C23C14/042 ,  H01L51/56

摘要： A mask frame assembly includes a frame having an opening and a mask having at least two unit mask elements. Both ends of each unit mask element are fixed to the frame in a state of tension. The unit mask elements include a unit masking pattern, and overlap each other on a predetermined width to form a single mask pattern block. Each unit mask element has a recessed wall in an overlapping portion thereof so as to maintain the thickness of the mask constant at an overlap between the unit mask elements. Accordingly, the mask frame assembly reduces distortion in an evaporation pattern due to an increase in the size of a mask pattern, facilitates the adjustment of a total pitch of evaporation patterns, and prevents evaporation from occurring at undesired positions.

摘要翻译： 掩模框架组件包括具有开口的框架和具有至少两个单元掩模元件的掩模。 每个单元掩模元件的两端在张力的状态下被固定到框架上。 单元掩模元件包括单元掩模图案，并且在预定宽度上彼此重叠以形成单个掩模图案块。 每个单元掩模元件在其重叠部分中具有凹壁，以便保持掩模的厚度在单元掩模元件之间的重叠处恒定。 因此，掩模框架组件由于掩模图案的尺寸的增加而减小了蒸发图案的变形，有助于调整蒸发图案的总间距，并且防止在不希望的位置发生蒸发。

公开(公告)号：US20110031486A1

公开(公告)日：2011-02-10

申请号：US12907469

申请日：2010-10-19

申请人： Koji SHIGEMURA ,  Chang Ho Kang

发明人： Koji SHIGEMURA ,  Chang Ho Kang

IPC分类号： H01L51/50

CPC分类号： H01L51/56 ,  C23C14/042 ,  C23C14/12 ,  G03F1/20 ,  H01L27/3223 ,  H01L27/3281 ,  H01L51/0011

摘要： An evaporation mask, a method of manufacturing an organic electroluminescent device using the evaporation mask, and an organic electroluminescent device manufactured by the method are provided. The evaporation mask is formed of a thin film and is drawn taut by application of tension. The evaporation mask includes at least one mask unit, the mask unit including a plurality of main apertures, and a plurality of first dummy apertures formed adjacent to outermost ones of the main apertures in a direction in which tension is applied to the evaporation mask.

摘要翻译： 提供了蒸发掩模，使用该蒸发掩模的有机电致发光器件的制造方法和通过该方法制造的有机电致发光器件。 蒸发掩模由薄膜形成，并通过张力拉伸拉紧。 所述蒸发掩模包括至少一个掩模单元，所述掩模单元包括多个主孔，以及在施加到所述蒸发掩模上的张力的方向上与所述主孔中的最外侧主孔相邻形成的多个第一虚拟孔。

公开(公告)号：US20100021829A1

公开(公告)日：2010-01-28

申请号：US12575001

申请日：2009-10-07

申请人： Chang-Ho KANG ,  Tae-Seung KIM ,  Jae-Min HONG

发明人： Chang-Ho KANG ,  Tae-Seung KIM ,  Jae-Min HONG

IPC分类号： G03F1/00

CPC分类号： H01L27/3211 ,  H01L51/0011 ,  H01L51/56

摘要： A deposition mask for manufacturing an organic light emitting display (OLED) using the same are provided. The deposition mask is intended for preventing an organic film from being damaged due to touching of a blocked-off portion of the mask to an emission layer (EML), or chemical transition from being generated at the organic film. For that purpose, the deposition mask stuck to a substrate of the OLED to deposit an organic EML includes an opening and an indentation. The opening is opened so as to deposit the organic EML. The indentation is indented a predetermined depth from a plane facing the substrate.

