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公开(公告)号：US06230566B1
公开(公告)日：2001-05-15
申请号：US09410458
申请日：1999-10-01
IPC分类号： G01P15125
CPC分类号： G01P15/125 , G01P2015/0814 , G01P2015/0831
摘要： A micro electro mechanical sensor that uses capacitive readout electronics. The sensor involves a micromachined low frequency rocking accelerometer with capacitive pickoff fabricated by deep reactive ion etching. The accelerometer includes a central silicon proof mass, is suspended by a thin polysilicon tether, and has a moving electrode (capacitor plate or interdigitated fingers) located at each end the proof mass. During movement (acceleration), the tethered mass moves relative to the surrounding packaging, for example, and this defection is measured capacitively by a plate capacitor or interdigitated finger capacitor, having the cooperating fixed electrode (capacitor plate or interdigitated fingers) positioned on the packaging, for example. The micromachined rocking accelerometer has a low frequency (
摘要翻译： 一种使用电容式读出电子元件的微机电传感器。 该传感器涉及一种微加工的低频摇摆加速度计，其具有通过深反应离子蚀刻制造的电容性传感器。 该加速度计包括一个中央防硅质量块，被薄的多晶硅系绳悬挂，并且在每个端部都有一个位于检测质量块的移动电极（电容器板或叉指）。 在移动（加速）期间，例如，系绳质量相对于周围的包装物移动，并且这种缺陷是由平板电容器或叉指式电容器电容测量的，该电容器具有位于包装上的配合的固定电极（电容器板或叉指） ， 例如。 微加工摇摆加速度计具有低频（<500Hz），高灵敏度（muG），功耗最小。 电容器连接到电源（电池）和传感器接口电子设备，传感器接口电路可能包括模数（A / D）转换器，逻辑，RF通信链路，天线等。传感器（加速度计）可以用于 例如，与接口电子设备一起打包，并且在2'x2''x2“立方体中包含通信系统。 验证质量可以是不对称的或对称的。 额外的致动电容板可以用于反馈控制，其给出更大的动态范围。
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公开(公告)号：US07755292B1
公开(公告)日：2010-07-13
申请号：US11625545
申请日：2007-01-22
申请人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
发明人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
摘要： An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that contact between portions of the filament upon expansion is avoided. The light source is made by fabricating a double-spiral ultraminiature tungsten filament from tungsten foil and housing the filament in a ceramic package having a reflective bottom and a well wherein the filament is suspended. A vacuum furnace brazing process attaches the filament to contacts of the ceramic package. Finally, a cover with a transparent window is attached onto the top of the ceramic package by solder reflow in a second vacuum furnace process to form a complete hermetically sealed package.
摘要翻译： 使用双螺旋形钨丝的超微型光源包括端部接触部分，其被分离以允许螺旋的径向和纵向展开。 双螺旋丝在其端部处间隔相对较远，从而避免了在膨胀时细丝部分之间的接触。 光源通过从钨箔制造双螺旋超薄钨丝制成，并将灯丝容纳在具有反射底部和阱的陶瓷封装中，其中灯丝被悬挂。 真空炉钎焊工艺将灯丝连接到陶瓷封装的触点。 最后，通过在第二真空炉工艺中通过回流焊接将具有透明窗口的盖子附接到陶瓷封装的顶部，以形成完整的密封封装。
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公开(公告)号：US08264134B2
公开(公告)日：2012-09-11
申请号：US12795356
申请日：2010-06-07
申请人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
发明人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
摘要： An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that contact between portions of the filament upon expansion is avoided. The light source is made by fabricating a double-spiral ultraminiature tungsten filament from tungsten foil and housing the filament in a ceramic package having a reflective bottom and a well wherein the filament is suspended. A vacuum furnace brazing process attaches the filament to contacts of the ceramic package. Finally, a cover with a transparent window is attached onto the top of the ceramic package by solder reflow in a second vacuum furnace process to form a complete hermetically sealed package.