摘要翻译： 提供了一种用于制造使用其的有机发光显示器（OLED）的沉积掩模。 沉积掩模用于防止由于掩模的遮挡部分与发光层（EML）的接触或在有机膜处产生的化学转变而损坏有机膜。 为此，粘附到OLED的基底以沉积有机EML的沉积掩模包括开口和凹陷。 打开开口以沉积有机EML。 压痕从面向衬底的平面缩进预定的深度。

公开(公告)号：US07618674B2

公开(公告)日：2009-11-17

申请号：US11180653

申请日：2005-07-14

申请人： Chang-Ho Kang ,  Tae-Seung Kim ,  Jae-Min Hong

发明人： Chang-Ho Kang ,  Tae-Seung Kim ,  Jae-Min Hong

IPC分类号： B05D5/06 ,  C23C16/00

CPC分类号： H01L27/3211 ,  H01L51/0011 ,  H01L51/56

摘要： A deposition mask and a method for manufacturing an organic light emitting display (OLED) using the same are provided. The deposition mask is intended for preventing an organic film from being damaged due to touching of a blocked-off portion of the mask to an emission layer (EML), or chemical transition from being generated at the organic film. For that purpose, the deposition mask stuck to a substrate of the OLED to deposit an organic EML includes an opening and an indentation. The opening is opened so as to deposit the organic EML. The indentation is indented a predetermined depth from a plane facing the substrate.

摘要翻译： 提供了一种沉积掩模和用于制造使用其的有机发光显示器（OLED）的方法。 沉积掩模用于防止由于掩模的遮挡部分与发光层（EML）的接触或在有机膜处产生的化学转变而损坏有机膜。 为此，粘附到OLED的基底以沉积有机EML的沉积掩模包括开口和凹陷。 打开开口以沉积有机EML。 压痕从面向衬底的平面缩进预定的深度。

公开(公告)号：US07097750B2

公开(公告)日：2006-08-29

申请号：US10448141

申请日：2003-05-30

申请人： Chang Ho Kang ,  Yong Weon Jang ,  Tae Seung Kim

发明人： Chang Ho Kang ,  Yong Weon Jang ,  Tae Seung Kim

IPC分类号： C23C14/35 ,  C23C16/00

CPC分类号： C23C14/042 ,  C23C14/50

摘要： A device to fix a substrate for a thin film sputter, includes a mask, a mask pressing plate, a magnetic body, and a driving unit. The mask having patterns is positioned under the substrate so as to form the patterns on the substrate. The mask pressing plate is positioned over the substrate and moves toward and contacts a back surface of the substrate at a predetermined pressure. The magnetic body is placed over the mask pressing plate and moves toward the mask pressing plate so as to have the mask adhere closely to the substrate by a magnetic force of the magnetic body. The driving unit applies a driving force to move the magnetic body. Where the mask pressing plate descends, the mask pressing plate adheres closely to the substrate. Thereafter, the magnetic body descends toward the back surface of the substrate which is supported by the mask pressing plate. The mask underneath the substrate adheres closely to a front surface of the substrate by the magnetic force of the magnetic body. Accordingly, since the substrate is multi-step supported, the alignment of the mask underneath the substrate is not dislocated.

公开(公告)号：US06858086B2

公开(公告)日：2005-02-22

申请号：US10223471

申请日：2002-08-20

申请人： Chang Ho Kang

发明人： Chang Ho Kang

IPC分类号： H05B33/10 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H01L51/00 ,  H01L51/40 ,  H01L51/50 ,  H01L51/56 ,  C23C16/00 ,  C23C14/00 ,  C23C16/04

CPC分类号： H01L51/56 ,  C23C14/042 ,  H01L51/001

摘要： A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device. The mask frame assembly includes a frame having an opening and at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.

摘要翻译： 用于真空沉积有机电致发光器件的薄膜的掩模框架组件。 面罩框架组件包括具有开口的框架和至少两个单元掩模，每个单元掩模在单元掩模的方向上具有至少一个单元掩模图案部分和在张力下固定到框架的两个边缘。

公开(公告)号：US20120278024A1

公开(公告)日：2012-11-01

申请号：US13368819

申请日：2012-02-08

申请人： Hyong Euk Lee ,  Bho Ram Lee ,  Sang Hyun Kim ,  Won Chul Bang ,  Chan Gook Park ,  Chul Woo Kang ,  Chang Ho Kang

发明人： Hyong Euk Lee ,  Bho Ram Lee ,  Sang Hyun Kim ,  Won Chul Bang ,  Chan Gook Park ,  Chul Woo Kang ,  Chang Ho Kang

IPC分类号： G06F19/00 ,  G01P21/00

CPC分类号： G01C21/16 ,  G01P15/00 ,  G01P21/00

摘要： A position estimation apparatus may measure 3-axis accelerations by at least two acceleration sensors disposed at different distances from a center of rotation of the position estimation apparatus, measure 3-axis angular velocity by a gyro sensor, and detect an azimuth angle using a geomagnetic sensor. Using the 3-axis accelerations measured by the acceleration sensors and the 3-axis angular velocity measured by the gyro sensor, the position estimation apparatus calculates gravity acceleration from which a rotational motion component is extracted.

摘要翻译： 位置估计装置可以通过设置在与位置估计装置的旋转中心不同的距离处的至少两个加速度传感器来测量3轴加速度，通过陀螺传感器测量3轴角速度，并使用地磁测量方位角 传感器。 使用由加速度传感器测量的3轴加速度和由陀螺传感器测量的3轴角速度，位置估计装置计算提取旋转运动分量的重力加速度。

公开(公告)号：US07185419B2

公开(公告)日：2007-03-06

申请号：US10448133

申请日：2003-05-30

申请人： Chang Ho Kang ,  Tae Seung Kim

发明人： Chang Ho Kang ,  Tae Seung Kim

IPC分类号： H01F3/04 ,  H01F7/06

CPC分类号： C25D1/10 ,  Y10T29/49002 ,  Y10T29/49078 ,  Y10T29/49224

摘要： A mask frame assembly for evaporation includes a mask and a frame which supports the mask. The mask includes a metal layer having a predetermined pattern, and a coating layer which is formed on a surface of the metal layer so as to increase a precision of the predetermined pattern and a surface roughness of the mask.

摘要翻译： 用于蒸发的面罩框架组件包括掩模和支撑掩模的框架。 掩模包括具有预定图案的金属层和形成在金属层的表面上的涂层，以便提高预定图案的精度和掩模的表面粗糙度。

公开(公告)号：US08968477B2

公开(公告)日：2015-03-03

申请号：US12575001

申请日：2009-10-07

申请人： Chang-Ho Kang ,  Tae-Seung Kim ,  Jae-Min Hong

发明人： Chang-Ho Kang ,  Tae-Seung Kim ,  Jae-Min Hong

IPC分类号： C23C16/50 ,  C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01L27/32 ,  H01L51/00 ,  H01L51/56

CPC分类号： H01L27/3211 ,  H01L51/0011 ,  H01L51/56

摘要： A deposition mask for manufacturing an organic light emitting display (OLED) using the same are provided. The deposition mask is intended for preventing an organic film from being damaged due to touching of a blocked-off portion of the mask to an emission layer (EML), or chemical transition from being generated at the organic film. For that purpose, the deposition mask stuck to a substrate of the OLED to deposit an organic EML includes an opening and an indentation. The opening is opened so as to deposit the organic EML. The indentation is indented a predetermined depth from a plane facing the substrate.

摘要翻译： 提供了一种用于制造使用其的有机发光显示器（OLED）的沉积掩模。 沉积掩模用于防止由于掩模的遮挡部分与发光层（EML）的接触或在有机膜处产生的化学转变而损坏有机膜。 为此，粘附到OLED的基底以沉积有机EML的沉积掩模包括开口和凹陷。 打开开口以沉积有机EML。 压痕从面向衬底的平面缩进预定的深度。