摘要翻译： 使用双螺旋形钨丝的超微型光源包括端部接触部分，其被分离以允许螺旋的径向和纵向展开。 双螺旋丝在其端部处间隔相对较远，从而避免了在膨胀时细丝部分之间的接触。 光源通过从钨箔制造双螺旋超薄钨丝制成，并将灯丝容纳在具有反射底部和阱的陶瓷封装中，其中灯丝被悬挂。 真空炉钎焊工艺将灯丝连接到陶瓷封装的触点。 最后，通过在第二真空炉工艺中通过回流焊接将具有透明窗口的盖子附接到陶瓷封装的顶部，以形成完整的密封封装。
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公开(公告)号：US20110006663A1
公开(公告)日：2011-01-13
申请号：US12795356
申请日：2010-06-07
申请人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W. Hansen
发明人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W. Hansen
IPC分类号： H01K1/14
摘要： An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that contact between portions of the filament upon expansion is avoided. The light source is made by fabricating a double-spiral ultraminiature tungsten filament from tungsten foil and housing the filament in a ceramic package having a reflective bottom and a well wherein the filament is suspended. A vacuum furnace brazing process attaches the filament to contacts of the ceramic package. Finally, a cover with a transparent window is attached onto the top of the ceramic package by solder reflow in a second vacuum furnace process to form a complete hermetically sealed package.
摘要翻译： 使用双螺旋形钨丝的超微型光源包括端部接触部分，其被分离以允许螺旋的径向和纵向展开。 双螺旋丝在其端部处间隔相对较远，从而避免了在膨胀时细丝部分之间的接触。 光源通过从钨箔制造双螺旋超薄钨丝制成，并将灯丝容纳在具有反射底部和阱的陶瓷封装中，其中灯丝被悬挂。 真空炉钎焊工艺将灯丝连接到陶瓷封装的触点。 最后，通过在第二真空炉工艺中通过回流焊接将具有透明窗口的盖子附接到陶瓷封装的顶部，以形成完整的密封封装。
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公开(公告)号：US6071426A
公开(公告)日：2000-06-06
申请号：US986477
申请日：1997-12-08
IPC分类号： G01B9/02 , G02B6/12 , G02B6/122 , G02B6/28 , G02B6/32 , G02B6/34 , G02B6/36 , G02B6/136 , B29D11/00
CPC分类号： G02B6/2935 , G01B9/02051 , G02B6/122 , G02B6/2817 , G02B6/29361 , G02B2006/12104 , G02B6/32 , G02B6/3636 , G02B6/3652 , G02B6/3692
摘要： Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.
摘要翻译： 利用体硅的平行蚀刻特性并集成硅的平行蚀刻平面与硅晶片结合和杂质掺杂的体硅的微加工使得能够利用原位对准的用于光纤，微透镜的蚀刻凹槽来制造片上光学器件， 光电二极管和激光二极管。 可以进行微加工和集成的其他光学部件包括半透明分束器，微光学扫描仪，针孔，光栅，微光学滤光器等。可利用利用其平行蚀刻特性的体硅的微加工来开发小型化 诸如通过荧光光谱仪进行波长监测的生物仪器，以及诸如用于滤波波长的法布里 - 珀罗干涉法，可调谐腔激光器，微全息模块和光通信系统的波长分离器等小型化光学系统。
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公开(公告)号：US5969848A
公开(公告)日：1999-10-19
申请号：US888000
申请日：1997-07-03
CPC分类号： G02B26/06
摘要： A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The micromachined electrostatic vertical actuator provides accurate movement in the sub-micron to micron ranges which is desirable in the phase modulation instrument, such as optical phase shifting. For example, compact, inexpensive, and position controllable micromirrors utilizing an electrostatic vertical actuator can replace the large, expensive, and difficult-to-maintain piezoelectric actuators. A thirty pound piezoelectric actuator with corner cube reflectors, as utilized in a phase shifting diffraction interferometer can be replaced with a micromirror and a lens. For any very precise and small amplitudes of motion` micromachined electrostatic actuation may be used because it is the most compact in size, with low power consumption and has more straightforward sensing and control options.
摘要翻译： 利用悬浮力的微机械垂直致动器，例如在静电梳状驱动器中，提供垂直致动，其在用于控制的致动中相对线性，并且可以容易地与用于位置控制的平行板电容位置感测组合。 微机械静电垂直致动器在相位调制仪器中所需的亚微米到微米范围内的精确移动，例如光学相移。 例如，使用静电垂直致动器的紧凑的，便宜的和位置可控的微镜可取代大型，昂贵且难以维持的压电致动器。 如在相移衍射干涉仪中使用的具有角立方反射器的三十磅压电致动器可以用微镜和透镜代替。 对于任何非常精确和小幅度的运动，可以使用微加工静电致动，因为它是尺寸最小，功耗最小，并且具有更直接的感测和控制选项。
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